CN110713347B - 复合材料、热吸收组件和用于生产复合材料的方法 - Google Patents

复合材料、热吸收组件和用于生产复合材料的方法 Download PDF

Info

Publication number
CN110713347B
CN110713347B CN201911006807.5A CN201911006807A CN110713347B CN 110713347 B CN110713347 B CN 110713347B CN 201911006807 A CN201911006807 A CN 201911006807A CN 110713347 B CN110713347 B CN 110713347B
Authority
CN
China
Prior art keywords
composite material
fused silica
powder
phase
particle size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201911006807.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN110713347A (zh
Inventor
G.沙伊赫
C.申克
F.维泽利
N.乔利奇
C.诺伊曼
S.莫里茨
D.米歇尔
A.阿塔诺斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Heraeus Quartz America LLC
Original Assignee
Heraeus Quarzglas GmbH and Co KG
Heraeus Quartz America LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzglas GmbH and Co KG, Heraeus Quartz America LLC filed Critical Heraeus Quarzglas GmbH and Co KG
Publication of CN110713347A publication Critical patent/CN110713347A/zh
Application granted granted Critical
Publication of CN110713347B publication Critical patent/CN110713347B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08—Materials not undergoing a change of physical state when used
    • C09K5/14—Solid materials, e.g. powdery or granular
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
    • C03C14/006—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of microcrystallites, e.g. of optically or electrically active material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/02—Other methods of shaping glass by casting molten glass, e.g. injection moulding
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C03B19/066—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
    • C03C14/004—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of particles or flakes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/14—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silica
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details specially adapted for crucible or pot furnaces
    • F27B14/10—Crucibles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00—Nature of the non-vitreous component
    • C03C2214/04—Particles; Flakes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00—Nature of the non-vitreous component
    • C03C2214/08—Metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00—Nature of the non-vitreous component
    • C03C2214/16—Microcrystallites, e.g. of optically or electrically active material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00—Nature of the non-vitreous component
    • C03C2214/30—Methods of making the composites
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details specially adapted for crucible or pot furnaces
    • F27B2014/0843—Lining or casing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Structural Engineering (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Compositions Of Oxide Ceramics (AREA)
CN201911006807.5A 2013-11-11 2014-11-06 复合材料、热吸收组件和用于生产复合材料的方法 Active CN110713347B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US14/077,182 US9957431B2 (en) 2013-11-11 2013-11-11 Composite material, heat-absorbing component, and method for producing the composite material
US14/077182 2013-11-11
PCT/EP2014/073906 WO2015067688A1 (en) 2013-11-11 2014-11-06 Composite material, heat-absorbing component, and method for producing the composite material
CN201480061685.9A CN105873874B (zh) 2013-11-11 2014-11-06 复合材料、热吸收组件和用于生产复合材料的方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201480061685.9A Division CN105873874B (zh) 2013-11-11 2014-11-06 复合材料、热吸收组件和用于生产复合材料的方法

Publications (2)

Publication Number Publication Date
CN110713347A CN110713347A (zh) 2020-01-21
CN110713347B true CN110713347B (zh) 2022-07-05

Family

ID=51871021

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201911006807.5A Active CN110713347B (zh) 2013-11-11 2014-11-06 复合材料、热吸收组件和用于生产复合材料的方法
CN201480061685.9A Active CN105873874B (zh) 2013-11-11 2014-11-06 复合材料、热吸收组件和用于生产复合材料的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201480061685.9A Active CN105873874B (zh) 2013-11-11 2014-11-06 复合材料、热吸收组件和用于生产复合材料的方法

Country Status (9)

Country Link
US (2) US9957431B2 (enExample)
EP (1) EP3068739B1 (enExample)
JP (2) JP6676525B2 (enExample)
KR (2) KR102387005B1 (enExample)
CN (2) CN110713347B (enExample)
IL (1) IL245132B (enExample)
SG (1) SG11201603037WA (enExample)
TW (1) TWI580662B (enExample)
WO (1) WO2015067688A1 (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015119763A1 (de) * 2015-11-16 2017-05-18 Heraeus Quarzglas Gmbh & Co. Kg Infrarotstrahler
EP3173386B1 (de) * 2015-11-25 2018-05-02 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung eines verbundkörpers aus hochkieselsäurehaltigem werkstoff
KR20180095619A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 실리카 유리 제조 동안 규소 함량의 증가
CN108698894A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 在多腔式烘箱中制备石英玻璃体
TWI733723B (zh) 2015-12-18 2021-07-21 德商何瑞斯廓格拉斯公司 不透明石英玻璃體的製備
CN108698888A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 在石英玻璃制备中作为中间物的经碳掺杂的二氧化硅颗粒的制备
CN108698892A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 从二氧化硅颗粒制备石英玻璃体
CN108698890A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 利用在熔融烘箱中的露点监测制备石英玻璃体
WO2017103153A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt
US11299417B2 (en) 2015-12-18 2022-04-12 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body in a melting crucible of refractory metal
TWI808933B (zh) 2015-12-18 2023-07-21 德商何瑞斯廓格拉斯公司 石英玻璃體、二氧化矽顆粒、光導、施照體、及成型體及其製備方法
KR20180095880A (ko) 2015-12-18 2018-08-28 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 합성 석영 유리 결정립의 제조
TW201733094A (zh) 2016-01-27 2017-09-16 康寧公司 用於例如嚴苛環境電路及高頻天線之矽石含量基板
EP3205630B1 (de) * 2016-02-12 2020-01-01 Heraeus Quarzglas GmbH & Co. KG Diffusormaterial aus synthetisch erzeugtem quarzglas sowie verfahren zur herstellung eines vollständig oder teilweise daraus bestehenden formkörpers
DE102016113815A1 (de) * 2016-07-27 2018-02-01 Heraeus Noblelight Gmbh Infrarotflächenstrahler und Verfahren zur Herstellung des Infrarotflächenstrahlers
WO2018054610A1 (de) 2016-09-22 2018-03-29 Heraeus Noblelight Gmbh Infrarot-strahler
DE102016118137A1 (de) * 2016-09-26 2018-03-29 Heraeus Noblelight Gmbh Infrarotflächenstrahler
DE102016120536A1 (de) * 2016-10-27 2018-05-03 Heraeus Noblelight Gmbh Infrarotstrahler
EP3339256A1 (de) * 2016-12-23 2018-06-27 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von opakem quarzglas, und rohling aus dem opaken quarzglas
KR101951440B1 (ko) * 2017-01-12 2019-02-22 코닝 인코포레이티드 유리 리본을 드로잉하기 위한 풀링 롤, 장치 및 방법
DE102017112611A1 (de) 2017-06-08 2018-12-13 Heraeus Noblelight Gmbh Infrarotstrahler und Verfahren für dessen Herstellung
DE102017124456A1 (de) 2017-10-19 2019-04-25 Heraeus Noblelight Gmbh Beheizbarer Gasinjektor
KR102015480B1 (ko) * 2019-01-02 2019-08-28 코닝 인코포레이티드 유리 리본을 드로잉하기 위한 풀링 롤, 장치 및 방법
WO2022070930A1 (ja) 2020-10-01 2022-04-07 東ソ－・エスジ－エム株式会社 黒色石英ガラス及びその製造方法
JP7680917B2 (ja) * 2020-10-01 2025-05-21 東ソ－・エスジ－エム株式会社 黒色石英ガラス及びその製造方法
CN116323503B (zh) 2020-10-07 2026-01-02 东曹石英素材股份有限公司 黑色石英玻璃及其制造方法
US20230078325A1 (en) * 2021-09-14 2023-03-16 Globalwafers Co., Ltd. Crystal pulling systems having composite polycrystalline silicon feed tubes, methods for preparing such tubes, and methods for forming a single crystal silicon ingot
CN114890678B (zh) * 2022-04-27 2023-05-02 中国科学院西安光学精密机械研究所 一种大尺寸低膨胀玻璃基复合材料及其注浆成型方法
CN117228934A (zh) * 2023-08-18 2023-12-15 江苏太平洋石英股份有限公司 高纯黑色不透明石英玻璃及其制造方法和其使用的染色剂
WO2025215729A1 (ja) * 2024-04-09 2025-10-16 東ソ－・エスジ－エム株式会社 黒色石英ガラス、その製造方法ならびにそれを応用した部材および製品
EP4737410A1 (de) 2024-10-31 2026-05-06 Heraeus Quarzglas GmbH & Co. KG Opakes quarzglas mit hoher absorption im infrarotbereich
EP4737411A1 (de) 2024-10-31 2026-05-06 Heraeus Quarzglas GmbH & Co. KG Opakes quarzglas mit hoher absorption
EP4737414A1 (en) 2024-10-31 2026-05-06 Heraeus Quarzglas GmbH & Co. KG Opaque quartz glass having high absorption in the infrared range

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2213788A (en) * 1987-09-15 1989-03-16 Unilever Plc Silicas
CN1320108A (zh) * 1998-09-28 2001-10-31 费伦顿有限公司 制备金刚石复合材料的方法及由该方法制备的复合材料
JP2006342023A (ja) * 2005-06-09 2006-12-21 Asahi Kasei Corp 中空シリカゾル及び中空シリカ微粒子
CN1955228A (zh) * 2005-10-21 2007-05-02 Esk陶瓷有限及两合公司 含有氮化硅的耐久性硬质涂层
CN101023041A (zh) * 2004-08-23 2007-08-22 赫罗伊斯石英玻璃股份有限两合公司 具有反射体层的组件及其生产方法
TW200804185A (en) * 2006-07-14 2008-01-16 Univ Chung Yuan Christian Biochip with a three dimensional mesoporous layer and method for forming the same
CN101370748A (zh) * 2005-05-09 2009-02-18 康宁股份有限公司 矿物聚合物复合材料及由其形成的结构物
CN101429051A (zh) * 2007-11-08 2009-05-13 Esk陶瓷有限及两合公司 含Si3N4的胶粘剂、成型体、成型体的制造方法以及成型体的用途
CN101687680A (zh) * 2007-06-30 2010-03-31 赫罗伊斯石英玻璃股份有限两合公司 从不透明石英玻璃和致密封闭层的基体生产复合体的方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3301635A (en) * 1965-07-01 1967-01-31 Du Pont Molded amorphous silica bodies and molding powders for manufacture of same
GB1384319A (en) * 1971-04-19 1975-02-19 Sherwood Refractories Vitreous silica and process and apparatus for making same
US4033780A (en) * 1976-04-26 1977-07-05 Corning Glass Works Method of enhancing the refractoriness of high purity fused silica
US4911896A (en) * 1986-07-24 1990-03-27 General Electric Company Fused quartz member for use in semiconductor manufacture
JP2676405B2 (ja) 1989-04-25 1997-11-17 信越石英株式会社 半導体製造装置若しくは治具用石英ガラス及びその製造方法
DE4338807C1 (de) * 1993-11-12 1995-01-26 Heraeus Quarzglas Formkörper mit hohem Gehalt an Siliziumdioxid und Verfahren zur Herstellung solcher Formkörper
US5674792A (en) * 1993-11-12 1997-10-07 Heraeus Quarzglas Gmbh Shaped body having a high silicon dioxide content and a process for producing such shaped bodies
JP3011866B2 (ja) 1994-11-30 2000-02-21 信越石英株式会社 枚葉式ウエーハ熱処理装置
GB9603128D0 (en) * 1996-02-15 1996-04-17 Tsl Group Plc Improved vitreous silica product and method of manufacture
DE19943103A1 (de) * 1999-09-09 2001-03-15 Wacker Chemie Gmbh Hochgefüllte SiO2-Dispersion, Verfahren zu ihrer Herstellung und Verwendung
JP4458692B2 (ja) * 2000-02-21 2010-04-28 日本碍子株式会社 複合材料
US6486084B2 (en) 2000-02-21 2002-11-26 Ngk Insulators, Ltd. Composite material and method of producing the same
JP2002283015A (ja) 2001-03-21 2002-10-02 Kawasaki Steel Corp 鋼の連続鋳造方法
CN100509669C (zh) * 2002-11-29 2009-07-08 信越石英株式会社 合成石英玻璃的制造方法及合成石英玻璃体
FR2858611B1 (fr) * 2003-08-07 2006-11-24 Saint Gobain Ct Recherches Procede de fabrication d'une piece en silice amorphe frittee, moule et barbotine mis en oeuvre dans ce procede
JP2006027930A (ja) * 2004-07-13 2006-02-02 Tosoh Corp 黒色石英ガラスおよびその製造方法並びにそれを用いた部材
US20060060820A1 (en) * 2004-09-21 2006-03-23 Schumacher Ray F Hollow porous-wall glass microspheres for hydrogen storage
DE102009005446A1 (de) * 2009-01-21 2010-07-22 Schott Ag Granulat, Verfahren zu dessen Herstellung sowie dessen Verwendung
JP4951040B2 (ja) * 2009-08-05 2012-06-13 信越石英株式会社 シリカ容器及びその製造方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2213788A (en) * 1987-09-15 1989-03-16 Unilever Plc Silicas
EP0308165A2 (en) * 1987-09-15 1989-03-22 Unilever Plc Silicas
CN1320108A (zh) * 1998-09-28 2001-10-31 费伦顿有限公司 制备金刚石复合材料的方法及由该方法制备的复合材料
CN101023041A (zh) * 2004-08-23 2007-08-22 赫罗伊斯石英玻璃股份有限两合公司 具有反射体层的组件及其生产方法
CN101370748A (zh) * 2005-05-09 2009-02-18 康宁股份有限公司 矿物聚合物复合材料及由其形成的结构物
JP2006342023A (ja) * 2005-06-09 2006-12-21 Asahi Kasei Corp 中空シリカゾル及び中空シリカ微粒子
CN1955228A (zh) * 2005-10-21 2007-05-02 Esk陶瓷有限及两合公司 含有氮化硅的耐久性硬质涂层
TW200804185A (en) * 2006-07-14 2008-01-16 Univ Chung Yuan Christian Biochip with a three dimensional mesoporous layer and method for forming the same
CN101687680A (zh) * 2007-06-30 2010-03-31 赫罗伊斯石英玻璃股份有限两合公司 从不透明石英玻璃和致密封闭层的基体生产复合体的方法
CN101429051A (zh) * 2007-11-08 2009-05-13 Esk陶瓷有限及两合公司 含Si3N4的胶粘剂、成型体、成型体的制造方法以及成型体的用途

Also Published As

Publication number Publication date
JP7009521B2 (ja) 2022-01-25
US9957431B2 (en) 2018-05-01
EP3068739A1 (en) 2016-09-21
EP3068739B1 (en) 2018-04-04
IL245132B (en) 2020-09-30
JP2016536254A (ja) 2016-11-24
TW201533006A (zh) 2015-09-01
US20150132511A1 (en) 2015-05-14
CN105873874A (zh) 2016-08-17
WO2015067688A1 (en) 2015-05-14
KR102083617B1 (ko) 2020-04-24
CN110713347A (zh) 2020-01-21
KR20160085314A (ko) 2016-07-15
JP6676525B2 (ja) 2020-04-08
JP2020073440A (ja) 2020-05-14
TWI580662B (zh) 2017-05-01
SG11201603037WA (en) 2016-05-30
KR102387005B1 (ko) 2022-04-18
KR20200020023A (ko) 2020-02-25
IL245132A0 (en) 2016-06-30
US20180215984A1 (en) 2018-08-02
CN105873874B (zh) 2019-11-08

Similar Documents

Publication Publication Date Title
CN105873874B (zh) 复合材料、热吸收组件和用于生产复合材料的方法
KR101333190B1 (ko) 실리카 용기 및 그 제조 방법
CN102099304B (zh) 掺杂氮的石英玻璃制造方法及适于其实施的石英玻璃粒子
US6013236A (en) Wafer
KR102246056B1 (ko) 불투명 석영 유리 및 그의 제조 방법
JP5314429B2 (ja) 合成不透明石英ガラス及びその製造方法
KR101374545B1 (ko) 실리카 분말 및 실리카 용기 그리고 그 제조방법
TWI395719B (zh) 石英玻璃坩堝的製法
KR20110114634A (ko) 실리카 용기 및 그 제조방법
JP6698585B2 (ja) 細孔を含む不透明石英ガラスの製造方法
US4040848A (en) Polycrystalline silicon articles containing boron by sintering
KR100734970B1 (ko) Ｓｉ3Ｎ4 코팅 ＳｉＯ2 성형체의 제조 방법
JP6379508B2 (ja) 不透明石英ガラスおよびその製造方法
Ahlawat Influence of multi-step annealing on nanostructure and surface morphology of Y2O3: SiO2 powder
JP3793553B2 (ja) 黒色ＳｉＯ２質耐食性部材及びその製造方法
US20060240287A1 (en) Dummy wafer and method for manufacturing thereof
US20260116812A1 (en) Opaque quartz glass having high absorption in the infrared range
JP6252257B2 (ja) 不透明石英ガラスおよびその製造方法
JP6273997B2 (ja) 不透明石英ガラスおよびその製造方法
JP2026081187A (ja) 高い吸収率を有する不透明石英ガラス
WO2025215729A1 (ja) 黒色石英ガラス、その製造方法ならびにそれを応用した部材および製品

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant