JP5350123B2 - 荷電粒子線装置及び画像表示方法 - Google Patents
荷電粒子線装置及び画像表示方法 Download PDFInfo
- Publication number
- JP5350123B2 JP5350123B2 JP2009185396A JP2009185396A JP5350123B2 JP 5350123 B2 JP5350123 B2 JP 5350123B2 JP 2009185396 A JP2009185396 A JP 2009185396A JP 2009185396 A JP2009185396 A JP 2009185396A JP 5350123 B2 JP5350123 B2 JP 5350123B2
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- state
- sample
- irradiation angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 53
- 239000002245 particle Substances 0.000 title claims description 49
- 230000004075 alteration Effects 0.000 claims description 18
- 239000004973 liquid crystal related substance Substances 0.000 claims description 18
- 201000009310 astigmatism Diseases 0.000 claims description 16
- 238000010894 electron beam technology Methods 0.000 claims description 12
- 238000005286 illumination Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 10
- 230000009471 action Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000003086 colorant Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/02—Arrangements for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
- A61B6/022—Stereoscopic imaging
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
- G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
- G02B30/22—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the stereoscopic type
- G02B30/23—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the stereoscopic type using wavelength separation, e.g. using anaglyph techniques
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
- G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
- G02B30/26—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
- G02B30/27—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving lenticular arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
- G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
- G02B30/26—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
- G02B30/30—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving parallax barriers
- G02B30/31—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving parallax barriers involving active parallax barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2611—Stereoscopic measurements and/or imaging
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
Description
試料上で所望の視差角を得るためには、前述公知特許でも示しているように、対物レンズ主軸から離れた位置に入射させ、レンズのビーム振り戻し作用を利用する。ところが、ビームが非点収差補正コイル8の軸外を通過すると、偏向作用が発生し、ビーム傾斜角に影響を与えてしまう。また、対物レンズ主軸に対し、離軸したビームが入射すると、対物レンズ本来の球面収差と色収差から派生すると考えられる収差ボケにより分解能が劣化する。
1′ 電子銃
2 陽極
3 一次電子線
4 第1集束レンズ
5 第2集束レンズ
6 絞り板
7 視差角形成用電磁コイル
8 非点収差補正コイル
9 第3集束レンズ(収差補正レンズ)
10 ビーム傾斜角制御コイル
11 走査コイル
12 対物レンズ
13 反射電子用検出器
14 試料
15 試料ステージ
16 二次電子検出器
17 信号増幅器
18 高圧制御電源
19 第1集束レンズ制御電源
20 第2集束レンズ制御電源
21 第1収差制御電源
22 第3集束レンズ制御電源
23 非点収差補正電源
24 第1ビーム傾斜角制御電源
25 走査コイル制御電源
26 対物レンズ制御電源
27 信号入力部
28 コンピュータ
29 表示装置
30 画像メモリ
31 入力装置
32 反転入力器
33 傾斜信号増幅器
34 傾斜方向切り替えスイッチ
35 第2収差制御電源
36 第2ビーム傾斜角制御電源
37 左目用傾斜ビーム軌道
38 右目用傾斜ビーム軌道
39 視差角指定部位
40 観察方向指定部位
41 第一表示領域
42 第二表示領域
43 立体観察方法選択部位
Claims (5)
- 荷電粒子源と、
前記荷電粒子源から放出される一次荷電粒子線を集束する対物レンズと、
前記一次荷電粒子線を試料上で走査する走査偏向器と、
前記一次荷電粒子線の走査によって試料から発生する信号粒子を検出する検出器と、を備え、
前記検出器の信号粒子を用いて試料像を取得する荷電粒子線装置において、
前記一次荷電粒子線の試料への照射角を偏向する偏向器と、
前記一次荷電粒子線の走査における同一ライン上で、前記照射角を第一の状態および第二の状態に切り替える切替手段と、
試料上の走査における同一ライン上で、前記第一の状態での照射角による走査と、前記第二の状態での照射角による走査との2回の走査を行い実時間で取得された、前記第一の状態での照射角で取得した第一の試料像と、前記第二の状態での照射角で取得した第二の試料像を横に並べて表示する交差法または平行法を選択する第一のボタンと、
試料上の走査における同一ライン上で、前記第一の状態での照射角による走査と、前記第二の状態での照射角による走査との2回の走査を行い実時間で取得された、前記第一の状態での照射角で取得した第一の画像データと、前記第二の状態での照射角で取得した第二の画像データを立体液晶ディスプレイの画素配列に合わせて入力する立体液晶ディスプレイによる立体観察を選択する第二のボタンと、を備えることを特徴とする荷電粒子線装置。 - 請求項1の荷電粒子線装置において、
前記第一の状態での照射角で取得した第一の試料像と、前記第二の状態での照射角で取得した第二の試料像を用いて、前記試料の傾斜方向からの立体像が観察可能であることを特徴とする荷電粒子線装置。 - 請求項1の荷電粒子線装置において、
前記一次電子線の傾斜方向ごとに、前記偏向器に流す電流値を規定するテーブルを記憶することを特徴とする荷電粒子線装置。 - 請求項1の荷電粒子線装置において、
前記偏向器より荷電粒子源側に、一次荷電粒子の非点収差を補正する非点収差補正器を備えたことを特徴とする荷電粒子線装置。 - 請求項1の荷電粒子線装置において、
前記荷電粒子線装置は、前記偏向器より荷電粒子源側に集束レンズを備え、
前記対物レンズで発生する軸外収差を当該集束レンズで相殺することを特徴とする荷電粒子線装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009185396A JP5350123B2 (ja) | 2009-08-10 | 2009-08-10 | 荷電粒子線装置及び画像表示方法 |
DE112010002918.0T DE112010002918B4 (de) | 2009-08-10 | 2010-07-20 | Vorrichtung für einen Strahl geladener Teilchen und Abbildungsanzeigeverfahren |
PCT/JP2010/062173 WO2011018932A1 (ja) | 2009-08-10 | 2010-07-20 | 荷電粒子線装置及び画像表示方法 |
CN201080035234.XA CN102484025B (zh) | 2009-08-10 | 2010-07-20 | 带电粒子束装置以及图像显示方法 |
KR1020127001764A KR101436218B1 (ko) | 2009-08-10 | 2010-07-20 | 하전 입자선 장치 및 화상 표시 방법 |
US13/389,285 US20120132803A1 (en) | 2009-08-10 | 2010-07-20 | Charged particle beam device and image display method |
US14/018,919 US9202669B2 (en) | 2009-08-10 | 2013-09-05 | Charged particle beam device and image display method for stereoscopic observation and stereoscopic display |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009185396A JP5350123B2 (ja) | 2009-08-10 | 2009-08-10 | 荷電粒子線装置及び画像表示方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011040240A JP2011040240A (ja) | 2011-02-24 |
JP2011040240A5 JP2011040240A5 (ja) | 2012-01-05 |
JP5350123B2 true JP5350123B2 (ja) | 2013-11-27 |
Family
ID=43586111
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009185396A Active JP5350123B2 (ja) | 2009-08-10 | 2009-08-10 | 荷電粒子線装置及び画像表示方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US20120132803A1 (ja) |
JP (1) | JP5350123B2 (ja) |
KR (1) | KR101436218B1 (ja) |
CN (1) | CN102484025B (ja) |
DE (1) | DE112010002918B4 (ja) |
WO (1) | WO2011018932A1 (ja) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10298834B2 (en) | 2006-12-01 | 2019-05-21 | Google Llc | Video refocusing |
JP5581248B2 (ja) * | 2011-03-08 | 2014-08-27 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
JP5698157B2 (ja) | 2012-01-06 | 2015-04-08 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および傾斜観察画像表示方法 |
US9858649B2 (en) | 2015-09-30 | 2018-01-02 | Lytro, Inc. | Depth-based image blurring |
US8997021B2 (en) * | 2012-11-06 | 2015-03-31 | Lytro, Inc. | Parallax and/or three-dimensional effects for thumbnail image displays |
EP2735866A1 (en) * | 2012-11-27 | 2014-05-28 | Fei Company | Method of sampling a sample and displaying obtained information |
US10334151B2 (en) | 2013-04-22 | 2019-06-25 | Google Llc | Phase detection autofocus using subaperture images |
JP5464535B1 (ja) * | 2013-07-23 | 2014-04-09 | 株式会社日立ハイテクノロジーズ | Ebsd検出器で所望箇所を容易に分析できる荷電粒子線装置およびその制御方法 |
JP6282076B2 (ja) * | 2013-10-04 | 2018-02-21 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP6320186B2 (ja) * | 2014-06-16 | 2018-05-09 | 株式会社日立ハイテクノロジーズ | 荷電粒子線応用装置 |
US9767986B2 (en) * | 2014-08-29 | 2017-09-19 | Kla-Tencor Corporation | Scanning electron microscope and methods of inspecting and reviewing samples |
US10412373B2 (en) | 2015-04-15 | 2019-09-10 | Google Llc | Image capture for virtual reality displays |
US10341632B2 (en) | 2015-04-15 | 2019-07-02 | Google Llc. | Spatial random access enabled video system with a three-dimensional viewing volume |
US10275898B1 (en) | 2015-04-15 | 2019-04-30 | Google Llc | Wedge-based light-field video capture |
US10565734B2 (en) | 2015-04-15 | 2020-02-18 | Google Llc | Video capture, processing, calibration, computational fiber artifact removal, and light-field pipeline |
US10440407B2 (en) | 2017-05-09 | 2019-10-08 | Google Llc | Adaptive control for immersive experience delivery |
US10419737B2 (en) | 2015-04-15 | 2019-09-17 | Google Llc | Data structures and delivery methods for expediting virtual reality playback |
US10540818B2 (en) | 2015-04-15 | 2020-01-21 | Google Llc | Stereo image generation and interactive playback |
US10444931B2 (en) | 2017-05-09 | 2019-10-15 | Google Llc | Vantage generation and interactive playback |
US10546424B2 (en) | 2015-04-15 | 2020-01-28 | Google Llc | Layered content delivery for virtual and augmented reality experiences |
US11328446B2 (en) | 2015-04-15 | 2022-05-10 | Google Llc | Combining light-field data with active depth data for depth map generation |
US10567464B2 (en) | 2015-04-15 | 2020-02-18 | Google Llc | Video compression with adaptive view-dependent lighting removal |
US10469873B2 (en) | 2015-04-15 | 2019-11-05 | Google Llc | Encoding and decoding virtual reality video |
US9979909B2 (en) | 2015-07-24 | 2018-05-22 | Lytro, Inc. | Automatic lens flare detection and correction for light-field images |
GB201609995D0 (en) * | 2016-06-08 | 2016-07-20 | Aquasium Technology Ltd | Shaped welding head |
US10275892B2 (en) | 2016-06-09 | 2019-04-30 | Google Llc | Multi-view scene segmentation and propagation |
US11120967B2 (en) | 2016-11-22 | 2021-09-14 | Hitachi High-Tech Corporation | Charged particle beam apparatus and sample observation method using superimposed comparison image display |
US10679361B2 (en) | 2016-12-05 | 2020-06-09 | Google Llc | Multi-view rotoscope contour propagation |
US10594945B2 (en) | 2017-04-03 | 2020-03-17 | Google Llc | Generating dolly zoom effect using light field image data |
US10474227B2 (en) | 2017-05-09 | 2019-11-12 | Google Llc | Generation of virtual reality with 6 degrees of freedom from limited viewer data |
US11532760B2 (en) | 2017-05-22 | 2022-12-20 | Howmedica Osteonics Corp. | Device for in-situ fabrication process monitoring and feedback control of an electron beam additive manufacturing process |
US10354399B2 (en) | 2017-05-25 | 2019-07-16 | Google Llc | Multi-view back-projection to a light-field |
US10545215B2 (en) | 2017-09-13 | 2020-01-28 | Google Llc | 4D camera tracking and optical stabilization |
CN111492457B (zh) * | 2017-12-21 | 2023-04-04 | 株式会社日立高新技术 | 带电粒子束装置 |
US10965862B2 (en) | 2018-01-18 | 2021-03-30 | Google Llc | Multi-camera navigation interface |
DE102018202728B4 (de) * | 2018-02-22 | 2019-11-21 | Carl Zeiss Microscopy Gmbh | Verfahren zum Betrieb eines Teilchenstrahlgeräts, Computerprogrammprodukt und Teilchenstrahlgerät zur Durchführung des Verfahrens |
WO2019186937A1 (ja) * | 2018-03-29 | 2019-10-03 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
AU2019206103A1 (en) | 2018-07-19 | 2020-02-06 | Howmedica Osteonics Corp. | System and process for in-process electron beam profile and location analyses |
US11094499B1 (en) * | 2020-10-04 | 2021-08-17 | Borries Pte. Ltd. | Apparatus of charged-particle beam such as electron microscope comprising sliding specimen table within objective lens |
CN113035675A (zh) * | 2021-02-26 | 2021-06-25 | 中国科学院生物物理研究所 | 带电粒子束设备 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5136196B2 (ja) * | 1972-05-22 | 1976-10-07 | ||
JPS5548610Y2 (ja) * | 1975-10-08 | 1980-11-13 | ||
JPS5854784Y2 (ja) * | 1978-09-25 | 1983-12-14 | 株式会社日立製作所 | 立体走査電子顕微鏡 |
JPS57145259A (en) * | 1981-03-03 | 1982-09-08 | Akashi Seisakusho Co Ltd | Scanning type electron microscope and its similar device |
JPS5854784A (ja) * | 1981-09-29 | 1983-03-31 | Nec Corp | テレビジヨンカメラのシエ−デイング補正装置 |
JPS62198043A (ja) * | 1986-02-25 | 1987-09-01 | Sanyuu Denshi Kk | 立体観察装置 |
JPS63231856A (ja) * | 1987-03-19 | 1988-09-27 | Jeol Ltd | 電子顕微鏡等の制御方法 |
JPH0233843A (ja) * | 1988-07-25 | 1990-02-05 | Hitachi Ltd | 走査電子顕微鏡 |
JPH052364U (ja) * | 1991-02-25 | 1993-01-14 | サンユー電子株式会社 | ステレオ表示装置 |
JP2000102037A (ja) * | 1998-09-25 | 2000-04-07 | Canon Inc | 撮像装置及び画像生成方法 |
JP2000284223A (ja) * | 1999-03-30 | 2000-10-13 | Idemitsu Kosan Co Ltd | 立体表示方法および立体表示装置 |
JP4069545B2 (ja) * | 1999-05-19 | 2008-04-02 | 株式会社日立製作所 | 電子顕微方法及びそれを用いた電子顕微鏡並び生体試料検査方法及び生体検査装置 |
JP2001357811A (ja) * | 2000-06-12 | 2001-12-26 | Hitachi Ltd | 走査形荷電粒子顕微鏡、並びに走査形荷電粒子顕微鏡の焦点合わせ方法及び非点収差補正方法 |
WO2001097531A2 (en) * | 2000-06-12 | 2001-12-20 | Vrex, Inc. | Electronic stereoscopic media delivery system |
US6852974B2 (en) * | 2001-03-06 | 2005-02-08 | Topcon Corporation | Electron beam device and method for stereoscopic measurements |
JP4627771B2 (ja) * | 2002-09-11 | 2011-02-09 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP3959379B2 (ja) * | 2003-08-27 | 2007-08-15 | 株式会社日立ハイテクノロジーズ | 形状測定装置及び形状測定方法 |
US7164128B2 (en) * | 2003-11-25 | 2007-01-16 | Hitachi High-Technologies Corporation | Method and apparatus for observing a specimen |
JP4620981B2 (ja) * | 2004-08-10 | 2011-01-26 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
JP4511303B2 (ja) * | 2004-10-05 | 2010-07-28 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および寸法測定方法 |
US7462828B2 (en) * | 2005-04-28 | 2008-12-09 | Hitachi High-Technologies Corporation | Inspection method and inspection system using charged particle beam |
JP4855726B2 (ja) * | 2005-07-15 | 2012-01-18 | 株式会社キーエンス | 拡大観察装置、拡大観察装置の操作方法、拡大観察装置操作プログラムおよびコンピュータで読み取り可能な記録媒体並びに記録した機器 |
JP2007049598A (ja) * | 2005-08-12 | 2007-02-22 | Seiko Epson Corp | 画像処理コントローラ、電子機器及び画像処理方法 |
JP2007179753A (ja) * | 2005-12-27 | 2007-07-12 | Hitachi High-Technologies Corp | 走査透過電子顕微鏡、及び収差測定方法 |
JP5271491B2 (ja) * | 2006-10-26 | 2013-08-21 | 株式会社日立ハイテクノロジーズ | 電子線応用装置および試料検査方法 |
JP4857101B2 (ja) * | 2006-12-21 | 2012-01-18 | 株式会社日立ハイテクノロジーズ | プローブ評価方法 |
JP2008298480A (ja) * | 2007-05-29 | 2008-12-11 | Beamsense Co Ltd | ステレオ透視装置およびそれを用いたステレオ観察方法 |
JP5183318B2 (ja) * | 2008-06-26 | 2013-04-17 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP5302595B2 (ja) * | 2008-08-06 | 2013-10-02 | 株式会社日立ハイテクノロジーズ | 傾斜観察方法および観察装置 |
US8129693B2 (en) * | 2009-06-26 | 2012-03-06 | Carl Zeiss Nts Gmbh | Charged particle beam column and method of operating same |
-
2009
- 2009-08-10 JP JP2009185396A patent/JP5350123B2/ja active Active
-
2010
- 2010-07-20 CN CN201080035234.XA patent/CN102484025B/zh active Active
- 2010-07-20 WO PCT/JP2010/062173 patent/WO2011018932A1/ja active Application Filing
- 2010-07-20 DE DE112010002918.0T patent/DE112010002918B4/de active Active
- 2010-07-20 KR KR1020127001764A patent/KR101436218B1/ko active IP Right Grant
- 2010-07-20 US US13/389,285 patent/US20120132803A1/en not_active Abandoned
-
2013
- 2013-09-05 US US14/018,919 patent/US9202669B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2011018932A1 (ja) | 2011-02-17 |
DE112010002918T8 (de) | 2012-08-23 |
US9202669B2 (en) | 2015-12-01 |
KR20120040203A (ko) | 2012-04-26 |
JP2011040240A (ja) | 2011-02-24 |
US20140001355A1 (en) | 2014-01-02 |
CN102484025B (zh) | 2015-11-25 |
US20120132803A1 (en) | 2012-05-31 |
DE112010002918B4 (de) | 2017-05-04 |
CN102484025A (zh) | 2012-05-30 |
KR101436218B1 (ko) | 2014-09-01 |
DE112010002918T5 (de) | 2012-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5350123B2 (ja) | 荷電粒子線装置及び画像表示方法 | |
JP5183318B2 (ja) | 荷電粒子線装置 | |
KR100812905B1 (ko) | 입체 화상 처리 방법, 장치 및 컴퓨터 판독가능 기록 매체 | |
WO2017073323A1 (ja) | 手術顕微鏡、画像処理装置、及び、画像処理方法 | |
WO2006062325A1 (en) | Apparatus for correcting image distortion of stereo-camera and method thereof | |
JP5698157B2 (ja) | 荷電粒子線装置および傾斜観察画像表示方法 | |
US7280274B2 (en) | Three-dimensional image observation microscope system | |
JP6114742B2 (ja) | 3dディスプレイのための位置インジケータ | |
WO2012023168A1 (ja) | 立体映像撮像装置および立体映像撮像方法 | |
JPH095643A (ja) | 立体内視鏡装置 | |
JP2008237749A (ja) | 立体観察システム | |
EP2493204A1 (en) | Stereoscopic image registration and color balance evaluation display | |
JPS5854784Y2 (ja) | 立体走査電子顕微鏡 | |
JP2012145747A (ja) | 実体顕微鏡装置 | |
JP2010231192A (ja) | ステレオ撮像装置 | |
WO2012063540A1 (ja) | 仮想視点画像生成装置 | |
JP2005167445A (ja) | 多視点画像表示装置 | |
JPH05191838A (ja) | 三次元情報記録再生装置 | |
JP4376754B2 (ja) | 荷電粒子線装置及び試料像観察方法 | |
US9396906B2 (en) | Transmission electron microscope and method of displaying TEM images | |
Fan et al. | Stereoscopy by tilted illumination in transmission electron microscopy | |
JPS62252055A (ja) | 立体視電子顕微鏡 | |
JP2011033820A (ja) | 3次元画像表示装置 | |
JPS61233950A (ja) | 電子顕微鏡 | |
JP2001264691A (ja) | 立体画像表示装置及び立体画像表示方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111019 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20111019 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111019 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130226 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130417 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130514 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130701 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130723 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130821 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5350123 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |