CN1227745C - 垂直金属-氧化物-半导体晶体管及其制造方法 - Google Patents
垂直金属-氧化物-半导体晶体管及其制造方法 Download PDFInfo
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- CN1227745C CN1227745C CNB011116900A CN01111690A CN1227745C CN 1227745 C CN1227745 C CN 1227745C CN B011116900 A CNB011116900 A CN B011116900A CN 01111690 A CN01111690 A CN 01111690A CN 1227745 C CN1227745 C CN 1227745C
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 73
- 238000000034 method Methods 0.000 title claims description 59
- 238000004519 manufacturing process Methods 0.000 claims abstract description 32
- 230000003647 oxidation Effects 0.000 claims description 75
- 238000007254 oxidation reaction Methods 0.000 claims description 75
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 45
- 229920005591 polysilicon Polymers 0.000 claims description 43
- 238000009792 diffusion process Methods 0.000 claims description 22
- 238000005530 etching Methods 0.000 claims description 21
- 238000000151 deposition Methods 0.000 claims description 20
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 235000003140 Panax quinquefolius Nutrition 0.000 claims 1
- 240000005373 Panax quinquefolius Species 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 5
- 230000003321 amplification Effects 0.000 description 7
- 238000003199 nucleic acid amplification method Methods 0.000 description 7
- 229910052796 boron Inorganic materials 0.000 description 4
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- 101100207343 Antirrhinum majus 1e20 gene Proteins 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
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- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
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- 238000012937 correction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/781—Inverted VDMOS transistors, i.e. Source-Down VDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
- H01L29/42368—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity the thickness being non-uniform
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
- H01L29/4238—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the surface lay-out
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP80755/00 | 2000-03-22 | ||
JP80755/2000 | 2000-03-22 | ||
JP2000080755A JP3910335B2 (ja) | 2000-03-22 | 2000-03-22 | 縦形mosトランジスタ及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1314713A CN1314713A (zh) | 2001-09-26 |
CN1227745C true CN1227745C (zh) | 2005-11-16 |
Family
ID=18597815
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB011116900A Expired - Fee Related CN1227745C (zh) | 2000-03-22 | 2001-03-22 | 垂直金属-氧化物-半导体晶体管及其制造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6511885B2 (zh) |
JP (1) | JP3910335B2 (zh) |
CN (1) | CN1227745C (zh) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7084456B2 (en) * | 1999-05-25 | 2006-08-01 | Advanced Analogic Technologies, Inc. | Trench MOSFET with recessed clamping diode using graded doping |
US6445037B1 (en) * | 2000-09-28 | 2002-09-03 | General Semiconductor, Inc. | Trench DMOS transistor having lightly doped source structure |
US6716709B1 (en) * | 2002-12-31 | 2004-04-06 | Texas Instruments Incorporated | Transistors formed with grid or island implantation masks to form reduced diffusion-depth regions without additional masks and process steps |
US7279743B2 (en) | 2003-12-02 | 2007-10-09 | Vishay-Siliconix | Closed cell trench metal-oxide-semiconductor field effect transistor |
US6906380B1 (en) | 2004-05-13 | 2005-06-14 | Vishay-Siliconix | Drain side gate trench metal-oxide-semiconductor field effect transistor |
US8183629B2 (en) * | 2004-05-13 | 2012-05-22 | Vishay-Siliconix | Stacked trench metal-oxide-semiconductor field effect transistor device |
WO2006011882A1 (en) * | 2004-06-30 | 2006-02-02 | Advanced Analogic Technologies, Inc. | Trench mosfet with recessed clamping diode |
CN101208803B (zh) * | 2005-05-24 | 2012-05-30 | 维税-希力康克斯公司 | 沟槽金属氧化物半导体场效应晶体管 |
US8471390B2 (en) * | 2006-05-12 | 2013-06-25 | Vishay-Siliconix | Power MOSFET contact metallization |
KR100868542B1 (ko) * | 2006-12-29 | 2008-11-13 | 어드밴스드 아날로직 테크놀로지스 인코퍼레이티드 | 리세스된 클램핑 다이오드를 구비한 트렌치 mosfet |
US8368126B2 (en) * | 2007-04-19 | 2013-02-05 | Vishay-Siliconix | Trench metal oxide semiconductor with recessed trench material and remote contacts |
US7960782B2 (en) * | 2007-12-26 | 2011-06-14 | Rohm Co., Ltd. | Nitride semiconductor device and method for producing nitride semiconductor device |
US20090267140A1 (en) * | 2008-04-29 | 2009-10-29 | Fu-Yuan Hsieh | Mosfet structure with guard ring |
US8164139B2 (en) * | 2008-04-29 | 2012-04-24 | Force Mos Technology Co., Ltd. | MOSFET structure with guard ring |
CN101567320B (zh) * | 2009-06-04 | 2012-06-20 | 上海宏力半导体制造有限公司 | 功率mos晶体管的制造方法 |
US10205017B2 (en) * | 2009-06-17 | 2019-02-12 | Alpha And Omega Semiconductor Incorporated | Bottom source NMOS triggered Zener clamp for configuring an ultra-low voltage transient voltage suppressor (TVS) |
JP5597963B2 (ja) * | 2009-10-09 | 2014-10-01 | 富士電機株式会社 | 半導体装置 |
US9306056B2 (en) | 2009-10-30 | 2016-04-05 | Vishay-Siliconix | Semiconductor device with trench-like feed-throughs |
US8604525B2 (en) | 2009-11-02 | 2013-12-10 | Vishay-Siliconix | Transistor structure with feed-through source-to-substrate contact |
KR101095802B1 (ko) * | 2010-01-07 | 2011-12-21 | 주식회사 하이닉스반도체 | 반도체 소자 및 그의 제조 방법 |
JP6022777B2 (ja) * | 2012-02-28 | 2016-11-09 | エスアイアイ・セミコンダクタ株式会社 | 半導体装置の製造方法 |
JP2015220408A (ja) * | 2014-05-20 | 2015-12-07 | 住友電気工業株式会社 | 炭化珪素半導体装置およびその製造方法 |
US9425304B2 (en) | 2014-08-21 | 2016-08-23 | Vishay-Siliconix | Transistor structure with improved unclamped inductive switching immunity |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4992390A (en) * | 1989-07-06 | 1991-02-12 | General Electric Company | Trench gate structure with thick bottom oxide |
JPH07122749A (ja) * | 1993-09-01 | 1995-05-12 | Toshiba Corp | 半導体装置及びその製造方法 |
JP3481287B2 (ja) * | 1994-02-24 | 2003-12-22 | 三菱電機株式会社 | 半導体装置の製造方法 |
US6198127B1 (en) * | 1999-05-19 | 2001-03-06 | Intersil Corporation | MOS-gated power device having extended trench and doping zone and process for forming same |
-
2000
- 2000-03-22 JP JP2000080755A patent/JP3910335B2/ja not_active Expired - Fee Related
-
2001
- 2001-01-23 US US09/767,505 patent/US6511885B2/en not_active Expired - Lifetime
- 2001-03-22 CN CNB011116900A patent/CN1227745C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20010023959A1 (en) | 2001-09-27 |
CN1314713A (zh) | 2001-09-26 |
JP3910335B2 (ja) | 2007-04-25 |
US6511885B2 (en) | 2003-01-28 |
JP2001267571A (ja) | 2001-09-28 |
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PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160311 Address after: Chiba County, Japan Patentee after: SEIKO INSTR INC Address before: Chiba County, Japan Patentee before: Seiko Instruments Inc. |
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CP01 | Change in the name or title of a patent holder |
Address after: Chiba County, Japan Patentee after: EPPs Lingke Co. Ltd. Address before: Chiba County, Japan Patentee before: SEIKO INSTR INC |
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CP01 | Change in the name or title of a patent holder | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20051116 Termination date: 20200322 |
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CF01 | Termination of patent right due to non-payment of annual fee |