CN1096710C - 半导体器件 - Google Patents
半导体器件 Download PDFInfo
- Publication number
- CN1096710C CN1096710C CN97125880A CN97125880A CN1096710C CN 1096710 C CN1096710 C CN 1096710C CN 97125880 A CN97125880 A CN 97125880A CN 97125880 A CN97125880 A CN 97125880A CN 1096710 C CN1096710 C CN 1096710C
- Authority
- CN
- China
- Prior art keywords
- diffusion layer
- conductivity type
- layer
- trap
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims description 56
- 230000015556 catabolic process Effects 0.000 claims abstract description 21
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 9
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000009792 diffusion process Methods 0.000 claims description 177
- 239000002184 metal Substances 0.000 claims description 39
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 238000009413 insulation Methods 0.000 claims description 27
- 239000012535 impurity Substances 0.000 claims description 11
- 230000020169 heat generation Effects 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 description 48
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 239000000758 substrate Substances 0.000 description 9
- 229910052914 metal silicate Inorganic materials 0.000 description 8
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003071 parasitic effect Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000002800 charge carrier Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- -1 phosphonium ion Chemical class 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0266—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements
- H01L27/027—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements specially adapted to provide an electrical current path other than the field effect induced current path
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP34782896A JP3144330B2 (ja) | 1996-12-26 | 1996-12-26 | 半導体装置 |
JP347828/96 | 1996-12-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1186341A CN1186341A (zh) | 1998-07-01 |
CN1096710C true CN1096710C (zh) | 2002-12-18 |
Family
ID=18392884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN97125880A Expired - Fee Related CN1096710C (zh) | 1996-12-26 | 1997-12-26 | 半导体器件 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5898206A (zh) |
JP (1) | JP3144330B2 (zh) |
KR (1) | KR100311578B1 (zh) |
CN (1) | CN1096710C (zh) |
TW (1) | TW368686B (zh) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3851738B2 (ja) * | 1999-01-29 | 2006-11-29 | 株式会社東芝 | 半導体装置 |
JP3317345B2 (ja) * | 1999-07-23 | 2002-08-26 | 日本電気株式会社 | 半導体装置 |
KR100328836B1 (ko) * | 1999-10-01 | 2002-03-15 | 박종섭 | 정전방전 보호부의 구조 |
JP3485087B2 (ja) * | 1999-12-27 | 2004-01-13 | セイコーエプソン株式会社 | 半導体装置 |
US6310380B1 (en) * | 2000-03-06 | 2001-10-30 | Chartered Semiconductor Manufacturing, Inc. | Electrostatic discharge protection transistor structure with a trench extending through the source or drain silicide layers |
DE10022366A1 (de) * | 2000-05-08 | 2001-11-29 | Micronas Gmbh | ESD-Schutzstruktur |
KR100712485B1 (ko) * | 2000-06-14 | 2007-04-27 | 삼성전자주식회사 | 입력특성 향상을 위해 노이즈를 방지하기 위한 반도체집적회로 |
DE10041139A1 (de) * | 2000-08-21 | 2002-03-14 | Philips Corp Intellectual Pty | Anordnung zur Verbesserung des ESD-Schutzes bei einem CMOS Buffer |
JP2002261292A (ja) | 2000-12-26 | 2002-09-13 | Toshiba Corp | 半導体装置及びその製造方法 |
US6815775B2 (en) | 2001-02-02 | 2004-11-09 | Industrial Technology Research Institute | ESD protection design with turn-on restraining method and structures |
KR100393220B1 (ko) * | 2001-03-23 | 2003-07-31 | 삼성전자주식회사 | Esd 보호용 반도체 장치 |
US6703641B2 (en) * | 2001-11-16 | 2004-03-09 | International Business Machines Corporation | Structure for detecting charging effects in device processing |
KR100437856B1 (ko) * | 2002-08-05 | 2004-06-30 | 삼성전자주식회사 | 모스 트랜지스터 및 이를 포함하는 반도체 장치의 형성방법. |
US7244992B2 (en) * | 2003-07-17 | 2007-07-17 | Ming-Dou Ker | Turn-on-efficient bipolar structures with deep N-well for on-chip ESD protection |
KR100629436B1 (ko) * | 2004-09-08 | 2006-09-27 | 매그나칩 반도체 유한회사 | 고전압 소자의 정전기 보호장치 |
JP4711061B2 (ja) * | 2005-09-13 | 2011-06-29 | セイコーエプソン株式会社 | 半導体装置 |
JP4950463B2 (ja) | 2005-09-14 | 2012-06-13 | キヤノン株式会社 | 半導体装置 |
JP2009116206A (ja) * | 2007-11-09 | 2009-05-28 | Sony Corp | El表示パネル及び電子機器 |
US7932577B2 (en) * | 2007-12-31 | 2011-04-26 | Silicon Laboratories, Inc. | Circuit device and method of forming a circuit device having a reduced peak current density |
JP6126489B2 (ja) * | 2013-07-29 | 2017-05-10 | キヤノン株式会社 | 記録素子基板、記録ヘッド及び記録装置 |
DE102016203906A1 (de) * | 2016-03-10 | 2017-09-28 | Robert Bosch Gmbh | Halbleiterbauelement, insbesondere Leistungstransistor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0379080A (ja) * | 1989-08-23 | 1991-04-04 | New Japan Radio Co Ltd | 高耐圧mosトランジスタ |
CN1130806A (zh) * | 1994-09-14 | 1996-09-11 | 日本电气株式会社 | 制造具有各种金属氧化物半导体场效应晶体管的半导体器件的方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8900593A (nl) * | 1989-03-13 | 1990-10-01 | Philips Nv | Halfgeleiderinrichting met een beveiligingsschakeling. |
US5604369A (en) * | 1995-03-01 | 1997-02-18 | Texas Instruments Incorporated | ESD protection device for high voltage CMOS applications |
-
1996
- 1996-12-26 JP JP34782896A patent/JP3144330B2/ja not_active Expired - Fee Related
-
1997
- 1997-12-22 TW TW086119527A patent/TW368686B/zh active
- 1997-12-23 US US08/997,719 patent/US5898206A/en not_active Expired - Lifetime
- 1997-12-26 KR KR1019970074433A patent/KR100311578B1/ko not_active IP Right Cessation
- 1997-12-26 CN CN97125880A patent/CN1096710C/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0379080A (ja) * | 1989-08-23 | 1991-04-04 | New Japan Radio Co Ltd | 高耐圧mosトランジスタ |
CN1130806A (zh) * | 1994-09-14 | 1996-09-11 | 日本电气株式会社 | 制造具有各种金属氧化物半导体场效应晶体管的半导体器件的方法 |
Also Published As
Publication number | Publication date |
---|---|
KR100311578B1 (ko) | 2001-11-30 |
CN1186341A (zh) | 1998-07-01 |
JPH10189756A (ja) | 1998-07-21 |
KR19980064705A (ko) | 1998-10-07 |
TW368686B (en) | 1999-09-01 |
JP3144330B2 (ja) | 2001-03-12 |
US5898206A (en) | 1999-04-27 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: NEC ELECTRONICS TAIWAN LTD. Free format text: FORMER OWNER: NIPPON ELECTRIC CO., LTD. Effective date: 20041015 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20041015 Address after: Kanagawa, Japan Patentee after: NEC Corp. Address before: Tokyo, Japan Patentee before: NEC Corp. |
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C56 | Change in the name or address of the patentee |
Owner name: RENESAS ELECTRONICS CORPORATION Free format text: FORMER NAME: NEC CORP. |
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CP01 | Change in the name or title of a patent holder |
Address after: Kanagawa, Japan Patentee after: Renesas Electronics Corporation Address before: Kanagawa, Japan Patentee before: NEC Corp. |
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ASS | Succession or assignment of patent right |
Owner name: DESAILA ADVANCED TECHNOLOGY COMPANY Free format text: FORMER OWNER: RENESAS ELECTRONICS CORPORATION Effective date: 20141014 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20141014 Address after: American California Patentee after: Desella Advanced Technology Company Address before: Kanagawa, Japan Patentee before: Renesas Electronics Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20021218 Termination date: 20161226 |