CN116635984B - 半导体装置及其制造方法 - Google Patents
半导体装置及其制造方法 Download PDFInfo
- Publication number
- CN116635984B CN116635984B CN202080107575.7A CN202080107575A CN116635984B CN 116635984 B CN116635984 B CN 116635984B CN 202080107575 A CN202080107575 A CN 202080107575A CN 116635984 B CN116635984 B CN 116635984B
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- CN
- China
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- region
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- semiconductor device
- substrate
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/112—Constructional design considerations for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layers, e.g. by using channel stoppers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/01—Manufacture or treatment
- H10D12/031—Manufacture or treatment of IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/028—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs
- H10D30/0281—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of lateral DMOS [LDMOS] FETs
- H10D30/0289—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of lateral DMOS [LDMOS] FETs using recessing of the gate electrodes, e.g. to form trench gate electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs
- H10D30/603—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended drain IGFETs [EDMOS]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/213—Channel regions of field-effect devices
- H10D62/221—Channel regions of field-effect devices of FETs
- H10D62/235—Channel regions of field-effect devices of FETs of IGFETs
- H10D62/314—Channel regions of field-effect devices of FETs of IGFETs having vertical doping variations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
- H10D62/8325—Silicon carbide
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
- H10D64/311—Gate electrodes for field-effect devices
- H10D64/411—Gate electrodes for field-effect devices for FETs
- H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
- H10D64/512—Disposition of the gate electrodes, e.g. buried gates
- H10D64/513—Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
Landscapes
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Junction Field-Effect Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/IB2020/000995 WO2022118055A1 (ja) | 2020-12-01 | 2020-12-01 | 半導体装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116635984A CN116635984A (zh) | 2023-08-22 |
| CN116635984B true CN116635984B (zh) | 2024-03-15 |
Family
ID=81853856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202080107575.7A Active CN116635984B (zh) | 2020-12-01 | 2020-12-01 | 半导体装置及其制造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11973108B2 (https=) |
| EP (1) | EP4258363A4 (https=) |
| JP (1) | JPWO2022118055A1 (https=) |
| CN (1) | CN116635984B (https=) |
| WO (1) | WO2022118055A1 (https=) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015155828A1 (ja) * | 2014-04-08 | 2015-10-15 | 日産自動車株式会社 | 半導体装置及びその製造方法 |
| CN105556647A (zh) * | 2013-07-19 | 2016-05-04 | 日产自动车株式会社 | 半导体装置及其制造方法 |
| CN110291620A (zh) * | 2017-02-14 | 2019-09-27 | 日产自动车株式会社 | 半导体装置及半导体装置的制造方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123432B2 (https=) * | 1971-08-26 | 1976-07-16 | ||
| JP3642768B2 (ja) * | 2002-06-17 | 2005-04-27 | 沖電気工業株式会社 | 横型高耐圧半導体装置 |
| US7067877B2 (en) | 2003-03-10 | 2006-06-27 | Fuji Electric Device Technology Co., Ltd. | MIS-type semiconductor device |
| JP2004335990A (ja) * | 2003-03-10 | 2004-11-25 | Fuji Electric Device Technology Co Ltd | Mis型半導体装置 |
| JP2005079339A (ja) * | 2003-08-29 | 2005-03-24 | National Institute Of Advanced Industrial & Technology | 半導体装置、およびその半導体装置を用いた電力変換器、駆動用インバータ、汎用インバータ、大電力高周波通信機器 |
| DE102004014928B4 (de) * | 2004-03-26 | 2018-07-12 | Austriamicrosystems Ag | Hochvolttransistor und Verfahren zu seiner Herstellung |
| JP4890773B2 (ja) * | 2005-03-07 | 2012-03-07 | ラピスセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
| JP2009059949A (ja) * | 2007-08-31 | 2009-03-19 | Sharp Corp | 半導体装置、および、半導体装置の製造方法 |
| JP2010028054A (ja) * | 2008-07-24 | 2010-02-04 | Seiko Epson Corp | 半導体装置およびその製造方法 |
| JP4772843B2 (ja) * | 2008-09-17 | 2011-09-14 | シャープ株式会社 | 半導体装置及びその製造方法 |
| JP2010245369A (ja) * | 2009-04-08 | 2010-10-28 | Toyota Motor Corp | Ldmosトランジスタ及びその製造方法 |
| JP2011100847A (ja) * | 2009-11-05 | 2011-05-19 | Sharp Corp | 半導体装置及びその製造方法 |
| JP6346777B2 (ja) * | 2014-04-10 | 2018-06-20 | 旭化成エレクトロニクス株式会社 | 半導体装置の製造方法 |
| JP7569144B2 (ja) * | 2018-12-19 | 2024-10-17 | エイブリック株式会社 | 半導体装置 |
-
2020
- 2020-12-01 JP JP2022566508A patent/JPWO2022118055A1/ja active Pending
- 2020-12-01 EP EP20963817.0A patent/EP4258363A4/en active Pending
- 2020-12-01 WO PCT/IB2020/000995 patent/WO2022118055A1/ja not_active Ceased
- 2020-12-01 CN CN202080107575.7A patent/CN116635984B/zh active Active
- 2020-12-01 US US18/039,610 patent/US11973108B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105556647A (zh) * | 2013-07-19 | 2016-05-04 | 日产自动车株式会社 | 半导体装置及其制造方法 |
| WO2015155828A1 (ja) * | 2014-04-08 | 2015-10-15 | 日産自動車株式会社 | 半導体装置及びその製造方法 |
| CN110291620A (zh) * | 2017-02-14 | 2019-09-27 | 日产自动车株式会社 | 半导体装置及半导体装置的制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US11973108B2 (en) | 2024-04-30 |
| CN116635984A (zh) | 2023-08-22 |
| EP4258363A1 (en) | 2023-10-11 |
| US20240055475A1 (en) | 2024-02-15 |
| EP4258363A4 (en) | 2024-02-14 |
| WO2022118055A8 (ja) | 2023-03-09 |
| WO2022118055A1 (ja) | 2022-06-09 |
| JPWO2022118055A1 (https=) | 2022-06-09 |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |