CN1253638A - 吸光聚合物 - Google Patents
吸光聚合物 Download PDFInfo
- Publication number
- CN1253638A CN1253638A CN98804588A CN98804588A CN1253638A CN 1253638 A CN1253638 A CN 1253638A CN 98804588 A CN98804588 A CN 98804588A CN 98804588 A CN98804588 A CN 98804588A CN 1253638 A CN1253638 A CN 1253638A
- Authority
- CN
- China
- Prior art keywords
- alkyl
- acid
- polymkeric substance
- sulfonic acid
- carboxylic acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D333/00—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom
- C07D333/02—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom not condensed with other rings
- C07D333/46—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom not condensed with other rings substituted on the ring sulfur atom
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D401/00—Heterocyclic compounds containing two or more hetero rings, having nitrogen atoms as the only ring hetero atoms, at least one ring being a six-membered ring with only one nitrogen atom
- C07D401/02—Heterocyclic compounds containing two or more hetero rings, having nitrogen atoms as the only ring hetero atoms, at least one ring being a six-membered ring with only one nitrogen atom containing two hetero rings
- C07D401/04—Heterocyclic compounds containing two or more hetero rings, having nitrogen atoms as the only ring hetero atoms, at least one ring being a six-membered ring with only one nitrogen atom containing two hetero rings directly linked by a ring-member-to-ring-member bond
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D405/00—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom
- C07D405/14—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing three or more hetero rings
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D487/00—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00
- C07D487/02—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00 in which the condensed system contains two hetero rings
- C07D487/04—Ortho-condensed systems
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/30—Introducing nitrogen atoms or nitrogen-containing groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L81/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing sulfur with or without nitrogen, oxygen or carbon only; Compositions of polysulfones; Compositions of derivatives of such polymers
- C08L81/06—Polysulfones; Polyethersulfones
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F12/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F12/02—Monomers containing only one unsaturated aliphatic radical
- C08F12/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F12/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by hetero atoms or groups containing heteroatoms
- C08F12/22—Oxygen
- C08F12/24—Phenols or alcohols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F212/02—Monomers containing only one unsaturated aliphatic radical
- C08F212/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F212/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by heteroatoms or groups containing heteroatoms
- C08F212/22—Oxygen
- C08F212/24—Phenols or alcohols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2810/00—Chemical modification of a polymer
- C08F2810/20—Chemical modification of a polymer leading to a crosslinking, either explicitly or inherently
Abstract
Description
实施例 | DTP(mJ/cm2) | 分辨率 | 驻波 |
实施例13 | 170 | 0.32μm | 无 |
实施例14 | 152 | 0.30μm | 无 |
无ARC | 195 | 0.38μm | 严重 |
A.R.C.聚合物 | %振幅降低 |
无A.R.C. | 0 |
实施例13 | 88.87 |
实施例14 | 90.26 |
实施例 | 振幅比 | %振幅降低 |
AZ7805 | 29.02% | 0 |
实施例17的A.R.C.和AZ7805 | 11.11% | 61.7% |
Claims (11)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/846,986 US5981145A (en) | 1997-04-30 | 1997-04-30 | Light absorbing polymers |
US08/846,986 | 1997-04-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1253638A true CN1253638A (zh) | 2000-05-17 |
CN1160599C CN1160599C (zh) | 2004-08-04 |
Family
ID=25299496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB988045885A Expired - Lifetime CN1160599C (zh) | 1997-04-30 | 1998-04-21 | 吸光聚合物 |
Country Status (8)
Country | Link |
---|---|
US (1) | US5981145A (zh) |
EP (1) | EP0978015B1 (zh) |
JP (1) | JP3220698B2 (zh) |
KR (1) | KR100567640B1 (zh) |
CN (1) | CN1160599C (zh) |
DE (1) | DE69837918T2 (zh) |
TW (1) | TW399081B (zh) |
WO (1) | WO1998049602A1 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1828415B (zh) * | 2005-03-02 | 2010-12-29 | 株式会社东进世美肯 | 用于形成抗反射涂层的聚合物 |
CN1828414B (zh) * | 2005-03-02 | 2011-07-20 | 株式会社东进世美肯 | 用于形成抗反射涂层的聚合物 |
CN101326217B (zh) * | 2005-10-14 | 2013-03-13 | Nor-X工业公司 | 有机/无机杂化聚合物基光保护性添加剂,其制法及用途 |
CN101030037B (zh) * | 2006-02-28 | 2013-12-11 | 罗门哈斯电子材料有限公司 | 用来与外涂的光刻胶一起使用的涂料组合物 |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
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US7361444B1 (en) * | 1998-02-23 | 2008-04-22 | International Business Machines Corporation | Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof |
US6114085A (en) * | 1998-11-18 | 2000-09-05 | Clariant Finance (Bvi) Limited | Antireflective composition for a deep ultraviolet photoresist |
US6251562B1 (en) * | 1998-12-23 | 2001-06-26 | International Business Machines Corporation | Antireflective polymer and method of use |
US7709177B2 (en) * | 1999-02-23 | 2010-05-04 | International Business Machines Corporation | Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof |
KR100395904B1 (ko) * | 1999-04-23 | 2003-08-27 | 주식회사 하이닉스반도체 | 유기 반사방지 중합체 및 그의 제조방법 |
US6890448B2 (en) * | 1999-06-11 | 2005-05-10 | Shipley Company, L.L.C. | Antireflective hard mask compositions |
KR100400243B1 (ko) * | 1999-06-26 | 2003-10-01 | 주식회사 하이닉스반도체 | 유기 반사방지 중합체 및 그의 제조방법 |
US6346361B1 (en) | 1999-10-06 | 2002-02-12 | Clariant Finance (Bvi) Limited | Method for synthesizing polymeric AZO dyes |
JP2002055446A (ja) * | 2000-08-11 | 2002-02-20 | Fuji Photo Film Co Ltd | 平版印刷版原版 |
US6323303B1 (en) | 2001-03-01 | 2001-11-27 | General Electric Company | Melt polycarbonate catalyst systems |
US7070914B2 (en) | 2002-01-09 | 2006-07-04 | Az Electronic Materials Usa Corp. | Process for producing an image using a first minimum bottom antireflective coating composition |
US6844131B2 (en) | 2002-01-09 | 2005-01-18 | Clariant Finance (Bvi) Limited | Positive-working photoimageable bottom antireflective coating |
US7335319B2 (en) * | 2002-02-06 | 2008-02-26 | Arch Specialty Chemicals, Inc. | Semiconductor stress buffer coating edge bead removal compositions and method for their use |
US7238462B2 (en) * | 2002-11-27 | 2007-07-03 | Tokyo Ohka Kogyo Co., Ltd. | Undercoating material for wiring, embedded material, and wiring formation method |
EP1634673A4 (en) * | 2003-04-25 | 2009-04-08 | Nitto Denko Corp | METHOD FOR PRODUCING A LASER-TREATED PRODUCT AND AN ADHESIVE SHEET FOR A LASER TREATMENT USED FOR THIS PRODUCT |
WO2005063435A1 (ja) * | 2003-12-25 | 2005-07-14 | Nitto Denko Corporation | レーザー加工用保護シート及びレーザー加工品の製造方法 |
US20050214674A1 (en) * | 2004-03-25 | 2005-09-29 | Yu Sui | Positive-working photoimageable bottom antireflective coating |
US7691556B2 (en) * | 2004-09-15 | 2010-04-06 | Az Electronic Materials Usa Corp. | Antireflective compositions for photoresists |
US20060057501A1 (en) * | 2004-09-15 | 2006-03-16 | Hengpeng Wu | Antireflective compositions for photoresists |
JP4854061B2 (ja) | 2005-01-14 | 2012-01-11 | 日東電工株式会社 | レーザー加工品の製造方法及びレーザー加工用保護シート |
JP4873863B2 (ja) * | 2005-01-14 | 2012-02-08 | 日東電工株式会社 | レーザー加工品の製造方法及びレーザー加工用粘着シート |
EP1742108B1 (en) * | 2005-07-05 | 2015-10-28 | Rohm and Haas Electronic Materials, L.L.C. | Coating compositions for use with an overcoated photoresist |
EP1762895B1 (en) * | 2005-08-29 | 2016-02-24 | Rohm and Haas Electronic Materials, L.L.C. | Antireflective Hard Mask Compositions |
US7553905B2 (en) * | 2005-10-31 | 2009-06-30 | Az Electronic Materials Usa Corp. | Anti-reflective coatings |
JP4847762B2 (ja) * | 2006-02-14 | 2011-12-28 | 株式会社 資生堂 | カチオン性ポリマー吸着粉体、薄膜被覆粉体及びそれを含む皮膚外用剤 |
US8017296B2 (en) * | 2007-05-22 | 2011-09-13 | Az Electronic Materials Usa Corp. | Antireflective coating composition comprising fused aromatic rings |
US20090042133A1 (en) * | 2007-08-10 | 2009-02-12 | Zhong Xiang | Antireflective Coating Composition |
US8088548B2 (en) * | 2007-10-23 | 2012-01-03 | Az Electronic Materials Usa Corp. | Bottom antireflective coating compositions |
US7989144B2 (en) * | 2008-04-01 | 2011-08-02 | Az Electronic Materials Usa Corp | Antireflective coating composition |
US7932018B2 (en) * | 2008-05-06 | 2011-04-26 | Az Electronic Materials Usa Corp. | Antireflective coating composition |
KR101007031B1 (ko) * | 2008-07-11 | 2011-01-12 | 비젼아이디앤씨(주) | 액세스플로어의 누풍 방지용 배선구멍커버 |
US8455176B2 (en) * | 2008-11-12 | 2013-06-04 | Az Electronic Materials Usa Corp. | Coating composition |
US20100119980A1 (en) * | 2008-11-13 | 2010-05-13 | Rahman M Dalil | Antireflective Coating Composition Comprising Fused Aromatic Rings |
US20100119979A1 (en) * | 2008-11-13 | 2010-05-13 | Rahman M Dalil | Antireflective Coating Composition Comprising Fused Aromatic Rings |
US20100151392A1 (en) * | 2008-12-11 | 2010-06-17 | Rahman M Dalil | Antireflective coating compositions |
US20100316949A1 (en) * | 2009-06-10 | 2010-12-16 | Rahman M Dalil | Spin On Organic Antireflective Coating Composition Comprising Polymer with Fused Aromatic Rings |
US8632948B2 (en) * | 2009-09-30 | 2014-01-21 | Az Electronic Materials Usa Corp. | Positive-working photoimageable bottom antireflective coating |
US8486609B2 (en) | 2009-12-23 | 2013-07-16 | Az Electronic Materials Usa Corp. | Antireflective coating composition and process thereof |
US8623589B2 (en) | 2011-06-06 | 2014-01-07 | Az Electronic Materials Usa Corp. | Bottom antireflective coating compositions and processes thereof |
KR101606990B1 (ko) * | 2013-06-19 | 2016-03-28 | 주식회사 엘지화학 | 적층체 및 이를 포함하는 박막형 태양전지 |
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US5693691A (en) * | 1995-08-21 | 1997-12-02 | Brewer Science, Inc. | Thermosetting anti-reflective coatings compositions |
DE69706288T2 (de) * | 1996-03-07 | 2002-05-16 | Clariant Finance Bvi Ltd | Antireflexions-unterbeschichtungen durch brechungsindexmodifikation mit anomaler dispersion |
DE69703283T2 (de) * | 1996-03-07 | 2001-05-17 | Clariant Finance Bvi Ltd | Licht-absorbierende antireflektionsschichten mit verbesserter leistung durch brechungsindex-optimierung |
US5652297A (en) * | 1996-08-16 | 1997-07-29 | Hoechst Celanese Corporation | Aqueous antireflective coatings for photoresist compositions |
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-
1997
- 1997-04-30 US US08/846,986 patent/US5981145A/en not_active Expired - Lifetime
-
1998
- 1998-04-21 JP JP54655798A patent/JP3220698B2/ja not_active Expired - Lifetime
- 1998-04-21 CN CNB988045885A patent/CN1160599C/zh not_active Expired - Lifetime
- 1998-04-21 WO PCT/EP1998/002333 patent/WO1998049602A1/en active IP Right Grant
- 1998-04-21 EP EP98922749A patent/EP0978015B1/en not_active Expired - Lifetime
- 1998-04-21 KR KR1019997009977A patent/KR100567640B1/ko not_active IP Right Cessation
- 1998-04-21 DE DE69837918T patent/DE69837918T2/de not_active Expired - Lifetime
- 1998-04-29 TW TW087106630A patent/TW399081B/zh not_active IP Right Cessation
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1828415B (zh) * | 2005-03-02 | 2010-12-29 | 株式会社东进世美肯 | 用于形成抗反射涂层的聚合物 |
CN1828414B (zh) * | 2005-03-02 | 2011-07-20 | 株式会社东进世美肯 | 用于形成抗反射涂层的聚合物 |
CN101326217B (zh) * | 2005-10-14 | 2013-03-13 | Nor-X工业公司 | 有机/无机杂化聚合物基光保护性添加剂,其制法及用途 |
CN101030037B (zh) * | 2006-02-28 | 2013-12-11 | 罗门哈斯电子材料有限公司 | 用来与外涂的光刻胶一起使用的涂料组合物 |
Also Published As
Publication number | Publication date |
---|---|
TW399081B (en) | 2000-07-21 |
KR20010020357A (ko) | 2001-03-15 |
US5981145A (en) | 1999-11-09 |
WO1998049602A1 (en) | 1998-11-05 |
EP0978015B1 (en) | 2007-06-13 |
JP3220698B2 (ja) | 2001-10-22 |
DE69837918D1 (de) | 2007-07-26 |
DE69837918T2 (de) | 2008-02-21 |
CN1160599C (zh) | 2004-08-04 |
EP0978015A1 (en) | 2000-02-09 |
JP2000512336A (ja) | 2000-09-19 |
KR100567640B1 (ko) | 2006-04-05 |
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