JPS5438785A - Production of coating film of photoelectric transducers - Google Patents
Production of coating film of photoelectric transducersInfo
- Publication number
- JPS5438785A JPS5438785A JP10418477A JP10418477A JPS5438785A JP S5438785 A JPS5438785 A JP S5438785A JP 10418477 A JP10418477 A JP 10418477A JP 10418477 A JP10418477 A JP 10418477A JP S5438785 A JPS5438785 A JP S5438785A
- Authority
- JP
- Japan
- Prior art keywords
- production
- coating film
- photoelectric transducers
- transducers
- photoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To obtain coating films which are even and have a desired refractive index in a low vacuum by depositing and forming silicon nitride films on photoelectric transducers through chemical reaction.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10418477A JPS5438785A (en) | 1977-09-01 | 1977-09-01 | Production of coating film of photoelectric transducers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10418477A JPS5438785A (en) | 1977-09-01 | 1977-09-01 | Production of coating film of photoelectric transducers |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5438785A true JPS5438785A (en) | 1979-03-23 |
Family
ID=14373902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10418477A Pending JPS5438785A (en) | 1977-09-01 | 1977-09-01 | Production of coating film of photoelectric transducers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5438785A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03250626A (en) * | 1990-01-30 | 1991-11-08 | Mitsubishi Electric Corp | Forming method for thin film |
-
1977
- 1977-09-01 JP JP10418477A patent/JPS5438785A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03250626A (en) * | 1990-01-30 | 1991-11-08 | Mitsubishi Electric Corp | Forming method for thin film |
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