JPS5436179A - Forming method of nitride film - Google Patents
Forming method of nitride filmInfo
- Publication number
- JPS5436179A JPS5436179A JP10170077A JP10170077A JPS5436179A JP S5436179 A JPS5436179 A JP S5436179A JP 10170077 A JP10170077 A JP 10170077A JP 10170077 A JP10170077 A JP 10170077A JP S5436179 A JPS5436179 A JP S5436179A
- Authority
- JP
- Japan
- Prior art keywords
- nitride film
- forming method
- reproducibility
- manufacture
- active
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To manufacture Si3N4 having the growing speed with reproducibility and refractive index, by reacting SiH4 with active N2 on the substrate heated more than 150°C.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10170077A JPS5436179A (en) | 1977-08-26 | 1977-08-26 | Forming method of nitride film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10170077A JPS5436179A (en) | 1977-08-26 | 1977-08-26 | Forming method of nitride film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5436179A true JPS5436179A (en) | 1979-03-16 |
Family
ID=14307587
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10170077A Pending JPS5436179A (en) | 1977-08-26 | 1977-08-26 | Forming method of nitride film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5436179A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125635A (en) * | 1979-03-23 | 1980-09-27 | Hitachi Ltd | Semiconductor device |
JPS609180A (en) * | 1983-06-13 | 1985-01-18 | アメリカン・テレフオン・アンド・テレグラフ・カムパニ− | Method of producing semiconductor photodetector |
EP0587500A1 (en) * | 1992-09-11 | 1994-03-16 | France Telecom | Fabrication method of striped electro-optical devices, especially lagers and devices made like-wise |
-
1977
- 1977-08-26 JP JP10170077A patent/JPS5436179A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125635A (en) * | 1979-03-23 | 1980-09-27 | Hitachi Ltd | Semiconductor device |
JPS609180A (en) * | 1983-06-13 | 1985-01-18 | アメリカン・テレフオン・アンド・テレグラフ・カムパニ− | Method of producing semiconductor photodetector |
JPH0586874B2 (en) * | 1983-06-13 | 1993-12-14 | American Telephone & Telegraph | |
EP0587500A1 (en) * | 1992-09-11 | 1994-03-16 | France Telecom | Fabrication method of striped electro-optical devices, especially lagers and devices made like-wise |
FR2695761A1 (en) * | 1992-09-11 | 1994-03-18 | Loualiche Slimane | Method for manufacturing electro-optical ribbon devices, in particular lasers, and devices thus obtained. |
US5511088A (en) * | 1992-09-11 | 1996-04-23 | France Telecom | Process for fabricating strip optoelectronic devices, particularly lasers, and devices obtained |
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