US20080293337A1 - Methods and apparatus for polishing a notch of a substrate by substrate vibration - Google Patents
Methods and apparatus for polishing a notch of a substrate by substrate vibration Download PDFInfo
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- US20080293337A1 US20080293337A1 US12/124,133 US12413308A US2008293337A1 US 20080293337 A1 US20080293337 A1 US 20080293337A1 US 12413308 A US12413308 A US 12413308A US 2008293337 A1 US2008293337 A1 US 2008293337A1
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- substrate
- notch
- polishing
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- polishing head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Apparatus and methods are provided for polishing a notch on an edge of a substrate. An exemplary apparatus may include a substrate support adapted to support a substrate; a polishing head adapted to contact a notch in an edge of the substrate; and a controller adapted to oscillate the substrate between at least first and second oscillatory positions while the polishing head contacts the substrate notch. Numerous other aspects are provided.
Description
- The present application claims priority from U.S. Provisional Patent Application Ser. No. 60/939,228, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR POLISHING A NOTCH OF A SUBSTRATE BY SUBSTRATE VIBRATION” (Attorney Docket No. 11952/L), which is hereby incorporated by reference herein in its entirety.
- The present application is related to the following commonly-assigned, co-pending U.S. patent applications, each of which is hereby incorporated herein by reference in its entirety for all purposes:
- U.S. patent application Ser. No. 11/299,295, filed on Dec. 9, 2005 and entitled “METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE” (Attorney Docket No. 10121/PPC/CMP/CKIM);
- U.S. patent application Ser. No. 11/298,555, filed on Dec. 9, 2005 and entitled “METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE” (Attorney Docket No. 10414/PPC/CMP/CKIM);
- U.S. patent application Ser. No. 60/939,351, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR POLISHING A NOTCH OF A SUBSTRATE USING AN INFLATABLE POLISHING WHEEL” (Attorney Docket No. 10674/L);
- U.S. patent application Ser. No. 60/939,353, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR FINDING A SUBSTRATE NOTCH CENTER” (Attorney Docket No. 11244/L);
- U.S. patent application Ser. No. 60/939,343, filed May 21, 2007, entitled “METHODS AND APPARATUS TO CONTROL SUBSTRATE BEVEL AND EDGE POLISHING PROFILES OF EPITAXIAL FILMS” (Attorney Docket No. 11417/L);
- U.S. patent application Ser. No. 60/939,219, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR POLISHING A NOTCH OF A SUBSTRATE USING A SHAPED BACKING PAD” (Attorney Docket No. 11483/L);
- U.S. patent application Ser. No. 60/939,342, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR REMOVAL OF FILMS AND FLAKES FROM THE EDGE OF BOTH SIDES OF A SUBSTRATE USING BACKING PADS” (Attorney Docket No. 11564/L);
- U.S. patent application Ser. No. 60/939,350, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR USING A BEVEL POLISHING HEAD WITH AN EFFICIENT TAPE ROUTING ARRANGEMENT” (Attorney Docket No. 11565/L);
- U.S. Patent Application Ser. No. 60/939,344, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR USING A ROLLING BACKING PAD FOR SUBSTRATE POLISHING” (Attorney Docket No. 11566/L);
- U.S. Patent Application Ser. No. 60/939,333, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR SUBSTRATE EDGE POLISHING USING A POLISHING ARM” (Attorney Docket No. 11567/L);
- U.S. Patent Application Ser. No. 60/939,212, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR IDENTIFYING A SUBSTRATE EDGE PROFILE AND ADJUSTING THE PROCESSING OF THE SUBSTRATE ACCORDING TO THE IDENTIFIED EDGE PROFILE” (Attorney Docket No. 11695/L);
- U.S. Patent Application Ser. No. 60/939,337, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR HIGH PERFORMANCE SUBSTRATE BEVEL AND EDGE POLISHING IN SEMICONDUCTOR MANUFACTURE” (Attorney Docket No. 11809/L); and
- U.S. Patent Application Ser. No. 60/939,209, filed May 21, 2007, entitled “METHODS AND APPARATUS FOR CONTROLLING THE SIZE OF AN EDGE EXCLUSION ZONE OF A SUBSTRATE” (Attorney Docket No. 11987/L);
- The present invention relates generally to substrate processing, and more particularly to methods and apparatus for cleaning a notch in an edge of a substrate.
- Substrates are used in semi-conductor device manufacturing. During processing, the notch and edge of a substrate may become dirty, which may negatively affect the semi-conductor devices formed on the substrate. Conventional systems may not be able to effectively clean a substrate notch in a cost-effective amount of time. Accordingly, improved methods and apparatus for cleaning or polishing notches in the edges of substrates are desired.
- In a first aspect of the invention, an apparatus for polishing a notch in a substrate edge is provided. The apparatus comprises a substrate support adapted to support a substrate; a polishing head adapted to contact a notch in an edge of the substrate; and a controller adapted to oscillate the substrate between at least first and second oscillatory positions while the polishing head contacts the substrate notch.
- In another aspect of the invention, a system for polishing a notch in a substrate edge is provided. The system comprises a substrate support adapted to support a substrate; a polishing head adapted to press a polishing tape against a notch in an edge of the substrate; a controller adapted to oscillate the substrate between at least first and second oscillatory positions while the polishing head contacts the substrate notch to control polishing by the polishing head.
- In yet another aspect of the invention, a method for polishing a notch in a substrate edge is provided. The method comprises supporting a substrate, wherein an edge of the substrate includes a notch; pressing a polishing head against a surface of the notch; and oscillating the substrate between first and second oscillatory positions while the polishing head is pressed against the notch.
- Other features and aspects of the present invention will become more fully apparent from the following detailed description, the appended claims and the accompanying drawings.
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FIG. 1 is a schematic plan view of an embodiment of a system for polishing parts of a substrate, including major surfaces, edge, bevel, and notch in accordance with the present invention. -
FIG. 2 is a perspective view of an embodiment of a polishing apparatus for polishing a substrate notch in accordance with the present invention. -
FIG. 3 is a perspective view of part of the embodiment of a polishing apparatus for polishing a substrate notch, shown inFIG. 2 . -
FIG. 4 is a schematic illustration of part of an exemplary substrate, including a substrate notch. -
FIG. 5 is a schematic cross-sectional view of an embodiment of a supporting backing pad for polishing a substrate notch in accordance with the present invention. -
FIG. 6 is a top plan view of an exemplary substrate. -
FIG. 7 is a flow chart of a method for polishing a substrate notch according to an embodiment of the present invention. - Substrates used in semiconductor device processing often have films and/or surface defects which typically should be removed prior to subsequent processing steps. In some cases, these films and defects may occur on the edge of a substrate, including a notch formed thereon.
- One method of cleaning and polishing a substrate notch includes applying an abrasive film or tape to the notch, and moving the abrasive tape relative to the notch, while the substrate is fixed in a particular position. The force, or pressure, applied to the abrasive tape while contacting the notch, as well as the degree of contact between the abrasive tape and the notch, may contribute to polishing efficiency. Another factor that may contribute to polishing efficiency is the degree of movement of the abrasive tape relative to the substrate notch. In some embodiments, the relative movement may be provided by advancing the abrasive tape over a surface of the notch. However, the degree of relative movement between the abrasive tape and the substrate notch may be increased by moving the substrate as the abrasive tape is advanced over the notch surface, thereby increasing the notch polishing efficiency and the cost-effectiveness thereof.
- The present invention provides apparatus and methods that enhance contact between the polishing or abrasive tape and all sections of a substrate notch region to efficiently and cost-effectively remove thin films and surface defects from the substrate notch. In one or more embodiments, a notch backing pad may be provided. The notch backing pad may be adapted to press a moving polishing tape against the substrate notch. In some embodiments, the notch backing pad may include a protruding portion that substantially conforms to the shape of the substrate notch. The protruding portion may be made of an elastically deformable material adapted to effectively conform the notch backing pad to the shape of the notch (e.g., when pressed against the notch), and to press the polishing tape into contact with all surfaces of the notch. The notch backing pad may include slots to guide the polishing tape over the notch backing pad.
- In some embodiments, the substrate may be rotated and/or oscillated about a center of rotation as the polishing tape is advanced over the notch. The rotation and/or oscillation may increase the degree of relative movement between the polishing tape and the substrate notch, thereby increasing the polishing efficiency and cost-effectiveness thereof.
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FIG. 1 is a schematic plan view depicting an exemplary embodiment of asubstrate polishing system 100 according to the present invention. Thesystem 100 ofFIG. 1 may be adapted to polish asubstrate 102, including, for example, asubstrate edge 101 and/or notch 244 (shown inFIG. 3 ) positioned in thesubstrate edge 101. In some embodiments, thenotch 244 may be used to align thesubstrate 102 in thesystem 100. Thesubstrate 102 may also include twomajor surfaces 103, (one of which is shown). Eachmajor surface 103 of thesubstrate 102 may include a device region (not shown) upon which devices may be fabricated, and edge exclusion regions (not shown) upon which device fabrication is not meant to occur. (Typically however, only one of the twomajor surfaces 103 will include a device region and an edge exclusion region). The edge exclusion regions or zones may serve as a buffer between the device regions and thesubstrate edge 101. In an edge polishing process, thesubstrate edge 101, including thenotch 244, may be polished to remove defects or contaminants, to reduce film thickness and more generally to improve surface uniformity. - The
system 100 ofFIG. 1 includes three polishingheads 104 which, in turn, may each include a plurality of polishing apparatus for cleaning and polishing the above-mentioned parts of thesubstrate 102. Any number and type of polishingheads 104 may be used in any practicable combination. Any number ofheads 104 may be used concurrently, individually, and/or in any sequence. The one ormore heads 104 may be disposed in different positions, and in different orientations (e.g., aligned with the substrate edge or notch, normal to the substrate edge or notch, angled relative to the substrate edge or notch, etc.), to allow the one or more polishing heads 104 (and backing pads and/or polishing tape described further below) to polish different portions of the edge and/or notch of thesubstrate 102. Thesubstrate 102 may be stationary or rotate as it is polished. The one ormore heads 104 may be adapted to be oscillated or moved (e.g., angularly translated about a tangential axis of thesubstrate 102 and/or circumferentially translated relative to the substrate 102) around or along thesubstrate edge 101 and/or notch 244 by any suitable means so as to polish different portions of thesubstrate 102.Different heads 104 may be used fordifferent substrates 102, different types ofsubstrates 102, or different polishing operations. - The
system 100 may also include a programmed or user operatedcontroller 106. Thecontroller 106 may direct the operation and movement of the one ormore heads 104, as well as the other system components, as will be further described below. -
FIG. 2 is a perspective view of an embodiment of apolishing apparatus 200 for polishing a substrate notch 244 (shown inFIG. 3 ). The polishingapparatus 200 may include a substrate driver 210 (e.g., a servomotor, gear, belt, chain, etc.), which may be mounted on apedestal 212. A support 214 (e.g., a vacuum chuck) may be coupled (e.g., rigidly) to a shaft (not shown) of thesubstrate driver 210. Thesupport 214 may support asubstrate 216, for example. Thesubstrate driver 210 may rotate thesubstrate 216, via thesupport 214, about acenter 218 of thesubstrate 216 or another suitable axis. Thesubstrate driver 210 may be connected to a substrate driver control unit (not shown), which may control the angular displacement, angular velocity, and angular acceleration of thesubstrate 216. The polishingapparatus 200 may further include apolishing arm 220 aligned in the horizontal plane approximately tangential to the edge 103 (shown inFIG. 1 ) of thesubstrate 216 and supported by aframe 224. In other embodiments, the polishingarm 220 may be aligned differently, for example, vertically or at an angle with respect to the horizontal plane. The polishingarm 220 may include a polishinghead section 222. The polishinghead 222 may include anotch backing pad 226, which may be moved toward or away from thesubstrate 216 by an actuator (e.g., hydraulic actuator, pneumatic actuator, servomotor, etc.) (not shown).Polishing tape 228, may wrap around the polishinghead 220, and over thenotch backing pad 226, and be tensioned betweenspools spools spool drivers 234, 236 (e.g., servomotors), respectively. Thespool drivers tape 228 that is advanced over the polishinghead 220 from, for example,spool 230 to spool 232 in order to polish thenotch 244 in thesubstrate 216. - In one or more embodiments, the polishing
tape 228 may be made from many different materials, such as aluminum oxide, silicon oxide, silicon carbide, etc. Other materials may also be used. In some embodiments, abrasives used may range from about 0.5 microns up to about 3 microns in size, although other sizes may be used. Different widths of polishingtape 228 ranging from about 0.2 inches to about 1.5 inches may be used, although other polishing tape widths may be used. In one or more embodiments, the polishingtape 228 may be about 0.002 to about 0.02 inches thick and withstand about 1 to 5 lbs. in tension. Other tapes having different thicknesses and tensile strengths may be used. Thespools tape 228. Other spool dimensions may be used. Thespools -
FIG. 3 is a perspective view of part of the embodiment of thepolishing apparatus 200 shown inFIG. 2 for polishing thesubstrate notch 244. The polishinghead 222, supported by the polishingarm 220, may include thenotch backing pad 226 and one ormore guide rollers tape 228 may wrap around the polishinghead 222 by wrapping around one of theguide rollers 238, thenotch backing pad 226 and another of theguide rollers 240. As described above, the polishingtape 228 may be tensioned betweenspool notch backing pad 226 may include a protrudingportion 242, having a cross section similar in shape to thesubstrate notch 244. The polishingtape 228 may be positioned to conform to the shape of the protrudingportion 242 of thenotch backing pad 226 when wrapped around the polishinghead 220, and tensioned between thespools - As described above, the
notch backing pad 226 may be moved toward, or away from, thesubstrate 216 by an actuator (not shown). Any other suitable means to move thenotch backing pad 226 may be used. When thenotch backing pad 226 is moved toward thesubstrate 216, the protrudingportion 242 of thenotch backing pad 226 may be pressed into thesubstrate notch 244. As the protrudingportion 242 is pressed into thenotch 244, the section of polishingtape 228 conforming to the shape of the protrudingportion 242 of thenotch backing pad 226 is also pressed into, and conforms to, thesubstrate notch 244, and thereby contacts theentire substrate notch 244 surface. As the polishingtape 228 may contact the entire surface of thesubstrate notch 244, as the polishingtape 228 is advanced, it may clean and polish the entire surface of thesubstrate notch 244. - With reference to
FIG. 4 , a part of thesubstrate 216 including thenotch 244 is schematically illustrated. The size of thenotch 244 is exaggerated for clarity purposes. Thenotch 244 may include one or more notch sides 400. Thenotch 244 may also include one ormore notch corners 402. Eachnotch corner 402 may be positioned at the intersection of anotch side 400 and the outer perimeter of thesubstrate 216. Thenotch 244 may further include anotch center 404, positioned at the intersection of the one or more notch sides 400. Anotch depth 406 may be calculated as the length or distance between the horizontal plane of thenotch center 404 and the horizontal plane of thenotch corners 402. In some embodiments, for example, in the embodiment shown herein, thenotch 244 may exhibit a large change in curvature as it is traced from onenotch corner 402 to anothernotch corner 402, via the notch sides 400 andnotch center 404. The change in curvature of thenotch 244 geometry may make it desirable to maintain consistent contact between the polishingtape 228 and all regions (e.g., notch sides 400,notch corners 402, and notch center 404) of thenotch 244 during polishing, such that theentire notch 244 may be polished/cleaned. -
FIG. 5 is a schematic cross-sectional view of an exemplary embodiment of thenotch backing pad 226 adapted to polish thesubstrate notch 244. As described above, thenotch backing pad 226 may include the protrudingportion 242, whose shape roughly corresponds to the shape of thesubstrate notch 244. In some embodiments, the protrudingportion 242 may be made of a soft conforming material, such as polyurethane, or any other suitable material. In other embodiments, the protrudingportion 242 may be made of a rigid material. The rest of thenotch backing pad 226 may be made of soft, conforming materials, or rigid materials. Thenotch backing pad 226 may also include one ormore slots slots tape 228 over the protrudingportion 242, as the polishingtape 228 is advanced and contacts thesubstrate notch 244. When the protrudingportion 242 of thenotch backing pad 226 is pressed into thenotch 244, the protrudingportion 242 may conform to the shape of thenotch 244, and thereby cause the polishingtape 228 to contact the notch sides 400, thenotch corners 402 and the notch center 404 (FIG. 4 ). - Turning to
FIG. 6 , a top plan view of an exemplary embodiment of substrate oscillating in the notch polishing apparatus of the present invention. It should be noted that thenotch 244 shown herein is not drawn to scale, and is enlarged for illustrative purposes. As described above with respect toFIGS. 1 and 2 , thesubstrate 216 may be supported by thesupport 214, and rotated and/or oscillated about thesubstrate center 218 by thesubstrate driver 210. For example, the controller 106 (FIG. 1 ) or another controller may cause thesubstrate driver 210 to rotate back and forth so as to rotate (e.g., oscillate) thesubstrate 216 back and forth. To polish thesubstrate notch 244, the polishingtape 228 may be advanced over thenotch backing pad 226, as the polishingtape 228 contacts thenotch 244, via pressure from thenotch backing pad 226. The direction of polishingtape 228 advancement as the polishingtape 228 contacts thenotch 244 may be approximately perpendicular to a plane of rotation of thesubstrate 216, i.e., approximately normal to the figure. However, the polishingtape 228 may be advanced at other angles with respect to the plane of rotation of thesubstrate 216. - In some embodiments, as the polishing
tape 228 is advanced, thesubstrate 216 may be rotated or oscillated sinusoidally or otherwise about itscenter 218. For example, the controller 106 (FIG. 1 ) may cause thesubstrate driver 210 to rotate back and forth. In the exemplary embodiment shown herein, thesubstrate 216 is oscillated about its center ofrotation 218. Radius R indicates a direction in which thesubstrate notch 244 is aligned with, or approximately centered with respect to, the polishing head 222 (not shown inFIG. 6 , shown inFIG. 2 ) and, specifically, the protrudingportion 242 of the notch backing pad 226 (seeFIG. 5 ). As thesubstrate 216 is oscillated, radius R may indicate a neutral position or direction of thesubstrate 216, and radii R1 and R2 may indicate limits of travel of the notch center 204 (shown inFIG. 4 ) as the substrate is oscillated through angles θ1 and θ2, respectively. Dotted line 244 a indicates an outline of thenotch 244 at one limit of travel R1, and dottedline 244 b indicates an outline of thenotch 244 at another limit of travel R2. The angles of rotation θ1 and θ2 of thesubstrate 216 may be set approximately equal to one another, or they may be set different from one another. Each angle θ1, θ2 may range between approximately 0 degrees and approximately 1 degree during polishing in some embodiments. Other angles may be used. A frequency of oscillation of thesubstrate 216 between radii R1 and R2 may be varied, for example, from approximately 0 cycles/min to approximately 50,000 cycles/min during polishing, and preferably from approximately 1000 cycles/min to approximately 50,000 cycles/min during polishing. Other and/or a constant number of cycles per minute may be used. - The force or pressure at which the polishing
tape 228 is pressed against thenotch 244, as well as the relative movement of the polishingtape 228 and thenotch 244 may account for the degree and/or efficiency of polishing. The advancement of the polishingtape 228, for example, in a direction perpendicular to the major surface of thesubstrate 216, as it contacts thenotch 244 may provide relative movement between the polishingtape 228 and thenotch 244, thereby aiding in the polishing process. In addition, oscillation of thesubstrate 216 about thesubstrate center 218 during the advancement of the polishingtape 228 may provide further relative movement between the polishingtape 228 and a surface of thenotch 244, thereby aiding in the polishing process. In some embodiments, the combination of substrate oscillation with polishing tape advancement may result in more effective notch polishing than the use of polishing tape advancement alone, as the oscillation creates greater contact between the polishingtape 228 and the notch surfaces. - Turning to
FIG. 7 , anexemplary method 700 for cleaning and polishing thenotch 244 in thesubstrate 216 is depicted. In step S702, thesubstrate 216 may be positioned and secured on thesupport 214. Then, in step S704, thesubstrate 216 may be rotated until thenotch 244 is aligned with the polishinghead 222, e.g., aligned with the protrudingportion 242 of thenotch backing pad 226. In step S706, the protrudingportion 242 of thenotch backing pad 226 contacts thesubstrate notch 244, and presses the polishingtape 228 against thenotch 244. In step S708, the polishingtape 228 may be advanced byspool driver 234 orspool driver 236, e.g., either ofspools substrate 216 may be oscillated about itscenter 218 or another suitable point. This step may be performed simultaneously with, before, or after step S708. Advancement of the polishingtape 228 as it contacts thenotch 244, in combination with the oscillation of thesubstrate 216, removes and eliminates films and imperfections on thenotch 244 via abrasion. - In addition, in step S712, the polishing
head 222 may be vertically rotated or rocked about thenotch 244, e.g., the polishinghead 222 may rotate about an axis tangential to the substrate 216 (and hence notch 244), as the polishingtape 228 is advanced, in order to more effectively clean and polish parts of thenotch 244 adjacent to major surfaces 103 (shown inFIG. 1 ) of thesubstrate 216. Step S712 may be performed simultaneously with, before or after step S708 and/or S710. The speed, direction, tension, pressing force, etc., of the polishingtape 228, the rotational displacement, speed, and acceleration of thesubstrate 216, and the rotational displacement, speed, and acceleration of the polishinghead 222 about thesubstrate 216, may be adjustable, via, for example, the controller 106 (FIG. 1 ). For instance, the polishingtape 228 may be advanced at one speed for a certain length, and then another speed for another length. In addition, the polishingtape 228 may be at least one of translated and oscillated, with constant or variable tensions and pressing forces. Furthermore, thesubstrate 216 may be oscillated at a first amplitude for a first period of time and a second amplitude for a second period of time. Additionally or alternatively, thesubstrate 216 may alternate between time periods of oscillation and time periods of simple or no rotation. Substrate oscillation may also be employed during cleaning of an edge region of a substrate which does not include a notch (e.g., using similar or other oscillations). - The foregoing description discloses only exemplary embodiments of the invention. Modification of the above disclosed apparatus and methods which fall within the scope of the invention will be readily apparent to those of ordinary skill in the art.
- Accordingly, while the present invention has been disclosed in connection with exemplary embodiments thereof, it should be understood that other embodiments may fall within the spirit and scope of the invention, as defined by the following claim.
Claims (25)
1. An apparatus for polishing a notch in a substrate edge comprising:
a substrate support adapted to support a substrate;
a polishing head adapted to contact a notch in an edge of the substrate; and
a controller adapted to oscillate the substrate between at least first and second oscillatory positions while the polishing head contacts the substrate notch.
2. The apparatus of claim 1 wherein the polishing head includes a backing pad.
3. The apparatus of claim 2 further comprising a polishing tape, wherein the backing pad is adapted to contact the substrate notch with the polishing tape.
4. The apparatus of claim 3 further comprising a motor adapted to advance the polishing tape, thereby creating relative movement between the polishing tape and the substrate notch.
5. The apparatus of claim 2 wherein the backing pad includes a protruding member.
6. The apparatus of claim 5 wherein the protruding member is adapted to be pressed into the substrate notch.
7. The apparatus of claim 5 wherein the protruding member is conformable to the shape of the substrate notch.
8. The apparatus of claim 1 wherein the first oscillatory position is at a first oscillatory angle to a neutral radius of the substrate when the substrate is stationary.
9. The apparatus of claim 8 wherein the second oscillatory position is at a second oscillatory angle to a neutral radius of the substrate when the substrate is stationary.
10. The apparatus of claim 9 wherein the first oscillatory angle is the same as the second oscillatory angle.
11. The apparatus of claim 9 wherein the frequency of oscillation between the first and second oscillatory positions is varied.
12. The apparatus of claim 1 wherein the polishing head is adapted to rock about an axis tangential to the substrate notch.
13. A system for polishing a notch in a substrate edge comprising:
a substrate support adapted to support a substrate;
a polishing head adapted to press a polishing tape against a notch in an edge of the substrate;
a controller adapted to oscillate the substrate between at least first and second oscillatory positions while the polishing head contacts the substrate notch and to control polishing by the polishing head.
14. The system of claim 13 wherein the polishing head includes a backing pad.
15. The system of claim 14 , wherein the backing pad is adapted to contact the substrate notch with the polishing tape.
16. The system of claim 15 further comprising a motor, wherein the motor is adapted to advance the polishing tape, thereby creating relative movement between the polishing tape and the substrate notch.
17. The system of claim 13 wherein the first oscillatory position is at a first oscillatory angle to a neutral radius of the substrate when the substrate is stationary.
18. The system of claim 19 wherein the second oscillatory position is at a second oscillatory angle to a neutral radius of the substrate when the substrate is stationary.
19. The system of claim 13 wherein the substrate oscillates at a first amplitude for a first period of time and at a second amplitude for a second period of time.
20. A method for polishing a notch in a substrate edge comprising:
supporting a substrate, wherein an edge of the substrate includes a notch;
pressing a polishing head against a surface of the notch; and
oscillating the substrate between first and second oscillatory positions while the polishing head is pressed against the notch.
21. The method of claim 20 further comprising pressing a polishing tape against the notch via the polishing head.
22. The method of claim 21 further comprising advancing the polishing tape as the polishing tape is pressed against the notch.
23. The method of claim 20 further comprising rocking the polishing head about the notch.
24. The method of claim 20 further comprising conforming the polishing head to the shape of the notch.
25. The method of claim 20 , wherein the polishing head includes a backing pad adapted to conform to the shape of the notch.
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US12/124,133 US20080293337A1 (en) | 2007-05-21 | 2008-05-20 | Methods and apparatus for polishing a notch of a substrate by substrate vibration |
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US93922807P | 2007-05-21 | 2007-05-21 | |
US12/124,133 US20080293337A1 (en) | 2007-05-21 | 2008-05-20 | Methods and apparatus for polishing a notch of a substrate by substrate vibration |
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US12/124,133 Abandoned US20080293337A1 (en) | 2007-05-21 | 2008-05-20 | Methods and apparatus for polishing a notch of a substrate by substrate vibration |
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Cited By (12)
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US20080291448A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for finding a substrate notch center |
US20080293340A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads |
US20080293335A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for substrate edge polishing using a polishing arm |
US20080293333A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for controlling the size of an edge exclusion zone of a substrate |
US20080293341A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for using a rolling backing pad for substrate polishing |
US20080293336A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus to control substrate bevel and edge polishing profiles of films |
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US20080293329A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for identifying a substrate edge profile and adjusting the processing of the substrate according to the identified edge profile |
US20080291448A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for finding a substrate notch center |
US20080293335A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for substrate edge polishing using a polishing arm |
US20080293333A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for controlling the size of an edge exclusion zone of a substrate |
US20080293341A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for using a rolling backing pad for substrate polishing |
US20080293336A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus to control substrate bevel and edge polishing profiles of films |
US20080293340A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads |
US20080293334A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for using a bevel polishing head with an efficient tape routing arrangement |
US8142260B2 (en) | 2007-05-21 | 2012-03-27 | Applied Materials, Inc. | Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads |
US20090264053A1 (en) * | 2008-04-21 | 2009-10-22 | Applied Materials, Inc. | Apparatus and methods for using a polishing tape cassette |
US20100105299A1 (en) * | 2008-10-24 | 2010-04-29 | Applied Materials, Inc. | Methods and apparatus for polishing an edge and/or notch of a substrate |
US20100105290A1 (en) * | 2008-10-24 | 2010-04-29 | Applied Materials, Inc. | Methods and apparatus for indicating a polishing tape end |
US20180277401A1 (en) * | 2017-03-27 | 2018-09-27 | Ebara Corporation | Substrate processing method and apparatus |
US10811284B2 (en) * | 2017-03-27 | 2020-10-20 | Ebara Corporation | Substrate processing method and apparatus |
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