ATE377184T1 - Vorrichtung zur messung eines mediumflusses - Google Patents

Vorrichtung zur messung eines mediumflusses

Info

Publication number
ATE377184T1
ATE377184T1 AT99200709T AT99200709T ATE377184T1 AT E377184 T1 ATE377184 T1 AT E377184T1 AT 99200709 T AT99200709 T AT 99200709T AT 99200709 T AT99200709 T AT 99200709T AT E377184 T1 ATE377184 T1 AT E377184T1
Authority
AT
Austria
Prior art keywords
medium
measuring
flow
zero
objects
Prior art date
Application number
AT99200709T
Other languages
English (en)
Inventor
Theodorus S J Lammerink
Original Assignee
Berkin Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkin Bv filed Critical Berkin Bv
Application granted granted Critical
Publication of ATE377184T1 publication Critical patent/ATE377184T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Paper (AREA)
AT99200709T 1998-03-20 1999-03-10 Vorrichtung zur messung eines mediumflusses ATE377184T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1008665A NL1008665C1 (nl) 1998-03-20 1998-03-20 Mediumstroommeter.
US09/272,575 US6370950B1 (en) 1998-03-20 1999-03-19 Medium flow meter

Publications (1)

Publication Number Publication Date
ATE377184T1 true ATE377184T1 (de) 2007-11-15

Family

ID=26642782

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99200709T ATE377184T1 (de) 1998-03-20 1999-03-10 Vorrichtung zur messung eines mediumflusses

Country Status (8)

Country Link
US (1) US6370950B1 (de)
EP (1) EP0943900B1 (de)
JP (1) JPH11326003A (de)
AT (1) ATE377184T1 (de)
DE (1) DE69937421T2 (de)
DK (1) DK0943900T3 (de)
ES (1) ES2296365T3 (de)
NL (1) NL1008665C1 (de)

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US6736005B2 (en) * 2002-05-28 2004-05-18 Mcmillan Company High accuracy measuring and control of low fluid flow rates
JP3650384B2 (ja) * 2002-08-29 2005-05-18 三菱電機株式会社 熱式流量検出装置
US7080545B2 (en) * 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
WO2004088415A2 (en) * 2003-03-28 2004-10-14 Advanced Technology Materials Inc. Photometrically modulated delivery of reagents
US7063097B2 (en) * 2003-03-28 2006-06-20 Advanced Technology Materials, Inc. In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
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US20060211253A1 (en) * 2005-03-16 2006-09-21 Ing-Shin Chen Method and apparatus for monitoring plasma conditions in an etching plasma processing facility
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EP1840535B1 (de) * 2006-03-31 2011-01-12 Sensirion Holding AG Durchflusssensor mit Thermoelementen
EP1840536B1 (de) * 2006-03-31 2011-01-19 Sensirion Holding AG Durchflusssensor mit durchflussanpassbarem Analog-Digital-Wandler
US20080006775A1 (en) * 2006-06-22 2008-01-10 Arno Jose I Infrared gas detection systems and methods
EP1965179B1 (de) * 2007-02-28 2017-04-12 Sensirion Holding AG Strömungsdetektorvorrichtung mit Eigenüberprüfung
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JP5282584B2 (ja) * 2009-01-20 2013-09-04 いすゞ自動車株式会社 エンジン排気管内に燃料を噴射する装置及び噴射量の測定方法
US9340878B2 (en) 2009-05-29 2016-05-17 Entegris, Inc. TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same
DE102009060302A1 (de) * 2009-12-23 2011-06-30 Truma Gerätetechnik GmbH & Co. KG, 85640 Gaszuführungsvorrichtung mit Massendurchflusssensor
US9146172B2 (en) 2011-01-03 2015-09-29 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection
US11814821B2 (en) 2011-01-03 2023-11-14 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control
US11608618B2 (en) 2011-01-03 2023-03-21 Sentinel Hydrosolutions, Llc Thermal dispersion flow meter with fluid leak detection and freeze burst prevention
NL2006895C2 (nl) 2011-06-03 2012-12-04 Berkin Bv Stromingsmeetapparaat en gebruik daarvan voor het bepalen van een stroming van een medium, alsmede werkwijze daarvoor.
DE102012001060A1 (de) * 2011-10-24 2013-04-25 Hydrometer Gmbh Verfahren zur Korrektur von Offset-Drift-Effekten einer thermischen Messeinrichtung, thermische Messeinrichtung und Gasdurchflussmessgerät
KR20150132124A (ko) 2013-02-08 2015-11-25 프로브타가렌 에이비 강화된 차등 열식 질량 유량계 어셈블리 및 질량 유량계 어셈블리를 사용하여 질량 유량을 측정하기 위한 방법
DE102013106863A1 (de) 2013-07-01 2015-01-08 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines in einem Trägergas transportierten Dampfs
DE102013114486A1 (de) * 2013-12-19 2015-06-25 Innovative Sensor Technology Ist Ag Vorrichtung und Verfahren zum Bestimmen des Durchflusses eines Mediums
JP5680178B1 (ja) * 2013-12-26 2015-03-04 三菱電機株式会社 流量センサおよび内燃機関の制御システム
DE102014101792A1 (de) 2014-02-13 2015-08-13 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines Gases beziehungsweise Gasgemisches mit ineinandergeschachtelten rohrförmigen Filamentanordnungen
JP6225766B2 (ja) * 2014-03-13 2017-11-08 オムロン株式会社 内部温度測定方法及び内部温度測定装置
DE102014119223B3 (de) * 2014-12-19 2016-03-31 Endress + Hauser Flowtec Ag Thermisches Durchflussmessgerät mit Diagnosefunktion
EP2930475B1 (de) 2014-12-22 2017-11-15 Sensirion AG Durchflusssensoranordnung
US10151772B2 (en) * 2015-01-23 2018-12-11 Embry-Riddle Aeronautical Univeristy, Inc. Hot wire anemometer
WO2018047836A1 (ja) * 2016-09-08 2018-03-15 株式会社村田製作所 風速測定装置および風量測定装置
WO2018047385A1 (ja) 2016-09-08 2018-03-15 株式会社村田製作所 風速測定装置および風量測定装置
DE102018208140B3 (de) 2018-05-24 2019-06-13 Continental Automotive Gmbh Pumpenvorrichtung und Verfahren zum Ermitteln eines Kühlmittelmassenstroms durch eine Pumpenvorrichtung einer Brennkraftmaschine
EP3933352A1 (de) 2020-07-01 2022-01-05 Sick Ag Thermische durchflussmessung

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Also Published As

Publication number Publication date
NL1008665C1 (nl) 1999-09-21
JPH11326003A (ja) 1999-11-26
US6370950B1 (en) 2002-04-16
DE69937421D1 (de) 2007-12-13
ES2296365T3 (es) 2008-04-16
DE69937421T2 (de) 2008-08-21
EP0943900A1 (de) 1999-09-22
EP0943900B1 (de) 2007-10-31
US20020043104A1 (en) 2002-04-18
DK0943900T3 (da) 2008-02-18

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