DK0943900T3 - Indretning til måling af en strömning af et medium - Google Patents

Indretning til måling af en strömning af et medium

Info

Publication number
DK0943900T3
DK0943900T3 DK99200709T DK99200709T DK0943900T3 DK 0943900 T3 DK0943900 T3 DK 0943900T3 DK 99200709 T DK99200709 T DK 99200709T DK 99200709 T DK99200709 T DK 99200709T DK 0943900 T3 DK0943900 T3 DK 0943900T3
Authority
DK
Denmark
Prior art keywords
medium
flow
measuring
zero
objects
Prior art date
Application number
DK99200709T
Other languages
English (en)
Inventor
Theodorus S J Lammerink
Original Assignee
Berkin Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkin Bv filed Critical Berkin Bv
Application granted granted Critical
Publication of DK0943900T3 publication Critical patent/DK0943900T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
DK99200709T 1998-03-20 1999-03-10 Indretning til måling af en strömning af et medium DK0943900T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1008665A NL1008665C1 (nl) 1998-03-20 1998-03-20 Mediumstroommeter.
US09/272,575 US6370950B1 (en) 1998-03-20 1999-03-19 Medium flow meter

Publications (1)

Publication Number Publication Date
DK0943900T3 true DK0943900T3 (da) 2008-02-18

Family

ID=26642782

Family Applications (1)

Application Number Title Priority Date Filing Date
DK99200709T DK0943900T3 (da) 1998-03-20 1999-03-10 Indretning til måling af en strömning af et medium

Country Status (8)

Country Link
US (1) US6370950B1 (da)
EP (1) EP0943900B1 (da)
JP (1) JPH11326003A (da)
AT (1) ATE377184T1 (da)
DE (1) DE69937421T2 (da)
DK (1) DK0943900T3 (da)
ES (1) ES2296365T3 (da)
NL (1) NL1008665C1 (da)

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WO2003052355A1 (fr) * 2001-12-14 2003-06-26 Mitsubishi Denki Kabushiki Kaisha Debitmetre
JP3969167B2 (ja) 2002-04-22 2007-09-05 三菱電機株式会社 流体流量測定装置
US6617175B1 (en) * 2002-05-08 2003-09-09 Advanced Technology Materials, Inc. Infrared thermopile detector system for semiconductor process monitoring and control
US7129519B2 (en) * 2002-05-08 2006-10-31 Advanced Technology Materials, Inc. Monitoring system comprising infrared thermopile detector
US6736005B2 (en) * 2002-05-28 2004-05-18 Mcmillan Company High accuracy measuring and control of low fluid flow rates
JP3650384B2 (ja) * 2002-08-29 2005-05-18 三菱電機株式会社 熱式流量検出装置
US7080545B2 (en) * 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
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WO2004088415A2 (en) * 2003-03-28 2004-10-14 Advanced Technology Materials Inc. Photometrically modulated delivery of reagents
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US20060211253A1 (en) * 2005-03-16 2006-09-21 Ing-Shin Chen Method and apparatus for monitoring plasma conditions in an etching plasma processing facility
TWI402098B (zh) * 2005-06-22 2013-07-21 Advanced Tech Materials 整合式氣體混合用之裝置及方法
DE102005057687A1 (de) * 2005-12-01 2007-06-06 Endress + Hauser Flowtec Ag Vorrichtung zur Bestimmung und/oder Überwachung des Massedurchflusses eines fluiden Mediums
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DE602006019688D1 (de) * 2006-03-31 2011-03-03 Sensirion Holding Ag Durchflusssensor mit durchflussanpassbarem Analog-Digital-Wandler
US20080006775A1 (en) * 2006-06-22 2008-01-10 Arno Jose I Infrared gas detection systems and methods
EP1965179B1 (en) * 2007-02-28 2017-04-12 Sensirion Holding AG Flow detector device with self check
DE202007003027U1 (de) * 2007-03-01 2007-06-21 Sensirion Ag Vorrichtung zur Handhabung von Fluiden mit einem Flußsensor
US7874208B2 (en) * 2007-10-10 2011-01-25 Brooks Instrument, Llc System for and method of providing a wide-range flow controller
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JP5282584B2 (ja) * 2009-01-20 2013-09-04 いすゞ自動車株式会社 エンジン排気管内に燃料を噴射する装置及び噴射量の測定方法
WO2010138930A2 (en) 2009-05-29 2010-12-02 Advanced Technology Materials, Inc. Tpir apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same
DE102009060302A1 (de) * 2009-12-23 2011-06-30 Truma Gerätetechnik GmbH & Co. KG, 85640 Gaszuführungsvorrichtung mit Massendurchflusssensor
US9146172B2 (en) * 2011-01-03 2015-09-29 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection
US11608618B2 (en) 2011-01-03 2023-03-21 Sentinel Hydrosolutions, Llc Thermal dispersion flow meter with fluid leak detection and freeze burst prevention
US11814821B2 (en) 2011-01-03 2023-11-14 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control
NL2006895C2 (nl) * 2011-06-03 2012-12-04 Berkin Bv Stromingsmeetapparaat en gebruik daarvan voor het bepalen van een stroming van een medium, alsmede werkwijze daarvoor.
DE102012001060A1 (de) * 2011-10-24 2013-04-25 Hydrometer Gmbh Verfahren zur Korrektur von Offset-Drift-Effekten einer thermischen Messeinrichtung, thermische Messeinrichtung und Gasdurchflussmessgerät
BR112015018170A2 (pt) 2013-02-08 2017-07-18 Provtagaren Ab montagem de fluxômetro de massa térmica diferencial para medição de um fluxo de massa de um gás ou líquido, método de medição de um fluxo de massa de um gás ou líquido utilizando uma montagem de fluxômetro de massa térmica diferencial, e método de medição de um fluxo de massa de um gás ou líquido utilizando um fluxômetro de massa térmica diferencial
DE102013106863A1 (de) 2013-07-01 2015-01-08 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines in einem Trägergas transportierten Dampfs
DE102013114486A1 (de) * 2013-12-19 2015-06-25 Innovative Sensor Technology Ist Ag Vorrichtung und Verfahren zum Bestimmen des Durchflusses eines Mediums
JP5680178B1 (ja) * 2013-12-26 2015-03-04 三菱電機株式会社 流量センサおよび内燃機関の制御システム
DE102014101792A1 (de) 2014-02-13 2015-08-13 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines Gases beziehungsweise Gasgemisches mit ineinandergeschachtelten rohrförmigen Filamentanordnungen
JP6225766B2 (ja) * 2014-03-13 2017-11-08 オムロン株式会社 内部温度測定方法及び内部温度測定装置
DE102014119223B3 (de) * 2014-12-19 2016-03-31 Endress + Hauser Flowtec Ag Thermisches Durchflussmessgerät mit Diagnosefunktion
EP2930475B1 (en) 2014-12-22 2017-11-15 Sensirion AG Flow sensor arrangement
US10151772B2 (en) * 2015-01-23 2018-12-11 Embry-Riddle Aeronautical Univeristy, Inc. Hot wire anemometer
WO2018047385A1 (ja) 2016-09-08 2018-03-15 株式会社村田製作所 風速測定装置および風量測定装置
WO2018047836A1 (ja) * 2016-09-08 2018-03-15 株式会社村田製作所 風速測定装置および風量測定装置
DE102018208140B3 (de) 2018-05-24 2019-06-13 Continental Automotive Gmbh Pumpenvorrichtung und Verfahren zum Ermitteln eines Kühlmittelmassenstroms durch eine Pumpenvorrichtung einer Brennkraftmaschine
EP3933352A1 (de) 2020-07-01 2022-01-05 Sick Ag Thermische durchflussmessung

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US5218866A (en) * 1991-02-19 1993-06-15 The United States Of America As Represented By The Secretary Of The Army Method and device for measuring fluid velocities
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Also Published As

Publication number Publication date
NL1008665C1 (nl) 1999-09-21
EP0943900B1 (en) 2007-10-31
JPH11326003A (ja) 1999-11-26
US6370950B1 (en) 2002-04-16
DE69937421T2 (de) 2008-08-21
ATE377184T1 (de) 2007-11-15
ES2296365T3 (es) 2008-04-16
US20020043104A1 (en) 2002-04-18
DE69937421D1 (de) 2007-12-13
EP0943900A1 (en) 1999-09-22

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