JPS5655910A - Production of optical multilayer film - Google Patents

Production of optical multilayer film

Info

Publication number
JPS5655910A
JPS5655910A JP13215279A JP13215279A JPS5655910A JP S5655910 A JPS5655910 A JP S5655910A JP 13215279 A JP13215279 A JP 13215279A JP 13215279 A JP13215279 A JP 13215279A JP S5655910 A JPS5655910 A JP S5655910A
Authority
JP
Japan
Prior art keywords
film
reactive
forming method
optical multilayer
multilayer film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13215279A
Other languages
Japanese (ja)
Other versions
JPH027042B2 (en
Inventor
Hiroki Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13215279A priority Critical patent/JPS5655910A/en
Publication of JPS5655910A publication Critical patent/JPS5655910A/en
Publication of JPH027042B2 publication Critical patent/JPH027042B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal

Abstract

PURPOSE: To produce optical multilayer film at low costs by repeating the process of forming a semiconductor film or metal film on a substrate and the process of oxidizing or nitriding this film.
CONSTITUTION: A semiconductor film of Si etc. or a metal film of Ti, Cr, etc. is formed on a substrate 2 of glass etc. by a vapor deposition film forming method, thence an O2 gas of oxide of reactive zero atmosphere is admitted to these films to form the film of oxide such as SiO2 etc. by a reactive film forming method. Or an N2 gas of nitride of reactive atmosphere is admitted to form the film of nitride such as Si3N4. In this way, the optical multilayer film material is formed with one kind of material by repeating an ordinary film forming method and a reactive film forming method in periodically changing atmospheres.
COPYRIGHT: (C)1981,JPO&Japio
JP13215279A 1979-10-13 1979-10-13 Production of optical multilayer film Granted JPS5655910A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13215279A JPS5655910A (en) 1979-10-13 1979-10-13 Production of optical multilayer film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13215279A JPS5655910A (en) 1979-10-13 1979-10-13 Production of optical multilayer film

Publications (2)

Publication Number Publication Date
JPS5655910A true JPS5655910A (en) 1981-05-16
JPH027042B2 JPH027042B2 (en) 1990-02-15

Family

ID=15074567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13215279A Granted JPS5655910A (en) 1979-10-13 1979-10-13 Production of optical multilayer film

Country Status (1)

Country Link
JP (1) JPS5655910A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127003A (en) * 1983-01-12 1984-07-21 Oki Electric Ind Co Ltd Optical attenuator
JPS60186804A (en) * 1984-03-06 1985-09-24 Hisanori Bando Film having periodic multi-layered structure
JPS61219004A (en) * 1985-03-25 1986-09-29 Canon Inc Multilayer film reflecting mirror
JP2007206136A (en) * 2006-01-31 2007-08-16 Canon Electronics Inc Nd filter, manufacturing method therefor and light quantity control diaphragm

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326147A (en) * 1976-08-20 1978-03-10 Siemens Ag Filter for light detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326147A (en) * 1976-08-20 1978-03-10 Siemens Ag Filter for light detector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127003A (en) * 1983-01-12 1984-07-21 Oki Electric Ind Co Ltd Optical attenuator
JPS60186804A (en) * 1984-03-06 1985-09-24 Hisanori Bando Film having periodic multi-layered structure
JPH0441670B2 (en) * 1984-03-06 1992-07-09 Hisanori Bando
JPS61219004A (en) * 1985-03-25 1986-09-29 Canon Inc Multilayer film reflecting mirror
JP2007206136A (en) * 2006-01-31 2007-08-16 Canon Electronics Inc Nd filter, manufacturing method therefor and light quantity control diaphragm

Also Published As

Publication number Publication date
JPH027042B2 (en) 1990-02-15

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