DE60009506D1 - Kantenschleifverfahren - Google Patents

Kantenschleifverfahren

Info

Publication number
DE60009506D1
DE60009506D1 DE60009506T DE60009506T DE60009506D1 DE 60009506 D1 DE60009506 D1 DE 60009506D1 DE 60009506 T DE60009506 T DE 60009506T DE 60009506 T DE60009506 T DE 60009506T DE 60009506 D1 DE60009506 D1 DE 60009506D1
Authority
DE
Germany
Prior art keywords
grinding process
edge grinding
edge
grinding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60009506T
Other languages
English (en)
Other versions
DE60009506T2 (de
Inventor
Andrew Stocker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cinetic Landis Grinding Ltd
Original Assignee
Unova UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unova UK Ltd filed Critical Unova UK Ltd
Publication of DE60009506D1 publication Critical patent/DE60009506D1/de
Application granted granted Critical
Publication of DE60009506T2 publication Critical patent/DE60009506T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • B23H1/04—Electrodes specially adapted therefor or their manufacture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
    • B24B53/065—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels having other than straight profiles, e.g. crowned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
DE60009506T 1999-07-03 2000-04-20 Kantenschleifverfahren Expired - Fee Related DE60009506T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9915557 1999-07-03
GB9915557A GB2351684B (en) 1999-07-03 1999-07-03 Improvement in and relating to edge grinding
PCT/GB2000/001562 WO2001002133A2 (en) 1999-07-03 2000-04-20 Improvement in and relating to edge grinding

Publications (2)

Publication Number Publication Date
DE60009506D1 true DE60009506D1 (de) 2004-05-06
DE60009506T2 DE60009506T2 (de) 2004-08-05

Family

ID=10856556

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60009506T Expired - Fee Related DE60009506T2 (de) 1999-07-03 2000-04-20 Kantenschleifverfahren
DE60011822T Expired - Fee Related DE60011822T2 (de) 1999-07-03 2000-04-20 Verfahren zum Positionieren von Schleifscheiben

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE60011822T Expired - Fee Related DE60011822T2 (de) 1999-07-03 2000-04-20 Verfahren zum Positionieren von Schleifscheiben

Country Status (7)

Country Link
US (1) US6881130B1 (de)
EP (2) EP1260312B1 (de)
JP (1) JP2003503225A (de)
DE (2) DE60009506T2 (de)
GB (1) GB2351684B (de)
TW (1) TW448087B (de)
WO (1) WO2001002133A2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100798322B1 (ko) * 2002-03-21 2008-01-28 엘지.필립스 엘시디 주식회사 액정 패널의 연마량 보정 장치 및 방법
JP4116583B2 (ja) * 2004-03-24 2008-07-09 株式会社東芝 基板処理方法
CN100515673C (zh) * 2005-10-13 2009-07-22 鸿富锦精密工业（深圳）有限公司 滚圆设备及滚圆方法
CN100515683C (zh) * 2006-01-21 2009-07-22 鸿富锦精密工业（深圳）有限公司 砂轮、使用该砂轮的滚圆设备及滚圆方法
JP2007208184A (ja) * 2006-02-06 2007-08-16 Elpida Memory Inc ウエハ研磨装置
JP4550773B2 (ja) * 2006-06-05 2010-09-22 株式会社三井ハイテック プロファイル研削盤
EP2107598B1 (de) * 2007-01-31 2016-09-07 Shin-Etsu Handotai Co., Ltd. Siliziumscheibenabfasvorrichtung und siliziumscheibenherstellungsverfahren
JP5160993B2 (ja) * 2008-07-25 2013-03-13 株式会社荏原製作所 基板処理装置
JP5103506B2 (ja) * 2010-06-30 2012-12-19 株式会社三井ハイテック 研削加工方法
JP6099960B2 (ja) * 2012-12-18 2017-03-22 ダイトエレクトロン株式会社 ウェーハの面取り加工方法およびウェーハの面取り装置
DE102013210057A1 (de) 2013-05-29 2014-12-04 Siltronic Ag Verfahren zur Politur der Kante einer Halbleiterscheibe
DE102013212850A1 (de) 2013-07-02 2013-09-12 Siltronic Ag Verfahren zur Politur der Kante einer Halbleiterscheibe
JP6614978B2 (ja) * 2016-01-14 2019-12-04 株式会社荏原製作所 研磨装置及び研磨方法
US10363622B2 (en) 2016-09-30 2019-07-30 General Electric Company Electrode for an electro-erosion process and an associated method thereof
US10661406B2 (en) 2018-01-11 2020-05-26 Razor Edge Systems, Inc. Robotic hand tool sharpening and cleaning apparatus
CN108453568A (zh) * 2018-05-08 2018-08-28 湖南工学院 一种平面光学元件磨削加工方法
US11884202B2 (en) 2019-01-18 2024-01-30 Kyocera Sld Laser, Inc. Laser-based fiber-coupled white light system
KR20210125726A (ko) 2020-04-09 2021-10-19 삼성전자주식회사 웨이퍼 트리밍 장치
CN111558874A (zh) * 2020-05-27 2020-08-21 燕山大学 一种弧面零件打磨装置
CN112959150B (zh) * 2021-01-22 2023-03-31 南京高精船用设备有限公司 一种基于系统误差补偿的齿轮内孔微量凸度磨削工艺

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1114528A1 (ru) * 1981-10-13 1984-09-23 Организация П/Я А-7124 Устройство дл обработки фасок на полупроводниковых пластинах
JPS6294247A (ja) * 1985-10-17 1987-04-30 Toyoda Mach Works Ltd 途中停止機能を備えた数値制御工作機械
US4638601A (en) * 1985-11-04 1987-01-27 Silicon Technology Corporation Automatic edge grinder
JP2660512B2 (ja) * 1987-05-15 1997-10-08 哲太郎 植松 メタルボンド砥石の機上放電ツルーイング方法
JP2571477B2 (ja) * 1991-06-12 1997-01-16 信越半導体株式会社 ウエーハのノッチ部面取り装置
US5185965A (en) * 1991-07-12 1993-02-16 Daito Shoji Co., Ltd. Method and apparatus for grinding notches of semiconductor wafer
US5538463A (en) * 1992-11-26 1996-07-23 Shin-Etsu Handotai Co., Ltd. Apparatus for bevelling wafer-edge
US5289661A (en) * 1992-12-23 1994-03-01 Texas Instruments Incorporated Notch beveling on semiconductor wafer edges
JPH08243891A (ja) * 1995-03-07 1996-09-24 Kao Corp 基板のチャンファ加工装置
KR100303074B1 (ko) * 1996-06-15 2001-11-02 로이 아써턴 그라인딩및폴리싱장치와이를이용한그라인딩방법
EP0945216A3 (de) * 1998-03-25 2002-07-17 Unova U.K. Limited Kerben-Schleifwerkzeug
ATE226127T1 (de) * 1998-06-25 2002-11-15 Unova Uk Ltd Verfahren und vorrichtung zum abfasen von halbleiterscheiben
JP3975309B2 (ja) * 1998-10-07 2007-09-12 株式会社東京精密 ウェーハ面取り方法及び装置

Also Published As

Publication number Publication date
WO2001002133A2 (en) 2001-01-11
EP1260312A1 (de) 2002-11-27
WO2001002133A3 (en) 2001-06-14
US6881130B1 (en) 2005-04-19
DE60011822D1 (de) 2004-07-29
JP2003503225A (ja) 2003-01-28
TW448087B (en) 2001-08-01
GB2351684A (en) 2001-01-10
DE60009506T2 (de) 2004-08-05
GB9915557D0 (en) 1999-09-01
GB2351684B (en) 2001-07-11
EP1260312B1 (de) 2004-06-23
EP1200228B1 (de) 2004-03-31
EP1200228A1 (de) 2002-05-02
DE60011822T2 (de) 2004-12-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: CINETIC LANDIS GRINDING LTD., KEIGHLEY, GB

8339 Ceased/non-payment of the annual fee