CN1605121A - 管芯底部与支撑板分隔开的表面安装封装 - Google Patents
管芯底部与支撑板分隔开的表面安装封装 Download PDFInfo
- Publication number
- CN1605121A CN1605121A CNA028252802A CN02825280A CN1605121A CN 1605121 A CN1605121 A CN 1605121A CN A028252802 A CNA028252802 A CN A028252802A CN 02825280 A CN02825280 A CN 02825280A CN 1605121 A CN1605121 A CN 1605121A
- Authority
- CN
- China
- Prior art keywords
- semiconductor packages
- semiconductor device
- device die
- mosfet
- packages according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/043—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body
- H01L23/047—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body the other leads being parallel to the base
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/492—Bases or plates or solder therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L24/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0618—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/06181—On opposite sides of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/37001—Core members of the connector
- H01L2224/37099—Material
- H01L2224/371—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/37138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/37147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/731—Location prior to the connecting process
- H01L2224/73151—Location prior to the connecting process on different surfaces
- H01L2224/73153—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/83801—Soldering or alloying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01057—Lanthanum [La]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1301—Thyristor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Die Bonding (AREA)
Abstract
根据本发明的半导体封装包括金属壳体(12),在金属壳体(12)的内部空间容纳有MOSFET(10)。所容纳的MOSFET(10)被定向,从而其漏极面向壳体(12)的底部,并通过导电环氧树脂层(14)或焊料等与壳体的底部电连接。MOSFET(10)的边缘与壳体(12)的壁隔开。MOSFET(10)的边缘和壳体(12)的壁之间的间隙被绝缘层(16)填充。MOSFET(10)的表面(标为A′)稍低于金属壳体(12)的凸起(22)形成的衬底的平面(标为A)。
Description
相关申请的交叉引用
本发明基于并要求由Martin standing和Andrew N.Sawle于2001年12月21日提交的题为“SURFACE MOUNTED PACKAGE WITH DIEBOTTOM SPACED FORM SUPPORT BOARD(管芯底部与支撑板隔开的表面安装封装)”的第60/342,333号美国临时申请的优先权,并且是由Martin Standing和Hazel Deborah Schofield于2001年3月28日提交的题为“CHIP SCALE SURFACE MOUNTED DEVICE AND PROCESS OFMANUFACTURE(芯片级表面安装器件和制造工艺)”的第09/819,774号美国专利申请的部分连续申请。上述两个申请的主题和公开内容被合并入本文中以作为参考。
发明领域
本发明涉及一种半导体封装,尤其涉及一种用于容纳具有可减少温度循环故障的结构的功率半导体管芯(semiconductor die)的半导体封装。
背景技术
通常,热循环会导致频繁和重复的应力,这种应力在分层结构中可能导致因老化等原因而造成的破裂,因此,温度循环(temperature cycling)是导致分层结构出现故障的一种材料因素(material factor)。
在半导体器件封装中,温度循环导致管芯与底层填料(die-underfill)的接合、底层填料与衬底的接合、焊料隆起焊盘(solder bump)连接以及其他区域中的钝化层的故障。这降低了封装的可靠性。因此,需要提供一种方法来减少由温度循环引起的故障。
现在参照附图,其中类似的参考标号指代了类似的元件。图1和图2示出了在2001年3月28日提交的第09/819,774号美国专利申请中得到完整描述的半导体封装5。该申请已转让给本申请的受让人并被合并入本文以用作参考。如图1和图2所示,半导体封装5包括在杯状壳体12内的MOSFET(金属氧化物半导体场效应管)10,壳体12起到漏极夹具的作用。壳体12优选地由铜合金制成并被镀银。壳体12具有大于MOSFET10的内部尺寸;因此MOSFET 10易于容纳在壳体12的内部中。MOSFET10的漏极触点通过装填了银的导电环氧树脂层14与壳体12的底部连接。环绕MOSFET 10的边缘涂布有一圈低应力高粘性的环氧树脂环16,用以对封装进行密封并为封装增加额外的结构强度。如图1所示,MOSFET 10的源极触点18和栅极触点20(它们布置在MOSFET 10的与其漏极触点相对的表面上)被暴露出来。壳体12包括两行凸起22,它们排列在壳体12的两个相对的边缘上。这些凸起被配置用于与诸如绝缘金属衬底或普通电路板的电路板(未示出)上的各个焊盘(land)电接触,从而使MOSFET10的漏极与其在电路中的位置电连接。如图1所示,MOSFET 10的源极触点18与壳体12的凸起22的接触表面平齐,因此,当在电路板上安装封装5时,MOSFET 10的源极触点18和栅极触点20将与电路板的表面相平齐。
如上所述,上述封装易于遭受因为温度循环而造成的可能的故障。因此,人们希望做出这样一种封装设计,其具有与上述结构相类似的结构,并且能够减少由热循环引致的衬底故障。
发明内容
为减少由例如热循环引致的衬底故障,本发明公开了一种半导体器件封装,其包括半导体器件管芯,所述半导体器件管芯具有与第二表面基本平行的第一表面,并且所述第一和第二表面每个都具有可焊接平面金属电极。另外,还公开了一种金属夹具(clip),其具有包括第一和第二表面的平连接板(flat web)部分,其中,所述第二表面与所述半导体器件管芯的所述第一表面电连接。
至少一个可焊接平面金属柱状电极从所述夹具的平连接板部分的边缘向上延伸并与所述半导体器件管芯的边缘分隔开,所述管芯被置于所述夹具的内部,从而所述管芯向内凹入到所述夹具的内部,所述管芯的第二表面不与所述至少一个可焊接平面金属柱状电极平齐(或共面)。所述可焊接平面金属柱状电极的内部被去除至位于所述管芯的第二表面的平面上方的平行平面。
所述至少一个可焊接平面金属柱状电极可安装在诸如电路板的支撑表面的金属化的图案上,并且所述管芯的第二表面与所述支撑表面上的金属化图案分隔开。
因此,根据本发明所述的半导体封装减少了由于热循环引致的故障的数量,从而增加了封装可靠性。另外,根据本发明所述的半导体封装包括诸如MOSFET的垂直导电的金属氧化物半导体门控管芯(MOS-gateddie),其具有第一主表面和与所述第一主表面相对的另一主表面,所述第一主表面上配置有主电极和控制电极,所述另一主表面上配置有另一主电极。根据惯例,在本发明所述封装中使用的垂直导电的MOSFET内的所述第一主电极为源电极;而其第二主电极为漏电极。垂直导电的MOSFET中的控制电极习惯上被称为栅电极。
尽管本文所描述的管芯为功率MOSFET,但显然管芯可以是任何所需的管芯,包括任何金属氧化物半导体门控器件(例如,绝缘栅双极型晶体管IGBT)、半导体闸流管或二极管等。
附图的简要说明
图1示出了现有技术的半导体封装的俯视图;
图2示出了沿线1-1方向看到的图1所示的半导体封装的剖视图;
图3示出了根据本发明所述经过改进的图1和图2所示的半导体封装的剖视图。
优选实施例的详细说明
现在参照图3,根据本发明,半导体封装24包括MOSFET(金属氧化物半导体场效应晶体管)10,与图1和图2所示的现有技术的封装相比,MOSFET 10被更深地设置(set back)入壳体(can)12的内部。因此,MOSFET 10的源极触点18和栅极触点20(图3中未示出)不再与壳体12的凸起22平齐。这种结构在图3中由虚线A、A′之间的间隙示出。可以发现,当MOSFET 10在壳体12中设置得更深从而使源极18与电路板的平面(由虚线A表示)偏移约0.001-0.005英寸时,由于在被环氧树脂焊接(solder down)或粘附到衬底时部件的热循环(themal cycling)所引起的故障被减少。
换句话说,根据本发明的半导体封装包括金属壳体,该壳体的内部空间能够容纳MOSFET或其他类似的半导体类型器件管芯。被这样容纳的MOSFET向内凹入壳体中并被定向,从而使MOSFET的漏极面向壳体的底部,并通过导电环氧树脂层或焊料等与其电连接。如此放置的MOSFET的边缘被与壳体的壁隔开。MOSFET的边缘与壳体的壁之间的间隙被绝缘层填充。该壳体优选地在其相对的边缘上包括两行接线柱(post)。这些接线柱可与衬底(如电路板)上的适当导电垫连接,以将MOSFET的漏极与其在电路内的适当位置连接。另外,在本发明的可选实施例中,接线柱可以是壳体边缘的全部或局部。
作为这种结构的结果,当将壳体安装在衬底上时,MOSFET的源极和栅极面向衬底。已经发现,如果MOSFET被定位在壳体内以使MOSFET的源极和栅极与衬底表面的下方平齐(sub-flush),则由于热循环引起的故障可得到改善。因此根据本发明的一个方面,MOSFET的底面比衬底平面低0.001-0.005英寸,以减少温度循环故障。该稍低的空间被诸如焊料、环氧树脂等的导电连接材料填充。
在不偏离本发明的精神和范围的情况下对所披露的本发明进行变换是可能的。因而本领域的技术人员应该意识到,也可利用本发明优选实施例所用的材料之外的材料来实现本发明所预期的有益效果。例如,除了MOSFET 10以外,也可在本发明所述的封装中采用IGBT(绝缘栅双极型晶体管)、半导体闸流管、二极管或其它任何适当的半导体器件。作为其它一些例子,可以采用具有银的环氧树脂14以外的其他合金来形成壳体12和/或其它导电装置,以将半导体管芯连接至壳体12。
因此,虽然本发明是结合其特定实施例得到描述的,但对本领域技术人员来说,许多其它的变换、修改和其它用途是显而易见。因而声明,本发明不受本文特定公开的限制,而只受所附权利要求的限制。
Claims (8)
1.一种半导体器件封装,包括
半导体器件管芯,其具有与第二表面基本平行的第一表面;
所述第一表面具有第一可焊接平面金属电极;
所述第二表面具有第二平面金属性电极;
具有平连接板部分的金属夹具,所述平连接板部分具有第一表面和第二表面,所述平连接板部分的所述第二表面与所述半导体器件管芯的所述第一表面电连接;以及
从所述平连接板部分的边缘向上延伸并与所述半导体器件管芯的边缘分隔开的至少一个可焊接平面金属柱状电极,其中所述半导体器件管芯向内凹入所述夹具的内部,从而所述半导体器件管芯的所述第二表面不与所述至少一个可焊接平面金属柱状电极平齐,并且所述至少一个可焊接平面金属柱状电极安装在支撑表面的金属化图案上。
2.根据权利要求1所述的半导体封装,其特征在于,所述半导体器件管芯向内凹入0.001到0.005英寸。
3.根据权利要求1所述的半导体封装,其特征在于,所述夹具为杯状结构并且具有至少一个外围边缘部分,所述至少一个外围边缘部分为环绕所述管芯外部的连续边缘,并且与所述管芯的外部分隔开。
4.根据权利要求3所述的半导体封装,其特征在于,所述管芯和所述外边缘之间的所述间隙被绝缘球填充。
5.根据权利要求1所述的半导体封装,其特征在于,所述半导体器件管芯为金属氧化物半导体场效应晶体管、绝缘栅双极型晶体管、功率二极管以及半导体闸流管中的一种。
6.根据权利要求1所述的半导体封装,其特征在于,所述夹具为单体并且为杯状。
7.根据权利要求1所述的半导体封装,其特征在于,所述夹具由铜合金制成并镀有银。
8.根据权利要求1所述的半导体封装,其特征在于,所述第一可焊接平面金属电极通过装填有银的导电环氧树脂与所述平连接板部分的所述第二表面电连接。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US34233301P | 2001-12-21 | 2001-12-21 | |
US60/342,333 | 2001-12-21 | ||
US10/327,270 US6930397B2 (en) | 2001-03-28 | 2002-12-20 | Surface mounted package with die bottom spaced from support board |
US10/327,270 | 2002-12-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1605121A true CN1605121A (zh) | 2005-04-06 |
CN100559557C CN100559557C (zh) | 2009-11-11 |
Family
ID=26985785
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028252802A Expired - Fee Related CN100559557C (zh) | 2001-12-21 | 2002-12-23 | 管芯底部与支撑板分隔开的表面安装封装 |
Country Status (6)
Country | Link |
---|---|
US (2) | US6930397B2 (zh) |
EP (1) | EP1466357B1 (zh) |
JP (2) | JP4535730B2 (zh) |
CN (1) | CN100559557C (zh) |
AU (1) | AU2002361873A1 (zh) |
WO (1) | WO2003060984A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101794714B (zh) * | 2009-01-20 | 2011-12-21 | 丰田自动车株式会社 | 钎焊散热件的方法 |
CN103420331A (zh) * | 2012-05-23 | 2013-12-04 | 飞思卡尔半导体公司 | 腔式半导体封装及其封装方法 |
CN104485321B (zh) * | 2009-02-05 | 2017-12-26 | 费查尔德半导体有限公司 | 半导体管芯封装件及其制造方法 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6930397B2 (en) * | 2001-03-28 | 2005-08-16 | International Rectifier Corporation | Surface mounted package with die bottom spaced from support board |
JP3879688B2 (ja) * | 2003-03-26 | 2007-02-14 | 株式会社デンソー | 半導体装置 |
US7786558B2 (en) * | 2005-10-20 | 2010-08-31 | Infineon Technologies Ag | Semiconductor component and methods to produce a semiconductor component |
US7723830B2 (en) | 2006-01-06 | 2010-05-25 | International Rectifier Corporation | Substrate and method for mounting silicon device |
US20070215997A1 (en) * | 2006-03-17 | 2007-09-20 | Martin Standing | Chip-scale package |
US7663212B2 (en) * | 2006-03-21 | 2010-02-16 | Infineon Technologies Ag | Electronic component having exposed surfaces |
US7768075B2 (en) | 2006-04-06 | 2010-08-03 | Fairchild Semiconductor Corporation | Semiconductor die packages using thin dies and metal substrates |
US7541681B2 (en) * | 2006-05-04 | 2009-06-02 | Infineon Technologies Ag | Interconnection structure, electronic component and method of manufacturing the same |
US7910992B2 (en) * | 2008-07-15 | 2011-03-22 | Maxim Integrated Products, Inc. | Vertical MOSFET with through-body via for gate |
US8563360B2 (en) * | 2009-06-08 | 2013-10-22 | Alpha And Omega Semiconductor, Inc. | Power semiconductor device package and fabrication method |
US20110075392A1 (en) * | 2009-09-29 | 2011-03-31 | Astec International Limited | Assemblies and Methods for Directly Connecting Integrated Circuits to Electrically Conductive Sheets |
US7939370B1 (en) * | 2009-10-29 | 2011-05-10 | Alpha And Omega Semiconductor Incorporated | Power semiconductor package |
CN103629567B (zh) * | 2012-08-22 | 2016-04-13 | 华夏光股份有限公司 | 照明装置 |
US9536800B2 (en) | 2013-12-07 | 2017-01-03 | Fairchild Semiconductor Corporation | Packaged semiconductor devices and methods of manufacturing |
US9214419B2 (en) * | 2014-02-28 | 2015-12-15 | Alpha And Omega Semiconductor Incorporated | Power semiconductor device and preparation method thereof |
US9117809B1 (en) * | 2014-03-09 | 2015-08-25 | Alpha & Omega Semiconductor (Cayman), Ltd. | Ultra-thin semiconductor device and preparation method thereof |
CN104979220B (zh) * | 2014-04-02 | 2017-09-01 | 万国半导体股份有限公司 | 功率半导体器件及制备方法 |
JP6905958B2 (ja) * | 2018-06-27 | 2021-07-21 | 京セラ株式会社 | 接着構造、撮像装置、および移動体 |
Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3403438A (en) * | 1964-12-02 | 1968-10-01 | Corning Glass Works | Process for joining transistor chip to printed circuit |
US3871014A (en) * | 1969-08-14 | 1975-03-11 | Ibm | Flip chip module with non-uniform solder wettable areas on the substrate |
US3972062A (en) * | 1973-10-04 | 1976-07-27 | Motorola, Inc. | Mounting assemblies for a plurality of transistor integrated circuit chips |
GB1487945A (en) * | 1974-11-20 | 1977-10-05 | Ibm | Semiconductor integrated circuit devices |
JPS6020943Y2 (ja) | 1979-08-29 | 1985-06-22 | 三菱電機株式会社 | 半導体装置 |
US4604644A (en) * | 1985-01-28 | 1986-08-05 | International Business Machines Corporation | Solder interconnection structure for joining semiconductor devices to substrates that have improved fatigue life, and process for making |
JPH01132142A (ja) * | 1987-08-05 | 1989-05-24 | Mitsubishi Electric Corp | 半導体装置のパツケージ構造 |
US5047833A (en) | 1990-10-17 | 1991-09-10 | International Rectifier Corporation | Solderable front metal contact for MOS devices |
JP2984068B2 (ja) * | 1991-01-31 | 1999-11-29 | 株式会社日立製作所 | 半導体装置の製造方法 |
JPH05506545A (ja) * | 1991-02-28 | 1993-09-22 | ゼネラル・エレクトリック・カンパニイ | パワー半導体チップ用の高密度気密パッケージのバッチ式組立 |
JPH05129516A (ja) | 1991-11-01 | 1993-05-25 | Hitachi Ltd | 半導体装置 |
CA2089435C (en) * | 1992-02-14 | 1997-12-09 | Kenzi Kobayashi | Semiconductor device |
JP2833326B2 (ja) * | 1992-03-03 | 1998-12-09 | 松下電器産業株式会社 | 電子部品実装接続体およびその製造方法 |
JPH0637143A (ja) * | 1992-07-15 | 1994-02-10 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
US5394490A (en) * | 1992-08-11 | 1995-02-28 | Hitachi, Ltd. | Semiconductor device having an optical waveguide interposed in the space between electrode members |
US5313366A (en) * | 1992-08-12 | 1994-05-17 | International Business Machines Corporation | Direct chip attach module (DCAM) |
JPH06244231A (ja) * | 1993-02-01 | 1994-09-02 | Motorola Inc | 気密半導体デバイスおよびその製造方法 |
US5371404A (en) * | 1993-02-04 | 1994-12-06 | Motorola, Inc. | Thermally conductive integrated circuit package with radio frequency shielding |
JP2795788B2 (ja) * | 1993-02-18 | 1998-09-10 | シャープ株式会社 | 半導体チップの実装方法 |
US5703405A (en) * | 1993-03-15 | 1997-12-30 | Motorola, Inc. | Integrated circuit chip formed from processing two opposing surfaces of a wafer |
US5510758A (en) * | 1993-04-07 | 1996-04-23 | Matsushita Electric Industrial Co., Ltd. | Multilayer microstrip wiring board with a semiconductor device mounted thereon via bumps |
JP3258764B2 (ja) * | 1993-06-01 | 2002-02-18 | 三菱電機株式会社 | 樹脂封止型半導体装置の製造方法ならびに外部引出用電極およびその製造方法 |
US5397921A (en) * | 1993-09-03 | 1995-03-14 | Advanced Semiconductor Assembly Technology | Tab grid array |
US5734201A (en) * | 1993-11-09 | 1998-03-31 | Motorola, Inc. | Low profile semiconductor device with like-sized chip and mounting substrate |
US5367435A (en) * | 1993-11-16 | 1994-11-22 | International Business Machines Corporation | Electronic package structure and method of making same |
US5454160A (en) * | 1993-12-03 | 1995-10-03 | Ncr Corporation | Apparatus and method for stacking integrated circuit devices |
JPH07193184A (ja) * | 1993-12-27 | 1995-07-28 | Fujitsu Ltd | マルチチップモジュールの製造方法及びマルチチップモジュール |
US5446316A (en) * | 1994-01-06 | 1995-08-29 | Harris Corporation | Hermetic package for a high power semiconductor device |
US5578869A (en) * | 1994-03-29 | 1996-11-26 | Olin Corporation | Components for housing an integrated circuit device |
JP3377867B2 (ja) * | 1994-08-12 | 2003-02-17 | 京セラ株式会社 | 半導体素子収納用パッケージ |
JP2546192B2 (ja) * | 1994-09-30 | 1996-10-23 | 日本電気株式会社 | フィルムキャリア半導体装置 |
US5532512A (en) * | 1994-10-03 | 1996-07-02 | General Electric Company | Direct stacked and flip chip power semiconductor device structures |
JP3138159B2 (ja) | 1994-11-22 | 2001-02-26 | シャープ株式会社 | 半導体装置、半導体装置実装体、及び半導体装置の交換方法 |
US5904499A (en) | 1994-12-22 | 1999-05-18 | Pace; Benedict G | Package for power semiconductor chips |
JPH08335653A (ja) * | 1995-04-07 | 1996-12-17 | Nitto Denko Corp | 半導体装置およびその製法並びに上記半導体装置の製造に用いる半導体装置用テープキャリア |
US5655703A (en) * | 1995-05-25 | 1997-08-12 | International Business Machines Corporation | Solder hierarchy for chip attachment to substrates |
US5674785A (en) * | 1995-11-27 | 1997-10-07 | Micron Technology, Inc. | Method of producing a single piece package for semiconductor die |
US5726502A (en) * | 1996-04-26 | 1998-03-10 | Motorola, Inc. | Bumped semiconductor device with alignment features and method for making the same |
EP0900477B1 (de) * | 1996-05-24 | 2001-07-18 | Epcos Ag | Elektronisches bauelement, insbesondere mit akustischen oberflächenwellen arbeitendes bauelement - ofw-bauelement |
US5814884C1 (en) | 1996-10-24 | 2002-01-29 | Int Rectifier Corp | Commonly housed diverse semiconductor die |
US6133634A (en) * | 1998-08-05 | 2000-10-17 | Fairchild Semiconductor Corporation | High performance flip chip package |
US6396127B1 (en) * | 1998-09-25 | 2002-05-28 | International Rectifier Corporation | Semiconductor package |
KR20000057810A (ko) * | 1999-01-28 | 2000-09-25 | 가나이 쓰토무 | 반도체 장치 |
US6262489B1 (en) * | 1999-11-08 | 2001-07-17 | Delphi Technologies, Inc. | Flip chip with backside electrical contact and assembly and method therefor |
US6744124B1 (en) | 1999-12-10 | 2004-06-01 | Siliconix Incorporated | Semiconductor die package including cup-shaped leadframe |
US6624522B2 (en) * | 2000-04-04 | 2003-09-23 | International Rectifier Corporation | Chip scale surface mounted device and process of manufacture |
US6391687B1 (en) * | 2000-10-31 | 2002-05-21 | Fairchild Semiconductor Corporation | Column ball grid array package |
US6777786B2 (en) * | 2001-03-12 | 2004-08-17 | Fairchild Semiconductor Corporation | Semiconductor device including stacked dies mounted on a leadframe |
US6930397B2 (en) * | 2001-03-28 | 2005-08-16 | International Rectifier Corporation | Surface mounted package with die bottom spaced from support board |
US6469398B1 (en) * | 2001-03-29 | 2002-10-22 | Kabushiki Kaisha Toshiba | Semiconductor package and manufacturing method thereof |
US6784540B2 (en) * | 2001-10-10 | 2004-08-31 | International Rectifier Corp. | Semiconductor device package with improved cooling |
US6841865B2 (en) * | 2002-11-22 | 2005-01-11 | International Rectifier Corporation | Semiconductor device having clips for connecting to external elements |
-
2002
- 2002-12-20 US US10/327,270 patent/US6930397B2/en not_active Expired - Lifetime
- 2002-12-23 JP JP2003560978A patent/JP4535730B2/ja not_active Expired - Fee Related
- 2002-12-23 EP EP02797504.4A patent/EP1466357B1/en not_active Expired - Lifetime
- 2002-12-23 CN CNB028252802A patent/CN100559557C/zh not_active Expired - Fee Related
- 2002-12-23 AU AU2002361873A patent/AU2002361873A1/en not_active Abandoned
- 2002-12-23 WO PCT/US2002/041477 patent/WO2003060984A1/en active Application Filing
-
2005
- 2005-06-07 US US11/146,628 patent/US7285866B2/en not_active Expired - Lifetime
-
2007
- 2007-08-17 JP JP2007212938A patent/JP2007295014A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101794714B (zh) * | 2009-01-20 | 2011-12-21 | 丰田自动车株式会社 | 钎焊散热件的方法 |
CN104485321B (zh) * | 2009-02-05 | 2017-12-26 | 费查尔德半导体有限公司 | 半导体管芯封装件及其制造方法 |
CN103420331A (zh) * | 2012-05-23 | 2013-12-04 | 飞思卡尔半导体公司 | 腔式半导体封装及其封装方法 |
CN103420331B (zh) * | 2012-05-23 | 2016-12-28 | 飞思卡尔半导体公司 | 腔式半导体封装及其封装方法 |
Also Published As
Publication number | Publication date |
---|---|
US7285866B2 (en) | 2007-10-23 |
US6930397B2 (en) | 2005-08-16 |
EP1466357A4 (en) | 2007-08-15 |
WO2003060984A1 (en) | 2003-07-24 |
JP2005515635A (ja) | 2005-05-26 |
US20050224960A1 (en) | 2005-10-13 |
JP4535730B2 (ja) | 2010-09-01 |
EP1466357A1 (en) | 2004-10-13 |
EP1466357B1 (en) | 2017-12-13 |
US20030132531A1 (en) | 2003-07-17 |
JP2007295014A (ja) | 2007-11-08 |
CN100559557C (zh) | 2009-11-11 |
AU2002361873A1 (en) | 2003-07-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100559557C (zh) | 管芯底部与支撑板分隔开的表面安装封装 | |
CN1311548C (zh) | 具有改进的散热能力的半导体器件封装 | |
US7541681B2 (en) | Interconnection structure, electronic component and method of manufacturing the same | |
US8222716B2 (en) | Multiple leadframe package | |
US9147637B2 (en) | Module including a discrete device mounted on a DCB substrate | |
TWI430407B (zh) | 堆疊式雙晶片封裝及其製備方法 | |
JP6509885B2 (ja) | 半導体チップの端子を有するdc−dcコンバータ | |
US8314489B2 (en) | Semiconductor module and method for production thereof | |
US20090189291A1 (en) | Multi-chip module | |
CN102217062B (zh) | 半导体封装及用于制造半导体封装的方法 | |
CN1675765A (zh) | 高功率mcm封装 | |
EP3648159B1 (en) | Semiconductor package and method of fabricating a semiconductor package | |
JP2005506691A5 (zh) | ||
KR20140032923A (ko) | 와이어리스 모듈 | |
JP2008147604A (ja) | 突起状バンプまたはボールを有する、封止されたリードフレームを特徴とする半導体デバイスパッケージ | |
JP2005064479A (ja) | 回路モジュール | |
KR101644913B1 (ko) | 초음파 용접을 이용한 반도체 패키지 및 제조 방법 | |
US20230402423A1 (en) | Semiconductor package having at least one electrically conductive spacer and method of forming the semiconductor package | |
CN1577824A (zh) | 制造一种直接芯片连接装置及结构的方法 | |
US20130256920A1 (en) | Semiconductor device | |
CN115425007A (zh) | 一种芯片连接件及功率模块 | |
CN113496958B (zh) | 基板及封装结构 | |
CN1695243A (zh) | 在倒装芯片贴装封装工艺中保持焊料厚度的方法 | |
TWI278076B (en) | Surface mounted package with die bottom spaced from support board | |
CN115579346A (zh) | 功率模块的连接结构、封装结构以及制作工艺 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: American California Patentee after: Infineon science and technology Americas Address before: American California Patentee before: International Rectifier Corporation |
|
CP01 | Change in the name or title of a patent holder | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091111 Termination date: 20201223 |
|
CF01 | Termination of patent right due to non-payment of annual fee |