CN1162630C - 闸阀 - Google Patents

闸阀 Download PDF

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CN1162630C
CN1162630C CNB001354825A CN00135482A CN1162630C CN 1162630 C CN1162630 C CN 1162630C CN B001354825 A CNB001354825 A CN B001354825A CN 00135482 A CN00135482 A CN 00135482A CN 1162630 C CN1162630 C CN 1162630C
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valve
small gear
valve rod
rod
guide shaft
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CN1300910A (zh
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藁谷健二
石垣恒雄
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SMC Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/53—Mechanical actuating means with toothed gearing
    • F16K31/54—Mechanical actuating means with toothed gearing with pinion and rack

Abstract

一种闸阀包括：阀杆(24)，用于由压力缸机构(44)的驱动作用而移动；导引轴(70a、70b)，用于引导阀杆；阀盘(26)，用于根据阀杆的移动而打开/关闭通道(32)；齿条(98)，其与阀杆相连以便与阀杆一起运动；小齿轮(100a、100b)，其由壳体(76)可旋转地支承以便与齿条啮合；轴衬件(106a、106b)，其与阀盘(26)相连并形成有用于与在小齿轮内圆周表面形成的内螺纹(102)相啮合的外螺纹(108)。

Description

闸阀
技术领域
本发明涉及一种闸阀，该闸阀例如能够打开/关闭例如用于压力流体或气体的流动通道或排出通道。
背景技术
目前已经进行了例如用半导体片、液晶基片等的处理装置的操作过程，其中，将半导体片、液晶基片等通过通道而送入不同处理室和从不同处理室取出。为该通道而设有打开/关闭该通道的闸阀。
例如，该闸阀的布置方式如日本专利No.2613171所述。即，阀盘根据阀杆的直线运动而到达对着阀座的位置，该阀杆则可根据压力缸的驱动作用而运动。然后，阀盘压靠在阀座上，并借助于阀杆的倾转运动而贴在该阀座上。因此，穿过阀室的通道被关闭。
也就是说，如图8和9所示，普通技术中的闸阀1包括：阀室3，该阀室3形成有用于使工件进出的通道2；阀盘5，其用于通过贴在形成于阀室3内的阀座4上而关闭该通道2；以及阀杆6，该阀杆6与阀盘5相连，并可向上和向下运动和倾转。
块体7与阀杆6的上部相连。枢轴11安装在块体7两侧表面上，该枢轴11可沿导引槽10(见图10)运动，该导引槽分别形成于一对压力8a、8b的缸筒9的侧表面上。块体7可由导引槽10的引导作用而向上和向下运动和倾转，该导引槽10与枢轴11配合。缸筒9、块体7和枢轴11都是由金属材料制成。
换句话说，块体7借助于拉伸弹簧12并由与枢轴11配合的导引槽10的引导作用而与轭架13一起在竖直方向进行直线运动。块体7绕枢轴11的支承点沿箭头A所示方向进行倾转运动，该枢轴11由导引槽10的弯曲底端10a(见图10)支承。因此，阀盘5绕枢轴11的支承点沿箭头B所示方向倾转，使它贴在阀座4上。这样，通道2被密封关闭。
参考标号14是指具有菱形截面的盘状凸轮。该倾斜的盘状凸轮14基本水平地移动，这样，块体7以箭头A所示方向绕导引槽10底端10a的支承点而倾转。
不过，上述的普通技术闸阀1布置得使阀杆6由一对压力缸8a、8b的驱动作用而进行竖直运动和倾转运动，而通道2由与阀杆6相连的阀盘5关闭。因此，对于普通技术的闸阀1，可能在该闸阀1使用多年后，当阀盘5贴在阀座4上以关闭通道2时，通道2的密封性能会降低。
发明内容
本发明的总的目的是提供一种闸阀，该闸阀可以通过使阀盘基本沿垂直方向而压住并密封住阀室的阀座来防止由于磨损而产生粉尘或类似物。
本发明的主要目的是提供一种闸阀，该闸阀能通过用阀盘可靠地密封阀室的通道来提高通道的密封性能。
为了实现上述目的，本发明的闸阀为一种闸阀，包括：一驱动机构；一阀杆，该阀杆用于根据该驱动机构的驱动作用而移动；一导引轴，用于引导所述阀杆；一阀盘，用于根据所述阀杆的移动而打开/关闭一个穿过阀室而形成的通道；其特征在于，还包括一移动机构，该移动机构设有与所述导引轴相连的块体件，用于使所述阀盘以基本垂直于所述阀杆轴线的方向运动；所述移动机构包括：一齿条件，该齿条件与所述阀杆相连，以便与所述阀杆一起运动；一小齿轮，该小齿轮由所述块体件可旋转地支承，以便与所述齿条件啮合；以及一轴衬件，该轴衬件与所述阀盘相连，并形成有用于与在所述小齿轮内圆周表面形成的内螺纹相配合的外螺纹；在所述导引轴的一端设有用于控制所述导引轴的移动的挡块；所述阀杆、导引轴、阀盘及移动机构向离开所述驱动机构的方向一体地移动，在由所述挡块阻止所述导引轴的移动之后，在该驱动机构的驱动作用下，通过仅使所述阀杆进一步地移动来驱动所述移动机构，由所述齿条件和所述小齿轮的啮合，所述阀盘向与阀杆的轴线垂直的方向移动，封闭形成于阀室的通道。
附图说明
通过下面的说明并结合附图，能够更了解本发明的上述和其它目的、特征和优点，附图中通过说明性的实例而示出了本发明优选实施例。
图1所示为本发明一个实施例的闸阀的示意透视图；
图2所示为沿图1中线II-II的垂直剖视图；
图3所示为沿图2中线III-III的垂直剖视图，其中有局部被省略；
图4所示为沿图2中轴向的局部垂直剖视图；
图5是表示活塞在下死点的初始位置状态的垂直剖视图；
图6是表示活塞到达上死点的状态的垂直剖视图；
图7是表示阀盘从图3所示状态开始，基本水平地朝着通道移动的状态的垂直剖视图，其中有局部被省略；
图8是表示普通技术闸阀的轴向垂直剖视图；
图9是表示普通技术闸阀的轴向垂直剖视图；以及
图10是表示构成普通技术闸阀的缸筒的透视图。
具体实施方式
图1中，参考标号20是指本发明实施例的一个闸阀。
闸阀20包括：驱动部分22；阀杆24，该阀杆24可由该驱动部分22的驱动作用而垂直移动；阀盘26，用于根据阀杆24的移动而打开/关闭通道(后面将介绍)；以及移动机构28，该移动机构28位于阀杆24和阀盘26之间，以便使阀盘26朝着通道来回运动。
阀室30借助于螺纹件而与驱动部分22的上部互联。阀室30有用于使大气与真空室连通的通道32(见图3)。阀盘26贴在形成于阀室30内壁面上的阀座34上，因此以密封方式关闭该通道32。密封件36沿环形槽而安装在阀盘26上。这样，通过该密封件36，能够将当阀盘26贴在阀座34上时所形成的密封保持住。
如图2和3所示，驱动部分22由压力缸机构(驱动机构)44构成。压力缸机构44包括：成圆柱形的缸筒46、与该缸筒46的第一端相连的杆套48以及与该缸筒46第二端相连的端盖50。在缸筒46的外壁面上形成有两条安装传感器的长槽52a、52b，这两条长槽52a，52b基本相互平行且沿轴向延伸(见图4)。一对未示出的传感器安装在该安装传感器的长槽52a、52b中，该对传感器用于检测活塞的位置，并将在后面进行介绍。
如图4所示，在杆套48和端盖50上分别形成有一对压力流体进口/出口孔54a、54b，该对压力流体进口/出口孔54a、54b分别与上部缸室和下部缸室连通，这将在后面进行介绍。
如图2所示，压力缸机构44包括：可沿缸室58移动地装于缸筒46中的活塞60；以及阀杆24，该阀杆24的第一端与活塞60相连，第二端与该移动机构28相连。
装在活塞60上的包括有：活塞密封圈62，该活塞密封圈62使得由活塞60分成两部分的上部缸室58a和下部缸室58b分别保持密封；磨损环64，该磨损环沿着缸筒46的内壁面进行滑动；以及环形磁体66。该环形磁体66可与活塞60一起移动。通过用装在安装传感器的长槽52a、52b中的且未示出的传感器来检测磁体66的磁性而探测活塞60的位置。
一对杆件68a、68b连接到活塞60上，该对杆件68a、68b基本与阀杆24平行。杆件68a、68b的第一端插入导引轴70a、70b的孔72中。弹簧件74设在导引轴70a、70b的孔72中。该杆件68a、68b总是处于借助弹簧件74的弹力而压向活塞60(向下)的状态。因此，该杆件68a、68b可沿孔72逆着弹簧件74的弹力而移动。
导引轴70a、70b的第一端与一壳体(块体件)76相连，该壳体构成移动机构28。挡块78与位于对侧的第二端相连，挡块78各有一径向向外伸出的环形扩大部分。在该结构中，挡块78紧靠盘状缓冲件80，该盘状缓冲件80固定在杆套48上，以控制导引轴70a、70b的移动。形成于杆件68a、68b第一端上的环形固定部分82紧靠着挡块78的内圆周凸起。因此，能够防止杆件68a、68b从导引轴70a、70b中脱出。
在杆套48的基本处于中心的部分处形成有小直径的第一通孔84，阀杆24穿过该第一通孔84插入。还形成有穿过杆套48的一对第二通孔86a、86b，一对导引轴70a、70b分别穿过该对第二通孔而插入，同时该第一通孔84位于该对第二通孔之间。
一密封件88安装在第一通孔84的内圆周表面，该密封件88通过环绕阀杆24外圆周表面而保持缸室58的密封。在内圆周表面上形成有环形凹口90，该环形凹口90作为加在阀杆24外圆周表面上的润滑油的卸荷槽。
环绕导引轴70a、70b外圆周表面的导引环92安装在第二通孔86a、86b的内圆周表面上的环形槽中。该导引环92既有保持缸室58密封的密封作用，又有使导引轴70a、70b线性移动的导引作用。
移动机构28包括分别与一对导引轴70a、70b的第一端相连的壳体76，该壳体76可与该对导引轴70a、70b一起轴向移动。壳体76包括由螺纹件94固定的外壳和盖体(见图3)。在壳体76内部形成有基本呈圆形截面的腔室96。该阀杆24的第一端可插入该腔室96内。
如图2和3所示，齿条98通过螺纹件而与阀杆24的第一端相连。一对基本相互平行的齿形成于齿条98的相对侧部分处。第一小齿轮100a和第二小齿轮100b分别有与齿条98上的一对齿相啮合的齿，该第一小齿轮100a和第二小齿轮100b分别可旋转地由壳体76支承。在第一小齿轮100a和第二小齿轮100b的内圆周表面分别形成有内螺纹102(见图3)。
一对轴衬件106a、106b通过螺纹件104而分别沿基本垂直的方向连接到阀盘26上。在该对轴衬件106a、106b上形成有外螺纹108，该外螺纹分别与形成于第一小齿轮100a和第二小齿轮100b内圆周表面上的内螺纹102相配合。相应的轴衬件106a、106b可旋转地由一对支承件110a、110b支承，该支承件110a、110b有多个环形布置的滚子。
形成于一对轴衬件106a、106b上的外螺纹108是螺纹方向相反的右手螺纹和左手螺纹，它们的螺纹方向与第一小齿轮100a和第二小齿轮100b的内螺纹102相对应。
在移动机构28中，齿条98与阀杆24一起向上运动。这时，齿条98的齿分别与第一小齿轮100a和第二小齿轮100b的齿啮合。第一小齿轮100a和第二小齿轮100b以相反的方向旋转。当第一小齿轮100a和第二小齿轮100b分别旋转时，由于第一小齿轮100a和第二小齿轮100b的内螺纹102与轴衬件106a、106b的外螺纹108之间的配合作用，轴衬件106a、106b朝通道32伸出。因此，与该对轴衬件106a、106b相连的阀盘26以基本水平的方向朝通道32移动。密封件36贴在阀座34上，从而使该通道32关闭。
在该结构中，可以获得下面关于移动机构28的优点。即，当阀盘26以基本垂直于阀杆24轴线的方向(基本水平方向)移动时，阀杆24上没有不平衡负载，可以通过等效地转动该对第一小齿轮100a和第二小齿轮100b而移动该阀盘26。
本发明实施例的闸阀20的基本结构如上所述。下面将介绍它的操作、功能和效果。在下面的介绍中，假设初始位置是处于打开状态，其中该活塞60位于缸室58的最底端(下死点)，穿过阀室32而形成的通道32并没有被阀盘26关闭，如图5所示。
在该初始位置，压力流体(例如压缩空气)通过压力流体进口/出口孔54b而从压力流体供给源(未示出)供给到下部缸室58b中。活塞60在供给到下部缸室58中的压力流体的作用下向上运动。与活塞60相连的阀杆24也一起向上运动。这时，假设上部缸室58a在未示出的方向控制阀的作用下处于与大气相通的状态。
当阀杆24向上运动时，一对杆件68a、68b、导引轴70a、70b、移动机构28和阀盘26与阀杆24一起整体地向上运动。在该结构中，将布置于导引轴70a、70b的各孔72内的弹簧件74的弹簧力设置成预定值。因此，导引轴70a、70b和与活塞60相连的杆件68a、68b一起向上运动。换句话说，在从图5所示的初始状态到图2所示的阀盘26正对着通道32的状态的过程中，杆件68a、68b的移动没有克服弹簧件74的弹性力。杆件68a、68b和导引轴70a、70b整体移动。
当该对导引轴70a、70b向上运动时，该对导引轴70a、70b分别由导引环92支承。因此，布置在该对导引轴70a、70b之间的阀杆24保持线性精确性。
当导引轴70a、70b与阀杆24一起向上运动时，设在导引轴70a、70b第一端处的挡块78紧靠着固定在杆套48上的缓冲件80。这时，该对导引轴70a、70b的移动被限制(见图2)。因此，与该对导引轴70a、70b的末端相连的移动机构28和阀盘26也静止不动，这时的状态是：阀盘26正对着阀室30的通道32(见图3)。
当活塞60从图2所示状态进一步向上运动时，阀杆24和克服了弹簧件74弹力的杆件68a、68b一起向上运动，从而形成如图6所示状态。在该结构中，只有杆件68a、68b和阀杆24向上运动，而导引轴70a、70b和壳体76通过挡块78的固定作用而保持静止。
因此，在移动机构28的壳体76保持静止的状态下，与阀杆24的第一端相连的齿条98整体地向上运动。这样，齿条98的齿分别与第一小齿轮100a和第二小齿轮100b的齿啮合。该第一小齿轮100a和第二小齿轮100b以相反的方向旋转。
当第一小齿轮100a和第二小齿轮100b以彼此相反的方向旋转时，由于第一小齿轮100a和第二小齿轮100b的内螺纹102与轴衬件106a、106b的外螺纹108的啮合作用，轴衬件106a、106b朝着通道32伸出。因此，与该对轴衬件106a、106b相连的阀盘26以基本水平的方向运动。密封件36贴在阀座36上，从而将通道32关闭。
当阀盘26的密封件36由于移动机构28的推动作用而压向通道32时，作用在阀杆24上的横向负载由基本成椭圆形的活塞60的平表面部分112(见图1)和缸筒46的内壁面吸收。而分别作用在该对导引轴70a、70b上的横向负载由导引环92和磨损环64吸收。因此，优选是对导引环92和磨损环64进行低摩擦处理。
随后，当阀盘26与阀座34分开以打开通道32时，压力流体通过未示出的方向控制阀的切换作用而供给到上部缸室58a。因此，活塞60、阀杆24、杆件68a、68b和齿条98一起向下运动。下部缸室58b则由于未示出的方向控制阀的切换作用而与大气相通。这时，与齿条98的齿啮合的第一小齿轮100a和第二小齿轮100b以与前述方向相反的方向旋转。分别与第一小齿轮100a和第二小齿轮100b啮合的轴衬件106a、106b以与前述方向相反的方向运动。因此，阀盘26以离开通道32的方向运动，从而形成图3所示状态。
当活塞60向下运动时，该对导引轴70a、70b由于弹簧件74的弹力作用而被向上压。因此，只有阀杆24向下运动，而该对导引轴70a、70b仍处于移动被限制的状态。
当压力流体供给到该上部缸室58a中以使活塞60继续向下运动时，阀杆24、杆件68a、68b、导引轴70a、70b、移动机构28和阀盘26一起向下运动，以回复图5所示的初始状态。当与活塞60相连的阀杆24向下运动时，形成于杆件68a、68b第一端处的环形固定部分82与挡块78的内圆周凸起部分相配合。因此，阀杆24和导引轴70a、70b一起运动。
在本发明实施例中，使得阀盘26以基本水平的方向朝着通道32来回运动的移动机构28设在阀杆24的末端。因此，通道32由阀盘26的密封件36可靠关闭。这可以提高通道32的密封性能。这时，阀盘26的密封件36以基本垂直于阀座34的方向贴合。因此，当密封件36贴合时不会产生滑移，从而能避免产生粉尘或类似物。因此，能够保持阀室30的清洁。
在本发明的实施例中，阀盘26能够通过移动机构28的推动作用而朝着通道32来回运动，以便使密封件36贴在阀座34上。因此，阀杆24只进行往复直线运动，并没有任何倾转运动。因此，可以减小作用在压力缸机构44上的负载，从而提高压力缸机构44的耐久性。
当通道32由阀盘26关闭时作用在阀杆24上的横向负载由基本成椭圆形的活塞60的平表面部分112和缸筒46的内壁面适当吸收。因此，可以减小作用在压力缸机构44上的负载，从而进一步提高耐久性。且本发明不需要专门增加用于吸收横向负载的构件。因此，可以减少零件数，减少生产成本。

Claims (6)

1.一种闸阀，包括：
一驱动机构(22)；
一阀杆(24)，该阀杆(24)用于根据该驱动机构(22)的驱动作用而移动；
一导引轴(70a、70b)，用于引导所述阀杆(24)；
一阀盘(26)，用于根据所述阀杆(24)的移动而打开/关闭一个穿过阀室(30)而形成的通道(32)；其特征在于，
还包括一移动机构(28)，该移动机构(28)设有与所述导引轴(70a、70b)相连的块体件(76)，用于使所述阀盘(26)以基本垂直于所述阀杆(24)轴线的方向运动；
所述移动机构(28)包括：一齿条件(98)，该齿条件(98)与所述阀杆(24)相连，以便与所述阀杆(24)一起运动；一小齿轮(100a、100b)，该小齿轮由所述块体件(76)可旋转地支承，以便与所述齿条件(98)啮合；以及一轴衬件(106a、106b)，该轴衬件与所述阀盘(26)相连，并形成有用于与在所述小齿轮(100a、100b)内圆周表面形成的内螺纹(102)相配合的外螺纹(108)；
在所述导引轴(70a、70b)的一端设有用于控制所述导引轴(70a、70b)的移动的挡块(78)；
所述阀杆(24)、导引轴(70a、70b)、阀盘(26)及移动机构(28)向离开所述驱动机构(22)的方向一体地移动，在由所述挡块(78)阻止所述导引轴(70a、70b)的移动之后，在该驱动机构(22)的驱动作用下，通过仅使所述阀杆(24)进一步地移动来驱动所述移动机构(28)，由所述齿条件(98)和所述小齿轮(100a、100b)的啮合，所述阀盘(26)向与阀杆(24)的轴线垂直的方向移动，封闭形成于阀室(30)的通道(32)。
2.根据权利要求1所述的闸阀，其特征在于，所述驱动机构由压力缸机构(22)组成，该压力缸机构(22)设有用于沿缸筒(46)往复运动的活塞(60)，所述活塞(60)基本成椭圆形。
3.根据权利要求1所述的闸阀，还包括：一与活塞(60)相连的杆件(68a、68b)和一弹簧件(74)，该弹簧件布置在所述导引轴(70a、70b)的孔(72)中，以便将所述杆件(68a、68b)压向所述活塞(60)；其中，当所述导引轴(70a、70b)的所述移动由于所述挡块(78)的固定作用而受到限制时，所述杆件(68a、68b)可与所述阀杆(24)一起逆着所述弹簧件(74)的弹力而移动。
4.根据权利要求3所述的闸阀，其特征在于，一对所述杆件(68a、68b)设在两侧，而基本与所述活塞(60)中心部分相连的所述阀杆(24)介于两杆件(68a、68b)之间。
5.根据权利要求1所述的闸阀，其特征在于，在所述齿条件(98)的相对侧部分处形成有一对基本平行的齿，所述小齿轮包括第一小齿轮(100a)和第二小齿轮(100b)，该第一小齿轮(100a)和第二小齿轮(100b)分别与所述齿条件(98)的所述一对齿相啮合。
6.根据权利要求5所述的闸阀，其特征在于，一对所述轴衬件(106a、106b)具有所述外螺纹(108)，将该外螺纹(108)设置成具有螺纹方向彼此相反的右手螺纹和左手螺纹，它们的螺纹方向分别与所述第一小齿轮(100a)和所述第二小齿轮(100b)的所述内螺纹(102)相对应。
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DE60038278T2 (de) 2009-04-30
EP1111279A2 (en) 2001-06-27
EP1111279A3 (en) 2002-10-30
JP2001173805A (ja) 2001-06-29
CN1300910A (zh) 2001-06-27
JP3810604B2 (ja) 2006-08-16
DE60038278D1 (de) 2008-04-24
US20010004106A1 (en) 2001-06-21
US6299133B2 (en) 2001-10-09
EP1111279B1 (en) 2008-03-12
KR20010062391A (ko) 2001-07-07
TW455659B (en) 2001-09-21

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