CN1207529C - 应变传感器及其制造方法 - Google Patents

应变传感器及其制造方法 Download PDF

Info

Publication number
CN1207529C
CN1207529C CNB028032640A CN02803264A CN1207529C CN 1207529 C CN1207529 C CN 1207529C CN B028032640 A CNB028032640 A CN B028032640A CN 02803264 A CN02803264 A CN 02803264A CN 1207529 C CN1207529 C CN 1207529C
Authority
CN
China
Prior art keywords
weight
electrode
less
metal substrate
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028032640A
Other languages
English (en)
Chinese (zh)
Other versions
CN1479859A (zh
Inventor
中尾惠一
水上行雄
石田裕昭
乙部敏郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of CN1479859A publication Critical patent/CN1479859A/zh
Application granted granted Critical
Publication of CN1207529C publication Critical patent/CN1207529C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49204—Contact or terminal manufacturing
    • Y10T29/49224—Contact or terminal manufacturing with coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of Force In General (AREA)
  • Pressure Sensors (AREA)
CNB028032640A 2001-10-02 2002-10-02 应变传感器及其制造方法 Expired - Fee Related CN1207529C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP306132/2001 2001-10-02
JP2001306132 2001-10-02

Publications (2)

Publication Number Publication Date
CN1479859A CN1479859A (zh) 2004-03-03
CN1207529C true CN1207529C (zh) 2005-06-22

Family

ID=19125816

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028032640A Expired - Fee Related CN1207529C (zh) 2001-10-02 2002-10-02 应变传感器及其制造方法

Country Status (6)

Country Link
US (2) US7010986B2 (enExample)
EP (1) EP1355122B1 (enExample)
JP (1) JP4111136B2 (enExample)
CN (1) CN1207529C (enExample)
DE (1) DE60235346D1 (enExample)
WO (1) WO2003031907A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100562727C (zh) * 2004-12-20 2009-11-25 松下电器产业株式会社 应变传感器及其制造方法
JP2007255953A (ja) * 2006-03-22 2007-10-04 Hitachi Ltd 力学量測定装置
US7441467B2 (en) * 2006-07-12 2008-10-28 Cts Corporation Compression strain sensor
CN103983182A (zh) * 2014-05-27 2014-08-13 相斌辉 便携式应变片粘贴工艺
WO2016027495A1 (ja) * 2014-08-22 2016-02-25 株式会社村田製作所 圧電センサ及び検出装置
JP6794293B2 (ja) * 2017-02-24 2020-12-02 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
CN107818850B (zh) * 2017-09-25 2019-04-16 江苏时恒电子科技有限公司 一种热敏电阻用低扩散率的复合铜电极材料
JP2019066453A (ja) * 2017-09-29 2019-04-25 ミネベアミツミ株式会社 ひずみゲージ
CN116086663B (zh) * 2023-02-13 2024-01-30 无锡胜脉电子有限公司 一种力传感器的制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54129889A (en) * 1978-03-31 1979-10-08 Hitachi Ltd Strain measuring unit
GB8303555D0 (en) * 1983-02-09 1983-03-16 Strain Measurement Dev Ltd Strain gauges
US4578735A (en) * 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm
JP3140081B2 (ja) * 1991-05-14 2001-03-05 株式会社日立製作所 電子回路のノイズ除去装置、その製造方法、金属ケース、電子機器およびエンジン制御システム
US5406852A (en) * 1992-03-18 1995-04-18 Matsushita Electric Industrial Co., Ltd. Pressure sensor having a resistor element on a glass dryer with electrodes connected thereto
JPH07167720A (ja) 1993-12-14 1995-07-04 Matsushita Electric Ind Co Ltd 圧力センサ
JPH07307210A (ja) * 1994-05-12 1995-11-21 Matsushita Electric Ind Co Ltd 金属抵抗体の製造方法および力学量センサ
JPH08304200A (ja) * 1995-05-09 1996-11-22 Matsushita Electric Ind Co Ltd 感歪み抵抗体ペーストおよびこれを用いた力学量センサ
JPH09243472A (ja) 1996-03-08 1997-09-19 Matsushita Electric Ind Co Ltd 力学量センサ
JPH10148591A (ja) 1996-09-19 1998-06-02 Fuji Koki Corp 圧力検出装置
DE19948045B4 (de) 1998-10-06 2008-01-10 Takata Corp. Sitzgewichtsmeßvorrichtung
JP3468728B2 (ja) 1998-10-06 2003-11-17 タカタ株式会社 シート重量計測装置
US6427539B1 (en) * 2000-07-31 2002-08-06 Motorola, Inc. Strain gauge
US6842965B2 (en) * 2000-12-28 2005-01-18 Matsushita Electric Industrial Co., Ltd. Method for manufacturing a strain detector
US6653009B2 (en) * 2001-10-19 2003-11-25 Sarnoff Corporation Solid oxide fuel cells and interconnectors

Also Published As

Publication number Publication date
JPWO2003031907A1 (ja) 2005-01-27
EP1355122A1 (en) 2003-10-22
US7181831B2 (en) 2007-02-27
WO2003031907A1 (en) 2003-04-17
JP4111136B2 (ja) 2008-07-02
DE60235346D1 (enExample) 2010-04-01
CN1479859A (zh) 2004-03-03
US20050028605A1 (en) 2005-02-10
EP1355122B1 (en) 2010-02-17
EP1355122A4 (en) 2007-05-23
US7010986B2 (en) 2006-03-14
US20040079162A1 (en) 2004-04-29

Similar Documents

Publication Publication Date Title
TWI517186B (zh) Thermistor and its manufacturing method
CN103310979B (zh) 多层陶瓷电子元件
US6233817B1 (en) Method of forming thick-film hybrid circuit on a metal circuit board
CN1207529C (zh) 应变传感器及其制造方法
TWI275113B (en) Electronic component and manufacturing method thereof
JP6225295B2 (ja) 抵抗器及び温度センサ
WO2008010642A1 (en) Ceramic component and method of manufacturing the same
JP3331083B2 (ja) 低温焼成セラミック回路基板
GB2149222A (en) Multilatered ceramic substrate and method of making the same
CN101874426A (zh) 陶瓷加热器及具备该陶瓷加热器的氧传感器及烫发器
JP4055775B2 (ja) 荷重センサ及びその製造方法
KR101883039B1 (ko) 칩 저항 소자
CN1178566C (zh) 多层板及其制造方法
CN1637957A (zh) 用于ltcc带的厚膜导体糊状组合物
JP6659915B2 (ja) 温度センサおよび温度測定装置
CN100562727C (zh) 应变传感器及其制造方法
CN105758899A (zh) 一种叠层式气敏传感器结构及其制造方法
KR102120235B1 (ko) 회로 기판 및 이것을 사용한 서멀 프린트 헤드
JP2006194598A (ja) 歪センサとその製造方法
JP3807257B2 (ja) セラミック部品の製造方法
WO2000069220A1 (fr) Plaque chauffante et pate conductrice
JP2006242797A (ja) 歪センサとその製造方法
JP2615970B2 (ja) 内部に導体、抵抗体を配線したＡ▲ｌ▼Ｎ多層基板の製造方法
JP2007085993A (ja) 歪センサとその製造方法
JPH06244363A (ja) 厚膜多層基板の製造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20050622

Termination date: 20191002