DE3650362T2 - Photoelektrische Umwandlungsvorrichtung mit hoher Ansprechgeschwindigkeit und Herstellungsverfahren. - Google Patents

Photoelektrische Umwandlungsvorrichtung mit hoher Ansprechgeschwindigkeit und Herstellungsverfahren.

Info

Publication number
DE3650362T2
DE3650362T2 DE3650362T DE3650362T DE3650362T2 DE 3650362 T2 DE3650362 T2 DE 3650362T2 DE 3650362 T DE3650362 T DE 3650362T DE 3650362 T DE3650362 T DE 3650362T DE 3650362 T2 DE3650362 T2 DE 3650362T2
Authority
DE
Germany
Prior art keywords
manufacturing
photoelectric conversion
conversion device
response photoelectric
response
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3650362T
Other languages
English (en)
Other versions
DE3650362D1 (de
Inventor
Shunpei Yamazaki
Akira Mase
Toshiji Hamatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61001009A external-priority patent/JPS62158362A/ja
Priority claimed from JP61001008A external-priority patent/JPS62158371A/ja
Priority claimed from JP61073746A external-priority patent/JP2639645B2/ja
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Publication of DE3650362D1 publication Critical patent/DE3650362D1/de
Application granted granted Critical
Publication of DE3650362T2 publication Critical patent/DE3650362T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
    • H01L31/1055—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type the devices comprising amorphous materials of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
DE3650362T 1986-01-06 1986-12-30 Photoelektrische Umwandlungsvorrichtung mit hoher Ansprechgeschwindigkeit und Herstellungsverfahren. Expired - Fee Related DE3650362T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61001009A JPS62158362A (ja) 1986-01-06 1986-01-06 光電変換装置の作成方法
JP61001008A JPS62158371A (ja) 1986-01-06 1986-01-06 光電変換装置
JP61073746A JP2639645B2 (ja) 1986-03-31 1986-03-31 光電変換装置の作成方法

Publications (2)

Publication Number Publication Date
DE3650362D1 DE3650362D1 (de) 1995-09-14
DE3650362T2 true DE3650362T2 (de) 1996-01-25

Family

ID=27274719

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3650362T Expired - Fee Related DE3650362T2 (de) 1986-01-06 1986-12-30 Photoelektrische Umwandlungsvorrichtung mit hoher Ansprechgeschwindigkeit und Herstellungsverfahren.

Country Status (5)

Country Link
US (3) US4999693A (de)
EP (1) EP0228712B1 (de)
KR (1) KR910001194B1 (de)
CN (1) CN1008784B (de)
DE (1) DE3650362T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0393206B1 (de) * 1988-10-14 1996-05-08 Matsushita Electric Industrial Co., Ltd. Bildsensor und verfahren zu dessen herstellung
US5266828A (en) * 1988-10-14 1993-11-30 Matsushita Electric Industrial Co., Ltd. Image sensors with an optical fiber array
JP2508851B2 (ja) * 1989-08-23 1996-06-19 日本電気株式会社 液晶表示素子用アクティブマトリクス基板とその製造方法
JPH03156980A (ja) * 1989-11-14 1991-07-04 Sumitomo Electric Ind Ltd 受光素子
JP3210657B2 (ja) * 1989-11-27 2001-09-17 株式会社日立製作所 ヘテロ接合バイポーラトランジスタ
US5187121A (en) * 1991-12-18 1993-02-16 International Business Machines Corporation Process for fabrication of a semiconductor structure and contact stud
US5449924A (en) * 1993-01-28 1995-09-12 Goldstar Electron Co., Ltd. Photodiode having a Schottky barrier formed on the lower metallic electrode
FR2701602B1 (fr) * 1993-02-12 1995-03-31 Thomson Csf Détecteur thermique comprenant un isolant thermique en polymère expansé.
US5470761A (en) * 1993-09-13 1995-11-28 Westinghouse Electric Corporation Process for fabricating a front surface resonant mesh array detector
US5626773A (en) * 1995-01-03 1997-05-06 Texas Instruments Incorporated Structure and method including dry etching techniques for forming an array of thermal sensitive elements
US6287888B1 (en) 1997-12-26 2001-09-11 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and process for producing photoelectric conversion device
JP2005032793A (ja) * 2003-07-08 2005-02-03 Matsushita Electric Ind Co Ltd 有機光電変換素子
JP4905762B2 (ja) 2005-08-23 2012-03-28 富士フイルム株式会社 光電変換素子、撮像素子、および該光電変換素子の製造方法
US8749483B2 (en) * 2007-02-15 2014-06-10 Pixart Imaging Inc. Control device and control method for image display
WO2012005205A1 (ja) * 2010-07-05 2012-01-12 Dic株式会社 透明導電層付き基体及びその製造方法、並びにタッチパネル用透明導電膜積層体、タッチパネル

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5137155B2 (de) * 1973-03-12 1976-10-14
US3955082A (en) * 1974-09-19 1976-05-04 Northern Electric Company Limited Photodiode detector with selective frequency response
US4062038A (en) * 1976-01-28 1977-12-06 International Business Machines Corporation Radiation responsive device
US4281208A (en) * 1979-02-09 1981-07-28 Sanyo Electric Co., Ltd. Photovoltaic device and method of manufacturing thereof
US4316049A (en) * 1979-08-28 1982-02-16 Rca Corporation High voltage series connected tandem junction solar battery
JPS56136076A (en) * 1980-03-26 1981-10-23 Hitachi Ltd Photoelectric converter
US4405915A (en) * 1980-03-28 1983-09-20 Canon Kabushiki Kaisha Photoelectric transducing element
JPS56165371A (en) * 1980-05-26 1981-12-18 Shunpei Yamazaki Semiconductor device
US4292092A (en) * 1980-06-02 1981-09-29 Rca Corporation Laser processing technique for fabricating series-connected and tandem junction series-connected solar cells into a solar battery
JPS5715476A (en) * 1980-07-02 1982-01-26 Canon Inc Photosensor
US4567374A (en) * 1980-12-10 1986-01-28 Fuji Xerox Co., Ltd. Photoelectric converting device with a plurality of divided electrodes
JPS57106083A (en) * 1980-12-23 1982-07-01 Toshiba Corp Amorphous silicon diode array
JPS57211787A (en) * 1981-06-24 1982-12-25 Hitachi Ltd Amorphous silicon diode
US4591892A (en) * 1982-08-24 1986-05-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor photoelectric conversion device
JPS5943568A (ja) * 1982-09-02 1984-03-10 Canon Inc フオトセンサアレイ
JPS5980964A (ja) * 1982-11-01 1984-05-10 Toshiba Corp 光電変換素子
US4677742A (en) * 1983-01-18 1987-07-07 Energy Conversion Devices, Inc. Electronic matrix arrays and method for making the same
JPH0614552B2 (ja) * 1983-02-02 1994-02-23 富士ゼロックス株式会社 光電変換素子の製造方法
JPS59147469A (ja) * 1983-02-14 1984-08-23 Hitachi Ltd 非晶質シリコン太陽電池
DE3478779D1 (en) * 1983-02-15 1989-07-27 Sharp Kk Two-dimensional image readout device
JPS59172274A (ja) * 1983-03-18 1984-09-28 Sanyo Electric Co Ltd 光起電力装置の製造方法
JPS6045057A (ja) * 1983-08-23 1985-03-11 Toshiba Corp 固体撮像装置の製造方法
JPS6047473A (ja) * 1983-08-26 1985-03-14 Hitachi Ltd アモルフアスシリコン光センサ
DE3546717C2 (de) * 1984-06-21 1993-06-03 Kyocera Corp., Kyoto, Jp
JPS617624A (ja) * 1984-06-22 1986-01-14 Fuji Xerox Co Ltd 密着型イメージセンサ
JPH0673372B2 (ja) * 1985-06-24 1994-09-14 三菱電機株式会社 光読み取り装置及びその製造方法
FR2586327B1 (fr) * 1985-08-14 1987-11-20 Thomson Csf Procede de fabrication d'un detecteur d'image lumineuse et detecteur lineaire d'images obtenu par ce procede
DE3650363T2 (de) * 1986-01-06 1996-01-25 Semiconductor Energy Lab Photoelektrische Umwandlungsvorrichtung und ihr Herstellungsverfahren.
US4806496A (en) * 1986-01-29 1989-02-21 Semiconductor Energy Laboratory Co. Ltd. Method for manufacturing photoelectric conversion devices
US4678542A (en) * 1986-07-25 1987-07-07 Energy Conversion Devices, Inc. Self-alignment process for thin film diode array fabrication
US4711857A (en) * 1986-08-28 1987-12-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Tailorable infrared sensing device with strain layer superlattice structure

Also Published As

Publication number Publication date
EP0228712B1 (de) 1995-08-09
CN87100058A (zh) 1987-07-22
KR870007575A (ko) 1987-08-20
US4999693A (en) 1991-03-12
US5039620A (en) 1991-08-13
CN1008784B (zh) 1990-07-11
EP0228712A3 (en) 1989-01-25
DE3650362D1 (de) 1995-09-14
KR910001194B1 (ko) 1991-02-25
US5164322A (en) 1992-11-17
EP0228712A2 (de) 1987-07-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee