CN116635984B - 半导体装置及其制造方法 - Google Patents

半导体装置及其制造方法 Download PDF

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Publication number
CN116635984B
CN116635984B CN202080107575.7A CN202080107575A CN116635984B CN 116635984 B CN116635984 B CN 116635984B CN 202080107575 A CN202080107575 A CN 202080107575A CN 116635984 B CN116635984 B CN 116635984B
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CN
China
Prior art keywords
region
well region
semiconductor device
substrate
drift region
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CN202080107575.7A
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English (en)
Chinese (zh)
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CN116635984A (zh
Inventor
倪威
林哲也
沼仓启一郎
丸井俊治
田中亮太
岩﨑裕一
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Renault SAS
Nissan Motor Co Ltd
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Renault SAS
Nissan Motor Co Ltd
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Publication of CN116635984A publication Critical patent/CN116635984A/zh
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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/112Constructional design considerations for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layers, e.g. by using channel stoppers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01Manufacture or treatment
    • H10D12/031Manufacture or treatment of IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/028Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs
    • H10D30/0281Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of lateral DMOS [LDMOS] FETs
    • H10D30/0289Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of lateral DMOS [LDMOS] FETs using recessing of the gate electrodes, e.g. to form trench gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/601Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/603Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended drain IGFETs [EDMOS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/213Channel regions of field-effect devices
    • H10D62/221Channel regions of field-effect devices of FETs
    • H10D62/235Channel regions of field-effect devices of FETs of IGFETs
    • H10D62/314Channel regions of field-effect devices of FETs of IGFETs having vertical doping variations 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325Silicon carbide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512Disposition of the gate electrodes, e.g. buried gates
    • H10D64/513Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Junction Field-Effect Transistors (AREA)
CN202080107575.7A 2020-12-01 2020-12-01 半导体装置及其制造方法 Active CN116635984B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB2020/000995 WO2022118055A1 (ja) 2020-12-01 2020-12-01 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
CN116635984A CN116635984A (zh) 2023-08-22
CN116635984B true CN116635984B (zh) 2024-03-15

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Country Status (5)

Country Link
US (1) US11973108B2 (https=)
EP (1) EP4258363A4 (https=)
JP (1) JPWO2022118055A1 (https=)
CN (1) CN116635984B (https=)
WO (1) WO2022118055A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015155828A1 (ja) * 2014-04-08 2015-10-15 日産自動車株式会社 半導体装置及びその製造方法
CN105556647A (zh) * 2013-07-19 2016-05-04 日产自动车株式会社 半导体装置及其制造方法
CN110291620A (zh) * 2017-02-14 2019-09-27 日产自动车株式会社 半导体装置及半导体装置的制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123432B2 (https=) * 1971-08-26 1976-07-16
JP3642768B2 (ja) * 2002-06-17 2005-04-27 沖電気工業株式会社 横型高耐圧半導体装置
US7067877B2 (en) 2003-03-10 2006-06-27 Fuji Electric Device Technology Co., Ltd. MIS-type semiconductor device
JP2004335990A (ja) * 2003-03-10 2004-11-25 Fuji Electric Device Technology Co Ltd Mis型半導体装置
JP2005079339A (ja) * 2003-08-29 2005-03-24 National Institute Of Advanced Industrial & Technology 半導体装置、およびその半導体装置を用いた電力変換器、駆動用インバータ、汎用インバータ、大電力高周波通信機器
DE102004014928B4 (de) * 2004-03-26 2018-07-12 Austriamicrosystems Ag Hochvolttransistor und Verfahren zu seiner Herstellung
JP4890773B2 (ja) * 2005-03-07 2012-03-07 ラピスセミコンダクタ株式会社 半導体装置及びその製造方法
JP2009059949A (ja) * 2007-08-31 2009-03-19 Sharp Corp 半導体装置、および、半導体装置の製造方法
JP2010028054A (ja) * 2008-07-24 2010-02-04 Seiko Epson Corp 半導体装置およびその製造方法
JP4772843B2 (ja) * 2008-09-17 2011-09-14 シャープ株式会社 半導体装置及びその製造方法
JP2010245369A (ja) * 2009-04-08 2010-10-28 Toyota Motor Corp Ldmosトランジスタ及びその製造方法
JP2011100847A (ja) * 2009-11-05 2011-05-19 Sharp Corp 半導体装置及びその製造方法
JP6346777B2 (ja) * 2014-04-10 2018-06-20 旭化成エレクトロニクス株式会社 半導体装置の製造方法
JP7569144B2 (ja) * 2018-12-19 2024-10-17 エイブリック株式会社 半導体装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105556647A (zh) * 2013-07-19 2016-05-04 日产自动车株式会社 半导体装置及其制造方法
WO2015155828A1 (ja) * 2014-04-08 2015-10-15 日産自動車株式会社 半導体装置及びその製造方法
CN110291620A (zh) * 2017-02-14 2019-09-27 日产自动车株式会社 半导体装置及半导体装置的制造方法

Also Published As

Publication number Publication date
US11973108B2 (en) 2024-04-30
CN116635984A (zh) 2023-08-22
EP4258363A1 (en) 2023-10-11
US20240055475A1 (en) 2024-02-15
EP4258363A4 (en) 2024-02-14
WO2022118055A8 (ja) 2023-03-09
WO2022118055A1 (ja) 2022-06-09
JPWO2022118055A1 (https=) 2022-06-09

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