ATE327498T1 - Massendurchflussmesser - Google Patents
MassendurchflussmesserInfo
- Publication number
- ATE327498T1 ATE327498T1 AT01201156T AT01201156T ATE327498T1 AT E327498 T1 ATE327498 T1 AT E327498T1 AT 01201156 T AT01201156 T AT 01201156T AT 01201156 T AT01201156 T AT 01201156T AT E327498 T1 ATE327498 T1 AT E327498T1
- Authority
- AT
- Austria
- Prior art keywords
- temperature sensor
- conduit
- resistor element
- temperature
- mass flow
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Drying Of Semiconductors (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1014797A NL1014797C2 (nl) | 2000-03-30 | 2000-03-30 | Massadebietmeter. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE327498T1 true ATE327498T1 (de) | 2006-06-15 |
Family
ID=19771110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01201156T ATE327498T1 (de) | 2000-03-30 | 2001-03-28 | Massendurchflussmesser |
Country Status (8)
Country | Link |
---|---|
US (1) | US6637264B2 (de) |
EP (2) | EP1615001A3 (de) |
JP (1) | JP4831879B2 (de) |
AT (1) | ATE327498T1 (de) |
DE (1) | DE60119821T2 (de) |
DK (1) | DK1139073T3 (de) |
ES (1) | ES2262598T3 (de) |
NL (1) | NL1014797C2 (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4157034B2 (ja) * | 2001-08-14 | 2008-09-24 | 株式会社日立製作所 | 熱式流量計測装置 |
KR100395656B1 (ko) * | 2001-12-19 | 2003-08-21 | 김욱현 | 질량유량제어기의 질량유량측정센서 |
JP3969167B2 (ja) * | 2002-04-22 | 2007-09-05 | 三菱電機株式会社 | 流体流量測定装置 |
US6736005B2 (en) * | 2002-05-28 | 2004-05-18 | Mcmillan Company | High accuracy measuring and control of low fluid flow rates |
US6883370B2 (en) * | 2002-06-28 | 2005-04-26 | Heetronix | Mass flow meter with chip-type sensors |
JP3650384B2 (ja) * | 2002-08-29 | 2005-05-18 | 三菱電機株式会社 | 熱式流量検出装置 |
NL1023404C2 (nl) * | 2003-05-13 | 2004-11-16 | Berkin Bv | Inrichting voor het regelen van het massadebiet van een vloeistofstroom in een vloeistofkanaal. |
NL1023405C2 (nl) * | 2003-05-13 | 2004-11-18 | Berkin Bv | Massadebietmeter. |
NL1023406C2 (nl) * | 2003-05-13 | 2004-11-18 | Berkin Bv | Massadebietmeter voor het meten volgens de CT methode. |
DE102004019189B3 (de) * | 2004-04-16 | 2005-08-18 | Krohne Ag | Magnetisch-induktives Durchflußmeßverfahren und magnetisch-induktives Durchflußmeßgerät |
DE102004033049B4 (de) * | 2004-07-08 | 2016-05-04 | Robert Bosch Gmbh | Messeinrichtung für einen Durchflusssensor, insbesondere einen Luftmassensensor für Brennkraftmaschinen und Verfahren zum Messen von Luftströmen |
US7107835B2 (en) * | 2004-09-08 | 2006-09-19 | Honeywell International Inc. | Thermal mass flow sensor |
US7000465B1 (en) * | 2004-09-17 | 2006-02-21 | Mks Instruments, Inc. | Attitude error self-correction for thermal sensors of mass flow meters and controllers |
JP2006153634A (ja) * | 2004-11-29 | 2006-06-15 | Mitsui Mining & Smelting Co Ltd | タンク内液体の漏れ検知装置 |
DE102004061883A1 (de) * | 2004-12-22 | 2006-07-06 | Vishay Electronic Gmbh | Heizeinrichtung für ein Inhalationsgerät, Inhalationsgerät und Erwärmungsverfahren |
US20070084280A1 (en) * | 2005-08-26 | 2007-04-19 | Gill Rajinder S | Semi-constant temperature excitation method for fluid flow sensors |
JP4805091B2 (ja) * | 2006-10-24 | 2011-11-02 | 株式会社堀場エステック | 熱式質量流量センサ及びマスフローコントローラ |
GB2446414A (en) * | 2007-02-06 | 2008-08-13 | Thorn Security | A Detector |
US7469583B2 (en) * | 2007-02-21 | 2008-12-30 | Mks Japan, Inc. | Flow sensor |
EP2232206B1 (de) * | 2008-01-18 | 2021-11-03 | Waters Technologies Corporation | Kreisfluss-wärmesensor |
US7971480B2 (en) * | 2008-10-13 | 2011-07-05 | Hitachi Metals, Ltd. | Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements |
NO332832B1 (no) * | 2009-01-30 | 2013-01-21 | Statoil Asa | Fremgangsmate for a male tykkelsen av avsetninger |
US11608618B2 (en) | 2011-01-03 | 2023-03-21 | Sentinel Hydrosolutions, Llc | Thermal dispersion flow meter with fluid leak detection and freeze burst prevention |
US11814821B2 (en) | 2011-01-03 | 2023-11-14 | Sentinel Hydrosolutions, Llc | Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control |
US9759632B2 (en) | 2011-01-03 | 2017-09-12 | Sentinel Hydrosolutions, Llc | Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection and freeze burst prevention |
NL1038574C2 (nl) | 2011-02-11 | 2011-11-23 | Berkin Bv | Sensor voor een massadebietmeter. |
DE102011120899B4 (de) * | 2011-12-12 | 2015-08-20 | Karlsruher Institut für Technologie | Verfahren und Verwendung einer Vorrichtung zur Bestimmung des Massenstroms eines Fluids |
JP5969760B2 (ja) * | 2011-12-27 | 2016-08-17 | 株式会社堀場エステック | 熱式流量センサ |
NL2011975C2 (nl) * | 2013-12-17 | 2015-06-18 | Berkin Bv | Stromingsmeetapparaat van het thermische type. |
KR102150579B1 (ko) * | 2014-03-31 | 2020-09-01 | 히타치 긴조쿠 가부시키가이샤 | 열식 질량 유량 측정 방법, 당해 방법을 사용하는 열식 질량 유량계 및 당해 열식 질량 유량계를 사용하는 열식 질량 유량 제어 장치 |
WO2016044866A1 (en) * | 2014-09-18 | 2016-03-24 | Csir | Electronically deriving a conclusion of the condition of slurry flow in a non-vertical conduit |
DE102014119556A1 (de) * | 2014-12-23 | 2016-06-23 | Endress + Hauser Flowtec Ag | Thermisches Durchflussmessgerät |
GB2553681B (en) | 2015-01-07 | 2019-06-26 | Homeserve Plc | Flow detection device |
GB201501935D0 (en) | 2015-02-05 | 2015-03-25 | Tooms Moore Consulting Ltd And Trow Consulting Ltd | Water flow analysis |
WO2016144717A1 (en) | 2015-03-06 | 2016-09-15 | Alicat Scientific, Inc. | Systems and methods for detecting flow of a fluid |
DE102016223294B4 (de) * | 2015-11-24 | 2020-11-05 | Ifm Electronic Gmbh | Thermischer Strömungsmesser und Verfahren zum Betreiben eines Strömungsmessers |
USD800591S1 (en) | 2016-03-31 | 2017-10-24 | Homeserve Plc | Flowmeter |
EP4122515A1 (de) * | 2016-09-16 | 2023-01-25 | Fisher & Paykel Healthcare Limited | Thermistordurchflusssensor mit mehreren temperaturpunkten |
EP3460369B1 (de) * | 2017-09-22 | 2020-04-22 | Vestel Elektronik Sanayi ve Ticaret A.S. | Induktionsgesteuerte kühlung |
CN113366285A (zh) * | 2018-12-20 | 2021-09-07 | 爱德华兹生命科学公司 | 热质流体流量传感器 |
CN110274649B (zh) * | 2019-06-13 | 2020-09-01 | 武汉大学 | 一种基于mems技术的热温差型流量传感器及其制备方法 |
US11073415B2 (en) | 2019-10-21 | 2021-07-27 | Flusso Limited | Thermal fluid flow sensor having a dielectric membrane comprising discontinuities between the heating element and an edge |
CN110672187B (zh) * | 2019-11-05 | 2021-08-31 | 北京七星华创流量计有限公司 | 传感器对称性检测方法和装置 |
CN112212928A (zh) * | 2020-09-11 | 2021-01-12 | 中国石油天然气股份有限公司 | 井下全井眼热式流量测量装置 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2594618A (en) * | 1945-08-11 | 1952-04-29 | Atomic Energy Commission | Thermal flowmeter |
JPS5543447A (en) * | 1978-09-22 | 1980-03-27 | Hitachi Ltd | Hot-wire type flow rate measuring device |
US4433329A (en) * | 1980-09-05 | 1984-02-21 | Chevron Research Company | Ultrasensitive apparatus and method for detecting change in fluid flow during the occurrence of a transient condition |
US4471655A (en) * | 1980-10-24 | 1984-09-18 | Nippon Soken, Inc. | Gas flow rate measuring apparatus |
JPS57170065A (en) * | 1981-04-14 | 1982-10-20 | Toshiba Corp | Inspection of gate photosignal of photo thyristor converter |
US4433575A (en) * | 1981-05-19 | 1984-02-28 | Rutherford Ralph E | Flow splitting device for fluid flow meter |
DE3229609A1 (de) * | 1982-08-09 | 1984-02-09 | Trasidex AG, 9490 Vaduz | Thermischer durchflussmesser |
JPS59197827A (ja) * | 1983-04-26 | 1984-11-09 | Nippon Soken Inc | 燃性流体の流量の測定装置 |
GB2173905A (en) * | 1985-04-12 | 1986-10-22 | Radyne Ltd | Fluid-flow monitoring apparatus |
JPH0676897B2 (ja) * | 1986-05-27 | 1994-09-28 | 株式会社エステツク | 熱式流量計 |
JPH0682056B2 (ja) * | 1987-07-13 | 1994-10-19 | 株式会社日立製作所 | 流量計用抵抗素子 |
JP2631481B2 (ja) * | 1987-12-08 | 1997-07-16 | 株式会社 リンテック | 質量流量計とその計測方法 |
US4843881A (en) * | 1987-12-24 | 1989-07-04 | Aalborg Instruments & Controls | Fluid flow sensor system |
US4972707A (en) * | 1988-05-18 | 1990-11-27 | Brooks Instrument B.V. | Apparatus for measuring the flow of a fluid |
JP2789458B2 (ja) * | 1988-11-22 | 1998-08-20 | 株式会社エステック | 液体気化のための流量制御装置 |
NL8900474A (nl) * | 1989-02-24 | 1990-09-17 | Bronkhorst High Tech Bv | Massa-debietmeter met temperatuursensoren. |
JP3047184B2 (ja) * | 1989-11-27 | 2000-05-29 | 株式会社エステック | 質量流量計 |
US5069066A (en) * | 1990-05-10 | 1991-12-03 | Djorup Robert Sonny | Constant temperature anemometer |
JPH0421917A (ja) * | 1990-05-15 | 1992-01-24 | Matsushita Electric Ind Co Ltd | 磁気ヘッド装置 |
JPH086268Y2 (ja) * | 1990-06-15 | 1996-02-21 | オーバル機器工業株式会社 | 熱式流量計 |
JPH04178527A (ja) * | 1990-11-14 | 1992-06-25 | Oval Corp | 熱式質量流量計 |
US5359878A (en) * | 1991-02-26 | 1994-11-01 | Dxl International, Inc. | Apparatus and method for in-line calibration verification of mass flow meters |
JP3266707B2 (ja) * | 1993-07-10 | 2002-03-18 | 株式会社エステック | 質量流量センサ |
JP3150510B2 (ja) * | 1993-12-07 | 2001-03-26 | 株式会社日立製作所 | 発熱抵抗式空気流量計 |
DE4404395C2 (de) * | 1994-02-11 | 1996-12-19 | Fresenius Ag | Verfahren und Vorrichtung zum Messen der Durchflußgeschwindigkeit einer in einer Leitung strömenden Flüssigkeit |
US5461913A (en) * | 1994-06-23 | 1995-10-31 | Mks Instruments, Inc. | Differential current thermal mass flow transducer |
US5792952A (en) * | 1996-05-23 | 1998-08-11 | Varian Associates, Inc. | Fluid thermal mass flow sensor |
JP3865159B2 (ja) * | 1997-07-31 | 2007-01-10 | 日立金属株式会社 | 熱式質量流量計 |
US6269692B1 (en) * | 1999-02-01 | 2001-08-07 | Dxl Usa Inc. | Mass flow measuring assembly having low pressure drop and fast response time |
-
2000
- 2000-03-30 NL NL1014797A patent/NL1014797C2/nl not_active IP Right Cessation
-
2001
- 2001-03-28 AT AT01201156T patent/ATE327498T1/de active
- 2001-03-28 EP EP05077164A patent/EP1615001A3/de not_active Withdrawn
- 2001-03-28 EP EP01201156A patent/EP1139073B1/de not_active Expired - Lifetime
- 2001-03-28 DK DK01201156T patent/DK1139073T3/da active
- 2001-03-28 DE DE60119821T patent/DE60119821T2/de not_active Expired - Lifetime
- 2001-03-28 ES ES01201156T patent/ES2262598T3/es not_active Expired - Lifetime
- 2001-03-30 US US09/820,851 patent/US6637264B2/en not_active Expired - Lifetime
- 2001-03-30 JP JP2001099836A patent/JP4831879B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20010027684A1 (en) | 2001-10-11 |
ES2262598T3 (es) | 2006-12-01 |
NL1014797C2 (nl) | 2001-10-02 |
EP1615001A3 (de) | 2011-01-19 |
DE60119821T2 (de) | 2006-10-19 |
DK1139073T3 (da) | 2006-09-18 |
JP2001304934A (ja) | 2001-10-31 |
DE60119821D1 (de) | 2006-06-29 |
EP1139073A1 (de) | 2001-10-04 |
US6637264B2 (en) | 2003-10-28 |
JP4831879B2 (ja) | 2011-12-07 |
EP1139073B1 (de) | 2006-05-24 |
EP1615001A2 (de) | 2006-01-11 |
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Legal Events
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UEP | Publication of translation of european patent specification |
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