CN105209958B - electrical scanner and laser processing device - Google Patents
electrical scanner and laser processing device Download PDFInfo
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- CN105209958B CN105209958B CN201480003159.7A CN201480003159A CN105209958B CN 105209958 B CN105209958 B CN 105209958B CN 201480003159 A CN201480003159 A CN 201480003159A CN 105209958 B CN105209958 B CN 105209958B
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- front side
- side bearing
- electrical scanner
- rotary shaft
- resonance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Laser Beam Processing (AREA)
Abstract
Having: rotary body, it has rotary shaft (3), and can pivot about with rotary shaft；Scanning reflection mirror (2), it links with one end of the front side in rotary shaft, is the reflecting mirror of the light deflection making incidence；Frame case (4), it has the inner space making rotary body rotate；Front side bearing (8), the end of its front side being arranged in inner space, is the bearing that can pivotally support rotary shaft；And bulb stopper (10), it is the vibration suppression structure of the vibration of front side bearing that suppression is caused by the driving of rotary shaft, vibration suppression constructs has the abutment that the circumferential lateral surface with front side bearing abuts, and abutment is in along with the displacement of the front side bearing in the axial direction parallel with rotary shaft movably.
Description
Technical field
The present invention relates to a kind of electrical scanner and laser processing device.
Background technology
There is the laser processing device of electrical scanner, such as, utilize in printed wiring board, essence
In the perforate processing of cipher telegram subassembly.Along with the essence becoming the electronic circuit of product, electronic unit
The development of refinement, it is desirable to laser processing device carries out high-precision control to Working position.
Electrical scanner, in the case of the movement repeating Working position with uniform distances, works as processing
When the travel frequency of position is consistent with the intrinsic vibration number of rotary body, sometimes to reflecting mirror
The direction generation vibration (face tilts resonance) that surface is vertical.Tilt resonance owing to producing face, come
The change in travel direction of the laser of self-reflection mirror, therefore, the position of the laser on workpiece
Put place and produce error.
Such as, Patent Document 1 discloses following technology, i.e. at axle and axle box
Between be assembled with the axle support means of cylinder roller bearing, set between the foreign steamer and axle box of bearing
Put the parts absorbing vibration.
Patent documentation 1: Japanese Unexamined Patent Publication 2008-138779 publication
Summary of the invention
The rotary body of electrical scanner is subject to the temperature caused by driving to rise and occur heat swollen sometimes
Swollen.In order to the change in size of the rotary body absorbed on axially, it is arranged in electrical scanner
Bearing configures in the way of separating a small amount of gap relative to the frame case housing rotary body.Requirement
Electrical scanner can absorb the change in size caused by the thermal expansion of rotary body, and can reduce
Make the vibration of the deteriorated accuracy of Working position.
In recent years, in order to realize high-speed driving, electrical scanner exists the driving of rotary body
Power becomes big tendency.In electrical scanner, owing to driving force increases, it is not necessary to the shaking of vibration
Width is also easy to become big.Electrical scanner is difficult to the tolerance management in the gap of bearing periphery, so that
Obtain and can fully reduce unwanted vibration for the increase of driving force.
The present invention is exactly to propose in view of the foregoing, and its object is to obtain one can
Reduction face tilts resonance, it is possible to realize electrical scanner and the Laser Processing of higher positional precision
Device.
In order to solve above-mentioned problem and realize purpose, it is a feature of the present invention that and have: rotation
Turning, it has rotary shaft, and can pivot about with described rotary shaft；Reflecting mirror,
It links with one end of the front side in described rotary shaft, makes the light deflection of incidence；Frame case,
It has the inner space making described rotary body rotate；Front side bearing, it is arranged on described inside
The end of the front side in space, is the bearing that can pivotally support described rotary shaft；And shake
Dynamic suppression structure, shaking of the described front side bearing that its suppression is caused by the driving of described rotary shaft
Dynamic, described vibration suppression constructs has the abutting part that the circumferential lateral surface with described front side bearing abuts
Part, described abutment is along with the described front side bearing in the axial direction parallel with described rotary shaft
Displacement and be in movable.
The effect of invention
Electrical scanner involved in the present invention, by make abutment that vibration suppression constructs with
The circumferential lateral surface of front side bearing abuts, thus reduces the face being difficult to adjust and tilt resonance.Electric scanning
Device can be in movably along with the displacement of the front side bearing on axially by making abutment, thus
Absorb the change in size caused by the thermal expansion of rotary body, and, even if the size of rotary body is sent out
Changing, it is also possible to maintain the abutting of abutment forward side bearing.Thus, electric scanning utensil
There is following effect, i.e. face can be reduced and tilt resonance, it is possible to realize higher positional precision.
Accompanying drawing explanation
Fig. 1 is the cross-section structure representing the electrical scanner involved by embodiments of the present invention 1
Figure.
Fig. 2 is the figure of the cross-section structure representing bulb stopper.
Fig. 3 is the figure illustrating the 1st generation tilting resonance.
Fig. 4 is the example representing the relation between the 1st frequency and the amplitude tilting resonance
Figure.
Fig. 5 is the figure illustrating the 2nd generation tilting resonance.
Fig. 6 is the example representing the relation between the 2nd frequency and the amplitude tilting resonance
Figure.
Fig. 7 is in the case of producing the 1st inclination resonance and the 2nd inclination resonance
The figure that relation between frequency and the amplitude of resonance illustrates.
Fig. 8 is the cross-section structure representing the electrical scanner involved by embodiments of the present invention 2
Figure.
Fig. 9 is the figure of the cross-section structure representing roller plunger.
Figure 10 is the cross-section structure representing the electrical scanner involved by embodiments of the present invention 3
Figure.
Figure 11 is by the side view of spring tectosome exploded representation.
Figure 12 is the structure representing the laser processing device involved by embodiments of the present invention 4
Figure.
Detailed description of the invention
Below, based on accompanying drawing, to electrical scanner involved in the present invention and laser processing device
The embodiment put is described in detail.Additionally, the present invention is not limited to these embodiments.
Embodiment 1.
Fig. 1 is the cross-section structure representing the electrical scanner involved by embodiments of the present invention 1
Figure.Electrical scanner 1 makes the laser from LASER Light Source be scanned on workpiece.
Electrical scanner 1 is made up of rotary body and fixed body.
Rotary body has scanning reflection mirror 2, rotary shaft 3 and magnet 5.Rotary body can
Rotate centered by rotary shaft 3.Scanning reflection mirror 2 is the reflecting mirror of the light deflection making incidence.
Scanning reflection mirror 2 links with one end of the front side in rotary shaft 3.Reflecting mirror installed part 12 will
Scanning reflection mirror 2 links with rotary shaft 3.Installed part press tool 13 is being inserted with securing member
Under the state of 14, reflecting mirror installed part 12 is fixed in rotary shaft 3.Before magnet 5 is positioned at
Between side bearing 8 and rear side bearing 9.
Fixed body has frame case 4, winding 6 and unshakable in one's determination 7.Winding 6 is arranged on magnetic
Body 5 is around.Unshakable in one's determination 7 are arranged on winding 6 around.By from being connected with wire 18
Power supply (omitting diagram) is to winding 6 streaming current, so that winding 6 produces electromagnetic force.Logical
Cross and make electromagnetic force around the magnetic field of magnet 5, thus produce and make the rotation that magnet 5 rotates
Torque.Rotary body utilizes and acts on the rotation torque of magnet 5 and rotate.
Magnet 5, winding 6 and unshakable in one's determination 7 are housed in inside by frame case 4.Frame shell
Body 4 has the inner space making the magnet 5 of rotary body rotate.Front side bearing 8 and rear side axle
Holding 9 is the bearing that can pivotally support rotary shaft 3.Front side bearing 8 is arranged on frame case
The end of the front side in the inner space of 4.Rear side bearing 9 is arranged on the inside of frame case 4
The end of the rear side in space.
Rear side bearing 9 is fixed in frame case 4.Front side bearing 8 is not affixed to framework
On housing 4.Preloading spring 16 applies preload pressure via packing ring 17 forward side bearing 8.Press
Pressing plate 15 is with the side abutted with the outer face and preloading spring 16 of the front side in frame case 4
Formula is arranged.
Through hole 11 is formed in frame case 4.Through hole 11 is by the outer peripheral face of frame case 4
And run through between the inner space of frame case 4.Through hole 11 is relative to parallel with rotary shaft 3
Direction formed the most axially vertically.The end of the side, inner space in through hole 11 is in front side
The position of the circumferential lateral surface of bearing 8.Inner surface at through hole 11 is formed with thread groove.
Bulb stopper 10 as vibration suppression structure is arranged in through hole 11.Bulb stopper 10 suppress by
The vibration of the front side bearing 8 that the driving of rotary shaft 3 causes.Bulb stopper 10 is from frame case 4
Appearance is screwed in through hole 11, thus is inserted in through hole 11.
Fig. 2 is the figure of the cross-section structure representing bulb stopper.Bulb stopper 10 has spherical member 21, master
Body 22 and helical spring 23.Main part 22 has lower end closed and upper end is open
Drum.It is formed with thread groove in the side of main part 22.
As the spherical member 21 of abutment to make one compared with the upper end of main part 22
The state protruded is divided to be arranged in main part 22.Spherical member 21 can be at main part 22
Upper end rotates.Spherical member 21 abuts with the circumferential lateral surface of front side bearing 8.
Helical spring 23 as elastomeric element is arranged in the inside of main part 22.Spiral bullet
Spring 23 applies the direction of forward side bearing 8 and boosts the power of spherical member 21 spherical member 21.
The upper end of helical spring 23 abuts with spherical member 21.The lower end of helical spring 23 and main body
Bottom surface within portion 22 abuts.
Such as, when manufacturing electrical scanner 1, bulb stopper 10 is screwed in ball in through hole 11
Till the position that shape parts 21 abut with front side bearing 8.Spiral shell is used when the screw-in of bulb stopper 10
The instruments such as silk cutter.
On front side of spherical member 21 arrives after bearing 8, by being the most marginally screwed into ball
Plug 10, makes spherical member 21 be in the state of bearing 8 on front side of slight pushing.For bulb stopper 10
Whether it is screwed into this state, e.g. according to the moment of torsion when being screwed into bulb stopper 10 is measured
And what the result obtained carried out judging.In addition, can be by arriving at spherical member 21
Rotation screw cutter after front side bearing 8, thus determine the position of bulb stopper 10.By bulb stopper 10
In the manner after location, binding agent etc. is used to fix.
When persistently driving electrical scanner 1, rotary body generation sometimes is caused by temperature rising
Thermal expansion.In the inside of frame case 4, compared with the fixed body being positioned at outside, it is positioned at inner side
The heat radiation of rotary body easily become insufficient, therefore, compared with fixed body, the heat of rotary body
Expand bigger.
In electrical scanner 1, rear side bearing 9 is fixed in frame case 4, the opposing party
Face, is not fixed on front side bearing 8 in frame case 4, therefore, it is possible to on axially
The thermal expansion of rotary body, make front side bearing 8 displacement in the axial direction.Thus, electrical scanner 1
The change in size of rotary body on axially can be absorbed.
Here, as the comparative example of present embodiment, illustrate do not have in electrical scanner 1
The face in the case of bulb stopper 10 is had to tilt resonance.Electrical scanner 1 is in order to on axially
The change in size of rotary body and make front side bearing 8 the most freely displacement, in front side shaft
Hold and a small amount of gap is set between 8 and frame case 4.This gap is set to example by electrical scanner 1
About such as less than or equal to 6 μm, on the other hand, electrical scanner 1 is difficult to as above
Fine dimension carries out tolerance management.
Currently, it is known that before producing in electrical scanner 1, the position of side bearing 8 is that fulcrum (closes
Joint) face tilt resonance.In the following description, suitably by the position of former side bearing 8
Face for fulcrum tilts referred to as the 1st inclination resonance of resonance.
Further, for electrical scanner 1, in the development of the high speed driven, also observe with
Scanning reflection mirror 2 tilts resonance with the face that boundary position is fulcrum of reflecting mirror installed part 12.
In the following description, suitably by the limit with scanning reflection mirror 2 with reflecting mirror installed part 12
Position, boundary is that the face of fulcrum tilts referred to as the 2nd inclination resonance of resonance.By the reality of inventor
Test, it is known that can draw in the case of the gap-ratio between front side bearing 8 and frame case 4 is relatively big
Play the 2nd and tilt resonance.
Fig. 3 is the figure illustrating the 1st generation tilting resonance.Fig. 4 is to represent the 1st
Face tilts the figure of the example of the relation between frequency and the amplitude of resonance.In figure 3, suitably
Simplify a part of structure representing electrical scanner 1, and to need not the incomplete structure figure of explanation
Show.
Gap between circumferential lateral surface 19 and the inner surface of frame case 4 of current side bearing 8
E.g., less than or equal to during 6 μm, sometimes in electrical scanner 1, produce the 1st and tilt resonance.
1st frequency tilting resonance is such as set to f1.When the amplitude of resonance is h, scanning is anti-
The position of the angle of throw side bearing 8 in the past penetrating mirror 2 is fulcrum, such as, be set to θ.
In electrical scanner 1, the reciprocating rotation of rotary body is being repeated with same period
In the case of, when the frequency of this rotation and the intrinsic vibration number of rotary body are consistent, the face that produces tilts
Resonance.Tilting resonance owing to producing face, the reflecting surface of scanning reflection mirror 2 is vertical with reflecting surface
Direction on periodically ground displacement.Owing to the reflecting surface of scanning reflection mirror 2 is vertical with reflecting surface
Direction top offset, therefore electrical scanner 1 makes on the direction vertical with the scanning direction of laser
The position of laser produces error.
For producing the 1st electrical scanner 1 tilting resonance, by reduce amplitude as far as possible
H mode adjusts the weight balancing of rotary body, thus reduces by swashing that the 1st inclination resonance causes
The error of optical position.The weight balancing of rotary body is e.g. by the back side of scanning reflection mirror 2
Paste paster and be adjusted.The back side refers to the rear side of the reflecting surface in scanning reflection mirror 2
Surface.
Fig. 5 is the figure illustrating the 2nd generation tilting resonance.Fig. 6 is to represent the 2nd
Face tilts the figure of the example of the relation between frequency and the amplitude of resonance.In Figure 5, suitably
Simplify a part of structure representing electrical scanner 1, and to need not the incomplete structure figure of explanation
Show.
Gap between the circumferential lateral surface 19 and the inner surface of frame case 4 of front side bearing 8
Than the situation shown in Fig. 3 big in the case of, electrical scanner 1 sometimes produces the 2nd and tilts to resonate.
Such as, the 2nd frequency tilting resonance is such as set to f2 (f2 > f1).Amplitude when resonance
When being h, the angle of throw of scanning reflection mirror 2 is with scanning reflection mirror 2 and reflecting mirror installed part 12
Boundary position be fulcrum, be such as set to θ '.
Gap between front side bearing 8 and frame case 4 is e.g. more than or equal to 6 μm
In the case of the biggest, it is contemplated that following situation, i.e. with on axially vertical direction
Producing the movement of rotary body, therefore front side bearing 8 suppresses the decreased effectiveness that rotary body vibrates.
Contrary with the side being fixed on reflecting mirror installed part 12 in scanning reflection mirror 2
End and the fulcrum of resonance between distance, tilt compared with resonance with the 1st, the 2nd
The situation that face tilts resonance is longer.It is all the situation of identical h at any one amplitude resonated
Under, θ ' bigger than θ (θ ' > θ).
In the case of the focal length of the lens being had by laser processing device is set to F,
The deviation chart being tilted the Working position that resonance causes by the 1st is shown as Δ x=2F θ.It addition,
The deviation chart being tilted the Working position that resonance causes by the 2nd is shown as Δ x '=2F θ '.Due to
θ ' > θ, therefore, the relation of Δ x ' ＞ Δ x is set up.As it has been described above, i.e. allow to incline the 1st face
Tiltedly resonance and the 2nd inclination resonance are set to mutually the same amplitude h, and the 2nd tilts resonance
Situation compared with the 1st situation tilting resonance, the 2nd Working position inclined tilting resonance
Difference still becomes big.
Electrical scanner 1 when producing the 2nd and tilting resonance, irregular real estate sometimes
Raw 2nd tilts resonance and the 1st inclination resonance.Electrical scanner 1 the most also mixes generation
1 tilts resonance and the 2nd inclination resonance.Fig. 7 be to produce the 1st tilt resonance and
Relation between frequency and the amplitude of the 2nd resonance tilted in the case of resonance illustrates
Figure.
In the case of the resonance being mixed with respective different frequency, electrical scanner 1 cannot obtain
The weight balancing of rotary body, to reduce the amplitude of the face inclination resonance of both sides.Such as, to frequency
Rate is the 1st the 2nd tilted in the 2nd the inclination resonance that resonance is f2 with frequency of f1
In the case of tilting the adjustment that resonance has carried out suppressing amplitude, increase the 1st sometimes and tilt altogether
The amplitude shaken.It addition, carried out the situation of the adjustment suppressing amplitude the 1st being tilted resonance
Under, increase the 2nd amplitude tilting resonance sometimes.
Wish electrical scanner 1 can on the basis of improving the precision of Working position, as far as possible
Ground suppression becomes the 2nd inclination resonance of unfavorable factor.Due to can be by carrying out rotary body
The adjustment of weight balancing and there is the limit, therefore, it is intended that electricity is swept when reducing the amplitude h of resonance
Retouch device 1 and can improve the 2nd inclination resonance from producing cause.Further, for electric scanning
Device 1, in order to suppress the 1st product tilting resonance under producing the 2nd situation tilting resonance
Raw and suppression both sides faces tilt resonance mixing, it is desirable to be able to improve from producing cause
2nd tilts resonance.
In the electrical scanner 1 assembled with the common accuracy of manufacture, it is the most right to be such as difficult to
The size of 10 μm implements tolerance management.Such as, even if by front side bearing 8 and frame case 4
Between gap be designed as about less than or equal to 6 μm, the most sometimes this gap also greater than
Or equal to 6 μm.It is difficult to stably manufacture the satisfied desired size condition in this gap of sening as an envoy to
Electrical scanner 1.At the product of the electrical scanner 1 that will be unsatisfactory for this size condition as defective
In the case of product, the yield rate of electrical scanner 1 can be greatly lowered.
Electrical scanner 1 involved by present embodiment is by making the spherical member 21 of bulb stopper 10
Abut with the circumferential lateral surface 19 of front side bearing 8, thus press with the power with axially vertical effect
Front side bearing 8.The gap of the surrounding of former side bearing 8 can be by electrical scanner 1 effectively
Reason and the vibration of rotary body that produces suppress.Additionally, electrical scanner 1 can be while seeing
Survey the generation state of resonance, adjust the position of bulb stopper 10.
By arranging bulb stopper 10, electrical scanner 1 can be from producing cause, to because of front
The 2nd the inclination resonance that the surrounding of side bearing 8 exists bigger gap and produces changes
Kind.Electrical scanner 1 tilts resonance and the 1st inclination resonance to producing the 2nd brokenly
State and mixing the 1st tilt resonance and the 2nd tilt resonance state all can enter
Row suppression.
Electrical scanner 1 can reduce the 2nd and tilt resonance by arranging bulb stopper 10, as
It is specifically designed to and reduces the means for the 1st amplitude tilting resonance and implement the weight of rotary body
The adjustment of amount balance.By the weight balancing of the position adjustment and rotary body that carry out bulb stopper 10
Adjusting, electrical scanner 1 can effectively reduce the face in high-speed driving and tilt resonance.
Spherical member 21 with axially on the displacement of front side bearing 8 rotate in linkage.Spherical portion
Part 21 is while maintaining the state abutted with the circumferential lateral surface 19 of front side bearing 8, along with axle
The displacement of front side bearing 8 upwards is in movably.
Electrical scanner 1 by abutting rotate freely under state spherical with front side bearing 8
Parts 21 be included in as vibration suppression structure bulb stopper 10 in such that it is able to absorption by
The change in size of the rotary body that thermal expansion causes, the vibration of suppression rotary body.
As it has been described above, electrical scanner 1 has following effect, i.e. face can be reduced and tilt altogether
Shake, it is possible to realize higher positional precision.Even if do not implement front side shaft hold 8 with frame case 4
Between the strict tolerance management in gap, it is also possible to reduce face and tilt resonance, therefore electric scanning
Device 1 can improve yield rate.
Additionally, vibration suppression structure is not limited to structure illustrated in the present embodiment
The situation of bulb stopper 10.Vibration suppression is constructed, can be the ball abutted with front side bearing 8
Shape parts with axially on the structure that rotates in linkage of the displacement of front side bearing 8, it is also possible to suitably
Structure illustrated by present embodiment is changed by ground.
Embodiment 2.
Fig. 8 is the cross-section structure representing the electrical scanner involved by embodiments of the present invention 2
Figure.Electrical scanner 30 makes the laser from LASER Light Source be scanned on workpiece.
The label identical to the part mark identical with embodiment 1, and suitably omit saying of repetition
Bright.
Roller plunger 31 as vibration suppression structure is arranged in through hole 11.Roller plunger
The vibration of the front side bearing 8 that 31 suppression are caused by the driving of rotary shaft 3.Roller plunger 31 from
The appearance of frame case 4 is screwed in through hole 11, thus is inserted in through hole 11.
Fig. 9 is the figure of the cross-section structure representing roller plunger.Roller plunger 31 has round plate
Part 32, main part 33 and helical spring 34.Main part 33 have lower end closed and
And the drum that upper end is open.It is formed with thread groove in the side of main part 33.
Disc parts 32 as abutment is arranged in the top of main part 33.Round plate
Part 32 is can be supported in the way of circular central rotation.The outer peripheral face of disc parts 32
Abut with the circumferential lateral surface of front side bearing 8.Roller plunger 31 is circular with disc parts 32
Surface configures with the axially in parallel mode of rotary body.
Helical spring 34 as elastomeric element is arranged in the inside of main part 33.Spiral bullet
Spring 34 applies the direction of forward side bearing 8 and boosts the power of disc parts 32 disc parts 32.
The upper end of helical spring 34 abuts with disc parts 32.The lower end of helical spring 34 and main body
Bottom surface within portion 33 abuts.
Such as, when manufacturing electrical scanner 30, roller plunger 31 is screwed in through hole 11
To the position that disc parts 32 abuts with front side bearing 8.Screw-in at roller plunger 31
Time use the instrument such as screwdriver.
On front side of disc parts 32 arrives after bearing 8, by being the most marginally screwed into rolling
Wheel plunger 31, so that disc parts 32 is in the state of bearing 8 on front side of slight pushing.Right
Whether it is screwed into this state in roller plunger 31, e.g. according to being screwed into roller plunger 31
Time the result that is measured of moment of torsion carry out judging.In addition, can pass through
Rotation screw cutter after bearing 8 on front side of disc parts 32 arrival, thus determine roller plunger 31
Position.After being positioned in the manner by roller plunger 31, use binding agent
Deng fixing.
Electrical scanner 30 involved by present embodiment is by making the round plate of roller plunger 31
Part 32 abuts with the circumferential lateral surface of front side bearing 8, thus presses with the power with axially vertical effect
Bearing 8 on front side of pressure.Electrical scanner 30 can be effectively between surrounding to former side bearing 8
Gap is that the vibration of the rotary body that reason produces suppresses.Additionally, electrical scanner 30 is permissible
While the generation state of observation resonance, adjust the position of roller plunger 31.
By arranging roller plunger 31, electrical scanner 30 can from producing cause, to because of
The 2nd the inclination resonance that there is bigger gap around front side bearing 8 and produce is carried out
Improve.Electrical scanner 30 tilts resonance and the 1st inclination to producing the 2nd brokenly
The state of resonance and mixing the 1st tilt resonance and the 2nd the equal energy of state tilting resonance
Enough suppress.
Electrical scanner 30 can reduce the 2nd and tilt resonance by arranging roller plunger 31,
Rotary body is implemented for the 1st means tilting the amplitude resonated as being specifically designed to reduce
The adjustment of weight balancing.Put down by the position adjustment of roller plunger 31 and the weight of rotary body
The adjustment of weighing apparatus, electrical scanner 30 can effectively reduce the face in high-speed driving and tilt resonance.
Disc parts 32 with axially on the displacement of front side bearing 8 rotate in linkage.Round plate
Part 32 is while maintaining the state abutted with the circumferential lateral surface of front side bearing 8, along with axially
On the displacement of front side bearing 8 be in movably.
Electrical scanner 30 is by abutting, with front side bearing 8, the disk rotated freely under state
Parts 32 are included in the roller plunger 31 as vibration suppression structure such that it is able to inhale
Receive the change in size of the rotary body caused by thermal expansion, the vibration of suppression rotary body.As above
Described, electrical scanner 30 has following effect, i.e. can reduce face and tilt resonance, it is possible to
Realize higher positional precision.
Additionally, vibration suppression structure is not limited to structure illustrated in the present embodiment
The situation of roller plunger 31.Vibration suppression is constructed, can be to abut with front side bearing 8
Disc parts with axially on the structure that rotates in linkage of the displacement of front side bearing 8, it is also possible to
Suitably structure illustrated by present embodiment is changed.
Embodiment 3.
Figure 10 is the cross-section structure representing the electrical scanner involved by embodiments of the present invention 3
Figure.Electrical scanner 40 makes the laser from LASER Light Source be scanned on workpiece.
The label identical to the part mark identical with embodiment 1, and suitably omit saying of repetition
Bright.
Spring tectosome 41 as vibration suppression structure is inserted in through hole 11.Spring structure
Make body 41 and suppress the vibration of the front side bearing 8 caused by the driving of rotary shaft 3.
Figure 11 is by the side view of spring tectosome exploded representation.Spring tectosome 41 has
Spring members 42, positioning element 43 and main part 44.Spring as elastomeric element
Part 42 is the abutment that the circumferential lateral surface with front side bearing 8 abuts.Spring members 42 is such as
It it is helical spring.Spring members 42 applies to boost the power of front side bearing 8 to front side bearing 8.
The external diameter of spring members 42 is less than the internal diameter of through hole 11.Inwall and spring at through hole 11
It is provided with gap between part 42.
Positioning element 43 is arranged on the upper end of main part 44.Positioning element 43 is diametrically than bullet
The cylindrical shape that the internal diameter of spring parts 42 is little.Positioning element 43 is inserted in spring members 42
Lower portion in.Positioning element 43 in spring members 42 except with front side bearing 8
The position abutting the side beyond side makes the position of spring members 42 be fixed.
Main part 44 is in the cylindrical shape thicker than positioning element 43.Side at main part 44
It is formed with thread groove.By by when being provided with spring members 42 on positioning element 43
Main part 44 be screwed in through hole 11 from the appearance of frame case 4, thus spring structure
Body 41 is inserted in through hole 11.The upper end of spring members 42 and the outer circumferential side of front side bearing 8
Face abuts.The lower end of spring members 42 abuts with the upper end of main part 44.
Such as, when manufacturing electrical scanner 40, main part 44 is screwed in extremely in through hole 11
Till the position that spring members 42 upper end abuts with front side bearing 8.Screw-in at main part 44
Time use the instrument such as screwdriver.
On front side of the upper end of spring members 42 arrives after bearing 8, by the most marginally
It is screwed into main part 44, so that spring members 42 is in the state of bearing 8 on front side of slight pushing.
Whether main part 44 is screwed into this state, e.g. according to being screwed into main part 44
Time the result that is measured of moment of torsion carry out judging.In addition, can pass through
Rotation screw cutter after bearing 8 on front side of the upper end arrival of spring members 42, thus determine main body
The position in portion 44.After being positioned in the manner by main part 44, use bonding
Agent etc. are fixed.
Electrical scanner 40 involved by present embodiment is by making the spring of spring tectosome 41
Parts 42 abut with front side bearing 8 circumferential lateral surface, thus press with the power with axially vertical effect
Bearing 8 on front side of pressure.Electrical scanner 40 can be effectively between surrounding to former side bearing 8
Gap is that the vibration of the rotary body that reason produces suppresses.Additionally, electrical scanner 40 is permissible
While the generation state of observation resonance, adjust the position of main part 44.
By arranging spring tectosome 41, electrical scanner 40 can be right from producing cause
The 2nd inclination produced because there is bigger gap around front side bearing 8 resonate into
Row improves.Electrical scanner 40 to produce brokenly the 2nd tilt resonance and the 1st face incline
Tiltedly state and the mixing the 1st of resonance tilts resonance and the 2nd the state energy tilting resonance
Enough suppress.
Electrical scanner 40 can reduce the 2nd and tilt altogether by arranging spring tectosome 41
Shake, implement to rotate for the 1st means tilting the amplitude resonated as being specifically designed to reduce
The adjustment of the weight balancing of body.By position adjustment and the weight of rotary body of spring tectosome 41
The adjustment of amount balance, electrical scanner 40 can effectively reduce the face in high-speed driving and tilt altogether
Shake.
By inserting positioning element 43 in the lower portion of spring members 42, so that spring
The position of parts 42 is fixed.To this, in spring members 42 be inserted with positioning element 43
Part compare be positioned at upside (side of front side bearing 8) part, with through hole 11
It is in movable in the range of gap between inwall.In spring tectosome 41, by arranging
Positioning element 43, so that it is guaranteed that the gap between the inwall of spring members 42 and through hole 11.
When there is the displacement of the front side bearing 8 caused by the thermal expansion of rotary body, spring
Part 42 is to deform in the way of the direction flexure being subjected to displacement by front side bearing 8.Spring members
42 while maintaining the state abutted with the circumferential lateral surface of front side bearing 8, on axially
The displacement of front side bearing 8 be in movably.
Electrical scanner 40 can be by abutting Free Transform under state with front side bearing 8
Spring members 42 is included in the spring tectosome 41 as vibration suppression structure such that it is able to
While absorbing the change in size of the rotary body caused by thermal expansion, shaking of suppression rotary body
Dynamic.Thus, electrical scanner 40 has following effect, i.e. can reduce face and tilt resonance,
It is capable of higher positional precision.
Additionally, vibration suppression structure is not limited to structure illustrated in the present embodiment
The situation of spring tectosome 41.Vibration suppression is constructed, can be to support with front side bearing 8
The elastomeric element connect with axially on the structure that deforms in linkage of the displacement of front side bearing, it is also possible to
Suitably the structure illustrated by present embodiment is changed.
Embodiment 4.
Figure 12 is the structure representing the laser processing device involved by embodiments of the present invention 4
Figure.Laser processing device 50 is the irradiation by laser (pulse laser) and right to processing
As thing perforate processes the device of minute aperture.Laser processing device 50 such as implements following processing
Process (recurrent pulse pattern), i.e. multiple on workpiece of scan setting add successively
Station is put, and carries out in cycles irradiating for the laser of each Working position.
Laser processing device 50 has laser oscillator 51, deflecting mirror 52, Y-axis electric scanning
Device 53, X-axis electrical scanner 54, scanning reflection mirror 55,56, f θ lens 57, automatically controlled drive
Dynamic device 60 and control device 61.
Workpiece 58 e.g. printed base plate as workpiece.Workpiece 58 is positioned in XY
On workbench (omitting diagram).XY worktable make workpiece 58 to comprise X-direction and
Y direction is at interior moving in two dimensional directions.
Laser oscillator 51 as LASER Light Source penetrates laser 62.Laser 62 is with pulse
The laser beam of shape output.In the processing of printed base plate, the wavelength is such as used to be as laser beam
Some in the infrared light of 9～10 μm and ultraviolet light that wavelength is 0.5 μm etc..Partially
Tilting mirror 52 reflects the laser 62 from laser oscillator 51, makes laser 62 march to scanning anti-
Penetrate mirror 55.
Scanning reflection mirror 55 reflects the laser 62 from laser oscillator 51.Scanning reflection mirror
55 is the reflecting mirror of laser 62 deflection making incidence.Y-axis electrical scanner 53 drives scanning anti-
Penetrate mirror 55.Scanning reflection mirror 56 reflects the laser 62 from scanning reflection mirror 55.Scanning is anti-
Penetrate the reflecting mirror that mirror 56 is laser 62 deflection making incidence.X-axis electrical scanner 54 drives and sweeps
Retouch reflecting mirror 56.
Scanning reflection mirror 55 links with the rotary shaft of Y-axis electrical scanner 53.Y-axis electric scanning
Device 53 makes rotary body reciprocating rotary centered by rotary shaft.Y-axis electrical scanner 53 is in Y-axis
Scan up the irradiation position of laser 62 on workpiece 58.
Scanning reflection mirror 56 links with the rotary shaft of X-axis electrical scanner 54.X-axis electric scanning
Device 54 makes rotary body reciprocating rotary centered by rotary shaft.X-axis electrical scanner 54 is in X-axis
Scan up the irradiation position of laser 62 on workpiece 58.
F θ lens 57 make to become and the adding of workpiece 58 from the laser 62 of scanning reflection mirror 56
The laser 63 that work surface is vertical.F θ lens 57 make the processing that laser 63 is converged in workpiece 58
Position 59.Automatically controlled driver 60 drives Y-axis electrical scanner 53 and X-axis electrical scanner 54.
The device 61 that controls as control portion controls the molar behavior of laser processing device 50.
Control device 61 to the vibration of the laser 62 of laser oscillator 51, by automatically controlled driver 60
The Y-axis electrical scanner 53 realized and the driving of X-axis electrical scanner 54 are controlled.Separately
Outward, control device 61 motor (omitting diagram) driving XY worktable is controlled.
Y-axis electrical scanner 53 and X-axis electrical scanner 54 such as have and embodiment 1
The structure that involved electrical scanner 1 is identical.Y-axis electrical scanner 53 and X-axis electric scanning
Device 54 can reduce face and tilt resonance, it is possible to realize higher positional precision.Laser processing device
Put 50 and there is following effect, i.e. laser 63 can be made to march to correct Working position 59,
High-precision processing can be carried out.
Y-axis electrical scanner 53 and X-axis electrical scanner 54 can also have and embodiment
In electrical scanner 30 involved by 2 and the electrical scanner 40 involved by embodiment 3 certain
One identical structure.Laser processing device 50 can also make Y-axis electrical scanner 53 and
In X-axis electrical scanner 54 at least some has and the electric scanning in embodiment 1 to 3
Some identical structure in device 1,30,40.No matter which kind of situation, laser processing device
50 can make laser 63 march to correct Working position 59, it is achieved high-precision processing.
The explanation of label
1 electrical scanner, 2 scanning reflection mirrors, 3 rotary shafts, 4 frame case, 5 magnets,
6 windings, 7 is unshakable in one's determination, bearing on front side of in the of 8, bearing on rear side of in the of 9,10 bulb stoppers, 11 through holes,
12 reflecting mirror installed parts, 13 installed part press tools, 14 securing members, 15 pressing plate,
16 preloading springs, 17 packing rings, 18 wires, 19 circumferential lateral surface, 21 spherical members, 22
Main part, 23 helical springs, 30 electrical scanners, 31 roller plungers, 32 disc parts,
33 main parts, 34 helical springs, 40 electrical scanners, 41 spring tectosomes, 42 springs
Parts, 43 positioning elements, 44 main parts, 50 laser processing devices, 51 laser generations
Device, 52 deflecting mirrors, 53 Y-axis electrical scanners, 54 X-axis electrical scanners, 55 scanning reflections
Mirror, 56 scanning reflection mirrors, 57 f θ lens, 58 workpiece, 59 Working positions, 60 is automatically controlled
Driver, 61 control device, 62,63 laser.
Claims (9)
1. an electrical scanner, it is characterised in that have:
Rotary body, it has rotary shaft, and can pivot about with described rotary shaft；
Reflecting mirror, it links with one end of the front side in described rotary shaft, makes incident light inclined
Turn；
Frame case, it has the inner space making described rotary body rotate；
Front side bearing, it is arranged on the end of the front side in described inner space, is to revolve
Turn ground and support the bearing of described rotary shaft；And
Vibration suppression constructs, and it suppresses the described front side shaft caused by the driving of described rotary shaft
The vibration held,
Described vibration suppression constructs has the abutting that the circumferential lateral surface with described front side bearing abuts
Parts,
Described abutment is along with the described front side bearing in the axial direction parallel with described rotary shaft
Displacement and be in movable.
Electrical scanner the most according to claim 1, it is characterised in that
Forming through hole in described frame case, this through hole is by the outer peripheral face of described frame case
And run through between described inner space,
Described vibration suppression structure is arranged in described through hole.
Electrical scanner the most according to claim 1, it is characterised in that
Described abutment is spherical member, this spherical member with described axially on described before
The displacement of side bearing links and rotates.
Electrical scanner the most according to claim 1, it is characterised in that
Described abutment is disc parts, this disc parts with described axially on described before
The displacement of side bearing links and rotates.
5. according to the electrical scanner described in claim 3 or 4, it is characterised in that
Described vibration suppression structure has elastomeric element, and this elastomeric element is to described abutment
Apply the power boosted to the direction of described front side bearing.
Electrical scanner the most according to claim 1, it is characterised in that
Described abutment is elastomeric element, its to described front side bearing apply boost described before
The power of side bearing,
Described elastomeric element with described axially on the displacement linkage of described front side bearing and carry out
Deformation.
Electrical scanner the most according to claim 6, it is characterised in that
Described vibration suppression structure has positioning element, and this positioning element is at described elastomeric element
In the side in addition to abutting side with described front side bearing, make the position of described elastomeric element
Fixing.
Electrical scanner the most according to claim 2, it is characterised in that
Described vibration suppression structure is screwed into described through hole.
9. a laser processing device, it is characterised in that have:
LASER Light Source；And
Electrical scanner, it makes the laser from described LASER Light Source carry out on workpiece
Scanning,
Described electrical scanner has:
Rotary body, it has rotary shaft, and can pivot about with described rotary shaft；
Reflecting mirror, it links with one end of the front side in described rotary shaft, makes incident light inclined
Turn；
Frame case, it has the inner space making described rotary body rotate；
Front side bearing, it is arranged on the end of the front side in described inner space, is to revolve
Turn ground and support the bearing of described rotary shaft；And
Vibration suppression constructs, and it suppresses the described front side shaft caused by the driving of described rotary shaft
The vibration held,
Described vibration suppression constructs has the abutting that the circumferential lateral surface with described front side bearing abuts
Parts,
Described abutment is along with the described front side bearing in the axial direction parallel with described rotary shaft
Displacement and be in movable.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2014/061490 WO2015162740A1 (en) | 2014-04-23 | 2014-04-23 | Galvano scanner and laser machining device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105209958A CN105209958A (en) | 2015-12-30 |
| CN105209958B true CN105209958B (en) | 2016-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480003159.7A Active CN105209958B (en) | 2014-04-23 | 2014-04-23 | electrical scanner and laser processing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5714196B1 (en) |
| CN (1) | CN105209958B (en) |
| TW (1) | TWI540338B (en) |
| WO (1) | WO2015162740A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109690383B (en) * | 2016-09-13 | 2021-07-30 | 三菱电机株式会社 | Galvano scanner and mirror unit |
| CN111872579B (en) * | 2020-06-16 | 2022-07-29 | 江苏亚威艾欧斯激光科技有限公司 | Laser drilling equipment |
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|---|---|---|---|---|
| JPH0694751A (en) * | 1991-02-25 | 1994-04-08 | General Scanning Inc | Movable magnet type galvanometer |
| JP2006227415A (en) * | 2005-02-18 | 2006-08-31 | Hitachi Via Mechanics Ltd | Scanner and laser beam machine |
| CN101075772A (en) * | 2006-05-18 | 2007-11-21 | 三星电子株式会社 | Actuator and two-dimensional scanner |
| CN101221283A (en) * | 2007-01-10 | 2008-07-16 | 精工爱普生株式会社 | Actuator, optical scanner and image forming device |
| CN101276054A (en) * | 2003-12-25 | 2008-10-01 | 佳能株式会社 | Micro-oscillating member, light-deflector, and image-forming apparatus |
| CN103246059A (en) * | 2012-02-14 | 2013-08-14 | 富士胶片株式会社 | Mirror driving device and method of controlling the device |
| JP2013190669A (en) * | 2012-03-14 | 2013-09-26 | Mitsubishi Electric Corp | Galvano scanner and laser beam machine |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4990213B2 (en) * | 2008-05-09 | 2012-08-01 | 日立ビアメカニクス株式会社 | Galvano scanner device and laser processing apparatus provided with galvano scanner device |
| JP2011154196A (en) * | 2010-01-27 | 2011-08-11 | Hitachi Via Mechanics Ltd | Galvano scanner and laser beam machining device |
| JP5716542B2 (en) * | 2010-06-23 | 2015-05-13 | 三菱電機株式会社 | Galvano scanner device |
-
2014
- 2014-04-23 JP JP2014557924A patent/JP5714196B1/en active Active
- 2014-04-23 CN CN201480003159.7A patent/CN105209958B/en active Active
- 2014-04-23 WO PCT/JP2014/061490 patent/WO2015162740A1/en active Application Filing
- 2014-11-13 TW TW103139350A patent/TWI540338B/en active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0694751A (en) * | 1991-02-25 | 1994-04-08 | General Scanning Inc | Movable magnet type galvanometer |
| CN101276054A (en) * | 2003-12-25 | 2008-10-01 | 佳能株式会社 | Micro-oscillating member, light-deflector, and image-forming apparatus |
| JP2006227415A (en) * | 2005-02-18 | 2006-08-31 | Hitachi Via Mechanics Ltd | Scanner and laser beam machine |
| CN101075772A (en) * | 2006-05-18 | 2007-11-21 | 三星电子株式会社 | Actuator and two-dimensional scanner |
| CN101221283A (en) * | 2007-01-10 | 2008-07-16 | 精工爱普生株式会社 | Actuator, optical scanner and image forming device |
| CN103246059A (en) * | 2012-02-14 | 2013-08-14 | 富士胶片株式会社 | Mirror driving device and method of controlling the device |
| JP2013190669A (en) * | 2012-03-14 | 2013-09-26 | Mitsubishi Electric Corp | Galvano scanner and laser beam machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2015162740A1 (en) | 2017-04-13 |
| TW201541121A (en) | 2015-11-01 |
| TWI540338B (en) | 2016-07-01 |
| CN105209958A (en) | 2015-12-30 |
| JP5714196B1 (en) | 2015-05-07 |
| WO2015162740A1 (en) | 2015-10-29 |
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