DK1477781T3 - Masseflowmeter - Google Patents

Masseflowmeter

Info

Publication number
DK1477781T3
DK1477781T3 DK04076259.3T DK04076259T DK1477781T3 DK 1477781 T3 DK1477781 T3 DK 1477781T3 DK 04076259 T DK04076259 T DK 04076259T DK 1477781 T3 DK1477781 T3 DK 1477781T3
Authority
DK
Denmark
Prior art keywords
sensing surface
mass flow
flow meter
planar
substrate
Prior art date
Application number
DK04076259.3T
Other languages
English (en)
Inventor
Joost Conrad Loetters
Original Assignee
Berkin Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from NL1023405A external-priority patent/NL1023405C2/nl
Application filed by Berkin Bv filed Critical Berkin Bv
Application granted granted Critical
Publication of DK1477781T3 publication Critical patent/DK1477781T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Glass Compositions (AREA)
DK04076259.3T 2003-05-13 2004-04-28 Masseflowmeter DK1477781T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1023405A NL1023405C2 (nl) 2003-05-13 2003-05-13 Massadebietmeter.
NL1025617A NL1025617C2 (nl) 2003-05-13 2004-03-02 Massadebietmeter.

Publications (1)

Publication Number Publication Date
DK1477781T3 true DK1477781T3 (da) 2010-09-20

Family

ID=33032452

Family Applications (1)

Application Number Title Priority Date Filing Date
DK04076259.3T DK1477781T3 (da) 2003-05-13 2004-04-28 Masseflowmeter

Country Status (8)

Country Link
US (1) US6945106B2 (da)
EP (1) EP1477781B1 (da)
JP (1) JP4709499B2 (da)
AT (1) ATE471498T1 (da)
DE (1) DE602004027682D1 (da)
DK (1) DK1477781T3 (da)
ES (1) ES2347145T3 (da)
NL (1) NL1025617C2 (da)

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EP1840536B1 (en) * 2006-03-31 2011-01-19 Sensirion Holding AG Flow sensor with flow-adaptable analog-digital-converter
EP2128573A1 (en) * 2007-02-28 2009-12-02 Yamatake Corporation Sensor, sensor temperature control method and abnormality recovery method
KR101114304B1 (ko) * 2007-02-28 2012-03-13 가부시키가이샤 야마다케 유량 센서
JP2009025098A (ja) * 2007-07-18 2009-02-05 Star Micronics Co Ltd 熱式流量センサ
US7603898B2 (en) * 2007-12-19 2009-10-20 Honeywell International Inc. MEMS structure for flow sensor
CN102209491B (zh) * 2008-11-11 2016-03-30 皇家飞利浦电子股份有限公司 包括探针用于测量患者组织中的温度数据的医疗设备
IL205084A (en) * 2010-04-14 2017-08-31 Vasa Applied Tech Ltd Probe learned flow
US20110252882A1 (en) * 2010-04-19 2011-10-20 Honeywell International Inc. Robust sensor with top cap
US8356514B2 (en) 2011-01-13 2013-01-22 Honeywell International Inc. Sensor with improved thermal stability
DE102011081922B4 (de) * 2011-08-31 2021-12-23 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Strömumgssensor zur Bestimmung eines Strömungsparameters
DE102012001060A1 (de) * 2011-10-24 2013-04-25 Hydrometer Gmbh Verfahren zur Korrektur von Offset-Drift-Effekten einer thermischen Messeinrichtung, thermische Messeinrichtung und Gasdurchflussmessgerät
EP2762864B1 (en) 2013-01-31 2018-08-08 Sensirion AG Membrane-based sensor device and method for manufacturing the same
JP5971199B2 (ja) * 2013-06-12 2016-08-17 株式会社デンソー 空気流量調整装置
US9366557B2 (en) * 2013-12-04 2016-06-14 Itron, Inc. Thermal flow sensors having isolated membranes
US9612146B2 (en) 2014-02-07 2017-04-04 Honeywell International, Inc. Airflow sensor with dust reduction
US11293794B1 (en) 2014-07-13 2022-04-05 Lev Volftsun Thermal flow sensor for beverage metering
EP2930475B1 (en) 2014-12-22 2017-11-15 Sensirion AG Flow sensor arrangement
US11192770B1 (en) * 2015-04-15 2021-12-07 Sestra Systems Self serve beverage by the glass
US10757973B2 (en) * 2016-07-25 2020-09-01 Fontem Holdings 1 B.V. Electronic cigarette with mass air flow sensor
CA3071945A1 (en) * 2017-08-03 2019-02-07 MedCision, Inc. Systems, devices, and methods for automated thawing of bag-format storage vessels
WO2019202126A1 (en) * 2018-04-19 2019-10-24 Healthup Sp. Z O.O. Portable handheld electronic spirometer
KR102087133B1 (ko) * 2018-10-05 2020-03-12 한국생산기술연구원 탄소나노튜브를 이용한 열전 발전 장치 및 센서
JP2020122747A (ja) * 2019-01-31 2020-08-13 オムロン株式会社 検出装置

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Also Published As

Publication number Publication date
JP4709499B2 (ja) 2011-06-22
ATE471498T1 (de) 2010-07-15
EP1477781A1 (en) 2004-11-17
US6945106B2 (en) 2005-09-20
ES2347145T3 (es) 2010-10-26
EP1477781B1 (en) 2010-06-16
DE602004027682D1 (de) 2010-07-29
JP2004340964A (ja) 2004-12-02
US20040261520A1 (en) 2004-12-30
NL1025617C2 (nl) 2004-11-18

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