JPS6462458A - Thin titanium oxide film - Google Patents

Thin titanium oxide film

Info

Publication number
JPS6462458A
JPS6462458A JP62217068A JP21706887A JPS6462458A JP S6462458 A JPS6462458 A JP S6462458A JP 62217068 A JP62217068 A JP 62217068A JP 21706887 A JP21706887 A JP 21706887A JP S6462458 A JPS6462458 A JP S6462458A
Authority
JP
Japan
Prior art keywords
thin
films
tio2
film
mgf2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62217068A
Other languages
Japanese (ja)
Other versions
JP2530461B2 (en
Inventor
Takeshi Tsukada
Toshisada Sekiguchi
Takashi Hasunuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Precision Corp
Original Assignee
Nidec Copal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Copal Corp filed Critical Nidec Copal Corp
Priority to JP62217068A priority Critical patent/JP2530461B2/en
Publication of JPS6462458A publication Critical patent/JPS6462458A/en
Application granted granted Critical
Publication of JP2530461B2 publication Critical patent/JP2530461B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Optical Filters (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

PURPOSE:To enable the formation of a thin optical multilayered film by forming thin TiO2 films so that each of the films has internal compressive stress and by combining the films with other thin films each having tensile stress. CONSTITUTION:A thin TiO2 film 8 having internal compressive stress is formed on a substrate 4 with an evaporating source 2 for TiO2 and an ion gun 5 at >=about 20muA/cm<2> density of O<+> ion beams. The TiO2 film 8 is dense and has high flatness. A thin film 9 of MgF2, etc., having tensile stress as internal stress is then formed with an evaporating source for MgF2, etc., without driving the ion gun 5. A polarized beam splitter (PBS), etc., made of a thin multilayered optical film can be formed by alternately laminating thin TiO2 films 8 and thin MgF2 films 9. The splitter is mechanically stable and has superior optical characteristics.
JP62217068A 1987-08-31 1987-08-31 Optical multilayer thin film Expired - Fee Related JP2530461B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62217068A JP2530461B2 (en) 1987-08-31 1987-08-31 Optical multilayer thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62217068A JP2530461B2 (en) 1987-08-31 1987-08-31 Optical multilayer thin film

Publications (2)

Publication Number Publication Date
JPS6462458A true JPS6462458A (en) 1989-03-08
JP2530461B2 JP2530461B2 (en) 1996-09-04

Family

ID=16698331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62217068A Expired - Fee Related JP2530461B2 (en) 1987-08-31 1987-08-31 Optical multilayer thin film

Country Status (1)

Country Link
JP (1) JP2530461B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108998760A (en) * 2018-08-14 2018-12-14 苏州安洁科技股份有限公司 A kind of technique of low temperature plating magnesium fluoride film
JP2020064257A (en) * 2018-10-19 2020-04-23 キヤノン電子株式会社 Optical filter, light amount adjustment device, and imaging apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4939059B2 (en) * 2006-01-06 2012-05-23 キヤノン株式会社 Optical multilayer film and method for forming the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565358A (en) * 1978-11-10 1980-05-16 Nippon Kogaku Kk <Nikon> Forming method for titanium dioxide by normal temperature reaction evaporation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565358A (en) * 1978-11-10 1980-05-16 Nippon Kogaku Kk <Nikon> Forming method for titanium dioxide by normal temperature reaction evaporation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108998760A (en) * 2018-08-14 2018-12-14 苏州安洁科技股份有限公司 A kind of technique of low temperature plating magnesium fluoride film
JP2020064257A (en) * 2018-10-19 2020-04-23 キヤノン電子株式会社 Optical filter, light amount adjustment device, and imaging apparatus

Also Published As

Publication number Publication date
JP2530461B2 (en) 1996-09-04

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

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LAPS Cancellation because of no payment of annual fees