JPS5298473A - Thin film material - Google Patents
Thin film materialInfo
- Publication number
- JPS5298473A JPS5298473A JP1402776A JP1402776A JPS5298473A JP S5298473 A JPS5298473 A JP S5298473A JP 1402776 A JP1402776 A JP 1402776A JP 1402776 A JP1402776 A JP 1402776A JP S5298473 A JPS5298473 A JP S5298473A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film material
- content
- relation
- selecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To produce a thin film of small intrinsic stress yet having chemical properties close to those of Si3 N4 by selecting the content of Ge in a nitride film as specified in relation to the content of Si.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1402776A JPS5298473A (en) | 1976-02-13 | 1976-02-13 | Thin film material |
NLAANVRAGE7613799,A NL171942C (en) | 1976-02-13 | 1976-12-10 | METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE APPLICATING A SEMICON AND GERMANIUM NITRIDES ON A SEMICONDUCTOR BODY |
US05/756,863 US4126880A (en) | 1976-02-13 | 1977-01-04 | Germanium-containing silicon nitride film |
DE2705902A DE2705902C3 (en) | 1976-02-13 | 1977-02-11 | Germanium-containing silicon nitride film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1402776A JPS5298473A (en) | 1976-02-13 | 1976-02-13 | Thin film material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5298473A true JPS5298473A (en) | 1977-08-18 |
JPS552731B2 JPS552731B2 (en) | 1980-01-22 |
Family
ID=11849675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1402776A Granted JPS5298473A (en) | 1976-02-13 | 1976-02-13 | Thin film material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5298473A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56175162U (en) * | 1980-05-27 | 1981-12-24 | ||
JP2006013503A (en) * | 2004-06-29 | 2006-01-12 | Internatl Business Mach Corp <Ibm> | Doped nitride film, doped oxide film, and other doped films |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5068085A (en) * | 1973-10-17 | 1975-06-07 |
-
1976
- 1976-02-13 JP JP1402776A patent/JPS5298473A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5068085A (en) * | 1973-10-17 | 1975-06-07 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56175162U (en) * | 1980-05-27 | 1981-12-24 | ||
JPS6121165Y2 (en) * | 1980-05-27 | 1986-06-25 | ||
JP2006013503A (en) * | 2004-06-29 | 2006-01-12 | Internatl Business Mach Corp <Ibm> | Doped nitride film, doped oxide film, and other doped films |
Also Published As
Publication number | Publication date |
---|---|
JPS552731B2 (en) | 1980-01-22 |
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