JPS5298473A - Thin film material - Google Patents

Thin film material

Info

Publication number
JPS5298473A
JPS5298473A JP1402776A JP1402776A JPS5298473A JP S5298473 A JPS5298473 A JP S5298473A JP 1402776 A JP1402776 A JP 1402776A JP 1402776 A JP1402776 A JP 1402776A JP S5298473 A JPS5298473 A JP S5298473A
Authority
JP
Japan
Prior art keywords
thin film
film material
content
relation
selecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1402776A
Other languages
Japanese (ja)
Other versions
JPS552731B2 (en
Inventor
Yoichi Tamaoki
Seiichi Isomae
Masahiko Kogirima
Akira Shintani
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1402776A priority Critical patent/JPS5298473A/en
Priority to NLAANVRAGE7613799,A priority patent/NL171942C/en
Priority to US05/756,863 priority patent/US4126880A/en
Priority to DE2705902A priority patent/DE2705902C3/en
Publication of JPS5298473A publication Critical patent/JPS5298473A/en
Publication of JPS552731B2 publication Critical patent/JPS552731B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To produce a thin film of small intrinsic stress yet having chemical properties close to those of Si3 N4 by selecting the content of Ge in a nitride film as specified in relation to the content of Si.
COPYRIGHT: (C)1977,JPO&Japio
JP1402776A 1976-02-13 1976-02-13 Thin film material Granted JPS5298473A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1402776A JPS5298473A (en) 1976-02-13 1976-02-13 Thin film material
NLAANVRAGE7613799,A NL171942C (en) 1976-02-13 1976-12-10 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE APPLICATING A SEMICON AND GERMANIUM NITRIDES ON A SEMICONDUCTOR BODY
US05/756,863 US4126880A (en) 1976-02-13 1977-01-04 Germanium-containing silicon nitride film
DE2705902A DE2705902C3 (en) 1976-02-13 1977-02-11 Germanium-containing silicon nitride film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1402776A JPS5298473A (en) 1976-02-13 1976-02-13 Thin film material

Publications (2)

Publication Number Publication Date
JPS5298473A true JPS5298473A (en) 1977-08-18
JPS552731B2 JPS552731B2 (en) 1980-01-22

Family

ID=11849675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1402776A Granted JPS5298473A (en) 1976-02-13 1976-02-13 Thin film material

Country Status (1)

Country Link
JP (1) JPS5298473A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56175162U (en) * 1980-05-27 1981-12-24
JP2006013503A (en) * 2004-06-29 2006-01-12 Internatl Business Mach Corp <Ibm> Doped nitride film, doped oxide film, and other doped films

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068085A (en) * 1973-10-17 1975-06-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068085A (en) * 1973-10-17 1975-06-07

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56175162U (en) * 1980-05-27 1981-12-24
JPS6121165Y2 (en) * 1980-05-27 1986-06-25
JP2006013503A (en) * 2004-06-29 2006-01-12 Internatl Business Mach Corp <Ibm> Doped nitride film, doped oxide film, and other doped films

Also Published As

Publication number Publication date
JPS552731B2 (en) 1980-01-22

Similar Documents

Publication Publication Date Title
JPS5298473A (en) Thin film material
JPS5286441A (en) Halogen-containing vinyl resin composition
JPS5386021A (en) Cockroach repellent
JPS51136288A (en) Photo etching using non-crystalline carchogenide glass thin film
JPS51122682A (en) Process for producing water repellent
JPS5325700A (en) Semiconductive polymer material
JPS5346222A (en) Solid state pick up unit
JPS52105866A (en) Timepiece dial
JPS533203A (en) Magnetic film
JPS5230840A (en) Adhesive tape
JPS53139211A (en) Manufacturing of light alloy blade
JPS5380160A (en) Manufacture of substrate for semiconductor device
JPS5359032A (en) Repellents to termite for soil application
JPS5295636A (en) Preparation of oxime derivatives
JPS5418670A (en) Manufacture of semiconductor device
JPS53133377A (en) Manufacture of schottky diode
JPS5352154A (en) Preparation of watch cover glass
JPS5332251A (en) Bush
JPS5287374A (en) Soi type semiconductor device
JPS52124031A (en) Adhesives
JPS52136093A (en) Automatic pachinko apparatus
JPS5273811A (en) Formaldehyde composition
JPS5374546A (en) Latex composition
JPS5349943A (en) Impurity diffusion method
JPS52119862A (en) Semi-conductor device and its manufacture