ATE377184T1 - Vorrichtung zur messung eines mediumflusses - Google Patents
Vorrichtung zur messung eines mediumflussesInfo
- Publication number
- ATE377184T1 ATE377184T1 AT99200709T AT99200709T ATE377184T1 AT E377184 T1 ATE377184 T1 AT E377184T1 AT 99200709 T AT99200709 T AT 99200709T AT 99200709 T AT99200709 T AT 99200709T AT E377184 T1 ATE377184 T1 AT E377184T1
- Authority
- AT
- Austria
- Prior art keywords
- medium
- measuring
- flow
- zero
- objects
- Prior art date
Links
- 239000012530 fluid Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Paper (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL1008665A NL1008665C1 (nl) | 1998-03-20 | 1998-03-20 | Mediumstroommeter. |
| US09/272,575 US6370950B1 (en) | 1998-03-20 | 1999-03-19 | Medium flow meter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE377184T1 true ATE377184T1 (de) | 2007-11-15 |
Family
ID=26642782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT99200709T ATE377184T1 (de) | 1998-03-20 | 1999-03-10 | Vorrichtung zur messung eines mediumflusses |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6370950B1 (de) |
| EP (1) | EP0943900B1 (de) |
| JP (1) | JPH11326003A (de) |
| AT (1) | ATE377184T1 (de) |
| DE (1) | DE69937421T2 (de) |
| DK (1) | DK0943900T3 (de) |
| ES (1) | ES2296365T3 (de) |
| NL (1) | NL1008665C1 (de) |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2003052355A1 (ja) * | 2001-12-14 | 2005-04-28 | 三菱電機株式会社 | 流量センサ |
| JP3969167B2 (ja) | 2002-04-22 | 2007-09-05 | 三菱電機株式会社 | 流体流量測定装置 |
| US6617175B1 (en) * | 2002-05-08 | 2003-09-09 | Advanced Technology Materials, Inc. | Infrared thermopile detector system for semiconductor process monitoring and control |
| US7129519B2 (en) * | 2002-05-08 | 2006-10-31 | Advanced Technology Materials, Inc. | Monitoring system comprising infrared thermopile detector |
| US6736005B2 (en) * | 2002-05-28 | 2004-05-18 | Mcmillan Company | High accuracy measuring and control of low fluid flow rates |
| JP3650384B2 (ja) * | 2002-08-29 | 2005-05-18 | 三菱電機株式会社 | 熱式流量検出装置 |
| US7080545B2 (en) * | 2002-10-17 | 2006-07-25 | Advanced Technology Materials, Inc. | Apparatus and process for sensing fluoro species in semiconductor processing systems |
| US7063097B2 (en) * | 2003-03-28 | 2006-06-20 | Advanced Technology Materials, Inc. | In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration |
| WO2004088415A2 (en) * | 2003-03-28 | 2004-10-14 | Advanced Technology Materials Inc. | Photometrically modulated delivery of reagents |
| NL1023405C2 (nl) * | 2003-05-13 | 2004-11-18 | Berkin Bv | Massadebietmeter. |
| US20060211253A1 (en) * | 2005-03-16 | 2006-09-21 | Ing-Shin Chen | Method and apparatus for monitoring plasma conditions in an etching plasma processing facility |
| TWI552797B (zh) | 2005-06-22 | 2016-10-11 | 恩特葛瑞斯股份有限公司 | 整合式氣體混合用之裝置及方法 |
| DE102005057687A1 (de) * | 2005-12-01 | 2007-06-06 | Endress + Hauser Flowtec Ag | Vorrichtung zur Bestimmung und/oder Überwachung des Massedurchflusses eines fluiden Mediums |
| EP1840535B1 (de) * | 2006-03-31 | 2011-01-12 | Sensirion Holding AG | Durchflusssensor mit Thermoelementen |
| EP1840536B1 (de) * | 2006-03-31 | 2011-01-19 | Sensirion Holding AG | Durchflusssensor mit durchflussanpassbarem Analog-Digital-Wandler |
| US20080006775A1 (en) * | 2006-06-22 | 2008-01-10 | Arno Jose I | Infrared gas detection systems and methods |
| EP1965179B1 (de) * | 2007-02-28 | 2017-04-12 | Sensirion Holding AG | Strömungsdetektorvorrichtung mit Eigenüberprüfung |
| DE202007003027U1 (de) * | 2007-03-01 | 2007-06-21 | Sensirion Ag | Vorrichtung zur Handhabung von Fluiden mit einem Flußsensor |
| US7874208B2 (en) * | 2007-10-10 | 2011-01-25 | Brooks Instrument, Llc | System for and method of providing a wide-range flow controller |
| EP2187182B1 (de) * | 2008-11-12 | 2015-08-05 | Sensirion AG | Verfahren zum Betrieb eines Durchflusssensors, der wiederholt einem thermischen und/oder chemischen Reinigungsprozess ausgesetzt ist, und Durchflussmessgerät |
| JP5282584B2 (ja) * | 2009-01-20 | 2013-09-04 | いすゞ自動車株式会社 | エンジン排気管内に燃料を噴射する装置及び噴射量の測定方法 |
| WO2010138930A2 (en) | 2009-05-29 | 2010-12-02 | Advanced Technology Materials, Inc. | Tpir apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same |
| DE102009060302A1 (de) * | 2009-12-23 | 2011-06-30 | Truma Gerätetechnik GmbH & Co. KG, 85640 | Gaszuführungsvorrichtung mit Massendurchflusssensor |
| US11814821B2 (en) | 2011-01-03 | 2023-11-14 | Sentinel Hydrosolutions, Llc | Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control |
| US9146172B2 (en) * | 2011-01-03 | 2015-09-29 | Sentinel Hydrosolutions, Llc | Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection |
| US11608618B2 (en) | 2011-01-03 | 2023-03-21 | Sentinel Hydrosolutions, Llc | Thermal dispersion flow meter with fluid leak detection and freeze burst prevention |
| NL2006895C2 (nl) | 2011-06-03 | 2012-12-04 | Berkin Bv | Stromingsmeetapparaat en gebruik daarvan voor het bepalen van een stroming van een medium, alsmede werkwijze daarvoor. |
| DE102012001060A1 (de) * | 2011-10-24 | 2013-04-25 | Hydrometer Gmbh | Verfahren zur Korrektur von Offset-Drift-Effekten einer thermischen Messeinrichtung, thermische Messeinrichtung und Gasdurchflussmessgerät |
| KR20150132124A (ko) | 2013-02-08 | 2015-11-25 | 프로브타가렌 에이비 | 강화된 차등 열식 질량 유량계 어셈블리 및 질량 유량계 어셈블리를 사용하여 질량 유량을 측정하기 위한 방법 |
| DE102013106863A1 (de) | 2013-07-01 | 2015-01-08 | Aixtron Se | Vorrichtung zum Bestimmen des Massenflusses eines in einem Trägergas transportierten Dampfs |
| DE102013114486A1 (de) * | 2013-12-19 | 2015-06-25 | Innovative Sensor Technology Ist Ag | Vorrichtung und Verfahren zum Bestimmen des Durchflusses eines Mediums |
| JP5680178B1 (ja) * | 2013-12-26 | 2015-03-04 | 三菱電機株式会社 | 流量センサおよび内燃機関の制御システム |
| DE102014101792A1 (de) | 2014-02-13 | 2015-08-13 | Aixtron Se | Vorrichtung zum Bestimmen des Massenflusses eines Gases beziehungsweise Gasgemisches mit ineinandergeschachtelten rohrförmigen Filamentanordnungen |
| JP6225766B2 (ja) * | 2014-03-13 | 2017-11-08 | オムロン株式会社 | 内部温度測定方法及び内部温度測定装置 |
| DE102014119223B3 (de) * | 2014-12-19 | 2016-03-31 | Endress + Hauser Flowtec Ag | Thermisches Durchflussmessgerät mit Diagnosefunktion |
| EP2930475B1 (de) | 2014-12-22 | 2017-11-15 | Sensirion AG | Durchflusssensoranordnung |
| US10151772B2 (en) * | 2015-01-23 | 2018-12-11 | Embry-Riddle Aeronautical Univeristy, Inc. | Hot wire anemometer |
| WO2018047385A1 (ja) | 2016-09-08 | 2018-03-15 | 株式会社村田製作所 | 風速測定装置および風量測定装置 |
| WO2018047836A1 (ja) * | 2016-09-08 | 2018-03-15 | 株式会社村田製作所 | 風速測定装置および風量測定装置 |
| DE102018208140B3 (de) | 2018-05-24 | 2019-06-13 | Continental Automotive Gmbh | Pumpenvorrichtung und Verfahren zum Ermitteln eines Kühlmittelmassenstroms durch eine Pumpenvorrichtung einer Brennkraftmaschine |
| EP3933352A1 (de) | 2020-07-01 | 2022-01-05 | Sick Ag | Thermische durchflussmessung |
| US12174050B1 (en) | 2021-05-10 | 2024-12-24 | Sentinel Hydrosolutions, Llc | High sensitivity ultrasonic flow meter |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4319483A (en) * | 1980-02-25 | 1982-03-16 | Texas Instruments Incorporated | Method of automated fluid flow measurement |
| US4332157A (en) * | 1980-08-29 | 1982-06-01 | Trustees Of The University Of Pennsylvania | Pyroelectric anemometer |
| US4480467A (en) * | 1982-11-29 | 1984-11-06 | Hyperion, Inc. | Flow monitoring device |
| DE3248603A1 (de) * | 1982-12-30 | 1984-07-12 | Robert Bosch Gmbh, 7000 Stuttgart | Einrichtung zur messung des massendurchsatzes eines stroemenden mediums |
| US4527427A (en) * | 1983-02-12 | 1985-07-09 | Robert Bosch Gmbh | Device for determining the flow rate of a flowing medium |
| EP0134859A1 (de) * | 1983-09-21 | 1985-03-27 | Honeywell Inc. | Flüssigkeitsströmungsfühler |
| DE3444347A1 (de) * | 1984-12-05 | 1986-06-12 | Robert Bosch Gmbh, 7000 Stuttgart | Vorrichtung zur luftmengenmessung |
| JP2631481B2 (ja) * | 1987-12-08 | 1997-07-16 | 株式会社 リンテック | 質量流量計とその計測方法 |
| US5187674A (en) * | 1989-12-28 | 1993-02-16 | Honeywell Inc. | Versatile, overpressure proof, absolute pressure sensor |
| US5218866A (en) * | 1991-02-19 | 1993-06-15 | The United States Of America As Represented By The Secretary Of The Army | Method and device for measuring fluid velocities |
| JPH07111367B2 (ja) * | 1991-02-26 | 1995-11-29 | ディーエクスエル・インターナショナル・インコーポレーテッド | 流量センサおよびその検査方法 |
| JP3310430B2 (ja) * | 1993-11-26 | 2002-08-05 | 株式会社半導体エネルギー研究所 | 計測装置および計測方法 |
| JP3226715B2 (ja) * | 1994-04-28 | 2001-11-05 | 株式会社半導体エネルギー研究所 | 計測装置 |
| US5515714A (en) * | 1994-11-17 | 1996-05-14 | General Motors Corporation | Vapor composition and flow sensor |
| JPH0989619A (ja) * | 1995-07-19 | 1997-04-04 | Ricoh Co Ltd | 感熱式流量計 |
| KR970059713A (ko) * | 1996-01-17 | 1997-08-12 | 가나이 쯔도무 | 발열 저항체 타입 공기 유속 측정 장치 |
| US5852239A (en) * | 1996-06-12 | 1998-12-22 | Ricoh Company, Ltd. | Flow sensor having an intermediate heater between two temperature-sensing heating portions |
-
1998
- 1998-03-20 NL NL1008665A patent/NL1008665C1/nl not_active IP Right Cessation
-
1999
- 1999-03-10 DK DK99200709T patent/DK0943900T3/da active
- 1999-03-10 DE DE69937421T patent/DE69937421T2/de not_active Expired - Lifetime
- 1999-03-10 AT AT99200709T patent/ATE377184T1/de active
- 1999-03-10 ES ES99200709T patent/ES2296365T3/es not_active Expired - Lifetime
- 1999-03-10 EP EP99200709A patent/EP0943900B1/de not_active Expired - Lifetime
- 1999-03-16 JP JP11069946A patent/JPH11326003A/ja active Pending
- 1999-03-19 US US09/272,575 patent/US6370950B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE69937421T2 (de) | 2008-08-21 |
| DK0943900T3 (da) | 2008-02-18 |
| US6370950B1 (en) | 2002-04-16 |
| EP0943900B1 (de) | 2007-10-31 |
| DE69937421D1 (de) | 2007-12-13 |
| ES2296365T3 (es) | 2008-04-16 |
| EP0943900A1 (de) | 1999-09-22 |
| JPH11326003A (ja) | 1999-11-26 |
| NL1008665C1 (nl) | 1999-09-21 |
| US20020043104A1 (en) | 2002-04-18 |
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