JPS6191125U - - Google Patents
Info
- Publication number
- JPS6191125U JPS6191125U JP17639584U JP17639584U JPS6191125U JP S6191125 U JPS6191125 U JP S6191125U JP 17639584 U JP17639584 U JP 17639584U JP 17639584 U JP17639584 U JP 17639584U JP S6191125 U JPS6191125 U JP S6191125U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- heating
- temperature difference
- sensor
- self
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims 2
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Description
第１図は本考案になる熱式質量流量計の第１実
施例を説明するための図、第２図は第１図に示す
流量計のセンサ流路の温度変化を説明するための
図、第３図は本考案流量計の第２実施例を説明す
るための図、第４図は本考案流量計の第３実施例
を説明するための図である。
１…バイパス流路、３，１０，２１…センサパ
イプ、３ａ，１３，２２…流入側パイプ、３ｂ，
１４，２５…流出側パイプ、４，５…自己加熱抵
抗体、６…断熱部材、１１，１２…温度検出セン
サ、１５…加熱用コイル、２３…流入側センサパ
イプ、２４…流出側センサパイプ。
FIG. 1 is a diagram for explaining the first embodiment of the thermal mass flowmeter according to the present invention, FIG. 2 is a diagram for explaining temperature changes in the sensor flow path of the flowmeter shown in FIG. 1, FIG. 3 is a diagram for explaining a second embodiment of the flowmeter of the present invention, and FIG. 4 is a diagram for explaining a third embodiment of the flowmeter of the present invention. 1... Bypass flow path, 3, 10, 21... Sensor pipe, 3a, 13, 22... Inflow side pipe, 3b,
14, 25... Outflow side pipe, 4, 5... Self heating resistor, 6... Heat insulating member, 11, 12... Temperature detection sensor, 15... Heating coil, 23... Inflow side sensor pipe, 24... Outflow side sensor pipe.
Claims (1)
送される被測流体を加熱し、該センサパイプの２
点間の温度差を検出する温度差検出手段を有し、
該温度差に応じて該被測流体の質量流量を計測す
る熱式質量流量計において、上記２点間のセンサ
パイプの一部を熱伝導率の低い断熱部材で構成し
てなる熱式質量流量計。 (2) 該温度差検出手段は加熱と温度検出とを兼
ねた一対の自己加熱抵抗体よりなり、該断熱部材
は該一対の自己加熱抵抗体間のセンサパイプに設
けられた実用新案登録請求の範囲第１項記載の熱
式質量流量計。 (3) 該温度差検出手段は加熱源と一対の温度検
出センサとよりなり、該断熱部材は一の温度検出
センサと該加熱源との間及び他の温度検出センサ
と該加熱源との間のセンサパイプに設けられた実
用新案登録請求の範囲第１項記載の熱式質量流量
計。 (4) 該温度差検出手段は加熱と温度検出とを兼
ねた一対の自己加熱抵抗体よりなり、該断熱部材
は該一対の自己加熱抵抗体間及び該一対の自己加
熱抵抗体両側の該センサパイプに設けられた実用
新案登録請求の範囲第１項記載の熱式質量流量計
。[Claims for Utility Model Registration] (1) The fluid to be measured that is fed to the sensor flow path formed by the sensor pipe is heated, and
It has a temperature difference detection means for detecting a temperature difference between points,
In a thermal mass flow meter that measures the mass flow rate of the measured fluid according to the temperature difference, a part of the sensor pipe between the two points is made of a heat insulating material with low thermal conductivity. Total. (2) The temperature difference detection means consists of a pair of self-heating resistors that serve both for heating and temperature detection, and the heat insulating member is a utility model registration claim that is provided in a sensor pipe between the pair of self-heating resistors. Thermal mass flowmeter according to scope 1. (3) The temperature difference detection means includes a heating source and a pair of temperature detection sensors, and the heat insulating member is provided between one temperature detection sensor and the heating source and between the other temperature detection sensor and the heating source. A thermal mass flowmeter according to claim 1, which is provided in a sensor pipe of a utility model. (4) The temperature difference detection means consists of a pair of self-heating resistors that serve both for heating and temperature detection, and the heat insulating member is arranged between the pair of self-heating resistors and between the sensors on both sides of the pair of self-heating resistors. A thermal mass flowmeter according to claim 1, which is provided on a pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17639584U JPS6191125U (en) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17639584U JPS6191125U (en) | 1984-11-20 | 1984-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6191125U true JPS6191125U (en) | 1986-06-13 |
Family
ID=30733994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17639584U Pending JPS6191125U (en) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6191125U (en) |
-
1984
- 1984-11-20 JP JP17639584U patent/JPS6191125U/ja active Pending
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