CN105209958A - Galvano scanner and laser machining device - Google Patents
Galvano scanner and laser machining device Download PDFInfo
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- CN105209958A CN105209958A CN201480003159.7A CN201480003159A CN105209958A CN 105209958 A CN105209958 A CN 105209958A CN 201480003159 A CN201480003159 A CN 201480003159A CN 105209958 A CN105209958 A CN 105209958A
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- front side
- side bearing
- electrical scanner
- turning axle
- face tilt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Laser Beam Processing (AREA)
Abstract
Provided is a galvano scanner comprising a rotating body that is provided with a rotation shaft (3) and is capable of rotating around the rotation shaft; a scan mirror (2) which is a mirror that deflects incident light and is connected to one end at the front side of the rotation shaft; a frame case (4) provided with an inner space in which the rotating body is rotated; a front-side bearing (8) which is a bearing provided at the front side end section of the inner space and rotatably supports the rotation shaft; and a ball plunger (10) which is a vibration suppression structure that suppresses vibrations of the front-side bearing caused by the driving of the rotation shaft. The vibration suppression structure has an abutting member that abuts an outer periphery side surface of the front-side bearing, and the abutting member is movable in accordance with displacement of the front-side bearing in an axial direction parallel to the rotation shaft.
Description
Technical field
The present invention relates to a kind of electrical scanner and laser processing device.
Background technology
There is the laser processing device of electrical scanner, such as, utilize in the perforate processing of printed wiring board, precision electronic components.Along with becoming the electronic circuit of product, the development become more meticulous of electronic unit, require that laser processing device carries out high-precision control to Working position.
Electrical scanner when repeating the movement of Working position with uniform distances, when the travel frequency of Working position and the proper vibration number of rotary body consistent time, produce to the direction vertical with the surface of catoptron sometimes and vibrate (face tilt resonates).Owing to producing face tilt resonance, from the change in travel direction of the laser of catoptron, therefore, the position of the laser on workpiece produces error.
Such as, Patent Document 1 discloses following technology, that is, for the axle bracing or strutting arrangement being assembled with cylinder roller bearing between axle and axle box, the parts absorbing and vibrate are set between the foreign steamer and axle box of bearing.
Patent documentation 1: Japanese Unexamined Patent Publication 2008-138779 publication
Summary of the invention
The rotary body of electrical scanner is sometimes subject to by driving the temperature caused to rise and thermal expansion occurs.In order to absorb the change in size of rotary body axially, the bearing be arranged in electrical scanner configures in the mode separating a small amount of gap relative to the frame case of collecting rotary body.Require that electrical scanner can absorb the change in size caused by the thermal expansion of rotary body, and the vibration of the deteriorated accuracy making Working position can be reduced.
In recent years, in order to realize high-speed driving, the driving force that there is rotary body in electrical scanner becomes large tendency.In electrical scanner, because driving force increases, the amplitude of unwanted vibration is also easy to become large.Electrical scanner is difficult to the tolerance management in the gap of carrying out bearing periphery, fully reduces unwanted vibration with the increase made it possible to for driving force.
The present invention proposes in view of the foregoing, its object is to obtain one and can reduce face tilt resonance, can realize electrical scanner and the laser processing device of higher positional precision.
In order to solve above-mentioned problem and realize object, the invention is characterized in, have: rotary body, it has turning axle, and can rotate centered by described turning axle; Catoptron, one end of the front side in itself and described turning axle links, and makes incident light deflection; Frame case, it has the inner space that described rotary body is rotated; Front side bearing, it is arranged on the end of the front side in described inner space, is the bearing that can support described turning axle rotatably; And vibration suppression structure, it suppresses the vibration of the described front side bearing caused by the driving of described turning axle, described vibration suppression there is the abutment abutted with the circumferential lateral surface of described front side bearing, and described abutment is in along with the displacement of the described front side bearing axially parallel with described turning axle movably.
The effect of invention
Electrical scanner involved in the present invention, the abutment constructed by making vibration suppression abuts with the circumferential lateral surface of front side bearing, thus the face tilt reducing to be difficult to adjust resonates.Electrical scanner can be in movably along with the displacement of front side bearing axially by making abutment, thus absorb the change in size caused by the thermal expansion of rotary body, further, even if the size of rotary body changes, the abutting of abutment side bearing forward can also be maintained.Thus, electrical scanner has following effect, that is, can reduce face tilt resonance, can realize higher positional precision.
Accompanying drawing explanation
Fig. 1 is the figure of the cross-section structure of the electrical scanner represented involved by embodiments of the present invention 1.
Fig. 2 is the figure of the cross-section structure representing bulb stopper.
Fig. 3 is the figure be described the generation of the 1st face tilt resonance.
Fig. 4 is the figure of the example of the relation represented between the frequency of the 1st face tilt resonance and amplitude.
Fig. 5 is the figure be described the generation of the 2nd face tilt resonance.
Fig. 6 is the figure of the example of the relation represented between the frequency of the 2nd face tilt resonance and amplitude.
Fig. 7 is the figure be described the relation between the frequency of resonance when the resonance of generation the 1st face tilt and the resonance of the 2nd face tilt and amplitude.
Fig. 8 is the figure of the cross-section structure of the electrical scanner represented involved by embodiments of the present invention 2.
Fig. 9 is the figure of the cross-section structure representing roller plunger.
Figure 10 is the figure of the cross-section structure of the electrical scanner represented involved by embodiments of the present invention 3.
Figure 11 is by the side view of spring construction body exploded representation.
Figure 12 is the figure of the structure of the laser processing device represented involved by embodiments of the present invention 4.
Embodiment
Below, based on accompanying drawing, the embodiment of electrical scanner involved in the present invention and laser processing device is described in detail.In addition, the present invention is not limited to these embodiments.
Embodiment 1.
Fig. 1 is the figure of the cross-section structure of the electrical scanner represented involved by embodiments of the present invention 1.Electrical scanner 1 makes laser from LASER Light Source in the enterprising line scanning of workpiece.Electrical scanner 1 is made up of rotary body and fixed body.
Rotary body has scanning reflection mirror 2, turning axle 3 and magnet 5.Rotary body can rotate centered by turning axle 3.Scanning reflection mirror 2 is the catoptrons making incident light deflection.Scanning reflection mirror 2 links with one end of the front side in turning axle 3.Scanning reflection mirror 2 and turning axle 3 link by catoptron fabricated section 12.Catoptron fabricated section 12, under the state being inserted with securing member 14, is fixed on turning axle 3 by fabricated section press tool 13.Magnet 5 is between front side bearing 8 and rear side bearing 9.
Fixed body has frame case 4, winding 6 and unshakable in one's determination 7.Winding 6 is arranged on magnet 5 around.Unshakable in one's determination 7 are arranged on winding 6 around.By from the power supply be connected with wire 18 (omit and illustrate) to winding 6 streaming current, thus winding 6 is made to produce electromagnetic force.By making electromagnetic force around the magnetic field of magnet 5, thus produce the rotary torque that magnet 5 is rotated.Rotary body utilization acts on the rotary torque of magnet 5 and rotates.
Magnet 5, winding 6 and unshakable in one's determination 7 are housed in inside by frame case 4.Frame case 4 has the inner space that the magnet 5 of rotary body is rotated.Front side bearing 8 and rear side bearing 9 are can the bearing of supporting rotating shaft 3 rotatably.Front side bearing 8 is arranged on the end of the front side in the inner space of frame case 4.Rear side bearing 9 is arranged on the end of the rear side in the inner space of frame case 4.
Rear side bearing 9 is fixed in frame case 4.Front side bearing 8 is not fixed in frame case 4.Preloading spring 16 via packing ring 17 forward side bearing 8 apply preload pressure.Pressing plate 15 is arranged in the mode abutted with the outer face and preloading spring 16 of the front side in frame case 4.
Through hole 11 is formed in frame case 4.Through hole 11 runs through between the outer peripheral face of frame case 4 and the inner space of frame case 4.Namely through hole 11 is axially vertically formed relative to the direction parallel with turning axle 3.The end of the side, inner space in through hole 11 is in the position that front side shaft holds the circumferential lateral surface of 8.Thread groove is formed at the inside surface of through hole 11.
Bulb stopper 10 as vibration suppression structure is configured in through hole 11.Bulb stopper 10 suppresses the vibration of the front side bearing 8 caused by the driving of turning axle 3.Bulb stopper 10 is screwed in through hole 11 from the outside surface of frame case 4, thus is inserted in through hole 11.
Fig. 2 is the figure of the cross-section structure representing bulb stopper.Bulb stopper 10 has spherical member 21, main part 22 and volute spring 23.Main part 22 has lower end closed and the drum of upper end opening.Thread groove is formed in the side of main part 22.
Spherical member 21 as abutment is configured in main part 22 to make a part of state protruded compared with the upper end of main part 22.Spherical member 21 can rotate in the upper end of main part 22.Spherical member 21 abuts with the circumferential lateral surface of front side bearing 8.
Volute spring 23 as elastomeric element is configured in the inside of main part 22.The direction that volute spring 23 pairs of spherical members 21 apply side bearing 8 forward boosts the power of spherical member 21.The upper end of volute spring 23 abuts with spherical member 21.The lower end of volute spring 23 abuts with the bottom surface of main part 22 inside.
Such as, manufacture electrical scanner 1 time, by bulb stopper 10 through hole 11 in screw-in to the position that spherical member 21 abuts with front side bearing 8.The instruments such as screwdriver are used when the screw-in of bulb stopper 10.
After spherical member 21 arrives front side bearing 8, by being marginally screwed into bulb stopper 10 further, the power making spherical member 21 be in specify slightly pushes the state of front side bearing 8.Whether be screwed into this state for bulb stopper 10, such as, be according to judging the result that the moment of torsion when being screwed into bulb stopper 10 is measured.In addition, can pass through with ormal weight rotation screw cutter after spherical member 21 arrives front side bearing 8, thus determine the position of bulb stopper 10.After being located in the manner by bulb stopper 10, cementing agent etc. is used to fix.
When lasting driving electrical scanner 1, rotary body produces and to be risen the thermal expansion caused by temperature sometimes.In the inside of frame case 4, compared with being positioned at the fixed body in outside, the heat radiation being positioned at the rotary body of inner side easily becomes insufficient, and therefore, compared with fixed body, the thermal expansion of rotary body is larger.
In electrical scanner 1, rear side bearing 9 is fixed in frame case 4, on the other hand, front side bearing 8 is not fixed in frame case 4, therefore, it is possible to for the thermal expansion of rotary body axially, make the displacement in the axial direction of front side bearing 8.Thus, electrical scanner 1 can absorb the change in size of rotary body axially.
Here, as the comparative example of present embodiment, face tilt resonance when not have bulb stopper 10 in electrical scanner 1 is described.Electrical scanner 1, in order to make the freely displacement in the axial direction of front side bearing 8 for the change in size of rotary body axially, arranges a small amount of gap between front side bearing 8 and frame case 4.This gap is set to and is such as less than or equal to about 6 μm by electrical scanner 1, and on the other hand, electrical scanner 1 is difficult to carry out tolerance management to fine dimension as above.
Current, known produce in electrical scanner 1 before the position of side bearing 8 be the face tilt resonance of fulcrum (joint).In the following description, by the position of former side bearing 8 be suitably fulcrum face tilt resonance be called the 1st face tilt resonance.
Further, for electrical scanner 1, in the development of the high speed driven, the face tilt that also to observe with scanning reflection mirror 2 and the boundary position of catoptron fabricated section 12 be fulcrum resonates.In the following description, suitably the face tilt that is fulcrum with scanning reflection mirror 2 and the boundary position of catoptron fabricated section 12 is resonated and be called that the 2nd face tilt resonates.By the experiment of inventor, the 2nd face tilt known gap between front side bearing 8 with frame case 4 is larger, can be caused to resonate.
Fig. 3 is the figure be described the generation of the 1st face tilt resonance.Fig. 4 is the figure of the example of the relation represented between the frequency of the 1st face tilt resonance and amplitude.In figure 3, suitably a part of structure of reduced representation electrical scanner 1, and to the incomplete structure diagram not needing to illustrate.
When gap between the circumferential lateral surface 19 of current side bearing 8 and the inside surface of frame case 4 is such as less than or equal to 6 μm, in electrical scanner 1, sometimes produce the 1st face tilt resonance.The frequency of the 1st face tilt resonance is such as set to f1.When the amplitude resonated is h, before the angle of throw of scanning reflection mirror 2, the position of side bearing 8 is fulcrum, such as, be set to θ.
In electrical scanner 1, when repeatedly carrying out the reciprocating rotation of rotary body with same period, when the frequency of this rotation and the proper vibration number of rotary body consistent time, produce face tilt resonance.Owing to producing face tilt resonance, reflecting surface periodically displacement on the direction vertical with reflecting surface of scanning reflection mirror 2.Because the reflecting surface of scanning reflection mirror 2 is at the direction top offset vertical with reflecting surface, therefore electrical scanner 1 makes the position of laser produce error on the direction vertical with the direction of scanning of laser.
For the electrical scanner 1 of generation the 1st face tilt resonance, by reduce the weight balancing that amplitude h mode adjusts rotary body as far as possible, thus the error of the laser position caused that reduces to be resonated by the 1st face tilt.The weight balancing of rotary body is such as undertaken adjusting by pasting paster at the back side of scanning reflection mirror 2.The back side refer in scanning reflection mirror 2 with the surface of reflecting surface opposite side.
Fig. 5 is the figure be described the generation of the 2nd face tilt resonance.Fig. 6 is the figure of the example of the relation represented between the frequency of the 2nd face tilt resonance and amplitude.In Figure 5, suitably a part of structure of reduced representation electrical scanner 1, and to the incomplete structure diagram not needing to illustrate.
Gap between the circumferential lateral surface 19 and the inside surface of frame case 4 of front side bearing 8 is larger than the situation shown in Fig. 3, electrical scanner 1 produces the 2nd face tilt resonance sometimes.Such as, the frequency of the 2nd face tilt resonance is such as set to f2 (f2>f1).When the amplitude resonated is h, the angle of throw of scanning reflection mirror 2 for fulcrum, such as, is set to θ ' with the boundary position of scanning reflection mirror 2 and catoptron fabricated section 12.
Gap between front side bearing 8 with frame case 4 be such as be more than or equal to 6 μm so larger, consider following situation, that is, the direction vertical with axis produces the movement of rotary body, the decreased effectiveness that therefore, bearing 8 suppresses rotary body to vibrate.
For the distance between the end contrary with the side be fixed on catoptron fabricated section 12 in scanning reflection mirror 2 and the fulcrum resonated, compared with resonating with the 1st face tilt, the situation of the 2nd face tilt resonance is longer.When the amplitude of any one resonance is all identical h, θ ' larger than θ (θ ' > θ).
When the focal length of the lens had by laser processing device is set to F, the deviation of the Working position caused that resonated by the 1st face tilt is expressed as Δ x=2F θ.In addition, the deviation of the Working position caused that resonated by the 2nd face tilt is expressed as Δ x '=2F θ '.Due to θ ' > θ, therefore, the relation of Δ x ' > Δ x is set up.As mentioned above, namely allow to the 1st face tilt resonance and the resonance of the 2nd face tilt to be set to mutually the same amplitude h, compared with the situation that the situation of the 2nd face tilt resonance and the 1st face tilt resonate, the deviation of the Working position that the 2nd face tilt resonates still becomes large.
Under the state that electrical scanner 1 resonates at generation the 2nd face tilt, sometimes produce the 2nd face tilt resonance brokenly and the 1st face tilt resonates.Electrical scanner 1 also mixes the resonance of generation the 1st face tilt and the resonance of the 2nd face tilt sometimes.Fig. 7 is the figure be described the relation between the frequency of resonance when the resonance of generation the 1st face tilt and the resonance of the 2nd face tilt and amplitude.
When being mixed with the resonance of respective different frequency, electrical scanner 1 cannot obtain the weight balancing of rotary body, to reduce the amplitude of the face tilt resonance of both sides.Such as, when the adjustment suppressing amplitude has been carried out in the 2nd face tilt resonance that to be the 1st face tilt resonance of f1 and frequency to frequency be in the 2nd face tilt resonance of f2, the amplitude of the 1st face tilt resonance has been increased sometimes.In addition, when having carried out suppressing the adjustment of amplitude to the 1st face tilt resonance, increase the amplitude of the 2nd face tilt resonance sometimes.
Wish that electrical scanner 1 can suppress the 2nd face tilt becoming unfavorable factor to resonate on the basis of precision of improving Working position, as much as possible.Owing to there is the limit when reducing by carrying out the adjustment of the weight balancing of rotary body the amplitude h resonated, therefore, wish that electrical scanner 1 can resonate from producing cause improvement the 2nd face tilt.Further, for electrical scanner 1, in order to suppress the generation of the 1st face tilt resonance under the situation that resonates at generation the 2nd face tilt and suppress the face tilt resonance mixing of both sides, it is desirable to resonate from producing cause improvement the 2nd face tilt.
In the electrical scanner 1 assembled with common manufacturing accuracy, such as, be difficult to strictly implement tolerance management to the size of 10 μm.Such as, even if by the gap design between front side bearing 8 and frame case 4 for being less than or equal to about 6 μm, this gap is also more than or equal to 6 μm in fact sometimes.Be difficult to stably manufacture this gap of sening as an envoy to and meet the electrical scanner 1 of desired size condition.When the product of the electrical scanner 1 using not meeting this size condition is as unacceptable product, the yield rate of electrical scanner 1 significantly can be reduced.
Electrical scanner 1 involved by present embodiment is abutted by the circumferential lateral surface 19 of the spherical member 21 with front side bearing 8 that make bulb stopper 10, thus to press front side bearing 8 with the power of the axial vertical regulation acted on.Electrical scanner 1 can suppress the vibration that the gap of the surrounding of former side bearing 8 is the rotary body that reason produces effectively.In addition, electrical scanner 1 can observe the generation state of resonance, while the position of adjustment bulb stopper 10.
By arranging bulb stopper 10, electrical scanner 1 from producing cause, can improve the 2nd face tilt resonance produced because there is larger gap around front side bearing 8.The state of electrical scanner 1 to the state and the resonance of mixing the 1st face tilt and the resonance of the 2nd face tilt that produce the 2nd face tilt resonance and the resonance of the 1st face tilt brokenly all can suppress.
Electrical scanner 1 can reduce the 2nd face tilt resonance by arranging bulb stopper 10, implement the adjustment of the weight balancing of rotary body as being specifically designed to the means that reduce for the amplitude of the 1st face tilt resonance.By the adjustment of weight balancing of the position adjustment and rotary body of carrying out bulb stopper 10, the face tilt that electrical scanner 1 can reduce in high-speed driving effectively resonates.
Spherical member 21 rotates in linkage with the displacement of front side bearing 8 axially.Spherical member 21 is while maintain the state abutted with the circumferential lateral surface 19 of front side bearing 8, along with the displacement of front side bearing 8 is axially in movably.
Electrical scanner 1 is by being included in the bulb stopper 10 constructed as vibration suppression abutting the spherical member 21 rotated freely under state with front side bearing 8, thus while absorb the change in size of the rotary body caused by thermal expansion, the vibration of rotary body can be suppressed.
As mentioned above, electrical scanner 1 has following effect, that is, can reduce face tilt resonance, can realize higher positional precision.Even if do not implement the strict tolerance management that front side shaft holds the gap between 8 and frame case 4, also can reduce face tilt resonance, therefore electrical scanner 1 can improve yield rate.
In addition, vibration suppression structure is not limited to the situation of the bulb stopper 10 of structure illustrated in the present embodiment.For vibration suppression structure, can be the structure that the spherical member abutted with front side bearing 8 rotates in linkage with the displacement of front side bearing 8 axially, also can suitably change the structure illustrated by present embodiment.
Embodiment 2.
Fig. 8 is the figure of the cross-section structure of the electrical scanner represented involved by embodiments of the present invention 2.Electrical scanner 30 makes laser from LASER Light Source in the enterprising line scanning of workpiece.Identical label is marked to the part identical with embodiment 1, and suitably the repetitive description thereof will be omitted.
Roller plunger 31 as vibration suppression structure is configured in through hole 11.Roller plunger 31 suppresses the vibration of the front side bearing 8 caused by the driving of turning axle 3.Roller plunger 31 is screwed in through hole 11 from the outside surface of frame case 4, thus is inserted in through hole 11.
Fig. 9 is the figure of the cross-section structure representing roller plunger.Roller plunger 31 has disc parts 32, main part 33 and volute spring 34.Main part 33 has lower end closed and the drum of upper end opening.Thread groove is formed in the side of main part 33.
Disc parts 32 as abutment is configured in the top of main part 33.Disc parts 32 is can be supported around the mode of the central rotation of circle.The outer peripheral face of disc parts 32 abuts with the circumferential lateral surface of front side bearing 8.Roller plunger 31 configures in the mode that the surface of the circle of disc parts 32 is parallel with the axis of rotary body.
Volute spring 34 as elastomeric element is configured in the inside of main part 33.The direction that volute spring 34 pairs of disc parts 32 apply side bearing 8 forward boosts the power of disc parts 32.The upper end of volute spring 34 abuts with disc parts 32.The lower end of volute spring 34 abuts with the bottom surface of main part 33 inside.
Such as, manufacture electrical scanner 30 time, by roller plunger 31 through hole 11 in screw-in to the position that disc parts 32 abuts with front side bearing 8.The instruments such as screwdriver are used when the screw-in of roller plunger 31.
After disc parts 32 arrives front side bearing 8, by being marginally screwed into roller plunger 31 further, thus the power making disc parts 32 be in specify slightly pushes the state of front side bearing 8.Whether be screwed into this state for roller plunger 31, such as, be according to judging the result that the moment of torsion when being screwed into roller plunger 31 is measured.In addition, can pass through with the amount rotation screw cutter of regulation after disc parts 32 arrives front side bearing 8, thus determine the position of roller plunger 31.After being located in the manner by roller plunger 31, cementing agent etc. is used to fix.
Electrical scanner 30 involved by present embodiment abuts with the circumferential lateral surface of front side bearing 8 by making the disc parts 32 of roller plunger 31, thus to press front side bearing 8 with the power of the axial vertical regulation acted on.Electrical scanner 30 can suppress the vibration that the gap of the surrounding of former side bearing 8 is the rotary body that reason produces effectively.In addition, electrical scanner 30 can observe the generation state of resonance, while the position of adjustment roller plunger 31.
By arranging roller plunger 31, electrical scanner 30 from producing cause, can improve the 2nd face tilt resonance produced because there is larger gap around front side bearing 8.The state of electrical scanner 30 to the state and the resonance of mixing the 1st face tilt and the resonance of the 2nd face tilt that produce the 2nd face tilt resonance and the resonance of the 1st face tilt brokenly all can suppress.
Electrical scanner 30 can reduce the 2nd face tilt resonance by arranging roller plunger 31, implement the adjustment of the weight balancing of rotary body as being specifically designed to the means that reduce for the amplitude of the 1st face tilt resonance.By the adjustment of the weight balancing of the adjustment of the position of roller plunger 31 and rotary body, the face tilt that electrical scanner 30 can reduce in high-speed driving effectively resonates.
Disc parts 32 rotates in linkage with the displacement of front side bearing 8 axially.Disc parts 32 is while maintain the state abutted with the circumferential lateral surface of front side bearing 8, along with the displacement of front side bearing 8 is axially in movably.
Electrical scanner 30 is by being included in the roller plunger 31 constructed as vibration suppression abutting the disc parts 32 rotated freely under state with front side bearing 8, thus while absorb the change in size of the rotary body caused by thermal expansion, the vibration of rotary body can be suppressed.As mentioned above, electrical scanner 30 has following effect, that is, can reduce face tilt resonance, can realize higher positional precision.
In addition, vibration suppression structure is not limited to the situation of the roller plunger 31 of structure illustrated in the present embodiment.For vibration suppression structure, can be the structure that the displacement of the disc parts that abuts with front side bearing 8 and front side bearing 8 axially rotates in linkage, also can suitably change structure illustrated by present embodiment.
Embodiment 3.
Figure 10 is the figure of the cross-section structure of the electrical scanner represented involved by embodiments of the present invention 3.Electrical scanner 40 makes laser from LASER Light Source in the enterprising line scanning of workpiece.Identical label is marked to the part identical with embodiment 1, and suitably the repetitive description thereof will be omitted.
Spring construction body 41 as vibration suppression structure is inserted in through hole 11.Spring construction body 41 suppresses the vibration of the front side bearing 8 caused by the driving of turning axle 3.
Figure 11 is by the side view of spring construction body exploded representation.Spring construction body 41 has spring members 42, positioning element 43 and main part 44.Spring members 42 as elastomeric element is the abutment abutted with the circumferential lateral surface of front side bearing 8.Spring members 42 is such as volute spring.Spring members 42 applies to front side bearing 8 power boosting front side bearing 8.The external diameter of spring members 42 is less than the internal diameter of through hole 11.Gap is provided with between the inwall and spring members 42 of through hole 11.
Positioning element 43 is arranged on the upper end of main part 44.The cylindrical shape that positioning element 43 is diametrically little than the internal diameter of spring members 42.Positioning element 43 is inserted in the lower portion in spring members 42.The position that with front side bearing 8 abut the opposite side of side of positioning element 43 in spring members 42 makes the position of spring members 42 be fixed.
Main part 44 is in the cylindrical shape thicker than positioning element 43.Thread groove is formed in the side of main part 44.By being screwed in through hole 11 by the outside surface of the main part 44 under the state being provided with spring members 42 on positioning element 43 from frame case 4, thus spring construction body 41 is inserted in through hole 11.The upper end of spring members 42 abuts with the circumferential lateral surface of front side bearing 8.The lower end of spring members 42 abuts with the upper end of main part 44.
Such as, manufacture electrical scanner 40 time, by main part 44 through hole 11 in screw-in to the position that spring members 42 upper end abuts with front side bearing 8.The instruments such as screwdriver are used when the screw-in of main part 44.
After the upper end of spring members 42 arrives front side bearing 8, by being marginally screwed into main part 44 further, thus the power making spring members 42 be in specify slightly pushes the state of front side bearing 8.Whether be screwed into this state for main part 44, such as, be according to judging the result that the moment of torsion when being screwed into main part 44 is measured.In addition, can pass through with the amount rotation screw cutter of regulation after the upper end of spring members 42 arrives front side bearing 8, thus determine the position of main part 44.After being located in the manner by main part 44, cementing agent etc. is used to fix.
Electrical scanner 40 involved by present embodiment abuts with front side bearing 8 circumferential lateral surface by making the spring members 42 of spring construction body 41, thus to press front side bearing 8 with the power of the axial vertical regulation acted on.Electrical scanner 40 can suppress the vibration that the gap of the surrounding of former side bearing 8 is the rotary body that reason produces effectively.In addition, electrical scanner 40 can observe the generation state of resonance, while the position of adjustment main part 44.
By arranging spring construction body 41, electrical scanner 40 from producing cause, can improve the 2nd face tilt resonance produced because there is larger gap around front side bearing 8.The state of electrical scanner 40 to the state and the resonance of mixing the 1st face tilt and the resonance of the 2nd face tilt that produce the 2nd face tilt resonance and the resonance of the 1st face tilt brokenly can suppress.
Electrical scanner 40 can reduce the 2nd face tilt resonance by arranging spring construction body 41, implement the adjustment of the weight balancing of rotary body as being specifically designed to the means that reduce for the amplitude of the 1st face tilt resonance.By the adjustment of the weight balancing of the adjustment of the position of spring construction body 41 and rotary body, the face tilt that electrical scanner 40 can reduce in high-speed driving effectively resonates.
By inserting positioning element 43 in the lower portion to spring members 42, thus the position of spring members 42 is fixed.To this, the part being positioned at upside (side of front side bearing 8) compared with being inserted with the part of positioning element 43 in spring members 42, is in movable in the scope in the gap between the inwall of through hole 11.In spring construction body 41, by arranging positioning element 43, thus the gap between the inwall guaranteeing spring members 42 and through hole 11.
When there is the displacement of the front side bearing 8 caused by the thermal expansion of rotary body, spring members 42 is to be out of shape to the mode of the direction flexure be subjected to displacement by front side bearing 8.Spring members 42 is while maintain the state abutted with the circumferential lateral surface of front side bearing 8, along with the displacement of front side bearing 8 is axially in movably.
Electrical scanner 40 can by being included in the spring construction body 41 constructed as vibration suppression at the spring members 42 abutting Free Transform under state with front side bearing 8, thus while absorb the change in size of the rotary body caused by thermal expansion, the vibration of rotary body can be suppressed.Thus, electrical scanner 40 has following effect, that is, can reduce face tilt resonance, can realize higher positional precision.
In addition, vibration suppression structure is not limited to the situation of the spring construction body 41 of structure illustrated in the present embodiment.For vibration suppression structure, can be the structure that the elastomeric element abutted with front side bearing 8 is out of shape in linkage with the displacement of front side bearing axially, also can suitably change the structure illustrated by present embodiment.
Embodiment 4.
Figure 12 is the figure of the structure of the laser processing device represented involved by embodiments of the present invention 4.Laser processing device 50 is the devices by the irradiation of laser (pulse laser), workpiece perforate being processed to minute aperture.Laser processing device 50 such as implements following processing process (recurrent pulse pattern), that is, the multiple Working positions of scan setting on workpiece successively, and the laser carried out in cycles for each Working position irradiates.
Laser processing device 50 have laser oscillator 51, deflecting mirror 52, Y-axis electrical scanner 53, X-axis electrical scanner 54, scanning reflection mirror 55,56, f θ lens 57, automatically controlled driver 60 and control device 61.
Workpiece 58 as workpiece is such as printed base plate.Workpiece 58 is positioned in XY worktable (omitting diagram).XY worktable makes workpiece 58 to the moving in two dimensional directions comprising X-direction and Y direction.
Laser oscillator 51 as LASER Light Source penetrates laser 62.Laser 62 is the laser beam exported with pulse type.In the processing of printed base plate, such as use wavelength to be the infrared light of 9 ~ 10 μm and wavelength to be in ultraviolet light of 0.5 μm etc. as laser beam some.Deflecting mirror 52 reflects the laser 62 from laser oscillator 51, makes laser 62 march to scanning reflection mirror 55.
Scanning reflection mirror 55 reflects the laser 62 from laser oscillator 51.Scanning reflection mirror 55 is catoptrons that incident laser 62 is deflected.Y-axis electrical scanner 53 drives scanning reflection mirror 55.Scanning reflection mirror 56 reflects the laser 62 from scanning reflection mirror 55.Scanning reflection mirror 56 is catoptrons that incident laser 62 is deflected.X-axis electrical scanner 54 drives scanning reflection mirror 56.
Scanning reflection mirror 55 links with the turning axle of Y-axis electrical scanner 53.Y-axis electrical scanner 53 makes rotary body reciprocating rotary centered by turning axle.Y-axis electrical scanner 53 scans the irradiation position of the laser 62 on workpiece 58 in Y-axis.
Scanning reflection mirror 56 links with the turning axle of X-axis electrical scanner 54.X-axis electrical scanner 54 makes rotary body reciprocating rotary centered by turning axle.X-axis electrical scanner 54 scans the irradiation position of the laser 62 on workpiece 58 in the X-axis.
The laser 63 that f θ lens 57 make the laser 62 from scanning reflection mirror 56 become vertical with the finished surface of workpiece 58.F θ lens 57 make laser 63 be converged to Working position 59 in workpiece 58.Automatically controlled driver 60 drives Y-axis electrical scanner 53 and X-axis electrical scanner 54.
Control device 61 as control part controls the molar behavior of laser processing device 50.The driving of the vibration of the laser 62 of control device 61 pairs of laser oscillators 51, the Y-axis electrical scanner 53 realized by automatically controlled driver 60 and X-axis electrical scanner 54 controls.In addition, control device 61 controls driving the motor of XY worktable (omitting diagram).
Y-axis electrical scanner 53 and X-axis electrical scanner 54 such as have the structure identical with the electrical scanner 1 involved by embodiment 1.Y-axis electrical scanner 53 and X-axis electrical scanner 54 can reduce face tilt resonance, can realize higher positional precision.Laser processing device 50 has following effect, that is, laser 63 can be made to march to correct Working position 59, can carry out high-precision processing.
Y-axis electrical scanner 53 and X-axis electrical scanner 54 also can have and some identical structures in the electrical scanner 30 involved by embodiment 2 and the electrical scanner 40 involved by embodiment 3.Also can to make in Y-axis electrical scanner 53 and X-axis electrical scanner 54 at least some has and the some identical structure in the electrical scanner 1,30,40 in embodiment 1 to 3 for laser processing device 50.No matter which kind of situation, laser processing device 50 can both make laser 63 march to correct Working position 59, realizes high-precision processing.
The explanation of label
1 electrical scanner, 2 scanning reflection mirrors, 3 turning axles, 4 frame case, 5 magnets, 6 windings, 7 is unshakable in one's determination, bearing on front side of in the of 8, bearing on rear side of in the of 9, 10 bulb stoppers, 11 through holes, 12 catoptron fabricated sections, 13 fabricated section press tools, 14 securing members, 15 pressing plate, 16 preloading springs, 17 packing rings, 18 wires, 19 circumferential lateral surface, 21 spherical members, 22 main parts, 23 volute springs, 30 electrical scanners, 31 roller plungers, 32 disc parts, 33 main parts, 34 volute springs, 40 electrical scanners, 41 spring construction bodies, 42 spring members, 43 positioning elements, 44 main parts, 50 laser processing devices, 51 laser oscillators, 52 deflecting mirrors, 53Y axle electrical scanner, 54X axle electrical scanner, 55 scanning reflection mirrors, 56 scanning reflection mirrors, 57f θ lens, 58 workpiece, 59 Working positions, 60 automatically controlled drivers, 61 control device, 62, 63 laser.
Claims (9)
1. an electrical scanner, is characterized in that, has:
Rotary body, it has turning axle, and can rotate centered by described turning axle;
Catoptron, one end of the front side in itself and described turning axle links, and makes incident light deflection;
Frame case, it has the inner space that described rotary body is rotated;
Front side bearing, it is arranged on the end of the front side in described inner space, is the bearing that can support described turning axle rotatably; And
Vibration suppression constructs, and it suppresses the vibration of the described front side bearing caused by the driving of described turning axle,
Described vibration suppression there is the abutment abutted with the circumferential lateral surface of described front side bearing,
Described abutment is in along with the displacement of the described front side bearing axially parallel with described turning axle movably.
2. electrical scanner according to claim 1, is characterized in that,
In described frame case, form through hole, this through hole runs through between the outer peripheral face of described frame case and described inner space,
Described vibration suppression structure is configured in described through hole.
3. electrical scanner according to claim 1, is characterized in that,
Described abutment is spherical member, and the displacement of this spherical member and described described front side bearing axially links and rotates.
4. electrical scanner according to claim 1, is characterized in that,
Described abutment is disc parts, and the displacement of this disc parts and described described front side bearing axially links and rotates.
5. the electrical scanner according to claim 3 or 4, is characterized in that,
Described vibration suppression there is elastomeric element, and this elastomeric element applies the power boosted to the direction of described front side bearing to described abutment.
6. electrical scanner according to claim 1, is characterized in that,
Described abutment is elastomeric element, and it applies to described front side bearing the power boosting described front side bearing,
The displacement of described elastomeric element and described described front side bearing axially links and is out of shape.
7. electrical scanner according to claim 6, is characterized in that,
Described vibration suppression there is positioning element, and the opposite side that with described front side bearing abut side of this positioning element in described elastomeric element, makes the position of described elastomeric element fix.
8. electrical scanner according to claim 2, is characterized in that,
Described vibration suppression structure is screwed into in described through hole.
9. a laser processing device, is characterized in that, has:
LASER Light Source; And
Electrical scanner, it makes laser from described LASER Light Source in the enterprising line scanning of workpiece,
Described electrical scanner has:
Rotary body, it has turning axle, and can rotate centered by described turning axle;
Catoptron, one end of the front side in itself and described turning axle links, and makes incident light deflection;
Frame case, it has the inner space that described rotary body is rotated;
Front side bearing, it is arranged on the end of the front side in described inner space, is the bearing that can support described turning axle rotatably; And
Vibration suppression constructs, and it suppresses the vibration of the described front side bearing caused by the driving of described turning axle,
Described vibration suppression there is the abutment abutted with the circumferential lateral surface of described front side bearing,
Described abutment is in along with the displacement of the described front side bearing axially parallel with described turning axle movably.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2014/061490 WO2015162740A1 (en) | 2014-04-23 | 2014-04-23 | Galvano scanner and laser machining device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105209958A true CN105209958A (en) | 2015-12-30 |
| CN105209958B CN105209958B (en) | 2016-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480003159.7A Active CN105209958B (en) | 2014-04-23 | 2014-04-23 | electrical scanner and laser processing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5714196B1 (en) |
| CN (1) | CN105209958B (en) |
| TW (1) | TWI540338B (en) |
| WO (1) | WO2015162740A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109690383A (en) * | 2016-09-13 | 2019-04-26 | 三菱电机株式会社 | Electrical scanner and mirror unit |
| CN111872579A (en) * | 2020-06-16 | 2020-11-03 | 江苏亚威艾欧斯激光科技有限公司 | Laser drilling equipment |
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- 2014-04-23 CN CN201480003159.7A patent/CN105209958B/en active Active
- 2014-04-23 WO PCT/JP2014/061490 patent/WO2015162740A1/en active Application Filing
- 2014-11-13 TW TW103139350A patent/TWI540338B/en active
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| CN109690383B (en) * | 2016-09-13 | 2021-07-30 | 三菱电机株式会社 | Galvano scanner and mirror unit |
| CN111872579A (en) * | 2020-06-16 | 2020-11-03 | 江苏亚威艾欧斯激光科技有限公司 | Laser drilling equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2015162740A1 (en) | 2017-04-13 |
| TW201541121A (en) | 2015-11-01 |
| TWI540338B (en) | 2016-07-01 |
| JP5714196B1 (en) | 2015-05-07 |
| CN105209958B (en) | 2016-08-31 |
| WO2015162740A1 (en) | 2015-10-29 |
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