CN1638112A - 半导体器件及其制造方法 - Google Patents

半导体器件及其制造方法 Download PDF

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Publication number
CN1638112A
CN1638112A CN200510000505.9A CN200510000505A CN1638112A CN 1638112 A CN1638112 A CN 1638112A CN 200510000505 A CN200510000505 A CN 200510000505A CN 1638112 A CN1638112 A CN 1638112A
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CN
China
Prior art keywords
dielectric film
wiring
film
oxide film
ground floor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200510000505.9A
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English (en)
Chinese (zh)
Inventor
细田直宏
金光贤司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Technology Corp
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Renesas Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Technology Corp filed Critical Renesas Technology Corp
Publication of CN1638112A publication Critical patent/CN1638112A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/49—Adaptable interconnections, e.g. fuses or antifuses
    • H10W20/493—Fuses, i.e. interconnections changeable from conductive to non-conductive
    • H10W20/494—Fuses, i.e. interconnections changeable from conductive to non-conductive changeable by the use of an external beam, e.g. laser beam or ion beam
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/45—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts
    • H10W20/47—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts comprising two or more dielectric layers having different properties, e.g. different dielectric constants

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
CN200510000505.9A 2004-01-09 2005-01-07 半导体器件及其制造方法 Pending CN1638112A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP004509/2004 2004-01-09
JP2004004509A JP2005197602A (ja) 2004-01-09 2004-01-09 半導体装置およびその製造方法

Publications (1)

Publication Number Publication Date
CN1638112A true CN1638112A (zh) 2005-07-13

Family

ID=34737195

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200510000505.9A Pending CN1638112A (zh) 2004-01-09 2005-01-07 半导体器件及其制造方法

Country Status (4)

Country Link
US (2) US20050151259A1 (enExample)
JP (1) JP2005197602A (enExample)
CN (1) CN1638112A (enExample)
TW (1) TW200527533A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100590843C (zh) * 2006-06-15 2010-02-17 旺宏电子股份有限公司 无等离子损伤的不着陆介层窗制程
CN102054839A (zh) * 2009-10-28 2011-05-11 无锡华润上华半导体有限公司 一种mos场效应晶体管结构及其制备方法
CN109830459A (zh) * 2019-01-28 2019-05-31 上海华虹宏力半导体制造有限公司 一种熔丝结构的形成方法
CN110416182A (zh) * 2018-04-28 2019-11-05 华邦电子股份有限公司 半导体装置及其制造方法
US10825769B2 (en) 2018-04-16 2020-11-03 Winbond Electronics Corp. Semiconductor devices and methods for manufacturing the same

Families Citing this family (8)

* Cited by examiner, † Cited by third party
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US20060237802A1 (en) * 2005-04-21 2006-10-26 Macronix International Co., Ltd. Method for improving SOG process
US20060292774A1 (en) * 2005-06-27 2006-12-28 Macronix International Co., Ltd. Method for preventing metal line bridging in a semiconductor device
KR101100428B1 (ko) * 2005-09-23 2011-12-30 삼성전자주식회사 ＳＲＯ(Ｓｉｌｉｃｏｎ Ｒｉｃｈ Ｏｘｉｄｅ) 및 이를적용한 반도체 소자의 제조방법
JP2008071991A (ja) 2006-09-15 2008-03-27 Ricoh Co Ltd 半導体装置及びその製造方法
JP6556007B2 (ja) * 2015-09-30 2019-08-07 エイブリック株式会社 半導体装置の製造方法
US20170287834A1 (en) * 2016-03-29 2017-10-05 Microchip Technology Incorporated Contact Expose Etch Stop
JP6985791B2 (ja) * 2016-09-27 2021-12-22 株式会社村田製作所 データ転送デバイス及び無線通信回路
KR102482697B1 (ko) * 2018-11-30 2022-12-28 양쯔 메모리 테크놀로지스 씨오., 엘티디. 본딩된 메모리 장치 및 그 제조 방법

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JPS59214239A (ja) * 1983-05-16 1984-12-04 Fujitsu Ltd 半導体装置の製造方法
US4833094A (en) * 1986-10-17 1989-05-23 International Business Machines Corporation Method of making a dynamic ram cell having shared trench storage capacitor with sidewall-defined bridge contacts and gate electrodes
JP2929820B2 (ja) * 1992-02-05 1999-08-03 富士通株式会社 半導体装置の製造方法
US5382545A (en) * 1993-11-29 1995-01-17 United Microelectronics Corporation Interconnection process with self-aligned via plug
US5879966A (en) * 1994-09-06 1999-03-09 Taiwan Semiconductor Manufacturing Company Ltd. Method of making an integrated circuit having an opening for a fuse
US5747868A (en) * 1995-06-26 1998-05-05 Alliance Semiconductor Corporation Laser fusible link structure for semiconductor devices
JPH09115888A (ja) * 1995-10-13 1997-05-02 Nec Corp 半導体装置の製造方法
US6117345A (en) * 1997-04-02 2000-09-12 United Microelectronics Corp. High density plasma chemical vapor deposition process
JPH118299A (ja) * 1997-04-22 1999-01-12 Sanyo Electric Co Ltd 半導体装置の製造方法
KR100483226B1 (ko) * 1997-10-13 2005-04-15 후지쯔 가부시끼가이샤 퓨즈를 갖는 반도체 장치 및 그 제조 방법
JP2000031271A (ja) * 1998-07-09 2000-01-28 Toshiba Corp 多層配線の半導体装置の製造方法
JP3450221B2 (ja) * 1999-04-21 2003-09-22 Ｎｅｃエレクトロニクス株式会社 半導体装置の製造方法
US6180503B1 (en) * 1999-07-29 2001-01-30 Vanguard International Semiconductor Corporation Passivation layer etching process for memory arrays with fusible links
US6313025B1 (en) * 1999-08-30 2001-11-06 Agere Systems Guardian Corp. Process for manufacturing an integrated circuit including a dual-damascene structure and an integrated circuit
JP2003060031A (ja) * 2001-08-14 2003-02-28 Oki Electric Ind Co Ltd 半導体装置及びその製造方法。
US6750129B2 (en) * 2002-11-12 2004-06-15 Infineon Technologies Ag Process for forming fusible links
JP4489345B2 (ja) * 2002-12-13 2010-06-23 株式会社ルネサステクノロジ 半導体装置の製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100590843C (zh) * 2006-06-15 2010-02-17 旺宏电子股份有限公司 无等离子损伤的不着陆介层窗制程
CN102054839A (zh) * 2009-10-28 2011-05-11 无锡华润上华半导体有限公司 一种mos场效应晶体管结构及其制备方法
US10825769B2 (en) 2018-04-16 2020-11-03 Winbond Electronics Corp. Semiconductor devices and methods for manufacturing the same
CN110416182A (zh) * 2018-04-28 2019-11-05 华邦电子股份有限公司 半导体装置及其制造方法
CN110416182B (zh) * 2018-04-28 2021-01-29 华邦电子股份有限公司 半导体装置及其制造方法
CN109830459A (zh) * 2019-01-28 2019-05-31 上海华虹宏力半导体制造有限公司 一种熔丝结构的形成方法

Also Published As

Publication number Publication date
US20050151259A1 (en) 2005-07-14
US20080293230A1 (en) 2008-11-27
TW200527533A (en) 2005-08-16
JP2005197602A (ja) 2005-07-21

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