DE3000121A1 - Verfahren zur herstellung einer mos-halbleitereinrichtung mit selbstjustierten anschluessen - Google Patents

Verfahren zur herstellung einer mos-halbleitereinrichtung mit selbstjustierten anschluessen

Info

Publication number
DE3000121A1
DE3000121A1 DE19803000121 DE3000121A DE3000121A1 DE 3000121 A1 DE3000121 A1 DE 3000121A1 DE 19803000121 DE19803000121 DE 19803000121 DE 3000121 A DE3000121 A DE 3000121A DE 3000121 A1 DE3000121 A1 DE 3000121A1
Authority
DE
Germany
Prior art keywords
layer
gate electrode
source
drain regions
dielectric material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19803000121
Other languages
German (de)
English (en)
Inventor
Tarsaim Lal Batra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
American Microsystems Holding Corp
Original Assignee
American Microsystems Holding Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Microsystems Holding Corp filed Critical American Microsystems Holding Corp
Publication of DE3000121A1 publication Critical patent/DE3000121A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H01L21/76213—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO introducing electrical inactive or active impurities in the local oxidation region, e.g. to alter LOCOS oxide growth characteristics or for additional isolation purpose
    • H01L21/76216—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO introducing electrical inactive or active impurities in the local oxidation region, e.g. to alter LOCOS oxide growth characteristics or for additional isolation purpose introducing electrical active impurities in the local oxidation region for the sole purpose of creating channel stoppers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
DE19803000121 1979-01-08 1980-01-03 Verfahren zur herstellung einer mos-halbleitereinrichtung mit selbstjustierten anschluessen Withdrawn DE3000121A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US184079A 1979-01-08 1979-01-08

Publications (1)

Publication Number Publication Date
DE3000121A1 true DE3000121A1 (de) 1980-07-17

Family

ID=21698078

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19803000121 Withdrawn DE3000121A1 (de) 1979-01-08 1980-01-03 Verfahren zur herstellung einer mos-halbleitereinrichtung mit selbstjustierten anschluessen

Country Status (7)

Country Link
JP (1) JPS5593271A (enExample)
CA (1) CA1131796A (enExample)
DE (1) DE3000121A1 (enExample)
FR (1) FR2446011A1 (enExample)
GB (1) GB2040564A (enExample)
IT (1) IT8019078A0 (enExample)
NL (1) NL7908534A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0046857A3 (en) * 1980-08-29 1982-09-08 International Business Machines Corporation Borderless diffusion contact structure and method of making such structure

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4506437A (en) * 1978-05-26 1985-03-26 Rockwell International Corporation Process for and structure of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines
US4455737A (en) * 1978-05-26 1984-06-26 Rockwell International Corporation Process for and structure of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines
US4341009A (en) * 1980-12-05 1982-07-27 International Business Machines Corporation Method for making an electrical contact to a silicon substrate through a relatively thin layer of silicon dioxide on the surface of the substrate
JPS57113289A (en) * 1980-12-30 1982-07-14 Fujitsu Ltd Semiconductor device and its manufacture
US4517729A (en) * 1981-07-27 1985-05-21 American Microsystems, Incorporated Method for fabricating MOS device with self-aligned contacts
US4686000A (en) * 1985-04-02 1987-08-11 Heath Barbara A Self-aligned contact process
JPS63207171A (ja) * 1987-02-24 1988-08-26 Nippon Telegr & Teleph Corp <Ntt> 半導体メモリ装置及びその製造方法
US5159353A (en) * 1991-07-02 1992-10-27 Hewlett-Packard Company Thermal inkjet printhead structure and method for making the same
KR100377833B1 (ko) * 2001-06-19 2003-03-29 삼성전자주식회사 보더리스 콘택 구조를 갖는 반도체 장치 및 그 제조방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0046857A3 (en) * 1980-08-29 1982-09-08 International Business Machines Corporation Borderless diffusion contact structure and method of making such structure

Also Published As

Publication number Publication date
FR2446011A1 (fr) 1980-08-01
IT8019078A0 (it) 1980-01-08
JPS5593271A (en) 1980-07-15
GB2040564A (en) 1980-08-28
FR2446011B3 (enExample) 1981-11-06
CA1131796A (en) 1982-09-14
NL7908534A (nl) 1980-07-10

Similar Documents

Publication Publication Date Title
DE69307216T2 (de) Verfahren für DMOS-Transistor mit Grabenstruktur unter Verwendung von sechs Masken
DE69029595T2 (de) Halbleiterbauelemente mit einem Wolframkontakt und sein Herstellungsverfahren
DE1764056C2 (de) Verfahren zum Herstellen einer Halbleiteranordnung
EP0049392A2 (de) Verfahren zum Herstellen einer monolithisch integrierten Zwei-Transistor-Speicherzelle in MOS-Technik
DE3334333A1 (de) Verfahren zur herstellung eines mos-einrichtung mit selbstjustierten kontakten
DE3229250A1 (de) Halbleitervorrichtung mit isoliertem gate und verfahren zu ihrer herstellung
DE2153103A1 (de) Integrierte Schaltungsanordnung und Verfahren zur Herstellung derselben
DE3311635A1 (de) Halbleiterbauelement und verfahren zu dessen herstellung
DE3525396A1 (de) Vertical mosfet und verfahren zu seiner herstellung
DE2928923C2 (enExample)
DE2915024C2 (de) Verfahren zum Herstellen eines MOS-Transistors
DE4007582C2 (de) Verfahren zum Herstellen von mindestens zwei Kontakten in einem Halbleiterbauelement
DE10236682A1 (de) Halbleitervorrichtung
DE2726003A1 (de) Verfahren zur herstellung von mis- bauelementen mit versetztem gate
DE3024084A1 (de) Verfahren zur herstellung von halbleiterbauelementen
DE19501557A1 (de) Halbleitervorrichtung und Verfahren zu deren Herstellung
DE2921010A1 (de) Verfahren zur herstellung von sowie strukturen fuer vlsi-schaltungen mit hoher dichte
DE2922015A1 (de) Verfahren zur herstellung einer vlsi-schaltung
DE3030385A1 (de) Mos-halbleitervorrichtung und verfahren zur herstellung derselben
DE2922016A1 (de) Vlsi-schaltungen
DE2365056A1 (de) Verfahren zur herstellung von halbleitereinrichtungen unter oertlicher oxidation einer silicium-oberflaeche
DE19542606C2 (de) MIS-Transistor mit einem Dreischicht-Einrichtungsisolationsfilm und Herstellungsverfahren
DE69032074T2 (de) Verfahren zur Herstellung eines Halbleiterbauteils
DE3000121A1 (de) Verfahren zur herstellung einer mos-halbleitereinrichtung mit selbstjustierten anschluessen
DE4130890A1 (de) Verfahren zur herstellung eines kondensators unter verwendung des feldeffekttransistor-prozesses und mit hilfe des verfahrens hergestellte struktur

Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee