DE112010002918B4 - Vorrichtung für einen Strahl geladener Teilchen und Abbildungsanzeigeverfahren - Google Patents

Vorrichtung für einen Strahl geladener Teilchen und Abbildungsanzeigeverfahren Download PDF

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Publication number
DE112010002918B4
DE112010002918B4 DE112010002918.0T DE112010002918T DE112010002918B4 DE 112010002918 B4 DE112010002918 B4 DE 112010002918B4 DE 112010002918 T DE112010002918 T DE 112010002918T DE 112010002918 B4 DE112010002918 B4 DE 112010002918B4
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sample
angle
image
state
incidence
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DE112010002918.0T
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German (de)
English (en)
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DE112010002918T8 (de
DE112010002918T5 (de
Inventor
Tatsuya Hirato
Hiroyuki Komuro
Shigeru Kawamata
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
Hitachi High Tech Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/02—Arrangements for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
    • A61B6/022—Stereoscopic imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
    • G02B30/22—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the stereoscopic type
    • G02B30/23—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the stereoscopic type using wavelength separation, e.g. using anaglyph techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
    • G02B30/26—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
    • G02B30/27—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving lenticular arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
    • G02B30/26—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
    • G02B30/30—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving parallax barriers
    • G02B30/31—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving parallax barriers involving active parallax barriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2611—Stereoscopic measurements and/or imaging
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
DE112010002918.0T 2009-08-10 2010-07-20 Vorrichtung für einen Strahl geladener Teilchen und Abbildungsanzeigeverfahren Active DE112010002918B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009-185396 2009-08-10
JP2009185396A JP5350123B2 (ja) 2009-08-10 2009-08-10 荷電粒子線装置及び画像表示方法
PCT/JP2010/062173 WO2011018932A1 (ja) 2009-08-10 2010-07-20 荷電粒子線装置及び画像表示方法

Publications (3)

Publication Number Publication Date
DE112010002918T5 DE112010002918T5 (de) 2012-06-21
DE112010002918T8 DE112010002918T8 (de) 2012-08-23
DE112010002918B4 true DE112010002918B4 (de) 2017-05-04

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DE112010002918.0T Active DE112010002918B4 (de) 2009-08-10 2010-07-20 Vorrichtung für einen Strahl geladener Teilchen und Abbildungsanzeigeverfahren

Country Status (6)

Country Link
US (2) US20120132803A1 (enExample)
JP (1) JP5350123B2 (enExample)
KR (1) KR101436218B1 (enExample)
CN (1) CN102484025B (enExample)
DE (1) DE112010002918B4 (enExample)
WO (1) WO2011018932A1 (enExample)

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JP6320186B2 (ja) * 2014-06-16 2018-05-09 株式会社日立ハイテクノロジーズ 荷電粒子線応用装置
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US10546424B2 (en) 2015-04-15 2020-01-28 Google Llc Layered content delivery for virtual and augmented reality experiences
US10275898B1 (en) 2015-04-15 2019-04-30 Google Llc Wedge-based light-field video capture
US10540818B2 (en) 2015-04-15 2020-01-21 Google Llc Stereo image generation and interactive playback
US10565734B2 (en) 2015-04-15 2020-02-18 Google Llc Video capture, processing, calibration, computational fiber artifact removal, and light-field pipeline
US10419737B2 (en) 2015-04-15 2019-09-17 Google Llc Data structures and delivery methods for expediting virtual reality playback
US10440407B2 (en) 2017-05-09 2019-10-08 Google Llc Adaptive control for immersive experience delivery
US10444931B2 (en) 2017-05-09 2019-10-15 Google Llc Vantage generation and interactive playback
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US10412373B2 (en) 2015-04-15 2019-09-10 Google Llc Image capture for virtual reality displays
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Also Published As

Publication number Publication date
CN102484025B (zh) 2015-11-25
DE112010002918T8 (de) 2012-08-23
KR20120040203A (ko) 2012-04-26
US9202669B2 (en) 2015-12-01
WO2011018932A1 (ja) 2011-02-17
KR101436218B1 (ko) 2014-09-01
CN102484025A (zh) 2012-05-30
JP5350123B2 (ja) 2013-11-27
DE112010002918T5 (de) 2012-06-21
JP2011040240A (ja) 2011-02-24
US20120132803A1 (en) 2012-05-31
US20140001355A1 (en) 2014-01-02

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