DE19581540T1 - Hochgeschwindigkeits-Testmusterübertragungsvorrichtung für eine Halbleiterspeichervorrichtung - Google Patents

Hochgeschwindigkeits-Testmusterübertragungsvorrichtung für eine Halbleiterspeichervorrichtung

Info

Publication number
DE19581540T1
DE19581540T1 DE19581540T DE19581540T DE19581540T1 DE 19581540 T1 DE19581540 T1 DE 19581540T1 DE 19581540 T DE19581540 T DE 19581540T DE 19581540 T DE19581540 T DE 19581540T DE 19581540 T1 DE19581540 T1 DE 19581540T1
Authority
DE
Germany
Prior art keywords
semiconductor memory
test pattern
pattern transfer
speed test
memory device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19581540T
Other languages
English (en)
Other versions
DE19581540C2 (de
Inventor
Yoshiaki Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of DE19581540T1 publication Critical patent/DE19581540T1/de
Application granted granted Critical
Publication of DE19581540C2 publication Critical patent/DE19581540C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31724—Test controller, e.g. BIST state machine

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Test And Diagnosis Of Digital Computers (AREA)
DE19581540T 1994-12-28 1995-12-26 Hochgeschwindigkeits- Testmusterübertragungsvorrichtung für eine Halbleitertestvorrichtung Expired - Fee Related DE19581540C2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6338918A JPH08184648A (ja) 1994-12-28 1994-12-28 半導体試験装置用テストパターンの高速転送装置
PCT/JP1995/002692 WO1996020409A1 (fr) 1994-12-28 1995-12-26 Dispositif de transfert grande vitesse de gabarits d'essai pour l'essai des semi-conducteurs

Publications (2)

Publication Number Publication Date
DE19581540T1 true DE19581540T1 (de) 1997-12-11
DE19581540C2 DE19581540C2 (de) 2003-08-14

Family

ID=18322562

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19581540T Expired - Fee Related DE19581540C2 (de) 1994-12-28 1995-12-26 Hochgeschwindigkeits- Testmusterübertragungsvorrichtung für eine Halbleitertestvorrichtung

Country Status (4)

Country Link
US (1) US5796753A (de)
JP (1) JPH08184648A (de)
DE (1) DE19581540C2 (de)
WO (1) WO1996020409A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5951705A (en) * 1997-10-31 1999-09-14 Credence Systems Corporation Integrated circuit tester having pattern generator controlled data bus
JP2000046916A (ja) * 1998-07-30 2000-02-18 Ando Electric Co Ltd パタンデータ転送回路
JP2007285737A (ja) * 2006-04-13 2007-11-01 Yokogawa Electric Corp 半導体検査装置
JP2009080074A (ja) * 2007-09-27 2009-04-16 Yokogawa Electric Corp 半導体検査装置
US8706439B2 (en) 2009-12-27 2014-04-22 Advantest Corporation Test apparatus and test method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6030973B2 (ja) * 1980-01-18 1985-07-19 日本電気株式会社 高速パタ−ン発生器
JPS6159558A (ja) * 1984-08-30 1986-03-27 Fujitsu Ltd Ｄｍａ診断方式
US4604744A (en) * 1984-10-01 1986-08-05 Motorola Inc. Automated circuit tester
US4816750A (en) * 1987-01-16 1989-03-28 Teradyne, Inc. Automatic circuit tester control system
US4875210A (en) * 1988-01-06 1989-10-17 Teradyne, Inc. Automatic circuit tester control system
WO1990015999A1 (en) * 1989-06-16 1990-12-27 Advantest Corporation Test pattern generator
JPH0462486A (ja) * 1990-06-29 1992-02-27 Hitachi Electron Eng Co Ltd Ｉｃテストシステム
JPH05126915A (ja) * 1991-11-01 1993-05-25 Mitsubishi Electric Corp 半導体試験装置
US5243274A (en) * 1992-08-07 1993-09-07 Westinghouse Electric Corp. Asic tester
US5524208A (en) * 1994-06-09 1996-06-04 Dell Usa, L.P. Method and apparatus for performing cache snoop testing using DMA cycles in a computer system

Also Published As

Publication number Publication date
WO1996020409A1 (fr) 1996-07-04
US5796753A (en) 1998-08-18
DE19581540C2 (de) 2003-08-14
JPH08184648A (ja) 1996-07-16

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8607 Notification of search results after publication
8304 Grant after examination procedure
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee