DE3886067D1 - Spiegel für Excimer-Laser und Excimer-Laservorrichtung unter Verwendung des Spiegels. - Google Patents

Spiegel für Excimer-Laser und Excimer-Laservorrichtung unter Verwendung des Spiegels.

Info

Publication number
DE3886067D1
DE3886067D1 DE88102823T DE3886067T DE3886067D1 DE 3886067 D1 DE3886067 D1 DE 3886067D1 DE 88102823 T DE88102823 T DE 88102823T DE 3886067 T DE3886067 T DE 3886067T DE 3886067 D1 DE3886067 D1 DE 3886067D1
Authority
DE
Germany
Prior art keywords
mirror
excimer laser
laser device
excimer
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88102823T
Other languages
English (en)
Other versions
DE3886067T2 (de
Inventor
Takeo Miyata
Takashi Iwabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE3886067D1 publication Critical patent/DE3886067D1/de
Application granted granted Critical
Publication of DE3886067T2 publication Critical patent/DE3886067T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
    • G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0891—Ultraviolet [UV] mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lasers (AREA)
DE3886067T 1987-02-26 1988-02-25 Spiegel für Excimer-Laser und Excimer-Laservorrichtung unter Verwendung des Spiegels. Expired - Fee Related DE3886067T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62043328A JP2629693B2 (ja) 1987-02-26 1987-02-26 エキシマレーザ用ミラー

Publications (2)

Publication Number Publication Date
DE3886067D1 true DE3886067D1 (de) 1994-01-20
DE3886067T2 DE3886067T2 (de) 1994-06-30

Family

ID=12660757

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3886067T Expired - Fee Related DE3886067T2 (de) 1987-02-26 1988-02-25 Spiegel für Excimer-Laser und Excimer-Laservorrichtung unter Verwendung des Spiegels.

Country Status (4)

Country Link
US (1) US4856019A (de)
EP (1) EP0280299B1 (de)
JP (1) JP2629693B2 (de)
DE (1) DE3886067T2 (de)

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US6809421B1 (en) * 1996-12-02 2004-10-26 Kabushiki Kaisha Toshiba Multichip semiconductor device, chip therefor and method of formation thereof
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US6124912A (en) * 1997-06-09 2000-09-26 National Semiconductor Corporation Reflectance enhancing thin film stack in which pairs of dielectric layers are on a reflector and liquid crystal is on the dielectric layers
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US7006546B2 (en) * 2000-03-15 2006-02-28 Komatsu Ltd. Gas laser electrode, laser chamber employing the electrode, and gas laser device
GB2371562A (en) * 2001-01-26 2002-07-31 Gen Electric Co Plc Coated reflector for a lamp
DE10136507A1 (de) 2001-07-17 2003-04-03 Zeiss Carl Geometrischer Strahlteiler und Verfahren zu seiner Herstellung
DE10240598A1 (de) * 2002-08-27 2004-03-25 Carl Zeiss Smt Ag Optisches Abbildungssystem, insbesondere katadioptrisches Reduktionsobjektiv
DE10248707A1 (de) * 2002-10-18 2004-05-13 Tuilaser Ag Excimerlaser-Spiegel zur gezielten Reflexion unterschiedlicher Wellenlängen
JP2005017543A (ja) * 2003-06-25 2005-01-20 Nikon Corp 紫外線レーザ光用ミラー及び光学系及び投影露光装置
US7405808B2 (en) * 2003-12-19 2008-07-29 Carl Zeiss Smt Ag Optical system, in particular illumination system, of a microlithographic projection exposure apparatus
JP4785389B2 (ja) * 2005-02-10 2011-10-05 キヤノン株式会社 反射ミラー、露光装置及びデバイス製造方法
DE102006030757A1 (de) * 2005-07-18 2007-02-01 Carl Zeiss Smt Ag Polarisationsoptimiertes Beleuchtungssystem
JP2007156264A (ja) * 2005-12-07 2007-06-21 Ricoh Co Ltd 高精度耐熱性ミラー及びその製造方法
JP2007193060A (ja) * 2006-01-19 2007-08-02 Shimadzu Corp 固体レーザ用ミラー
JP5473200B2 (ja) * 2006-11-21 2014-04-16 村原 正隆 光学部品の接着方法および素子製作装置
DE102007054731A1 (de) * 2007-11-14 2009-05-20 Carl Zeiss Smt Ag Optisches Element zur Reflexion von UV-Strahlung, Herstellungsverfahren dafür und Projektionsbelichtungsanlage damit
DE102011054837A1 (de) 2011-10-26 2013-05-02 Carl Zeiss Laser Optics Gmbh Optisches Element
JP5962317B2 (ja) * 2012-08-07 2016-08-03 株式会社島津製作所 回折格子及び光パルス圧縮器
JP6149218B2 (ja) * 2013-06-19 2017-06-21 東海光学株式会社 誘電体多層膜の設計方法及び同方法で作製される光学素子
GB201400264D0 (en) * 2014-01-08 2014-02-26 Element Six Ltd Synthetic diamond optical mirrors
US9611999B2 (en) * 2014-07-21 2017-04-04 GE Lighting Solutions, LLC Reflecting apparatus including enhanced aluminum optical coatings
JPWO2017057233A1 (ja) * 2015-09-30 2018-07-19 株式会社ニコン 光学部材、チャンバ、及び光源装置
DE102018211499A1 (de) * 2018-07-11 2020-01-16 Carl Zeiss Smt Gmbh Reflektives optisches Element und Verfahren zum Herstellen eines reflektiven optischen Elements
DE102019120284A1 (de) * 2018-08-08 2020-02-13 Schott Ag Spiegel sowie Spiegelträger mit hohem Aspektverhältnis sowie Verfahren und Mittel zur Herstellung eines solchen Spiegelträgers
CN115373054A (zh) * 2021-05-21 2022-11-22 手持产品公司 为光学部件提供光学涂层的方法、设备和系统

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US4023119A (en) * 1976-04-29 1977-05-10 University Of Illinois Foundation Laser output coupler
NL7606693A (nl) * 1976-06-21 1977-12-23 Philips Nv Gasontladingslaser en weergmefinrichting voor het uitlezen van informatie voorzien van een dergelijke gasontladingslaser.
US4147409A (en) * 1976-11-22 1979-04-03 Optical Coating Laboratory, Inc. Laser reflector with reduced electric field intensity
US4189205A (en) * 1978-02-21 1980-02-19 Infrared Industries, Inc. Coated copper reflector
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JPS5689703A (en) * 1979-12-24 1981-07-21 Agency Of Ind Science & Technol Manufacture of reflecting mirror for high output laser
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JPS5987404A (ja) * 1982-11-12 1984-05-21 Hitachi Ltd レ−ザ装置用ミラ−
US4713824A (en) * 1983-02-11 1987-12-15 Allied Corporation Noble-metal overcoated, front-surface silver reflectors
SU1125589A1 (ru) * 1983-02-21 1984-11-23 Ленинградский Ордена Трудового Красного Знамени Институт Точной Механики И Оптики Антиотражательный интерференционный светофильтр
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US4710426A (en) * 1983-11-28 1987-12-01 Polaroid Corporation, Patent Dept. Solar radiation-control articles with protective overlayer
JPS60181704A (ja) * 1984-02-29 1985-09-17 Canon Inc 真空紫外用反射ミラー
JPS6113202A (ja) * 1984-06-29 1986-01-21 Nec Corp レ−ザミラ−
JPS61185986A (ja) * 1985-02-13 1986-08-19 Nec Corp レ−ザ用反射鏡
US4746202A (en) * 1985-07-11 1988-05-24 Coherent, Inc. Polarization preserving reflector and method
US4686684A (en) * 1985-08-09 1987-08-11 United Technologies Corporation Buried laser mirror with a multicomponent reflective interlayer
JPS62254105A (ja) * 1986-04-26 1987-11-05 Komatsu Ltd 反射鏡
JPS6363002A (ja) * 1986-09-04 1988-03-19 Nikon Corp レ−ザ用反射鏡

Also Published As

Publication number Publication date
US4856019A (en) 1989-08-08
EP0280299A2 (de) 1988-08-31
EP0280299A3 (en) 1989-07-26
JPS63208801A (ja) 1988-08-30
EP0280299B1 (de) 1993-12-08
JP2629693B2 (ja) 1997-07-09
DE3886067T2 (de) 1994-06-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee