JP4116583B2 - 基板処理方法 - Google Patents
基板処理方法 Download PDFInfo
- Publication number
- JP4116583B2 JP4116583B2 JP2004087418A JP2004087418A JP4116583B2 JP 4116583 B2 JP4116583 B2 JP 4116583B2 JP 2004087418 A JP2004087418 A JP 2004087418A JP 2004087418 A JP2004087418 A JP 2004087418A JP 4116583 B2 JP4116583 B2 JP 4116583B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- substrate
- polishing head
- wafer
- tape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
図1は、本発明の第1の実施形態方法に使用した研磨装置の概略構成を示す斜視図である。
図4は、本発明の第2の実施形態方法に使用した研磨装置の概略構成を示す斜視図である。なお、図1と同一部分には同一符号を付して、その詳しい説明は省略する。これは、研磨処理毎に新しい研磨テープの供給と、同時に古い研磨テープの巻き取りを行う場合の研磨ヘッド機構を示したものである。
なお、本発明は上述した実施形態に限定されるものではない。実施形態では、研磨ヘッドに装着した研磨テープとの摺動によりノッチ部を研磨したが、研磨材として研磨テープの代わりに研磨パッドや研磨布を取り付け、純水の代わりに研磨粒子を含む研磨液を供給して基板のノッチ部を研磨するようにしても良い。
12…被処理基板
13…研磨ヘッド機構
14…純水供給ノズル
20…軸
21…研磨ヘッド
22…弾性体
23…研磨テープ
31…Siウェハ
32…SiO2 膜
33…SiN膜
34…トレンチ
35…針状突起
36…レジスト
40…研磨テープ供給・巻取機構
41…供給部
42…巻取部
Claims (2)
- 軸芯を中心に回転可能な円柱状の研磨ヘッドの一方端側に回転可能な研磨テープ供給部が研磨ヘッドの回転により公転可能に取り付けられ、他方端側に回転可能な研磨テープ巻き取り部が研磨ヘッドの回転により公転可能に取り付けられ、研磨テープ供給部から研磨テープ巻き取り部まで連続する研磨テープが研磨ヘッドの周面に螺旋状に装着された研磨機構を用い、
前記研磨ヘッドの軸芯を被処理基板の表面と直交する方向にし、前記研磨ヘッドに装着された前記研磨テープを、被処理基板のノッチ部に接触・加圧させた状態で、前記研磨ヘッドを回転させることによりノッチ部を研磨し、
前記研磨テープ供給部及び研磨テープ巻取り部によって、前記ノッチ部に対して、研磨使用前の研磨テープの供給と同時に研磨使用後の研磨テープの巻き取りを行うことを特徴とする基板処理方法。 - 前記ノッチ部の側壁面の形状に応じて前記研磨ヘッドの軸を傾けることを特徴とする請求項1記載の基板処理方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004087418A JP4116583B2 (ja) | 2004-03-24 | 2004-03-24 | 基板処理方法 |
US11/085,495 US7241205B2 (en) | 2004-03-24 | 2005-03-22 | Method of processing a substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004087418A JP4116583B2 (ja) | 2004-03-24 | 2004-03-24 | 基板処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005277051A JP2005277051A (ja) | 2005-10-06 |
JP4116583B2 true JP4116583B2 (ja) | 2008-07-09 |
Family
ID=35176392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004087418A Expired - Fee Related JP4116583B2 (ja) | 2004-03-24 | 2004-03-24 | 基板処理方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7241205B2 (ja) |
JP (1) | JP4116583B2 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2859619B1 (fr) * | 2003-09-16 | 2006-05-26 | Jean Christophe Grimard | Dispositif pour raper le canal intra-medullaire d'un os et systeme pour mettre en oeuvre ce dispositif |
JP4284215B2 (ja) * | 2004-03-24 | 2009-06-24 | 株式会社東芝 | 基板処理方法 |
US7115023B1 (en) * | 2005-06-29 | 2006-10-03 | Lam Research Corporation | Process tape for cleaning or processing the edge of a semiconductor wafer |
DE102006008689B4 (de) * | 2006-02-24 | 2012-01-26 | Lanxess Deutschland Gmbh | Poliermittel und dessen Verwendung |
JP2008288599A (ja) * | 2007-05-21 | 2008-11-27 | Applied Materials Inc | 研磨パッドを使用して基板のノッチを研磨する方法及び装置 |
US20080293337A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for polishing a notch of a substrate by substrate vibration |
US20100105291A1 (en) * | 2008-10-24 | 2010-04-29 | Applied Materials, Inc. | Methods and apparatus for polishing a notch of a substrate |
US20100105299A1 (en) * | 2008-10-24 | 2010-04-29 | Applied Materials, Inc. | Methods and apparatus for polishing an edge and/or notch of a substrate |
AU2010287779B2 (en) * | 2009-08-31 | 2015-04-09 | Hoya Corporation | Polarizing element and method for manufacturing polarizing lens |
JP7104580B2 (ja) * | 2018-07-27 | 2022-07-21 | 芝浦メカトロニクス株式会社 | 基板洗浄装置及び基板洗浄方法 |
KR20210125726A (ko) | 2020-04-09 | 2021-10-19 | 삼성전자주식회사 | 웨이퍼 트리밍 장치 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2309456A (en) * | 1942-02-16 | 1943-01-26 | Mid West Abrasive Co | Abrasive article |
US5181347A (en) * | 1991-07-18 | 1993-01-26 | Green Gary L | Drum sander and fasteners |
US5289661A (en) * | 1992-12-23 | 1994-03-01 | Texas Instruments Incorporated | Notch beveling on semiconductor wafer edges |
JP3542815B2 (ja) | 1993-08-11 | 2004-07-14 | 不二越機械工業株式会社 | ウェハーノッチ部の鏡面研磨装置およびその鏡面研磨方法 |
JPH10249689A (ja) * | 1997-03-10 | 1998-09-22 | Tokyo Seimitsu Co Ltd | ウェーハ面取方法及び装置 |
JP3578194B2 (ja) * | 1997-03-18 | 2004-10-20 | 株式会社東京精密 | ウェーハ位置決め方法及び装置 |
JP3197253B2 (ja) * | 1998-04-13 | 2001-08-13 | 株式会社日平トヤマ | ウエーハの面取り方法 |
JP2000254845A (ja) * | 1999-03-10 | 2000-09-19 | Nippei Toyama Corp | ウエーハのノッチ溝の面取り方法及びウエーハ |
GB2351684B (en) * | 1999-07-03 | 2001-07-11 | Unova Uk Ltd | Improvement in and relating to edge grinding |
US6685539B1 (en) * | 1999-08-24 | 2004-02-03 | Ricoh Company, Ltd. | Processing tool, method of producing tool, processing method and processing apparatus |
US6976901B1 (en) * | 1999-10-27 | 2005-12-20 | Strasbaugh | In situ feature height measurement |
JP2001205549A (ja) | 2000-01-25 | 2001-07-31 | Speedfam Co Ltd | 基板エッジ部の片面研磨方法およびその装置 |
JP2001225261A (ja) * | 2000-02-16 | 2001-08-21 | Ebara Corp | ポリッシング装置 |
US6306016B1 (en) * | 2000-08-03 | 2001-10-23 | Tsk America, Inc. | Wafer notch polishing machine and method of polishing an orientation notch in a wafer |
US6913526B2 (en) * | 2000-08-18 | 2005-07-05 | Tokyo Seimitsu Co., Ltd. | Polishing machine for polishing periphery of sheet |
JP3949941B2 (ja) * | 2001-11-26 | 2007-07-25 | 株式会社東芝 | 半導体装置の製造方法および研磨装置 |
JP4090247B2 (ja) * | 2002-02-12 | 2008-05-28 | 株式会社荏原製作所 | 基板処理装置 |
TWI294622B (en) * | 2002-08-12 | 2008-03-11 | Samsung Electronics Co Ltd | Disc with tdds and tdfl, and method and apparatus for managing defect in the same |
JP2004087647A (ja) * | 2002-08-26 | 2004-03-18 | Nihon Micro Coating Co Ltd | 研磨パッド及び方法 |
JP2004103825A (ja) | 2002-09-10 | 2004-04-02 | Nihon Micro Coating Co Ltd | 半導体ウエハエッジ研磨装置及び方法 |
JP4125148B2 (ja) * | 2003-02-03 | 2008-07-30 | 株式会社荏原製作所 | 基板処理装置 |
US6885539B1 (en) * | 2003-12-02 | 2005-04-26 | Presidio Components, Inc. | Single layer capacitor |
US6997794B2 (en) * | 2004-06-03 | 2006-02-14 | James Matthew Pontieri | Sanding rope and method of forming same |
-
2004
- 2004-03-24 JP JP2004087418A patent/JP4116583B2/ja not_active Expired - Fee Related
-
2005
- 2005-03-22 US US11/085,495 patent/US7241205B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2005277051A (ja) | 2005-10-06 |
US20050245174A1 (en) | 2005-11-03 |
US7241205B2 (en) | 2007-07-10 |
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