TWI559033B - 檢流計掃描儀及雷射加工裝置 - Google Patents

檢流計掃描儀及雷射加工裝置 Download PDF

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Publication number
TWI559033B
TWI559033B TW104101294A TW104101294A TWI559033B TW I559033 B TWI559033 B TW I559033B TW 104101294 A TW104101294 A TW 104101294A TW 104101294 A TW104101294 A TW 104101294A TW I559033 B TWI559033 B TW I559033B
Authority
TW
Taiwan
Prior art keywords
front side
rotating shaft
vibration
galvanometer scanner
bearing
Prior art date
Application number
TW104101294A
Other languages
English (en)
Chinese (zh)
Other versions
TW201604584A (zh
Inventor
鉾館俊之
内山研吾
高橋尙弘
Original Assignee
三菱電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機股份有限公司 filed Critical 三菱電機股份有限公司
Publication of TW201604584A publication Critical patent/TW201604584A/zh
Application granted granted Critical
Publication of TWI559033B publication Critical patent/TWI559033B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
TW104101294A 2014-07-31 2015-01-15 檢流計掃描儀及雷射加工裝置 TWI559033B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2014/070278 WO2016017019A1 (ja) 2014-07-31 2014-07-31 ガルバノスキャナ及びレーザ加工装置

Publications (2)

Publication Number Publication Date
TW201604584A TW201604584A (zh) 2016-02-01
TWI559033B true TWI559033B (zh) 2016-11-21

Family

ID=52986015

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104101294A TWI559033B (zh) 2014-07-31 2015-01-15 檢流計掃描儀及雷射加工裝置

Country Status (5)

Country Link
JP (1) JP5705390B1 (ja)
KR (1) KR20170016990A (ja)
CN (1) CN106662741B (ja)
TW (1) TWI559033B (ja)
WO (1) WO2016017019A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6484204B2 (ja) * 2016-09-09 2019-03-13 ファナック株式会社 ガルバノスキャナ
JP6374938B2 (ja) 2016-11-16 2018-08-15 株式会社ソディック ガルバノスキャナ
RU174483U1 (ru) * 2016-12-23 2017-10-16 Игорь Александрович Зябрев Сканатор лазерного излучения

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200803119A (en) * 2006-06-16 2008-01-01 Gsi Group Corp Improved mirror mounting structures and methods employing shape memory materials for limited rotation motors and scanners
JP2011154196A (ja) * 2010-01-27 2011-08-11 Hitachi Via Mechanics Ltd ガルバノスキャナ装置及びレーザ加工装置
TW201135283A (en) * 2009-08-12 2011-10-16 Mitsubishi Electric Corp Galvanometer scanner
JP2012078279A (ja) * 2010-10-05 2012-04-19 Shimadzu Corp 干渉分光光度計
TW201411186A (zh) * 2012-06-08 2014-03-16 Mitsubishi Electric Corp 電流鏡掃描器及雷射加工機

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050225312A1 (en) * 2004-04-12 2005-10-13 William Daly Galvanometer
JP2006220254A (ja) * 2005-02-14 2006-08-24 Nsk Ltd 転がり軸受及びこれを備えた歯車装置
JP2007306755A (ja) * 2006-05-15 2007-11-22 Konica Minolta Opto Inc モータユニット及びレンズ鏡胴並びにカメラ
JP2008138779A (ja) 2006-12-01 2008-06-19 Ntn Corp 軸支持装置及び円筒ころ軸受の予圧法
JP2009192626A (ja) * 2008-02-12 2009-08-27 Nikon Corp 走査型顕微鏡
JP2010071458A (ja) * 2008-09-22 2010-04-02 Asmo Co Ltd 回転電機の軸受構造及び回転電機
JP2014058932A (ja) * 2012-09-19 2014-04-03 Shimadzu Corp 真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200803119A (en) * 2006-06-16 2008-01-01 Gsi Group Corp Improved mirror mounting structures and methods employing shape memory materials for limited rotation motors and scanners
TW201135283A (en) * 2009-08-12 2011-10-16 Mitsubishi Electric Corp Galvanometer scanner
JP2011154196A (ja) * 2010-01-27 2011-08-11 Hitachi Via Mechanics Ltd ガルバノスキャナ装置及びレーザ加工装置
JP2012078279A (ja) * 2010-10-05 2012-04-19 Shimadzu Corp 干渉分光光度計
TW201411186A (zh) * 2012-06-08 2014-03-16 Mitsubishi Electric Corp 電流鏡掃描器及雷射加工機

Also Published As

Publication number Publication date
JPWO2016017019A1 (ja) 2017-04-27
CN106662741A (zh) 2017-05-10
CN106662741B (zh) 2018-05-29
TW201604584A (zh) 2016-02-01
WO2016017019A1 (ja) 2016-02-04
JP5705390B1 (ja) 2015-04-22
KR20170016990A (ko) 2017-02-14

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