CN107109631A - 圆筒形靶材的制造方法、圆筒形溅镀靶及烧制用辅助具 - Google Patents
圆筒形靶材的制造方法、圆筒形溅镀靶及烧制用辅助具 Download PDFInfo
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- CN107109631A CN107109631A CN201580073047.3A CN201580073047A CN107109631A CN 107109631 A CN107109631 A CN 107109631A CN 201580073047 A CN201580073047 A CN 201580073047A CN 107109631 A CN107109631 A CN 107109631A
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- cylindrical shape
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Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015-035839 | 2015-02-25 | ||
JP2015035839 | 2015-02-25 | ||
PCT/JP2015/084567 WO2016136088A1 (ja) | 2015-02-25 | 2015-12-09 | 円筒形ターゲット材の製造方法、円筒形スパッタリングターゲットおよび焼成用治具 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN107109631A true CN107109631A (zh) | 2017-08-29 |
Family
ID=56789359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201580073047.3A Pending CN107109631A (zh) | 2015-02-25 | 2015-12-09 | 圆筒形靶材的制造方法、圆筒形溅镀靶及烧制用辅助具 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6678157B2 (ja) |
CN (1) | CN107109631A (ja) |
TW (1) | TWI723974B (ja) |
WO (1) | WO2016136088A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021106258A1 (ja) * | 2019-11-29 | 2021-06-03 | 三井金属鉱業株式会社 | 円筒形スパッタリングターゲットの製造方法及び該製造方法に用いる焼成治具 |
CN113277835B (zh) * | 2020-02-20 | 2022-10-11 | 广州市尤特新材料有限公司 | 定位工装和平面靶材的烧结方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10114567A (ja) * | 1996-10-04 | 1998-05-06 | Ngk Insulators Ltd | 焼成用支持台 |
JP2001348264A (ja) * | 2000-06-06 | 2001-12-18 | Takahama Industry Co Ltd | 焼成用治具の支持板の反転方法およびその装置 |
JP2004250241A (ja) * | 2003-02-18 | 2004-09-09 | Nec Tokin Corp | 焼成用セッター及び焼成方法 |
JP2005281862A (ja) * | 2004-03-05 | 2005-10-13 | Tosoh Corp | 円筒形スパッタリングターゲット並びにセラミックス焼結体及びその製造方法 |
CN102165092A (zh) * | 2008-09-25 | 2011-08-24 | 东曹株式会社 | 圆筒形溅镀靶及其制造方法 |
JP2013147368A (ja) * | 2012-01-18 | 2013-08-01 | Mitsui Mining & Smelting Co Ltd | セラミックス円筒形スパッタリングターゲット材およびその製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS575519Y2 (ja) * | 1976-12-25 | 1982-02-02 | ||
JPS59107953A (ja) * | 1982-12-08 | 1984-06-22 | 東洋ゴム工業株式会社 | 多孔性セラミツクス円筒体の焼成法 |
JPH03103363A (ja) * | 1989-09-14 | 1991-04-30 | Showa Denko Kk | セラミックス成形体の焼結方法および焼結用治具 |
JP2828750B2 (ja) * | 1990-08-21 | 1998-11-25 | 日本碍子株式会社 | 金属溶湯用濾材の焼成方法及びそれに用いる焼成用治具 |
JP2000086358A (ja) * | 1998-06-04 | 2000-03-28 | Ngk Spark Plug Co Ltd | 有底円筒状セラミックス焼結体の製造方法 |
KR20060043427A (ko) * | 2004-03-05 | 2006-05-15 | 토소가부시키가이샤 | 원통형 스퍼터링 타겟, 세라믹 소결체와 그 제조방법 |
-
2015
- 2015-12-09 JP JP2017501866A patent/JP6678157B2/ja active Active
- 2015-12-09 WO PCT/JP2015/084567 patent/WO2016136088A1/ja active Application Filing
- 2015-12-09 CN CN201580073047.3A patent/CN107109631A/zh active Pending
-
2016
- 2016-01-25 TW TW105102177A patent/TWI723974B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10114567A (ja) * | 1996-10-04 | 1998-05-06 | Ngk Insulators Ltd | 焼成用支持台 |
JP2001348264A (ja) * | 2000-06-06 | 2001-12-18 | Takahama Industry Co Ltd | 焼成用治具の支持板の反転方法およびその装置 |
JP2004250241A (ja) * | 2003-02-18 | 2004-09-09 | Nec Tokin Corp | 焼成用セッター及び焼成方法 |
JP2005281862A (ja) * | 2004-03-05 | 2005-10-13 | Tosoh Corp | 円筒形スパッタリングターゲット並びにセラミックス焼結体及びその製造方法 |
CN102165092A (zh) * | 2008-09-25 | 2011-08-24 | 东曹株式会社 | 圆筒形溅镀靶及其制造方法 |
JP2013147368A (ja) * | 2012-01-18 | 2013-08-01 | Mitsui Mining & Smelting Co Ltd | セラミックス円筒形スパッタリングターゲット材およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2016136088A1 (ja) | 2017-12-07 |
WO2016136088A1 (ja) | 2016-09-01 |
TW201702411A (zh) | 2017-01-16 |
JP6678157B2 (ja) | 2020-04-08 |
TWI723974B (zh) | 2021-04-11 |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170829 |
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RJ01 | Rejection of invention patent application after publication |