CN116462517B - 一种利用熔盐法在石墨基体上制备氮化硅涂层的方法 - Google Patents
一种利用熔盐法在石墨基体上制备氮化硅涂层的方法 Download PDFInfo
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Abstract
本发明公开了一种利用熔盐法在石墨基体上制备氮化硅涂层的方法,包括以下步骤:对石墨片进行超声清洗处理,然后将熔盐和SiO2粉末放入研钵中搅拌均匀;将混合均匀的熔盐和SiO2粉末与石墨片一同放入密闭石墨坩埚中,然后将石墨坩埚烘干;将烘干后的石墨坩埚放入反应炉中,打开真空泵抽真空,高温条件下保温;然后通入氮气,高温烧结处理,处理完成后关闭电源自然冷却炉温,获得含有致密氮化硅涂层的石墨基体复合材料。本发明采用上述制备氮化硅涂层的方法,制备的氮化硅涂层化学成分和分布均匀、物相纯度高、晶体形貌好,并且氮化硅具有好的热稳定性和良好抗氧化的特点,可以对石墨基体的热物理性能起到强化效果。
Description
技术领域
本发明涉及石墨基体上氮化硅涂层的制备技术领域,尤其是涉及一种利用熔盐法在石墨基体上制备氮化硅涂层的方法。
背景技术
氮化硅是一种重要的结构陶瓷材料,它属于高温难溶化合物,具有很好的抗高温蠕变性能,由氮化硅形成的陶瓷材料具有热稳定性高、抗氧化能力强和产品尺寸精度高等优良性能。而碳基材料,特别是石墨、碳纤维和碳/碳(C/C)复合材料,由于其高比强度和比模量、更好的抗热震性和耐腐蚀性,已广泛应用于航空航天、化学工程、储能和其他领域。然而,碳基材料具有容易氧化、在高温和氧气环境下不耐氨腐蚀和耐划伤性差等缺点。随着科学技术的发展,碳基材料不能满足越来越严格的要求,其发展和实际应用受到了各方面的限制。为解决这一问题,采用具有高熔点、高硬度和良好抗热震性等优异力学性能和热力学性能的超高温陶瓷Si3N4引入石墨基体上,将碳基材料与Si3N4的优势相结合,可以实现碳基材料的强化。
目前,制备Si3N4涂层的方法很少主要包括以下几种:喷涂法还原氮化法、熔盐法、化学气相沉积法(CVD)和物理气相沉积法(PVD)等。
熔盐法是一种采用一种或几种具有低熔点且反应物在其中具有一定溶解度的盐类作为反应介质,使得反应在原子尺度上进行的方法。与传统化学气相沉积(CVD)工艺相比,熔盐法具有工艺简单、合成温度低、保温时间短、合成的粉体化学成分均匀、晶体形貌好、物相纯度高等优点,其被广泛地用于在较低温度下生长晶体。虽然使用熔盐法制备产品有很多优点,但是同时也存在着较多缺点:1)熔盐的选取不是很容易,需要考虑原料溶解度、安全性和成本三个方面。2)熔盐不经适当处理,很容易残留在材料表面会降低材料性能;3)发生反应时必须严格控制好熔盐的环境,否则会导致熔盐外泄从而污染坩埚和炉体,并且会导致样品制备失败。因此提出一种利用熔盐法在石墨基体上制备氮化硅涂层的方法。
发明内容
本发明的目的是提供一种利用熔盐法在石墨基体上制备氮化硅涂层的方法,制备的氮化硅涂层化学成分和分布均匀、物相纯度高、晶体形貌好,并且氮化硅具有好的热稳定性和良好抗氧化的特点,可以对石墨基体的热物理性能起到强化效果。
为实现上述目的,本发明提供了一种利用熔盐法在石墨基体上制备氮化硅涂层的方法,包括以下步骤:
S1、对石墨片进行超声清洗处理,备用;
S2、将熔盐和SiO2粉末按照配比称量好后,放入研钵中搅拌均匀;
S3、将混合均匀的熔盐和SiO2粉末与石墨片一同放入密闭石墨坩埚中,然后将石墨坩埚在100-150℃条件下烘干12h;
S4、将烘干后的石墨坩埚放入真空碳管炉或管式炉中,打开真空泵抽真空至100±50Pa;
S5、然后通入氮气作为保护气体,在200℃条件下保温0.5h,然后高温烧结处理,处理完成后关闭电源自然冷却炉温,获得含有致密氮化硅涂层的石墨基体复合材料。
优选的,所述步骤S2中熔盐的成分包括CsCl、NaCl和NaF,SiO2粉末与熔盐各成分的重量比为SiO2:CsCl:NaCl:NaF=(10-12):(10-12):(9-10):(0.5-1)。
优选的,所述步骤S5中保温条件为以10℃/min的升温速率升温至200℃后保温0.5h。
优选的,所述步骤S5中通入流动氮气作为反应气氛。
优选的,所述步骤S5中烧结条件为以10℃/min的升温速率升温至1200℃-1400℃烧结处理,烧结时间为4-6h。
优选的,所述烧结温度为1300℃。
本发明所述的一种利用熔盐法在石墨基体上制备氮化硅涂层的方法的优点和积极效果是:
1、本发明利用熔盐氧化硅在熔盐中的溶解性,使之在原子尺度上与石墨基体发生氧化还原反应,进而形成Si3N4涂层。
2、本发明与传统的化学气相沉积方法相比,由于反应存在液相,所以形成的Si3N4涂层化学成分和分布均匀、物相纯度高、晶体形貌好。
3、本发明由于在石墨基体上获得了具有一定厚度且分布均匀的Si3N4涂层,借助Si3N4具有好的热稳定性和良好抗氧化等特点,可以对石墨基体的热物理性能起到强化效果。
下面通过附图和实施例,对本发明的技术方案做进一步的详细描述。
附图说明
图1为本发明实验方法流程图;
图2为本发明实施例1中的Si3N4涂层扫描电镜照片;
图3为本发明实施例2中的Si3N4涂层扫描电镜照片;
图4为本发明实施例1的Si3N4涂层EDS面扫图。
具体实施方式
以下通过附图和实施例对本发明的技术方案作进一步说明。
一种利用熔盐法在石墨基体上制备氮化硅涂层的方法,包括以下步骤:
实施例1
步骤一:将熔盐和SiO2按照配比称量好放入研钵中搅拌均匀,随后混合均匀的熔盐与预先经过打磨超声清洗处理的石墨片一同放入密闭石墨坩埚中,随后将整个坩埚在100℃下烘干12h。
所述氧化硅和熔盐原始质量比如下:SiO2:CsCl:NaCl:NaF=10:10:9:1。
步骤二:将烘干后的石墨坩埚放入真空碳管炉或管式炉中,打开真空泵抽真空至100±50Pa,随后通入氮气作为反应气氛,以10℃/min的升温速率升温至200℃后保温0.5h,随后以10℃/min的升温速率升温至1300℃发生反应。反应结束后关闭电源自然冷却炉温,获得含有致密Si3N4涂层的石墨基复合材料。
实施例2
步骤一:将熔盐和Si按照配比称量好放入研钵中搅拌均匀,随后混合均匀的熔盐与预先经过打磨超声清洗处理的石墨片一同放入密闭石墨坩埚中,随后将整个坩埚在100℃下烘干12h。
所述硅和熔盐原始质量比如下:Si:CsCl:NaCl:NaF=10:10:9:1。
步骤二:将烘干后的石墨坩埚放入真空碳管炉或管式炉中,打开真空泵抽真空至100±50Pa,随后通入氮气作为反应气氛,以10℃/min的升温速率升温至200℃后保温0.5h,随后以10℃/min的升温速率升温至1300℃发生反应。反应结束后关闭电源自然冷却炉温,获得含有Si3N4涂层的石墨基复合材料。
对实施例1和实施例2中所得样品进行扫描电镜分析和EDS能谱分析。
由图2可知,使用该熔盐方法获得的氮化硅涂层晶体形貌呈现均一的方块形状,而图3中原料粉使用Si粉也可以得到氮化硅涂层,但所得到的涂层形貌较差。同时从图4的EDS结果中可以看出,制备出来的氮化硅涂层元素含量较为均匀,且可以证明氮化硅的存在。
因此,本发明采用上述制备氮化硅涂层的方法,制备的氮化硅涂层化学成分和分布均匀、物相纯度高、晶体形貌好,并且氮化硅良好的热稳定性、高硬度和良好的抗氧化性能强化了石墨基体的力学性能和热物理性。
最后应说明的是:以上实施例仅用以说明本发明的技术方案而非对其进行限制,尽管参照较佳实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对本发明的技术方案进行修改或者等同替换,而这些修改或者等同替换亦不能使修改后的技术方案脱离本发明技术方案的精神和范围。
Claims (5)
1.一种利用熔盐法在石墨基体上制备氮化硅涂层的方法,其特征在于:包括以下步骤:
S1、对石墨片进行超声清洗处理,备用;
S2、将熔盐和SiO2粉末按照配比称量好后,放入研钵中搅拌均匀;
S3、将混合均匀的熔盐和SiO2粉末与石墨片一同放入密闭石墨坩埚中,然后将石墨坩埚在100-150℃条件下烘干12h;
S4、将烘干后的石墨坩埚放入真空碳管炉或管式炉中,打开真空泵抽真空至100±50Pa;
S5、然后通入氮气作为保护气体,在200℃条件下保温0.5h,然后高温烧结处理,处理完成后关闭电源自然冷却炉温,获得含有致密氮化硅涂层的石墨基体复合材料;
其中步骤S2中熔盐的成分包括CsCl、NaCl和NaF,SiO2粉末与熔盐各成分的重量比为SiO2:CsCl:NaCl:NaF=10:10:9:1。
2.根据权利要求1所述的一种利用熔盐法在石墨基体上制备氮化硅涂层的方法,其特征在于:所述步骤S5中保温条件为以10℃/min的升温速率升温至200℃后保温0.5h。
3.根据权利要求1所述的一种利用熔盐法在石墨基体上制备氮化硅涂层的方法,其特征在于:所述步骤S5中通入流动氮气作为反应气氛。
4.根据权利要求1所述的一种利用熔盐法在石墨基体上制备氮化硅涂层的方法,其特征在于:所述步骤S5中烧结条件为以10℃/min的升温速率升温至1200℃-1400℃烧结处理,烧结时间为4-6h。
5.根据权利要求4所述的一种利用熔盐法在石墨基体上制备氮化硅涂层的方法,其特征在于:所述烧结温度为1300℃。
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