CN1173546A - 金合金引线及制造凸起的方法 - Google Patents
金合金引线及制造凸起的方法 Download PDFInfo
- Publication number
- CN1173546A CN1173546A CN97113568A CN97113568A CN1173546A CN 1173546 A CN1173546 A CN 1173546A CN 97113568 A CN97113568 A CN 97113568A CN 97113568 A CN97113568 A CN 97113568A CN 1173546 A CN1173546 A CN 1173546A
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- weight
- gold
- wire
- alloy wire
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- 229910001020 Au alloy Inorganic materials 0.000 title claims abstract description 57
- 239000003353 gold alloy Substances 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims description 49
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000010931 gold Substances 0.000 claims abstract description 38
- 229910052737 gold Inorganic materials 0.000 claims abstract description 34
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 21
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 20
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 19
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 16
- 238000003466 welding Methods 0.000 claims description 24
- 239000011324 bead Substances 0.000 claims description 19
- 229910045601 alloy Inorganic materials 0.000 claims description 14
- 239000000956 alloy Substances 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 8
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract description 47
- 239000011575 calcium Substances 0.000 abstract description 16
- 229910052797 bismuth Inorganic materials 0.000 abstract description 15
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 abstract description 5
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052790 beryllium Inorganic materials 0.000 abstract description 4
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 abstract description 4
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 abstract description 4
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 abstract description 4
- 210000001217 buttock Anatomy 0.000 description 41
- 238000005476 soldering Methods 0.000 description 35
- 230000000052 comparative effect Effects 0.000 description 19
- 238000012360 testing method Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 239000004411 aluminium Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000010008 shearing Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 239000001995 intermetallic alloy Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005482 strain hardening Methods 0.000 description 2
- 241000218202 Coptis Species 0.000 description 1
- 235000002991 Coptis groenlandica Nutrition 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000003019 stabilising effect Effects 0.000 description 1
- 210000005239 tubule Anatomy 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K35/3013—Au as the principal constituent
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Abstract
一种金合金引线,其中把按重量比为0.2到5.0%的Pd和按重量比为1到100ppm的Bi加入到按重量比至少为99.99%纯度的金中。最好,进一步把按重量比为3到250ppm含量的选自Y、La、Ca、Be组中的至少一种元素加入到所述的金中。金合金引线特别适于形成金凸起。
Description
本发明涉及金合金引线,特别适合用在IC芯片的无引线焊接中形成金合金凸起,及形成金合金凸起的方法。
利用引线焊接方法,通过引线连接IC芯片电极焊盘和外端等等。
利用引线焊接方法获得的半导体器件表示在图5,其中,标号11表示半导体元件,12表示电极,13表示金合金引线,14表示引线框架,H表示从半导体元件的表面到曲线顶部的高度(下文称为环形高度)。一般,首先把引线13焊接到半导体元件11的电极12上面,然后把它拉成环形,再把引线用超声焊接方法焊接到引线框架14上面。
引线焊接的方法,需要一个难于减低半导体器件高度的高度。
因此希望所用引线焊接方法减少环形高度。
第二,为了克服引线焊接方法的上述缺点,利用公知的无引线焊接方法,其中把电路板的外部接点或电极焊接到形成在IC芯片电极焊盘上的突起上。利用这种无引线焊接方法,和引线焊接方法比较,能减少连接高度,因为利用它们之间的凸起,直接把电极焊盘焊接到外端等位置上。这样,无引线焊接,有利于用在较薄的封装。
日本未审查的专利公开48-7678和59-208751和其它的专利中公开了在电极焊盘上形成凸起的方法。这些方法包括,加热引线末端形成熔珠,利用压焊夹具把熔珠压焊到IC芯片的电极焊盘上,把带有引线的压焊夹具向上拉,在靠近熔珠的引线部分拉断引线,由此,在电极焊盘处形成凸起。这种方法,许可利用关于常规引线焊接方法的装置,不用任何变化,并且得到高的生产率,但是存在缺点,即在熔珠上残留引线,即所谓尾线不能被均匀地缩短。如果在连接步骤,线尾长度太长,则位于凸起上面的线尾弯曲横向伸出,可能引起短路。
为了解决上述问题,日本未审查的专利申请No、62-152143公开了一种方法,其中在把熔珠压焊到电极焊盘后,利用切割刀具在靠近熔珠的位置把引线切成凹槽,接着拉引线,以便稳定地获得具有短尾线的凸起,但是这增加了附加步骤,因而降低了生产率。
形成凸起的优选材料是金、形成电极焊盘的材料是铝。但是众所周知,当把通过加热金线末端形成的熔珠压焊到铝电极焊盘上时,则在金珠和铝电极焊盘之间的连接部分形成Au-Al金属间合金。当连接部分保持在高温时,会增加Au-Al金属间合金的数量,并且减少连接部分的焊接强度。因此,需要有改善焊接电极焊盘和外端用的凸起材料的措施。
本发明的目的是提供金合金线,即使把电极焊盘上凸起长时间地曝露在高温下,其也具有高焊接强度,(下文称为“高温焊接强度”),还提供利用引线制造凸起的方法。
本发明的另一个目的是提供一种金合金引线,当在金属末端形成熔珠的方法中利用该引线时,金合金引线稳定地提供短的尾线,该熔珠被焊接到IC芯片的电极焊盘上,然后向上拉断引线,该引线上没有凹槽(下文称为“简单拉断的尾线”)。
本发明的又一目的是提供金合金引线,当进行焊接时,其允许减少环形高度。
本发明者努力研究发现,利用加入到高纯度金中的元素钯(Pd)和铋(Bi)的协同作用,能达到上述目的。
于是,通过提供其中在至少按重量达到99.99%纯度的金中加入按重量为0.2到5.0%的钯(Pd)和按重量为1到100ppm的铋(Bi)的金合金,达到本发明上述的和其它的目的,特征和优点。
最好,上述金合金引线至少还包括按重量含有3到250ppm的选自钇(Y)、镧(La)、钙(Ca)、铍(Be)中的至少一种元素。
本发明提供形成金合金凸起的方法,它包括下述步骤,通过毛细管在金合金引线末端形成珠,降低所述毛细管把所述珠压焊到IC芯片的电极上面,上拉金合金引线,从焊接到所述电极上的所述珠上拉断所述金合金引线,因此在所述IC芯片的所述电极上,形成金合金凸起,其中所述金合金线有下列组成,把按重量比为0.2到5.0%的钯,按重量为1到100ppm的铋,和最好按重量为3到250ppm的选自钇、镧、钙、铍中的至少一种元素加入到纯度至少按重量比为99.99%的金中。
本发明还提供一种形成金合金凸起的方法,包括下列步骤,通过毛细管在金合金引线末端形成熔珠,降低所述的毛细管把所述熔珠压焊到IC芯片的电极上,在上述熔珠上的所述金合金线上形成凹槽,拉所述金合金引线,从焊接到所述电极的所述上拉断所述合金线,由此,在所述IC芯片的所述电极上形成金合金凸起,其中金合金引线具有下列组成,其中,把按重量为0.2到5%的钯,按重量为1到100ppm的铋和最好为按重量3到250ppm的选自钇、镧、钙、铍中的至少一种元素加入到按重量至少为99.99%的金中。
本发明的金合金引线不仅用在无引线焊接中也用在有引线焊接中。
图1A到图1C表示利用简单的拉引线形成凸起的方法;
图2A、2B、2B’、2C表示利用拉带凹槽的引线形成凸起的方法;
图3是图1C凸起部分的扩大剖视图。
图4是图2B’中凹槽部分的扩大剖视图。
图5是表示其中制成引线焊接的半导体器件。
本发明金合金引线的特征在于,具有如下的组成,把预定量的Pd和Bi(下文称作为第1组元素),最好把预定量的Y、La、Ca和Be中的至少一种元素(下文称为第2组元素)一起加入到高纯度金中。
本发明使用的高纯度金是具有下述纯度的高纯度金,其纯度按重量至少为99.99%,优选为按重量至少为99.995.%,最好为按重量为99.999%。
(1)按照本发明把预定量的Pd和Bi加入到上述的纯金中,获得协同效果,以致于保持高的高温焊接强度,可以使简单拉断的尾线长度稳定地缩短。
外加Pd与Bi共存,则提供优良的效果,以致于保持高的高温焊接强度,并使简单拉断的尾线的长度均匀地缩短。如果Pd含量小于按重量比0.2%,和当Pd含量按重量比是0.2%或以上的情况相比,即使共同存在Bi的规定数量,其高温焊接强度降低、简单拉断的尾线长度增长。如果按重量比Pd含量大于5.0%,和当按重量比Pd含量是5.0%以下,即使共存Bi的所述规定含量,所得到的情况相比,则简单地拉断的尾线的长度增长。所以,规定Pd按重量比为0.2到5.0%的含量,并且共存Bi的规定含量。
外加Bi与Pd共存,提供优良效果,以致于保持高的高温焊接强度,使简单拉断的尾线的长度均匀地缩短。如果Bi的含量按重量比小于1ppm,和当Bi的含量按重量比是1ppm以上,即使共存Pd所述规定的含量所获得的情况相比,则简单的拉断的尾线的长度较长和均匀性差。如果Bi的含量按重比大于100ppm,即使共存Pd的所述规定含量,在形成凸起之前,在形成珠的阶段,在珠的表面出现针孔、和Bi的含量按重量比是100ppm以下的情况相比出现的次数更多。所以,规定Bi的含量按重量比为1到100ppm,并且共存Pd的规定含量。
在共存Pd规定含量的情况,Bi优选的含量,按重量比是1到40ppm。
于是,按照本发明,能获得保持高温焊接强度的效果和稳定地形成简短的拉断的尾线。
(2)在上述合金引线中,即使还加入其它元素到合金线中,基本上能获得上述效果。通常,如果加入到线中的除了Pd和Bi以外的其它元素的总量、按重量比不大于250ppm,则不损坏通过加入Pd和Bi规定量所获得的效果。
于是,即使加入除Pd、Bi以外的其它元素,通常保持本发明的效果,但具体地的说,按重量比加入3到250ppm含量的Y、La、Ca和Be中的至少一种元素、则获得简短拉断的尾线稳定效果是相等的,但改善了高温焊接强度。通过加入Y、La、Ca、Be中任一种元素,可能获得附加效果,因此,这些元素中的每一种元素是优选的附加元素。特别是,要加入这些元素中的至少3种元素。更具体地说,加入至少包括Y、La、Ca3种元素。这种情况则进一步改善了高温焊接强度。至少第2组元素中的一种元素的优选含量按重量比是3到70ppm。
即使加入第2组中一种或多种元素,但是不加入第1组中元素规定的含量,则改善简单拉断的尾线的长度和高温焊接强度。但是,如果在存在第1组元素的规定含量情况下,把第2组中一种或者多种元素加入到金合金引线中,则简单拉断的尾线的均匀性和高温焊接强度是更优良。如果加入第2组中一种或多种元素和第1组元素中的Bi元素的规定含量,但不加入第1组元素中的Pd元素的规定含量,则改善高温焊接强度和缩短简单拉断的尾线长度的效果不充分。因此,如果加入Bi的规定含量,则应该存在Pd的规定含量。于是,按照本发明,一般认为,第2组含量、即Y、La、Ca和Be中的至少一种元素应当和Pd、Bi的规定含量共存,而且它的含量按重量比应当是3到250ppm,优选为按重量比为3到70ppm。
应当注意,本发明金合金引线可以包括下列元素,重量比为0.2到5.0%的Pd,重量比为1到100ppm的Bi,还有重量比优选为3到250ppm的至少选自Y、La、Ca、Be组中的一种元素,其余的是金和不可避免的杂质。
按照本发明,也提供了利用如上所述的金合金形成凸起的方法。
(3)简单拉断方法
参见图1A到图1C叙述简单拉断方法。
如图1A所示,本发明的金合金引线2通过毛细管1、电焊枪3面对引线2的末端,在电焊枪和引线2的末端之间通过放电加热引线的末端、形成熔珠4。
如图1B所示,降低毛细管1,把熔珠压焊到IC芯片6上的电极5。虽然没用图表示,由于同时把超声波通过毛细管1加到珠4上和利用较热的块加热IC芯片6,则热焊接珠4,使珠4变形成有2个台阶的扁平形状4’。
如图1C所示,上拉毛细管1,同时夹持器夹住金合金引线2。结果,拉断引线2,分开变形珠4’,留下凸起4’,即把珠压焊到IC芯片6的电极5上面。
此后,把凸起4’的顶部连到外部引线端(没表示)。
此处,如图1C所示,部分线保留在凸起4’的顶部。图3是该凸起4’的扩大图。本发明利用的尾线长度指的是线段8的长度L,残留在凸起4’上。
当利用这种简单拉断方法形成凸起时,按照本发明利用的金合金引线,可能均匀地缩短尾线(简单拉断的尾线)的长度。
(4)利用凹槽拉断方法。
参见图2A、2B、2B’、2C叙述利用凹槽的拉断方法。
如图2A-图2B所示,把珠4压焊到IC芯片6的电极5上面,使其变形为具有2个台阶的扁平状或山丘状,与前述图1A和图1B所述的情况相同。
如图2B’所示,形成凹槽刀具7的一尖锐刀口从一侧接近位于具有2个台阶的扁平片或山丘状部分4’上面的金合金引线2,形成凹槽或者凹口。图4是这段扩大的剖视图,表示凹槽或者凹口。凹槽或凹口9的形状不限于V-形状。
如图2C所示,以和图1C所示相同的方法上拉引线2,把引线2从焊珠4’处拉断或切断,于是,在IC芯片6的电极上形成凸起4’。
把凸起4’的顶部和外引线端相连,但对此没有表示。
这种情况,在凸起4’处留下引线残留部分8。
利用凹槽的拉断方法是较好的,因为通过设定凹槽部位,可以把线尾长度控制到所要求的长度。
可能利用导电材料连接凸起4’和外引线端。
例1
按重量比含量为99.99%的高纯度金,和有预定含量的Pd、Bi的混合物,在真空炉中熔化,浇注获得如表1所示组分的金合金锭,即按重量比为0.2%的Pd和按重量比为20ppm的Bi。利用槽形辊压拉断机冷加工合金锭、中间进行退火、以便获得直径为25μm的细线。最后退火该线,使其具有2%到3%的延伸率。
利用如图1A到图1C所示的超声热压焊接方法,由引线焊接机把金合金引线焊接到IC芯片的电极上面。然后简单向上拉引线焊接,形成10个凸起。
通过测量尾线长度,进行高温焊接试验,观察凸起或珠的外部特性、来检测获得的凸起。表1表示检查的结果。
例2到41和比较例1到9
进行和例1相同的工序和检测、除了如表1到表3所示的制造线的组成以外。
(测量方法)
(1)尾线长度
利用长度测量显微镜、测量各例和比较例样品的尾线长度。然后计算平均长度和标准偏差。
(2)高温焊接强度
把各例和比较例样品放入300℃的恒温炉中经过500小时,接着用剪切强度测量机测量剪切强度。取剪切强度的平均值作为高温焊接强度。
(3)珠的外部特性
当珠形成时用显微镜观察球的外部特性,确定珠的外表面上是否有针孔。当看见针孔时,认为结果是坏的。当没看见针孔时,认为是好的。在表中,是○表示“好的”,用×表示“坏的”。
(试验和测试结果)
(1)把Pd和Bi(第1组元素)按规定量加入金中的例1到例6中,获得下述优良效果。
(i)平均尾线长是33.4到39.6μm,非均匀尾线长度的标准偏差为5.0到8.8μm。尾线长度短而且均匀。
(ii)高温焊接强度在42.1到56.2gf。
(iii)在任何例中没有观察到针孔。
(2)除了Pd和Bi(第1组元素)规定量以外,还加入Y、La、Ca、Be(第2组元素)中至少一种元素的规定量到金中,则显示出优良的下述效果。特别是高温焊接强度比只加入第1组元素的情况有更好的效果。
(i)平均尾线长度是31.1到37.6μm,具有尾线长度非均匀性的尾线长度标准偏差是4.4到4.9μm。尾线长度短而且均匀。
(ii)高温焊接强度是42.8到67.4gf。
(iii)通过加入第2组元素,进一步改善了高温焊接强度。
(a)把例1和把第2组元素的一种或多种进一步加入到例1的金中时的例7、13、19进行比较,则改善高温焊接强度,从42.1gf变到42.8到43.3gf。
(b)当比较例2-6和进一步把第2组中一个或多个元素加入到例2-6中的相对应例时,同样地改善了高温焊接强度。
(IV)在任何例中都没有观察到针孔。
(V)在加入第2组中的三种以上的元素的例40到41中,高温焊接强度是最好的,为67.2到67.4gf。
(3)在没加入第1组或第2组元素的比较例1中,平均尾线长度是75.2μm,尾线长度的标准偏差是32.3μm。高温焊接强度是5.2gf。这些结果是坏的。
(4)在比较例2、3、7和8中,加入Bi的规定含量,按重量比以小于0.2%的含量加入Pd,则平均尾线长度为46.0到50.9μm,尾线长度标准偏差是8.3到12.7μm,高温焊接强度是13.5到16.4gf。这些结果是坏的。
(5)在比较例4中,加入Bi的规定含量,按重量比以超过5%含量的加入Pd,则尾线的平均长度是58.9μm,尾线长度的标准偏差是14.4μm。这些结果是坏的。
(6)在比较例5和9中,加入Pd的规定含量,而没有加入Bi,则尾线长度的标准偏差是坏的,长度为19.5到21.4μm。高温焊接强度是33.2到36.8gf,和比较例1比较得到改善,但次于本发明的各例。
(7)在比较例6中,加入Pd的规定含量,按重量比以大于100ppm的含量加入Bi,结果观察到针孔。高温焊接强度是低的,偏差是大的,因此,其数值未列于表中。
表1
重量 | 测试条件 | 测试结果 | ||||||||||
组成 | 尾线长度(μm) | 高温焊接强度(gf) | 珠的外部特性 | |||||||||
重量% | 重量ppm | 平均值 | 标准偏差 | |||||||||
Pd | Bi | Y | La | Ca | Be | Au | ||||||
例1例2例3例4例5 | 0.20.51.05.01.0 | 202020201 | ----- | ----- | ----- | ----- | 残残残残残 | 38.233.433.536.339.6 | 6.65.25.05.08.8 | 42.155.856.255.046.8 | ○○○○○ | |
例6例7例8例9例10 | 1.00.20.51.05.0 | 10020202020 | -10-1010 | ----- | ----- | ----- | 残残残残残 | 37.434.334.931.133.6 | 5.26.66.86.24.7 | 47.342.857.257.756.0 | ○○○○○ | |
例11例12例13例14例15 | 1.01.00.20.51.0 | 1100202020 | 1010--- | --10-10 | ----- | 残残残残残 | 37.137.136.736.534.9 | 7.15.87.27.26.3 | 47.254.443.155.858.4 | ○○○○○ | ||
例16例17例18例19例20 | 5.01.01.00.20.5 | 2011002020 | ----- | 101010-- | ---10- | ----- | 残残残残残 | 33.637.136.334.934.5 | 5.59.47.06.36.6 | 56.950.251.843.357.1 | ○○○○○ |
表2
重量 | 测试条件 | 测试结果 | ||||||||||
组成 | 尾线长度(μm) | 高温焊接强度(gf) | 珠的外部特性 | |||||||||
重量% | 重量ppm | 平均值 | 标准偏差 | |||||||||
Pd | Bi | Y | La | Ca | Be | Au | ||||||
例21例22例23例24例25 | 1.05.01.01.01.0 | 2020110020 | ----3 | ----- | 10101010- | ----- | 残残残残残 | 32.134.135.835.935.6 | 5.75.78.45.37.3 | 57.458.149.253.761.2 | ○○○○○ | |
例26例27例28例29例30 | 1.01.01.01.01.0 | 2020202020 | 250---- | -3250-- | ---3250 | ----- | 残残残残残 | 32.234.434.236.134.9 | 5.89.97.16.74.4 | 57.962.059.361.860.7 | ○○○○○ | |
例31例32例33例34例35 | 1.01.01.01.01.0 | 2020202020 | ---1010 | ---10- | ----10 | 310250-- | 残残残残残 | 36.334.132.134.833.2 | 8.16.15.85.75.1 | 61.260.458.059.862.0 | ○○○○○ | |
例36例37例38例39例40 | 1.01.01.01.01.0 | 2020202020 | 10---10 | -1010-10 | -10-1010 | 10-1010- | 残残残残残 | 33.535.237.635.733.9 | 5.85.86.15.06.0 | 59.259.858.760.267.4 | ○○○○○ | |
例41 | 1.0 | 20 | 10 | 10 | 10 | 10 | 残 | 32.7 | 4.6 | 67.2 | ○ |
表3
重量 | 测试条件 | 测试结果 | ||||||||||
组成 | 尾线长度(μ m) | 高温焊接强度(gf) | 珠的外部特性 | |||||||||
重量% | 重量ppm | 平均值 | 标准偏差 | |||||||||
Pd | Bi | Y | La | Ca | Be | Au | ||||||
比较例1比较例2比较例3比较例4比较例5 | --0.17.01.0 | -202020 | ----- | ----- | ----- | ----- | 残残残残残 | 75.248.146.058.956.1 | 32.312.71 1.014.421.4 | 5.214.816.444.133.2 | ○○○○○ | |
比较例6比较例7比较例8比较例9 | 1.0--3.5 | 2002020- | -10-- | ---10 | ---- | --10- | 残残残残 | 38.146.450.939.1 | 6.78.79.520.1 | -13.515.833.4 | ×○○○ |
按照本发明,提供了加入Pd和Bi规定含量的新金合金、特别适合形成IC芯片的凸起,获得下述效果。
(1)可以用短的长度稳定地形成简单的拉断的尾线。结果,利用简单拉断方法可能稳定地形成凸起,并且有利用改善半导体器件的可靠性。
(2)能改善高温焊接强度,有利于增加半导体器件的可靠性。如果进一步加入至少一种Y、La、Ca、Be中的元素的规定含量,则能进一步改善高温焊接强度,进一步有利于增加半导体器件的可靠性。
此外,利用上述金合金引线和简单的拉断方法形成凸起。
(1)利用简单的拉断操作能够稳定地形成具有均匀尾线长度的金凸起,其有利于改善合格率。
(2)能够改善高温焊接强度,有利于增加半导体器件的可靠性。
此外,利用上述金合金引线和利用凹槽式拉断方法形成凸起。
(1)能把尾线长度设置成所希望的长度,因此能更均匀地和简短地制造尾线长度,
(2)能够改善高温焊接强度,有利于增加半导体器件的可靠性。
例42到例47
在真空炉中熔化按重量比为99.999%的高纯度金和Pd、Bi的规定含量的混合物,浇注获得如表4所示成分的金合金锭,即,按重量比为1.0%Pd和按重量比为30ppm Bi。利用槽状辊拉断机冷加工合金锭,中间进行退火,获得直径为30μm的细线。最后退火引线,具有4%的延伸率。
利用自动引线焊接机(UTC-50型,Shinkawa K、K),利用超声热压焊接方法,由上述获得的金合金线,把焊接线连到IC芯片100铝电极和引线框架之间。
利用测量显微镜(STM-MJS型、olympus k、K)测量上述样品的环形高度。如图4所示,环形高度是由IC芯片11的顶面到环形最高点的高度H。对每个例子测量100样品,利用100样品环形高度的平均高度作为表4的环形高度。
对于每个例子把几百个样品放置在200℃下,经过500小时,利用剪切试验机测量剪切强度。在表4中,利用50样品的平均值作为高温焊接强度。
表4实施 组成 结果例号 高温焊
pd Bi Y La Ca Be Au 环形高度 接强度
(wt%) (重量比ppm) (μ m) (gf)42 1.0 30 - - - - 余 84 6743 1.0 1 - - - - 余 110 6144 1.0 30 50 - - - 余 88 6845 1.0 30 - 50 - - 余 87 6846 1.0 30 - - 50 - 余 92 6547 1.0 30 20 - - 10 余 90 68
注意, 当使用常规的金合金线时,通常环形高度大于170μm,高温焊接强度通常小于30gf。
于是,当利用本发明的金合金引线时,能够基本上减少环形高度,改善高温焊接强度。
Claims (22)
1、金合金引线,其特征是,把按重量比为0.2到5.0%的Pd,按重量比为1到100ppm的Bi加入到按重量比至少为99.99%纯度的金中。
2、按照权利要求1的金合金引线,其特征是,所述金的所述纯度按重量比至少为99.999%。
3、按照权利要求1的金合金引线,其特征是,Pd的所述含量按重量比是0.5到5.0%。
4、按照权利要求1的金合金引线,其特征是,按重量比,Bi的所述含量是1到40ppm。
5、按照权利要求1的金合金引线,其特征是,把按重量比为3到250ppm含量的选自Y、La、Ca、Be中的至少一种元素加入到所述的金中。
6、按照权利要求5的金合金引线,其特征是,所述的至少一种元素的所述含量按重量比是3到70ppm。
7、按照权利要求5的金合金引线,其特征是,把选自Y、La、Ca、Be中的至少三种元素加入到金中。
8、按照权利要求5的金合金引线,其特征是,把至少Y、La、Ca三种元素加入到所述的金中。
9、按照权利要求1的金合金引线,其特征是,所述的引线特别适合形成凸起。
10、按照权利要求1的金合金引线,其特征是,所述的引线特别适合于引线焊接。
11、形成金合金凸起的方法,包括下列步骤:
通过毛细管在金合金引线的末端形成熔珠,
降低所述的毛细管,把所述的熔珠压焊到IC芯片的电极上,
上拉所述的合金引线,从焊接到所述电极上的熔珠上面,拉断所述的合金引线,因此在所述IC芯片的所述电极上形成金合金凸起,
其中所述金合金引线有下述组成,把按重量比为0.2到5.0%的Pd,和按重量比为1到100ppm的Bi加入到按重量比至少为99.99%纯度的金中。
12、按照权利要求11的方法,其特征是,所述金的所述纯度按重量比是99.999%。
13、按照权利要求11的方法,其特征是,所述Pd的含量按重量比是在0.5到5.0%。
14、按照权利要求11的方法,其特征是,进一步把按重量比为3到250ppm含量的选自Y、La、Ca、Be组中的至少一种元素加入到所述的金中。
15、按照权利要求14的方法,其特征是,把至少Y、La、Ca三种元素加入到所述金中。
16、形金合金凸起的方法,包括下列步骤:
通过毛细管在金合金引线的末端形成球,
降低所述毛细管把所述球压焊到IC芯片的电极上,
把所述球上面的所述金引线切出凹槽,
上拉所述金合金引线,从焊接到所述电极上的所述凸起上面拉断所述金合金引线,因此形成位于所述IC芯片所述电极上的金合金凸起,
其中所述合金引线具有下面的组成,把按重量比为0.2到5.0%的Pd和按重量比为1到100ppm的Bi加入到按重量比为至少99.99%纯度的金中。
17、按照权利要求16的方法,其特征是,所述金的所述纯度按重量比是99.999%。
18、按照权利要求16的方法,其特征是,所述Pd的含量按重量比是在0.5到5.0%。
19、按照权利要求16的方法,其特征是,进一步把按重量比为3到250ppm的选自Y、La、Ca、Be组中至少一种元素加入到所述金中。
20、按照权利要求19的方法,其特征是,把至少Y、La、Ca三种元素加入到所述的金中。
21、引线焊接方法,其特征是,所用引线具有下述组成,把按重量比为0.2到5.0%的Pd和按重量比为1到100ppm的Bi加入到按重量比至少为99.99%纯度的金中。
22、按照权利要求21的方法,其特征是,进一步把按重量比为3到250ppm含量的选自Y、La、Ca、Be组中的至少一种元素加入到所述的金中。
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JP13354696A JP3328135B2 (ja) | 1996-05-28 | 1996-05-28 | バンプ形成用金合金線及びバンプ形成方法 |
JP133546/96 | 1996-05-28 |
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EP (1) | EP0810293B1 (zh) |
JP (1) | JP3328135B2 (zh) |
KR (1) | KR100275001B1 (zh) |
CN (1) | CN1065001C (zh) |
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-
1997
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- 1997-05-27 TW TW086107139A patent/TW327697B/zh not_active IP Right Cessation
- 1997-05-27 KR KR1019970020964A patent/KR100275001B1/ko not_active IP Right Cessation
- 1997-05-28 CN CN971135681A patent/CN1065001C/zh not_active Expired - Lifetime
- 1997-05-28 MY MYPI97002327A patent/MY120121A/en unknown
- 1997-05-28 EP EP97250166A patent/EP0810293B1/en not_active Expired - Lifetime
- 1997-05-28 DE DE69707559T patent/DE69707559T2/de not_active Expired - Lifetime
-
1999
- 1999-01-05 US US09/226,033 patent/US6213382B1/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100487883C (zh) * | 2004-09-30 | 2009-05-13 | 田中电子工业株式会社 | 金合金焊线 |
CN100411162C (zh) * | 2005-02-22 | 2008-08-13 | 恩益禧电子股份有限公司 | 半导体器件 |
CN116329830A (zh) * | 2023-05-29 | 2023-06-27 | 宁波尚进自动化科技有限公司 | 芯片引脚的焊接方法 |
CN116329830B (zh) * | 2023-05-29 | 2023-08-29 | 宁波尚进自动化科技有限公司 | 芯片引脚的焊接方法 |
Also Published As
Publication number | Publication date |
---|---|
JP3328135B2 (ja) | 2002-09-24 |
KR100275001B1 (ko) | 2001-01-15 |
TW327697B (en) | 1998-03-01 |
US6159420A (en) | 2000-12-12 |
DE69707559D1 (de) | 2001-11-29 |
KR970077400A (ko) | 1997-12-12 |
EP0810293A1 (en) | 1997-12-03 |
MY120121A (en) | 2005-09-30 |
CN1065001C (zh) | 2001-04-25 |
JPH09321076A (ja) | 1997-12-12 |
US6213382B1 (en) | 2001-04-10 |
EP0810293B1 (en) | 2001-10-24 |
DE69707559T2 (de) | 2002-05-16 |
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