CN106662741B - Electrical scanner and laser processing device - Google Patents
Electrical scanner and laser processing device Download PDFInfo
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- CN106662741B CN106662741B CN201480080856.2A CN201480080856A CN106662741B CN 106662741 B CN106662741 B CN 106662741B CN 201480080856 A CN201480080856 A CN 201480080856A CN 106662741 B CN106662741 B CN 106662741B
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- front side
- rotation axis
- side bearing
- electrical scanner
- rotary body
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Abstract
Electrical scanner (1) has：Rotary body (26), with rotation axis (3)；Scanning reflection mirror (2) links with one end of the front side of rotation axis (3), deflects the light of injection；Frame case (4), with inner space, which rotatably accommodates the rotary body (26) in a manner of the central shaft that rotation axis (3) becomes rotation；Front side bearing (8) is configured at the end of the front side of inner space (4a), is the bearing for being rotatably supported rotation axis (3)；And vibration absorption component (25), it is the component of the tubular formed by damping alloy, with in the state of gap between the circumferential lateral surface (19) of front side bearing (8), frame case (4) is arranged in a manner of the peripheral side that inner cylinder face (251) are located at front side bearing (8), the vibration for the front side bearing (8) that the rotation of accompanying rotation body (26) occurs absorbs.
Description
Technical field
The present invention relates to a kind of electrical scanner and laser processing devices.
Background technology
The perforate that laser processing device with electrical scanner is used in printed wiring board and precision electronic components etc. adds
Work.With the development to become more meticulous of the circuit as product and electronic unit, it is desirable that laser processing device carries out Working position
High-precision control.
Electrical scanner with identical spacing repeat Working position movement in the case of, when Working position travel frequency with
When the intrinsic vibration number of rotary body is consistent, vibration is generated to the direction vertical with the surface of speculum sometimes.With speculum
The vibration in the vertical direction in surface is referred to as face and tilts resonance.Resonance, the row of the laser from speculum are tilted due to generating face
Into direction change, therefore, error is generated at the position of the laser on workpiece.
Patent Document 1 discloses following technologies, i.e. for being assembled with cylinder roller bearing between axis and axle box
Axis support device sets the component for absorbing vibration between the foreign steamer and axle box of bearing.
Patent document 1：Japanese Unexamined Patent Publication 2008-138779 publications
The content of the invention
The rotary body of electrical scanner is subject to the temperature as caused by driving to rise and thermal expansion occurs sometimes.In order to absorb
The change in size of rotary body in axial direction, be arranged on the bearing in electrical scanner with compared with accommodate rotary body frame case every
The mode for opening a small amount of gap configures.It is required that electrical scanner can absorb the change in size as caused by the thermal expansion of rotary body, and
The vibration for deteriorating the precision of Working position can be reduced.
In recent years, in order to realize high-speed driving, there are the driving force bigger tendencies of rotary body in electrical scanner.In electricity
In scanner, since driving force increases, the amplitude of unwanted vibration is also easy to become larger.Electrical scanner is difficult to bearing periphery
Gap tolerance management, enable to for driving force increase and reduce unwanted vibration.
The present invention is exactly to propose in view of the foregoing, its object is to reduce face to tilt resonance, is realized high-order
Put precision.
In order to solve above-mentioned problem, purpose is realized, it is a feature of the present invention that having：Rotary body has rotation
Axis；Speculum links with one end of the front side of rotation axis, deflects the light of injection；Frame case, with inner space,
The inner space rotatably accommodates the rotary body in a manner of the central shaft that rotation axis becomes rotation；Front side bearing, configuration
It is the bearing for being rotatably supported rotation axis in the end of the front side of inner space；And vibration absorption component, it is
By the component for the tubular that damping alloy is formed, in the state of there is gap between the circumferential lateral surface of front side bearing, with inner cylinder
Face is located at the mode of the peripheral side of front side bearing and is arranged at frame case, the front side shaft that the rotation of accompanying rotation body occurs
The vibration held is absorbed.
The effect of invention
The present invention obtains following effects, i.e. can reduce face and tilt resonance, realize high positional precision.
Description of the drawings
Fig. 1 is the sectional view for the structure for representing the electrical scanner that embodiments of the present invention 1 are related to.
Fig. 2 is the sectional view for the structure for representing the electrical scanner without vibration absorption component.
Fig. 3 is the definition graph for the generation that resonance is tilted on the 1st face.
Fig. 4 is the definition graph for the example for representing the relation between the frequency of the 1st face inclination resonance and amplitude.
Fig. 5 is the definition graph for the generation that resonance is tilted on the 2nd face.
Fig. 6 is the definition graph for the example for representing the relation between the frequency of the 2nd face inclination resonance and amplitude.
Fig. 7 be on the 1st face that generates tilt resonance and the 2nd face tilt resonance in the case of resonance frequency and amplitude it
Between relation definition graph.
Fig. 8 is the sectional view for the structure for representing the electrical scanner that embodiments of the present invention 2 are related to.
Fig. 9 is the sectional view for the structure for representing the electrical scanner that embodiments of the present invention 3 are related to.
Figure 10 is the sectional view for the structure for representing the electrical scanner that embodiments of the present invention 4 are related to.
Figure 11 is the sectional view for the structure for representing bulb plunger.
Figure 12 is the structure chart for the laser processing device that embodiments of the present invention 5 are related to.
Specific embodiment
In the following, based on attached drawing, the embodiment of electrical scanner of the present invention and laser processing device is carried out detailed
Explanation.In addition, the present invention is not limited to present embodiments.
Embodiment 1.
Fig. 1 is the sectional view for the structure for representing the electrical scanner that embodiments of the present invention 1 are related to.Electrical scanner 1 makes to come
It is scanned from the laser of laser light source on workpiece.Electrical scanner 1 is made of rotary body 26 and fixed body 27.
Rotary body 26 has scanning reflection mirror 2, rotation axis 3 and magnet 5.Rotary body 26 can be rotation with rotation axis 3
Central shaft and rotated.Scanning reflection mirror 2 is the speculum for deflecting the light of injection.Scanning reflection mirror 2 and rotation axis 3
One end connection of front side.Speculum installed part 12 links scanning reflection mirror 2 and rotation axis 3.Installed part press tool 13 is being inserted
In the state of entering to have fastener 14, speculum installed part 12 is fixed on rotation axis 3.Magnet 5 is fixed on rotation axis 3, after being located at
Between the front side bearing 8 of face narration and rear side bearing 9.
Fixed body 27 has frame case 4, coil 6 and iron core 7.Coil 6 is arranged at around magnet 5.Iron core 7 is set
Around coil 6.By from the power supply (not shown) being connected with conducting wire 18 to 6 streaming current of coil, so that coil 6 generates
Electromagnetic force.By making electromagnetic force around the magnetic field of magnet 5, so as to generate the rotation torque for rotating magnet 5.Rotation
Body 26 is rotated by acting on the rotation torque of magnet 5.
Magnet 5, coil 6 and iron core 7 are housed in inside by frame case 4.Frame case 4 has inner space 4a, should
Inner space 4a is used to rotated the magnet 5 of rotary body 26.Front side bearing 8 and rear side bearing 9 are that rotation axis 3 is rotatable
The bearing that ground is supported.Front side bearing 8 is arranged at the end of the front side in the inner space 4a of frame case 4.Rear side bearing 9
It is arranged at the end of the rear side in the inner space 4a of frame case 4.
Vibration absorption component 25 is the component of tubular, and frame is arranged in a manner that front side bearing 8 to be covered from outside
Housing 4.Vibration absorption component 25 is formed by damping alloy.The diameter ratio front side bearing 8 of the inner cylinder of vibration absorption component 25
Outer diameter it is big, be formed with gap between the inner peripheral surface 251 of vibration absorption component 25 and the circumferential lateral surface 19 of front side bearing 8.
Damping alloy is by melting to be mixed above or equal to 2 kinds of metals, comparing metallic monomer so as to impart
The general designation of alloy after high ability of absorbing vibration.Damping alloy in inside from external vibrational energy by will be changing into thermal energy
And radiate from material surface, thus by absorption of vibrations, it is classified as compound, ferromagnetism based on the mechanism of energy conversion
Any type in type, transfevent or twin crystal type.It gives one example, the Mn-Cu-Ni-Fe of the damping alloy as manganese base is closed
Gold is twin crystal type, under component ratio as 73Mn-20Cu-5Ni-2Fe, has both the elasticity modulus of mild steel degree and with rubber etc.
Same loss coefficient.
When rotary body 26 rotates, if rotation axis 3 shakes, front side bearing 8 vibrate and with vibration absorption component 25
It is collided, then kinetic energy is transformed into thermal energy.Kinetic energy can be converted by employing the vibration absorption component 25 of Mn-Cu-Ni-Fe alloys
Into thermal energy, will not be deformed due to the collision of front side bearing 8.
Vibration absorption component 25 is restrictively arranged at the part opposite with front side bearing 8, therefore can in frame case 4
Promote the cooling of coil 6 using the good material of the thermal conductivity such as aluminium.As a result, when reducing face inclination resonance, frame will not be sacrificed
The heat dissipation performance of housing 4.
Rear side bearing 9 is fixed on frame case 4.On the other hand, front side bearing 8 is not secured to vibration absorption component 25.In advance
Via washer 17, side bearing 8 applies preload pressure to tight spring 16 forward.Pressing plate 15 is the outer end with the front side in frame case 4
Face, preloading spring 16 are abutted and set.
In the driving of lasting electrical scanner 1, rotary body 26 is it some times happens that the thermal expansion as caused by rising temperature.In frame
The inside of frame housing 4, compared with the fixed body 27 positioned at outside, the rotary body 26 positioned inside is easier heat, therefore with consolidating
Determine body 27 to compare, the thermal expansion bigger of rotary body 26.
In electrical scanner 1, rear side bearing 9 is fixed on frame case 4, on the other hand, is not fixed on front side bearing 8
Vibration absorption component 25 thus, it is possible to be directed to the thermal expansion of the rotary body 26 in axial direction, makes front side bearing 8 in the axial direction into line position
It moves.Electrical scanner 1 is capable of the change in size of the upward rotary body 26 of absorption axiss as a result,.
In general, electrical scanner 1 is to be equipped with the angle detector 28 that is detected for the rotation angle to rotation axis 3
In the state of used.Angle detector 28 is by the fixed disk 29 in end of the rear side in rotation axis 3 and in frame shell
The fixed detector 31 in rear end of body 4 is formed.Angle detector 28 being capable of Application Optics formula or magnetic-type.That is, examined by angle
Survey in the case that device 28 is set to optical profile type, multiple slits be set in disk 29, and detector 31 set light-emitting component and by
Optical element, by using photo detector to being detected after being projected from light-emitting component by the light of the slit of disk 29, so as to
The rotation angle of rotation axis 3 is detected.In addition, in the case where angle detector 28 is set to magnetic-type, make disk 29
Outer circumferential surface is magnetized in a manner that S poles and N are extremely alternate, and sets field sensing component in detector 31, by using magnetic
Field detecting element is detected the variation in magnetic field, so as to be detected to the rotation angle of rotation axis 3.
Herein, the situation without vibration absorption component 25 is exemplified by the comparative example of embodiment 1, opposite tilts altogether
It shakes and illustrates.Fig. 2 is the sectional view for the structure for representing the electrical scanner without vibration absorption component.Except not having vibration
It is identical with the electrical scanner 1 that embodiment 1 is related to beyond absorption piece 25, therefore identical label is marked to identical structural element
And the repetitive description thereof will be omitted.In the electrical scanner 1' for being not provided with the structure of vibration absorption component 25, in order to be directed to axis
The change in size of upward rotary body 26 and make front side bearing 8 freely carry out displacement in the axial direction, the periphery of bearing 8 in front side
Gap is set between side 19 and the inner peripheral surface 41 of frame case 4.Electrical scanner 1' is designed to front side bearing 8 and frame case
Gap between 4 is less than or equal to several μm, on the other hand, becomes for the tolerance management of the fine dimension less than or equal to several μm
It is difficult.
The position of side bearing 8 tilts resonance for the face of node before known electrical scanner 1' is generated.In the following description,
The position of former side bearing 8 is tilted into resonance for the face of node and is known as the inclination resonance of the 1st face.
Also, in electrical scanner 1', as actuating speed becomes faster, also observe and pacified with scanning reflection mirror 2 and speculum
The boundary position of piece installing 12 tilts resonance for the face of node.In the following description, will be installed with scanning reflection mirror 2 and speculum
The boundary position of part 12 tilts resonance for the face of node and is known as the inclination resonance of the 2nd face.Between front side bearing 8 and frame case 4
Gap it is big in the case of can cause the 2nd face tilt resonance.
Fig. 3 is the definition graph for the generation that resonance is tilted on the 1st face.Fig. 4 is that the 1st face that represents tilts the frequency of resonance with shaking
The definition graph of the example of relation between width.In figure 3, a part of structure of electrical scanner 1' is suitably simplified and shown
Go out, and the incomplete structure to that need not illustrate illustrates.
Gap between the circumferential lateral surface 19 of front side bearing 8 and the inner surface 41 of frame case 4 is less than or equal to several μm
When, electrical scanner 1' generates the 1st face and tilts resonance sometimes.Herein, the 1st face tilts the frequency to resonate and is set to f1.In addition, the
The position that the angle of throw of scanning reflection mirror 2 when the amplitude that 1 face tilts resonance is h is set to former side bearing 8 is the angle on vertex
θ。
In electrical scanner 1' in the case where the reciprocating rotation of rotary body 26 is repeated with same period, work as rotation
Frequency it is consistent with the intrinsic vibration number of rotary body when, generate face tilt resonance.Resonance, scanning reflection mirror are tilted due to generating face
2 reflecting surface periodically carries out displacement on the direction vertical with reflecting surface.Due to scanning reflection mirror 2 reflecting surface with it is anti-
It penetrates the enterprising line position in the vertical direction in face to move, therefore electrical scanner 1' makes laser on the direction vertical with the scanning direction of laser
Position generates error.
For generate the 1st face tilt resonance electrical scanner 1', by the weight balancing to rotary body 26 be adjusted with
So that amplitude h becomes smaller as far as possible, so as to reduce the site error of the laser as caused by the 1st face tilts resonance.It gives one example, revolves
The weight balancing of swivel 26 is adjusted by pasting patch at the back side of scanning reflection mirror 2.The back of the body of scanning reflection mirror 2
Face is the face of side opposite with the reflecting surface reflected laser.
Fig. 5 is the definition graph for the generation that resonance is tilted on the 2nd face.Fig. 6 is that the 2nd face that represents tilts the frequency of resonance with shaking
The definition graph of one example of the relation between width.In Figure 5, by a part of structure of electrical scanner 1' suitably simplify and into
Row is shown, and the incomplete structure to that need not illustrate illustrates.
In the case that gap between the circumferential lateral surface 19 of front side bearing 8 and the inner surface 41 of frame case 4 is big, electricity is swept
It retouches device 1' and generates the inclination resonance of the 2nd face sometimes.Herein, the 2nd face tilts the frequency to resonate and is set to f2.Moreover, it is assumed that frequency
F2 is bigger than frequency f1.In addition, when the amplitude that resonance is tilted in the 2nd face is h, the angle of throw of scanning reflection mirror 2 is set to scan anti-
Penetrate the boundary position of mirror 2 and speculum installed part 12 for the angle, θ on vertex '.
In the case that gap between front side bearing 8 and frame case 4 is big, specifically, it is greater than or equal in gap
In the case of several μm, it is contemplated that following situations, i.e. since the movement with the rotary body 26 on axially vertical direction occurs, because
The decreased effectiveness that side bearing 8 inhibits the vibration of rotary body 26 before this.
On between the end opposite with being fixed on 12 side of speculum installed part in scanning reflection mirror 2 and the fulcrum of resonance
Distance, with the 1st face tilt resonance compared with, the 2nd face tilt resonance in the case of this apart from longer.If the 1st face tilts altogether
The amplitude that the amplitude to shake and the inclination of the 2nd face are resonated is identical and is all h, then angle of throw θ ' is bigger than angle of throw θ.That is, become θ ' ＞ θ this
The relation of sample.
In the case where the focal length of lens possessed by laser processing device is set to F, resonance is tilted by the 1st face and is made
Into the deviation of Working position be expressed as Δ x=2F θ.In addition, the deviation of Working position as caused by the 2nd face tilts resonance represents
For Δ x '=2F θ '.Due to θ ' ＞ θ, the relation of Δ x ' ＞ Δs x is set up.Therefore, that is, allow to by the 1st face tilt resonance and
2nd face tilts resonance and is set to identical amplitude h, and in the case of tilting resonance in the 2nd face, the situation phase of resonance is tilted with the 1st face
Than the deviation of Working position becomes larger.
In a state that electrical scanner 1' tilts resonance in the 2nd face that generates, the 2nd face is irregularly generated sometimes and tilts resonance
It tilts and resonates with the 1st face.Sometimes also mixing generates the inclination resonance of the 1st face to electrical scanner 1' and the 2nd face tilts resonance.Fig. 7 is to close
The explanation of relation between the frequency of the resonance in the case that the 1st face that generates tilts resonance and the 2nd face tilts resonance and amplitude
Figure.
In the case where being mixed with the resonance of different frequency, electrical scanner 1' is unable to reach so that being tilted for the face of both sides
It resonates and reduces the weight balancing of rotary body 26 as amplitude.It gives one example, is being the 1st face inclination resonance of f1 to frequency
With frequency be f2 the 2nd face tilt resonance in the 2nd face tilt resonance carried out inhibit amplitude adjustment in the case of, sometimes
Increase the amplitude that the 1st face tilts resonance.In addition, in the case where tilting resonance to the 1st face and having carried out inhibiting the adjustment of amplitude, have
When can increase the 2nd face tilt resonance amplitude.
Wish electrical scanner 1' can improve Working position precision on the basis of, as much as possible inhibit become it is unfavorable because
2nd face of element tilts resonance.Since the adjustment in the weight balancing by rotary body 26 is and there are poles when reducing the amplitude h of resonance
Limit can improve the 2nd face it is desirable to electrical scanner 1' from producing cause and tilt resonance.Also, electrical scanner 1' is
It is tilted in the 2nd face of generating and inhibits the 1st face under the situation of resonance and tilt the generation of resonance and resonance and the 2nd are tilted to the 1st face
The mixing that face tilts resonance is inhibited, it is desirable to be able to be improved the 2nd face from producing cause and be tilted resonance.
In the electrical scanner 1' assembled with the common accuracy of manufacture, it is difficult to strictly implement the public affairs for 10 μm of size
Difference management.Even if the gap being designed as between front side bearing 8 and frame case 4 is less than or equal to several μm, the actually gap has
When can also be greater than or equal to design load.It is swept accordingly, it is difficult to steadily produce the gap and meet the electricity of desirable size condition
Retouch device 1'.It, can significantly in the case where the product of electrical scanner 1' of above-mentioned size condition will be unsatisfactory for as defective work
Degree reduces the yield rate of electrical scanner 1'.
In the electrical scanner 1 being related in embodiment 1, in a manner that from outside, front side bearing 8 to be covered and in frame shell
Body 4 is provided with vibration absorption component 25, so if by rotation axis 3 rock cause front side bearing 8 vibrate and and absorption of vibrations
Component 25 is collided, then kinetic energy is transformed into thermal energy, and opposite tilts resonance and inhibited.In other words, the electricity that embodiment 1 is related to
Scanner 1 is absorbed by vibration absorption component 25 and the vibration for the front side bearing 8 that the rotation of accompanying rotation body 26 occurs.
It therefore, also can be effectively right in the case that gap of the electrical scanner 1 between front side bearing 8 and vibration absorption component 25 is big
The vibration for the rotary body 26 that the gap around side bearing 8 generates for reason was inhibited in the past.
By setting vibration absorption component 25, so as to which electrical scanner 1 can be from producing cause, to former side bearing 8
Around the 2nd face that generates for reason of gap tilt resonance and improved.Electrical scanner 1 is to being irregularly generated the 2nd face
It tilts resonance and the 1st face tilts the state of resonance and the 1st face of mixing tilts resonance and the 2nd face tilts the equal energy of state of resonance
Enough inhibited.
Electrical scanner 1 tilts resonance by the setting of vibration absorption component 25 to reduce the 2nd face, and thus, it is possible in order to special
Reduce and tilted the amplitude of resonance generation by the 1st face and implemented the adjustment of the weight balancing of rotary body 26.
As described above, electrical scanner 1 obtains following effects, i.e. can reduce face and tilt resonance, can realize high position essence
Degree.Even if independent of the stringent tolerance management in the gap between front side bearing 8 and frame case 4, it can also reduce face and incline
Tiltedly resonance, therefore electrical scanner 1 can realize the raising of yield rate.
Embodiment 2.
Fig. 8 is the sectional view for the structure for representing the electrical scanner that embodiments of the present invention 2 are related to.Pair with embodiment 1
Identical part marks identical label, and suitably the repetitive description thereof will be omitted.The electrical scanner 20 that embodiment 2 is related to is in frame
Frame housing 4 is not provided with vibration absorption component 25.Make front side in order to the change in size for the rotary body 26 being directed in axial direction
Bearing 8 freely carries out displacement in the axial direction, between the circumferential lateral surface 19 of front side bearing 8 and the inner peripheral surface 41 of frame case 4
It is provided with gap.In addition, in embodiment 2, the connecting member i.e. speculum that scanning reflection mirror 2 and rotation axis 3 are linked is pacified
Piece installing 12' is formed by damping alloy.As an example of the damping alloy that can be applied to speculum installed part 12',
Mn-Cu-Ni-Fe alloys can be enumerated.
In the electrical scanner 20 being related in embodiment 2, since speculum installed part 12' is formed by damping alloy,
Therefore the deformation for the scanning reflection mirror 2 for tilting resonance by the 2nd face and occurring is transformed into thermal energy by speculum installed part 12',
Opposite tilts resonance and is inhibited.In other words, the deformation of scanning reflection mirror 2 is transformed into thermal energy by speculum installed part 12',
Thus the vibration of scanning reflection mirror 2 is inhibited.It gives one example, speculum installed part 12' is to the vibration by front side bearing 8
Vibration caused, using the engaging portion of scanning reflection mirror 2 and rotation axis 3 as the scanning reflection mirror 2 of node is inhibited.Therefore,
The vibration progress for the rotary body 26 that electrical scanner 20 can effectively generate the gap around former side bearing 8 for reason
Inhibit.Speculum installed part 12' is formed by using the Mn-Cu-Ni-Fe alloys of the elasticity modulus with mild steel degree, from
And speculum installed part 12' can be by the deformation transformation of scanning reflection mirror 2 into thermal energy, without the change with scanning reflection mirror 2
Shape and deform.
Embodiment 3.
Fig. 9 is the sectional view for the structure for representing the electrical scanner that embodiments of the present invention 3 are related to.Pair with embodiment 1
Identical part marks identical label, and suitably the repetitive description thereof will be omitted.The electrical scanner 30 that embodiment 3 is related to is in frame
Frame housing 4 is not provided with vibration absorption component 25.Make front side in order to the change in size for the rotary body 26 being directed in axial direction
Bearing 8 freely carries out displacement in the axial direction, between the circumferential lateral surface 19 of front side bearing 8 and the inner peripheral surface 41 of frame case 4
It is provided with gap.In addition, in embodiment 3, the connecting member i.e. installed part that scanning reflection mirror 2 and rotation axis 3 link is pressed
Pressure instrument 13' is formed by damping alloy.An example as the damping alloy that can be applied to installed part press tool 13'
Son can enumerate Mn-Cu-Ni-Fe alloys.
In the electrical scanner 30 being related in embodiment 3, since installed part press tool 13' is formed by damping alloy
, therefore the deformation for the scanning reflection mirror 2 for being tilted resonance by the 2nd face and being occurred is transformed by installed part press tool 13'
Thermal energy, opposite tilt resonance and are inhibited.In other words, the deformation of scanning reflection mirror 2 is converted by installed part press tool 13'
Into thermal energy, thus the vibration of scanning reflection mirror 2 is inhibited.It gives one example, installed part press tool 13' is to by front side shaft
Caused by holding 8 vibration, the vibration using the engaging portion of scanning reflection mirror 2 and rotation axis 3 as the scanning reflection mirror 2 of node pressed down
System.Therefore, the rotary body 26 that electrical scanner 30 can effectively generate the gap around former side bearing 8 for reason
Vibration is inhibited.Installed part pressing is formed by using the Mn-Cu-Ni-Fe alloys of the elasticity modulus with mild steel degree
Instrument 13', so as to which installed part press tool 13' can be by the deformation transformation of scanning reflection mirror 2 into thermal energy, without with scanning
The deformation of speculum 2 and deform.
Embodiment 4.
Figure 10 is the sectional view for the structure for representing the electrical scanner that embodiments of the present invention 4 are related to.Pair with embodiment 1
Identical part marks identical label, and suitably the repetitive description thereof will be omitted.In the electrical scanner 40 of embodiment 4,
Frame case 4 and vibration absorption component 25 are formed with through hole 11a, 11b, and through hole 11a, 11b are provided with bulb plunger 10.
Through hole 11a is formed at frame case 4.Through hole 11b is formed at vibration absorption component 25.Through hole 11a is by frame case 4
Outer circumferential surface and frame case 4 inner peripheral surface between run through.Through hole 11b is by the outer circumferential surface and absorption of vibrations of vibration absorption component 25
Run through between the inner peripheral surface 251 of component 25.Through hole 11a and through hole 11b are coaxially configured, and through hole 11a, 11b be perpendicular to
The parallel direction of rotation axis 3 is axial and formation.The end of the inner space 4a sides of through hole 11b be in front side shaft hold 8 it is outer
The position of all sides 19.Thread groove is formed in the inner surface of through hole 11a, 11b.
Bulb plunger 10 as vibration suppression construction is configured at through hole 11a, 11b.Bulb plunger 10 is to by rotation axis 3
The vibration of front side bearing 8 is inhibited caused by driving.Bulb plunger 10 is from the appearance of frame case 4 towards through hole 11a, 11b
It is inside screwed into, is thus inserted into through hole 11a, 11b.
Figure 11 is the sectional view for the structure for representing bulb plunger.Bulb plunger 10 have spherical member 21, main part 22 with
And helical spring 23.Main part 22 has the cylindrical shape of lower end closed and upper end opening.It is formed in the side of main part 22
There is thread groove.
Spherical member 21 as abutment is matched somebody with somebody so that a part is protruding to the state on the upper end of main part 22
It is placed in main part 22.Spherical member 21 can be rotated in the upper end of main part 22.The peripheral side of spherical member 21 and front side bearing 8
Face 19 abuts.
Helical spring 23 as elastomeric element is configured at the inside of main part 22.Helical spring 23 applies spherical member 21
The direction of side bearing 8 forward is added to boost the power of spherical member 21.The upper end of helical spring 23 is abutted with spherical member 21.Spiral bullet
The lower end of spring 23 is abutted with the bottom surface inside main part 22.
When manufacturing electrical scanner 40, bulb plunger 10 is screwed in through hole 11a, 11b to spherical member 21 and front side
Until the position that bearing 8 abuts.Instrument is used in the screw-in of bulb plunger 10.For the example of an instrument, such as screwdriver.
In spherical member 21 to reaching after front side shaft holds 8, by the way that further bulb plunger 10 is marginally screwed into, from
And spherical member 21 is made to become the state for slightly pushing front side bearing 8 with preset power.For bulb plunger 10 whether
It has been screwed into the state for slightly pushing front side bearing 8, can have been surveyed according to the torque when being screwed into bulb plunger 10
Result after fixed and judged.In addition it is also possible to by screwdriver being revolved after front side shaft holds 8 in spherical member 21 to reaching
Turn preset amount, so as to determine the position of bulb plunger 10.Bulb plunger 10 after the positioning, is consolidated using bonding agent
It is fixed.
The electrical scanner 40 that embodiment 4 is related to is by making the outer of the spherical member 21 of bulb plunger 10 and front side bearing 8
All sides 19 abut, so as to the power pressing front side bearing 8 with axially vertical to act on.Electrical scanner 40 can effectively to
Gap around front side bearing 8 is inhibited for the vibration for the rotary body 26 that reason generates.In addition, electrical scanner 40 also may be used
With the generation state of one side observation resonance, while being adjusted to the position of bulb plunger 10.
By setting bulb plunger 10, electrical scanner 40 can be from producing cause, around former side bearing 8
Gap tilts resonance for the 2nd face that reason generates to be improved.Electrical scanner 40 tilts resonance to the 2nd face is irregularly generated
And the 1st face tilt resonance state and mixing the 1st face tilt resonance and the 2nd face tilt resonance state can be pressed down
System.
Electrical scanner 40 tilts resonance by the setting of bulb plunger 10 to reduce the 2nd face, and thus, it is possible in order to specially subtract
The adjustment of the small weight balancing that the amplitude of resonance generation is tilted by the 1st face and implements rotary body 26.By the position of bulb plunger 10
The adjustment of the weight balancing of adjustment and rotary body is put, face when electrical scanner 40 can effectively reduce high-speed driving tilts altogether
It shakes.
Spherical member 21 and the displacement of the front side bearing 8 in axial direction are rotated in linkage.Spherical member 21 is while maintain
The state abutted with the circumferential lateral surface 19 of front side bearing 8, can while being correspondingly in the displacement of the front side bearing 8 in axial direction
It is dynamic.
In electrical scanner 40, by the way that the spherical member rotated freely in the state of being abutted with front side bearing 8 21 is wrapped
The bulb plunger 10 as vibration suppression construction is contained in, the size of the rotary body 26 as caused by thermal expansion is absorbed so as to one side
Variation, while inhibiting to the vibration of rotary body 26.
The amplitude of resonance is tilted in the 1st face greatly and the 1st face can not fully be absorbed by bulb plunger 10 and tilts resonance
In the case of, front side bearing 8 is collided with vibration absorption component 25, and thus identically with embodiment 1, kinetic energy is transformed into heat
Can, face tilts resonance and reduces.
By using bulb plunger 10 and vibration absorption component 25 simultaneously, so as to vibration absorption component 25 is used alone
Situation is compared, and can further improve the reduction effect that face tilts resonance.In addition, the electrical scanner 20 of embodiment 2 or
The electrical scanner 30 of embodiment 3 can also use bulb plunger simultaneously.In the electrical scanner 20 of embodiment 2 or embodiment party
In the electrical scanner 30 of formula 3 following structures are formed using in the case of bulb plunger, i.e. formed in frame case 4 simultaneously
The through hole orthogonal with rotation axis 3 makes the bulb plunger for being configured at through hole be abutted with the outer circumferential surface of front side bearing 8.By making simultaneously
With bulb plunger and speculum installed part 12' or installed part press tool 13', so as to speculum installed part is used alone
The situation of 12' or installed part press tool 13' are compared, and can further improve the reduction effect that face tilts resonance.
In addition, in the above description, the bulb plunger 10 that spherical member 21 is connected to front side bearing 8 is illustrated, but
The component for being connected to front side bearing 8 is necessarily spherical shape.That is, as long as can front side shaft be pressed with the power with axially vertical acted on
8 are held, can also just use the component beyond bulb plunger 10.
Embodiment 5.
Figure 12 is the structure chart for the laser processing device that embodiments of the present invention 5 are related to.Laser processing device 50 is logical
The irradiation of extra pulse laser and the device of micropore is processed to workpiece perforate.Laser processing device 50 implements following add
Work processing, i.e. scan multiple Working positions in workpiece setting successively, carried out in several cycles for each machining position
The laser irradiation put.
Laser processing device 50 have laser oscillator 51, deflecting mirror 52, Y-axis electrical scanner 53, X-axis electrical scanner 54,
Scanning reflection mirror 55,56, f θ lens 57, automatically controlled driver 60 and control device 61.
Workpiece 58 as workpiece gives a concrete illustration, and is printed base plate.Workpiece 58 is placed in (not shown)
XY worktable.XY worktable makes workpiece 58 be moved to the two-dimensional directional comprising X-direction and Y direction.
Laser oscillator 51 as laser light source projects laser 62.Laser 62 is the laser beam exported with pulse type.Print
The laser beam of the processing of brush substrate uses infrared light, wavelength of the wavelength more than or equal to 9 μm and less than or equal to 10 μm as 0.5 μm
Ultraviolet light in arbitrary light.Deflecting mirror 52 reflects the laser 62 from laser oscillator 51, makes the laser 62 to scanning reflection
Mirror 55 is advanced.
Scanning reflection mirror 55 reflects the laser 62 from laser oscillator 51.Scanning reflection mirror 55 is the laser 62 for making injection
The speculum of deflection.Y-axis electrical scanner 53 drives scanning reflection mirror 55.Scanning reflection mirror 56 is reflected from scanning reflection mirror 55
Laser 62.Scanning reflection mirror 56 is the speculum for deflecting the laser 62 of injection.X-axis electrical scanner 54 drives scanning reflection mirror
56。
Scanning reflection mirror 55 and the rotation axis of Y-axis electrical scanner 53 link.Y-axis electrical scanner 53 makes rotary body with rotation axis
Centered on axis carry out reciprocating rotary.Y-axis electrical scanner 53 carries out the irradiation position of the laser 62 at workpiece 58 along Y direction
Scanning.
Scanning reflection mirror 56 and the rotation axis of X-axis electrical scanner 54 link.X-axis electrical scanner 54 makes rotary body with rotation axis
Centered on axis carry out reciprocating rotary.X-axis electrical scanner 54 carries out the irradiation position of the laser 62 at workpiece 58 along X-direction
Scanning.
F θ lens 57 make the laser 62 from scanning reflection mirror 56 become the laser 63 vertical with the finished surface of workpiece 58.
F θ lens 57 make the Working position 59 that laser 63 is converged in workpiece 58.Automatically controlled driver 60 drives Y-axis electrical scanner 53 and X-axis
Electrical scanner 54.
Control device 61 as control unit controls the molar behavior of laser processing device 50.Control device 61 shakes to laser
Swing the vibration of the laser 62 of device 51, the driving of the Y-axis electrical scanner 53 and X-axis electrical scanner 54 realized by automatically controlled driver 60 into
Row control.In addition, control device 61 controls the motor (not shown) for driving XY worktable.
Y-axis electrical scanner 53 and X-axis electrical scanner 54 have the structure identical with the electrical scanner 1 that embodiment 1 is related to.
Therefore, Y-axis electrical scanner 53 and X-axis electrical scanner 54 can reduce face inclination resonance, can realize high positional precision.Laser adds
Frock puts the following effects of 50 acquirements, i.e. laser 63 can be made to advance to accurate Working position 59, can carry out high-precision add
Work.
Y-axis electrical scanner 53 and X-axis electrical scanner 54 can also have the electrical scanner 20 being related to embodiment 2, reality
Apply the electrical scanner 30 that mode 3 is related to and the identical knot of arbitrary electrical scanner in the electrical scanner 40 that embodiment 4 is related to
Structure.Laser processing device 50 can make in Y-axis electrical scanner 53 and X-axis electrical scanner 54 at least any one have and embodiment party
The identical structure of arbitrary electrical scanner in the electrical scanner 1,20,30,40 of formula 1 to 4.No matter which kind of situation, laser processing device
Putting 50 can make laser 63 advance to accurate Working position 59, can realize high-precision processing.
The explanation of label
1st, the electrical scanner of 1', 20,30,40,2,55,56 scanning reflection mirrors, 3 rotation axis, 4 frame cases, 5 magnets,
6 coils, 7 iron cores, 8 front side bearings, 9 rear side bearings, 10 bulb plungers, 11a, 11b through hole, 12,12' speculums peace
Piece installing, 13,13' installed part press tools, 14 fasteners, 15 pressing plate, 16 preloading springs, 17 washers, 18 conducting wires, 19
Circumferential lateral surface, 21 spherical members, 22 main parts, 23 helical springs, 25 vibration absorption components, 26 rotary bodies, 27 fix
Body, 28 angle detectors, 29 disks, 31 detectors, 41,251 inner peripheral surfaces, 50 laser processing devices, 51 laser generations
Device, 52 deflecting mirrors, 53 Y-axis electrical scanners, 54 X-axis electrical scanners, 57 f θ lens, 58 workpiece, 59 Working positions, 60
Automatically controlled driver, 61 control devices, 62,63 laser.
Claims (7)
1. a kind of electrical scanner, which is characterized in that have：
Rotary body, with rotation axis；
Speculum links with one end of the front side of the rotation axis, deflects the light of injection；
Frame case, with inner space, which can be revolved in a manner of the central shaft that the rotation axis becomes rotation
Turn ground and accommodate the rotary body；
Front side bearing is configured at the end of the front side of the inner space, is to be rotatably supported the rotation axis
Bearing；And
Vibration absorption component is the component of the tubular formed by damping alloy, with the circumferential lateral surface of the front side bearing it
Between have gap in the state of, be arranged at the frame shell in a manner of the peripheral side that inner cylinder face is located at the front side bearing
Body, the vibration for the front side bearing that the rotation with the rotary body occurs absorb.
2. electrical scanner according to claim 1, which is characterized in that
The through hole with the rotating shaft direct cross of the rotary body is formed in the vibration absorption component,
The plunger abutted with the outer circumferential surface of the front side bearing is configured in the through hole.
3. a kind of electrical scanner, which is characterized in that have：
Rotary body, with rotation axis；
Speculum links with one end of the front side of the rotation axis, deflects the light of injection；
Connecting member is formed by damping alloy, and the speculum and the rotation axis are linked；
Frame case, with inner space, which can be revolved in a manner of the central shaft that the rotation axis becomes rotation
Turn ground and accommodate the rotary body；And
Front side bearing is arranged at the end of the front side of the inner space, is to be rotatably supported the rotation axis
Bearing,
The connecting member caused by the vibration as the front side bearing, with the speculum and the engaging portion of the rotation axis
Vibration for the speculum of node is inhibited.
4. electrical scanner according to claim 3, which is characterized in that
The through hole with the rotating shaft direct cross is formed in the frame case,
The plunger abutted with the outer circumferential surface of the front side bearing is configured in the through hole.
5. electrical scanner according to any one of claim 1 to 4, which is characterized in that
The damping alloy is Mn-Cu-Ni-Fe alloys.
6. a kind of laser processing device, which is characterized in that have：
Laser light source；And
Electrical scanner makes the laser from the laser light source be scanned on workpiece,
The electrical scanner has：
Rotary body, with rotation axis；
Speculum links with one end of the front side of the rotation axis, deflects the light of injection；
Frame case, with inner space, which can be revolved in a manner of the central shaft that the rotation axis becomes rotation
Turn ground and accommodate the rotary body；
Front side bearing is configured at the end of the front side of the inner space, is to be rotatably supported the rotation axis
Bearing；And
Vibration absorption component is the component of the tubular formed by damping alloy, with the circumferential lateral surface of the front side bearing it
Between have gap in the state of, be arranged at the frame shell in a manner of the peripheral side that inner cylinder face is located at the front side bearing
Body, the vibration for the front side bearing that the rotation with the rotary body occurs absorb.
7. a kind of laser processing device, which is characterized in that have：
Laser light source；And
Electrical scanner makes the laser from the laser light source be scanned on workpiece,
The electrical scanner has：
Rotary body, with rotation axis；
Speculum links with one end of the front side of the rotation axis, deflects the light of injection；
Connecting member is formed by damping alloy, and the speculum and the rotation axis are linked；
Frame case, with inner space, which can be revolved in a manner of the central shaft that the rotation axis becomes rotation
Turn ground and accommodate the rotary body；And
Front side bearing is arranged at the end of the front side of the inner space, is to be rotatably supported the rotation axis
Bearing,
The connecting member caused by the vibration as the front side bearing, with the speculum and the engaging portion of the rotation axis
Vibration for the speculum of node is inhibited.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2014/070278 WO2016017019A1 (en) | 2014-07-31 | 2014-07-31 | Galvano scanner and laser machining device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106662741A CN106662741A (en) | 2017-05-10 |
| CN106662741B true CN106662741B (en) | 2018-05-29 |
Family
ID=52986015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480080856.2A Active CN106662741B (en) | 2014-07-31 | 2014-07-31 | Electrical scanner and laser processing device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5705390B1 (en) |
| KR (1) | KR20170016990A (en) |
| CN (1) | CN106662741B (en) |
| TW (1) | TWI559033B (en) |
| WO (1) | WO2016017019A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6484204B2 (en) * | 2016-09-09 | 2019-03-13 | ファナック株式会社 | Galvano scanner |
| JP6374938B2 (en) | 2016-11-16 | 2018-08-15 | 株式会社ソディック | Galvano scanner |
| RU174483U1 (en) * | 2016-12-23 | 2017-10-16 | Игорь Александрович Зябрев | Laser light scanner |
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| US20050225312A1 (en) * | 2004-04-12 | 2005-10-13 | William Daly | Galvanometer |
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| JP5744330B2 (en) * | 2012-06-08 | 2015-07-08 | 三菱電機株式会社 | Galvano scanner and laser processing machine |
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2014
- 2014-07-31 CN CN201480080856.2A patent/CN106662741B/en active Active
- 2014-07-31 KR KR1020177002370A patent/KR20170016990A/en not_active Application Discontinuation
- 2014-07-31 WO PCT/JP2014/070278 patent/WO2016017019A1/en active Application Filing
- 2014-07-31 JP JP2014557937A patent/JP5705390B1/en active Active
-
2015
- 2015-01-15 TW TW104101294A patent/TWI559033B/en active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006220254A (en) * | 2005-02-14 | 2006-08-24 | Nsk Ltd | Roller bearing, and gear system provided therewith |
| JP2007306755A (en) * | 2006-05-15 | 2007-11-22 | Konica Minolta Opto Inc | Motor unit, lens barrel, and camera |
| JP2009192626A (en) * | 2008-02-12 | 2009-08-27 | Nikon Corp | Scanning microscope |
| JP2010071458A (en) * | 2008-09-22 | 2010-04-02 | Asmo Co Ltd | Bearing structure of electric rotary machine, and the electric rotary machine |
| JP2011154196A (en) * | 2010-01-27 | 2011-08-11 | Hitachi Via Mechanics Ltd | Galvano scanner and laser beam machining device |
| JP2012078279A (en) * | 2010-10-05 | 2012-04-19 | Shimadzu Corp | Interference spectrophotometer |
| JP2014058932A (en) * | 2012-09-19 | 2014-04-03 | Shimadzu Corp | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2016017019A1 (en) | 2017-04-27 |
| CN106662741A (en) | 2017-05-10 |
| WO2016017019A1 (en) | 2016-02-04 |
| KR20170016990A (en) | 2017-02-14 |
| TWI559033B (en) | 2016-11-21 |
| JP5705390B1 (en) | 2015-04-22 |
| TW201604584A (en) | 2016-02-01 |
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