CN106662741B - 电扫描器及激光加工装置 - Google Patents

电扫描器及激光加工装置 Download PDF

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Publication number
CN106662741B
CN106662741B CN201480080856.2A CN201480080856A CN106662741B CN 106662741 B CN106662741 B CN 106662741B CN 201480080856 A CN201480080856 A CN 201480080856A CN 106662741 B CN106662741 B CN 106662741B
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CN
China
Prior art keywords
front side
rotation axis
side bearing
electrical scanner
rotary body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201480080856.2A
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English (en)
Chinese (zh)
Other versions
CN106662741A (zh
Inventor
矛馆俊之
内山研吾
高桥尚弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication date
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Publication of CN106662741A publication Critical patent/CN106662741A/zh
Application granted granted Critical
Publication of CN106662741B publication Critical patent/CN106662741B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN201480080856.2A 2014-07-31 2014-07-31 电扫描器及激光加工装置 Active CN106662741B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2014/070278 WO2016017019A1 (ja) 2014-07-31 2014-07-31 ガルバノスキャナ及びレーザ加工装置

Publications (2)

Publication Number Publication Date
CN106662741A CN106662741A (zh) 2017-05-10
CN106662741B true CN106662741B (zh) 2018-05-29

Family

ID=52986015

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480080856.2A Active CN106662741B (zh) 2014-07-31 2014-07-31 电扫描器及激光加工装置

Country Status (5)

Country Link
JP (1) JP5705390B1 (ja)
KR (1) KR20170016990A (ja)
CN (1) CN106662741B (ja)
TW (1) TWI559033B (ja)
WO (1) WO2016017019A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6484204B2 (ja) * 2016-09-09 2019-03-13 ファナック株式会社 ガルバノスキャナ
JP6374938B2 (ja) 2016-11-16 2018-08-15 株式会社ソディック ガルバノスキャナ
RU174483U1 (ru) * 2016-12-23 2017-10-16 Игорь Александрович Зябрев Сканатор лазерного излучения

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006220254A (ja) * 2005-02-14 2006-08-24 Nsk Ltd 転がり軸受及びこれを備えた歯車装置
JP2007306755A (ja) * 2006-05-15 2007-11-22 Konica Minolta Opto Inc モータユニット及びレンズ鏡胴並びにカメラ
JP2009192626A (ja) * 2008-02-12 2009-08-27 Nikon Corp 走査型顕微鏡
JP2010071458A (ja) * 2008-09-22 2010-04-02 Asmo Co Ltd 回転電機の軸受構造及び回転電機
JP2011154196A (ja) * 2010-01-27 2011-08-11 Hitachi Via Mechanics Ltd ガルバノスキャナ装置及びレーザ加工装置
JP2012078279A (ja) * 2010-10-05 2012-04-19 Shimadzu Corp 干渉分光光度計
JP2014058932A (ja) * 2012-09-19 2014-04-03 Shimadzu Corp 真空ポンプ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050225312A1 (en) * 2004-04-12 2005-10-13 William Daly Galvanometer
US20070291382A1 (en) * 2006-06-16 2007-12-20 Pinard Adam I Mirror mounting structures and methods employing shape memory materials for limited rotation motors and scanners
JP2008138779A (ja) 2006-12-01 2008-06-19 Ntn Corp 軸支持装置及び円筒ころ軸受の予圧法
US8081362B2 (en) * 2009-08-12 2011-12-20 Mitsubishi Electric Research Laboratories, Inc. Method and apparatus for stabilizing galvanometer scanner
WO2013183435A1 (ja) * 2012-06-08 2013-12-12 三菱電機株式会社 ガルバノスキャナおよびレーザ加工機

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006220254A (ja) * 2005-02-14 2006-08-24 Nsk Ltd 転がり軸受及びこれを備えた歯車装置
JP2007306755A (ja) * 2006-05-15 2007-11-22 Konica Minolta Opto Inc モータユニット及びレンズ鏡胴並びにカメラ
JP2009192626A (ja) * 2008-02-12 2009-08-27 Nikon Corp 走査型顕微鏡
JP2010071458A (ja) * 2008-09-22 2010-04-02 Asmo Co Ltd 回転電機の軸受構造及び回転電機
JP2011154196A (ja) * 2010-01-27 2011-08-11 Hitachi Via Mechanics Ltd ガルバノスキャナ装置及びレーザ加工装置
JP2012078279A (ja) * 2010-10-05 2012-04-19 Shimadzu Corp 干渉分光光度計
JP2014058932A (ja) * 2012-09-19 2014-04-03 Shimadzu Corp 真空ポンプ

Also Published As

Publication number Publication date
JPWO2016017019A1 (ja) 2017-04-27
CN106662741A (zh) 2017-05-10
TW201604584A (zh) 2016-02-01
TWI559033B (zh) 2016-11-21
WO2016017019A1 (ja) 2016-02-04
JP5705390B1 (ja) 2015-04-22
KR20170016990A (ko) 2017-02-14

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