DE112010002918T8 - Vorrichtung für einen Strahl geladener Teilchen und Abbildungsanzeigeverfahren - Google Patents

Vorrichtung für einen Strahl geladener Teilchen und Abbildungsanzeigeverfahren Download PDF

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Publication number
DE112010002918T8
DE112010002918T8 DE112010002918T DE112010002918T DE112010002918T8 DE 112010002918 T8 DE112010002918 T8 DE 112010002918T8 DE 112010002918 T DE112010002918 T DE 112010002918T DE 112010002918 T DE112010002918 T DE 112010002918T DE 112010002918 T8 DE112010002918 T8 DE 112010002918T8
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DE
Germany
Prior art keywords
image display
charged particle
particle beam
display method
beam apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112010002918T
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English (en)
Other versions
DE112010002918B4 (de
DE112010002918T5 (de
Inventor
Tatsuya Hirato
Hiroyuki Komuro
Shigeru Kawamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of DE112010002918T5 publication Critical patent/DE112010002918T5/de
Application granted granted Critical
Publication of DE112010002918T8 publication Critical patent/DE112010002918T8/de
Publication of DE112010002918B4 publication Critical patent/DE112010002918B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/02—Arrangements for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
    • A61B6/022—Stereoscopic imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
    • G02B30/22—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the stereoscopic type
    • G02B30/23—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the stereoscopic type using wavelength separation, e.g. using anaglyph techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
    • G02B30/26—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
    • G02B30/27—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving lenticular arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
    • G02B30/26—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
    • G02B30/30—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving parallax barriers
    • G02B30/31—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving parallax barriers involving active parallax barriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2611—Stereoscopic measurements and/or imaging
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
DE112010002918.0T 2009-08-10 2010-07-20 Vorrichtung für einen Strahl geladener Teilchen und Abbildungsanzeigeverfahren Active DE112010002918B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009-185396 2009-08-10
JP2009185396A JP5350123B2 (ja) 2009-08-10 2009-08-10 荷電粒子線装置及び画像表示方法
PCT/JP2010/062173 WO2011018932A1 (ja) 2009-08-10 2010-07-20 荷電粒子線装置及び画像表示方法

Publications (3)

Publication Number Publication Date
DE112010002918T5 DE112010002918T5 (de) 2012-06-21
DE112010002918T8 true DE112010002918T8 (de) 2012-08-23
DE112010002918B4 DE112010002918B4 (de) 2017-05-04

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE112010002918.0T Active DE112010002918B4 (de) 2009-08-10 2010-07-20 Vorrichtung für einen Strahl geladener Teilchen und Abbildungsanzeigeverfahren

Country Status (6)

Country Link
US (2) US20120132803A1 (de)
JP (1) JP5350123B2 (de)
KR (1) KR101436218B1 (de)
CN (1) CN102484025B (de)
DE (1) DE112010002918B4 (de)
WO (1) WO2011018932A1 (de)

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US10567464B2 (en) 2015-04-15 2020-02-18 Google Llc Video compression with adaptive view-dependent lighting removal
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US10412373B2 (en) 2015-04-15 2019-09-10 Google Llc Image capture for virtual reality displays
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Also Published As

Publication number Publication date
DE112010002918B4 (de) 2017-05-04
WO2011018932A1 (ja) 2011-02-17
CN102484025A (zh) 2012-05-30
KR101436218B1 (ko) 2014-09-01
US9202669B2 (en) 2015-12-01
US20120132803A1 (en) 2012-05-31
CN102484025B (zh) 2015-11-25
KR20120040203A (ko) 2012-04-26
DE112010002918T5 (de) 2012-06-21
JP2011040240A (ja) 2011-02-24
US20140001355A1 (en) 2014-01-02
JP5350123B2 (ja) 2013-11-27

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Owner name: HITACHI HIGH-TECH CORPORATION, JP

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