JPS5689703A - Manufacture of reflecting mirror for high output laser - Google Patents
Manufacture of reflecting mirror for high output laserInfo
- Publication number
- JPS5689703A JPS5689703A JP16789179A JP16789179A JPS5689703A JP S5689703 A JPS5689703 A JP S5689703A JP 16789179 A JP16789179 A JP 16789179A JP 16789179 A JP16789179 A JP 16789179A JP S5689703 A JPS5689703 A JP S5689703A
- Authority
- JP
- Japan
- Prior art keywords
- sio
- refractive index
- reflecting mirror
- high output
- output laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Optical Filters (AREA)
- Lasers (AREA)
Abstract
PURPOSE: To obtain a reflecting mirror for high output laser by alternately laminating a higher refractive index oxide substance and a lower refractive index oxide substance on a quartz or calcium fluoride substrate by a vapor depositing method using electron beams or a sputtering method to form a multilayer film followed by heat treatment.
CONSTITUTION: Al2O3, HfO2 or ZrO2 as a higher refractive index substance and SiO2 as a lower refractive index substance are alternately laminated on quartz or CaF2 by a sputtering method or a vapor depositing method using electron beams to form a multilayer film. ≥23 Layers and ≥49 layers are superposed in case of HfO2- SiO2 or ZrO2-SiO2 and Al2O3-SiO2, respectively. The multilayer film is then heat treated at 450W600°C for 10W24hr. Thus, a reflecting mirror for high output laser, especially ultraviolet rays is obtd. by such a simple method as heating.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16789179A JPS5689703A (en) | 1979-12-24 | 1979-12-24 | Manufacture of reflecting mirror for high output laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16789179A JPS5689703A (en) | 1979-12-24 | 1979-12-24 | Manufacture of reflecting mirror for high output laser |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5689703A true JPS5689703A (en) | 1981-07-21 |
Family
ID=15857975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16789179A Pending JPS5689703A (en) | 1979-12-24 | 1979-12-24 | Manufacture of reflecting mirror for high output laser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5689703A (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60218601A (en) * | 1984-03-30 | 1985-11-01 | スペクトラ‐フイジツクス・インコーポレイテツド | Optical thin film interference coating with extremely narrowband for monowavelength laser |
JPS62198182A (en) * | 1986-02-25 | 1987-09-01 | Komatsu Ltd | Excimer laser |
JPS62240903A (en) * | 1986-04-14 | 1987-10-21 | Toshiba Glass Co Ltd | Multi-layered reflection mirror |
JPS63208801A (en) * | 1987-02-26 | 1988-08-30 | Matsushita Electric Ind Co Ltd | Mirror for excimer laser |
JPH01161301A (en) * | 1987-12-18 | 1989-06-26 | Toshiba Glass Co Ltd | Production of reflecting mirror of multilayered film |
US4948530A (en) * | 1988-09-26 | 1990-08-14 | Patent-Treuhand-Gesellschaft Fur Elektrische Gluhlampen M.B.H. | Method to make a reflective coating on high-pressure discharge lamps |
US5151819A (en) * | 1988-12-12 | 1992-09-29 | General Atomics | Barrier for scattering electromagnetic radiation |
JPH05283883A (en) * | 1992-04-01 | 1993-10-29 | Takuo Nakajima | Electromagnetic shield material |
WO1996031927A1 (en) * | 1995-04-07 | 1996-10-10 | Kabushiki Kaisha Toshiba | Ultraviolet laser and method of producing the same |
JP2010196168A (en) * | 2009-02-26 | 2010-09-09 | Corning Inc | WIDE-ANGLE HIGH REFLECTION MIRROR AT 193 nm |
JP2013044978A (en) * | 2011-08-25 | 2013-03-04 | Mitsubishi Cable Ind Ltd | Optical fiber structure for laser beam and method for manufacturing the same |
-
1979
- 1979-12-24 JP JP16789179A patent/JPS5689703A/en active Pending
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60218601A (en) * | 1984-03-30 | 1985-11-01 | スペクトラ‐フイジツクス・インコーポレイテツド | Optical thin film interference coating with extremely narrowband for monowavelength laser |
JPS62198182A (en) * | 1986-02-25 | 1987-09-01 | Komatsu Ltd | Excimer laser |
JPS62240903A (en) * | 1986-04-14 | 1987-10-21 | Toshiba Glass Co Ltd | Multi-layered reflection mirror |
JPS63208801A (en) * | 1987-02-26 | 1988-08-30 | Matsushita Electric Ind Co Ltd | Mirror for excimer laser |
JPH01161301A (en) * | 1987-12-18 | 1989-06-26 | Toshiba Glass Co Ltd | Production of reflecting mirror of multilayered film |
US4948530A (en) * | 1988-09-26 | 1990-08-14 | Patent-Treuhand-Gesellschaft Fur Elektrische Gluhlampen M.B.H. | Method to make a reflective coating on high-pressure discharge lamps |
US5151819A (en) * | 1988-12-12 | 1992-09-29 | General Atomics | Barrier for scattering electromagnetic radiation |
JPH05283883A (en) * | 1992-04-01 | 1993-10-29 | Takuo Nakajima | Electromagnetic shield material |
WO1996031927A1 (en) * | 1995-04-07 | 1996-10-10 | Kabushiki Kaisha Toshiba | Ultraviolet laser and method of producing the same |
US5694411A (en) * | 1995-04-07 | 1997-12-02 | Kabushiki Kaisha Toshiba | Ultraviolet range laser and method for manufacturing the same |
JP2010196168A (en) * | 2009-02-26 | 2010-09-09 | Corning Inc | WIDE-ANGLE HIGH REFLECTION MIRROR AT 193 nm |
JP2013044978A (en) * | 2011-08-25 | 2013-03-04 | Mitsubishi Cable Ind Ltd | Optical fiber structure for laser beam and method for manufacturing the same |
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