JPWO2015162740A1 - Galvano scanner and laser processing equipment - Google Patents

Abstract

A rotating body provided with a rotating shaft (3) and rotatable around the rotating shaft, a scan mirror (2) which is connected to one front end of the rotating shaft and deflects incident light, and rotates A frame case (4) having an internal space for rotating the body, a front bearing (8) that is provided at the front end of the internal space and rotatably supports the rotary shaft, and by driving the rotary shaft A ball plunger (10) that is a vibration suppression structure that suppresses vibration of the front bearing, and the vibration suppression structure includes a contact member that contacts the outer peripheral side surface of the front bearing, and the contact member is a rotating shaft. It is movable according to the displacement of the front bearing in the axial direction parallel to.

Description

  The present invention relates to a galvano scanner and a laser processing apparatus.

  A laser processing apparatus provided with a galvano scanner is used, for example, for punching printed circuit boards and precision electronic components. As the electronic circuits and electronic parts that are products are being refined, the laser processing apparatus is required to control the processing position with high accuracy.

  When the galvano scanner repeats the movement of the machining position at the same pitch, when the movement frequency of the machining position matches the natural frequency of the rotating body, the galvano scanner vibrates in the direction perpendicular to the mirror surface (surface tilt). Resonance) may occur. When the surface tilt resonance occurs, the traveling direction of the laser beam from the mirror changes, so that an error occurs in the position of the laser beam on the workpiece.

  For example, Patent Document 1 discloses a shaft support device in which a cylindrical roller bearing is incorporated between a shaft and a shaft box, and provides a member that absorbs vibration between the outer ring of the bearing and the shaft box. Yes.

JP 2008-138779 A

  The rotator of the galvano scanner may be subject to thermal expansion upon receiving a temperature rise due to driving. In order to be able to absorb the dimensional change of the rotating body in the axial direction, the bearing provided in the galvano scanner is arranged with a slight gap with respect to the frame case in which the rotating body is accommodated. The galvano scanner is required to be able to absorb the dimensional change due to the thermal expansion of the rotating body and to reduce the vibration that deteriorates the accuracy of the processing position.

  In recent years, since the galvano scanner is required to be driven at high speed, the driving force of the rotating body tends to increase. In the galvano scanner, an increase in driving force easily increases the amplitude of unnecessary vibration. In the galvano scanner, it is difficult to manage the tolerance of the clearance around the bearing so that unnecessary vibrations can be sufficiently reduced as the driving force increases.

  The present invention has been made in view of the above, and an object of the present invention is to obtain a galvano scanner and a laser processing apparatus that can reduce surface tilt resonance and realize high positional accuracy.

  In order to solve the above-described problems and achieve the object, the present invention is provided with a rotating shaft, and is connected to a rotating body that is rotatable around the rotating shaft, and one front end of the rotating shaft, A front-side bearing which is a bearing that is provided at a front end portion of the internal space and rotatably supports the rotary shaft, a mirror that deflects incident light, a frame case that includes an internal space for rotating the rotating body, and the internal space. And a vibration suppressing structure that suppresses vibration of the front bearing caused by driving of the rotating shaft, and the vibration suppressing structure includes a contact member that contacts an outer peripheral side surface of the front bearing, and the contact member Is movable according to the displacement of the front bearing in the axial direction parallel to the rotating shaft.

  The galvano scanner according to the present invention reduces surface tilt resonance that is difficult to adjust by bringing the contact member of the vibration suppressing structure into contact with the outer peripheral side surface of the front bearing. The galvano scanner can absorb the dimensional change due to the thermal expansion of the rotating body by making the contact member movable according to the displacement of the front bearing in the axial direction. The contact of the contact member to the can be maintained. As a result, the galvano scanner can reduce surface tilt resonance and achieve an effect of realizing high positional accuracy.

FIG. 1 is a diagram showing a cross-sectional configuration of a galvano scanner according to a first embodiment of the present invention. FIG. 2 is a diagram showing a cross-sectional configuration of the ball plunger. FIG. 3 is a diagram for explaining the occurrence of the first surface tilt resonance. FIG. 4 is a diagram illustrating an example of the relationship between the frequency and amplitude of the first surface tilt resonance. FIG. 5 is a diagram for explaining the occurrence of the second surface tilt resonance. FIG. 6 is a diagram illustrating an example of the relationship between the frequency and amplitude of the second surface tilt resonance. FIG. 7 is a diagram for explaining the relationship between the resonance frequency and amplitude when the first surface-inclined resonance and the second surface-inclined resonance occur. FIG. 8 is a diagram showing a cross-sectional configuration of the galvano scanner according to the second embodiment of the present invention. FIG. 9 is a diagram showing a cross-sectional configuration of the roller plunger. FIG. 10 is a diagram showing a cross-sectional configuration of the galvano scanner according to the third embodiment of the present invention. FIG. 11 is an exploded side view of the spring structure. FIG. 12 is a diagram showing a configuration of a laser processing apparatus according to Embodiment 4 of the present invention.

  Embodiments of a galvano scanner and a laser processing apparatus according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

Embodiment 1 FIG.
FIG. 1 is a diagram showing a cross-sectional configuration of a galvano scanner according to a first embodiment of the present invention. The galvano scanner 1 scans a laser beam from a laser light source with a workpiece. The galvano scanner 1 includes a rotating body and a fixed body.

  The rotating body includes a scan mirror 2, a rotating shaft 3, and a magnet 5. The rotating body is rotatable around the rotation shaft 3. The scan mirror 2 is a mirror that deflects incident light. The scan mirror 2 is connected to one end of the rotating shaft 3 on the front side. The mirror mount 12 connects the scan mirror 2 to the rotation shaft 3. The mount retainer 13 fixes the mirror mount 12 to the rotating shaft 3 in a state where the fastener 14 is inserted. The magnet 5 is located between the front bearing 8 and the rear bearing 9.

  The fixed body includes a frame case 4, a coil 6, and an iron core 7. The coil 6 is provided around the magnet 5. The iron core 7 is provided around the coil 6. When a current flows from the power source (not shown) connected to the lead wire 18 to the coil 6, the coil 6 generates an electromagnetic force. By applying an electromagnetic force around the magnetic field of the magnet 5, a rotational torque that rotates the magnet 5 is generated. The rotating body rotates using the rotational torque acting on the magnet 5.

  The frame case 4 houses the magnet 5, the coil 6, and the iron core 7 inside. The frame case 4 includes an internal space for rotating the magnet 5 of the rotating body. The front bearing 8 and the rear bearing 9 are bearings that rotatably support the rotary shaft 3. The front bearing 8 is provided at the front end of the internal space of the frame case 4. The rear bearing 9 is provided at the rear end of the internal space of the frame case 4.

  The rear bearing 9 is fixed to the frame case 4. The front bearing 8 is not fixed to the frame case 4. The preload spring 16 applies preload to the front bearing 8 via a washer 17. The holding plate 15 is provided in contact with the front outer end surface of the frame case 4 and the preload spring 16.

  The through hole 11 is formed in the frame case 4. The through hole 11 penetrates between the outer peripheral surface of the frame case 4 and the internal space of the frame case 4. The through hole 11 is formed perpendicular to the axial direction which is a direction parallel to the rotation shaft 3. The end portion on the inner space side of the through hole 11 is located on the outer peripheral side surface of the front bearing 8. A thread groove is formed on the inner surface of the through hole 11.

  A ball plunger 10 having a vibration suppressing structure is disposed in the through hole 11. The ball plunger 10 suppresses the vibration of the front bearing 8 due to the driving of the rotating shaft 3. The ball plunger 10 is inserted into the through hole 11 by being screwed into the through hole 11 from the outer surface of the frame case 4.

  FIG. 2 is a diagram showing a cross-sectional configuration of the ball plunger. The ball plunger 10 includes a spherical member 21, a main body portion 22, and a coil spring 23. The main body 22 has a cylindrical shape with the lower end closed and the upper end opened. A thread groove is formed on the side surface of the main body 22.

  The spherical member 21, which is a contact member, is disposed on the main body 22 in a state in which a part protrudes above the upper end of the main body 22. The spherical member 21 is rotatable at the upper end of the main body 22. The spherical member 21 abuts on the outer peripheral side surface of the front bearing 8.

  A coil spring 23 that is an elastic member is disposed inside the main body 22. The coil spring 23 applies a force that pushes up the spherical member 21 toward the front bearing 8 to the spherical member 21. The upper end of the coil spring 23 contacts the spherical member 21. The lower end of the coil spring 23 contacts the bottom surface inside the main body 22.

  For example, when the galvano scanner 1 is manufactured, the ball plunger 10 is tightened in the through hole 11 to a position where the spherical member 21 contacts the front bearing 8. A tool such as a screwdriver is used to tighten the ball plunger 10.

  After the spherical member 21 reaches the front bearing 8, the ball plunger 10 is further screwed in so that the spherical member 21 slightly presses the front bearing 8 with a predetermined force. Whether or not the ball plunger 10 has been screwed in until such a state is determined, for example, from the result of measuring the torque when the ball plunger 10 is screwed in. In addition, the position of the ball plunger 10 may be determined by turning the driver a predetermined amount after the spherical member 21 reaches the front bearing 8. After the ball plunger 10 is positioned in this way, it is fixed using an adhesive or the like.

  While the driving of the galvano scanner 1 is continued, the rotating body may cause thermal expansion due to a temperature rise. In the frame case 4, heat is apt to be insufficient for the rotating body positioned on the inner side relative to the fixed body positioned on the outer side, so that the thermal expansion is larger for the rotating body than for the fixed body. .

  The galvano scanner 1 displaces the front bearing 8 in the axial direction against the thermal expansion of the rotating body in the axial direction by fixing the rear bearing 9 to the frame case 4 and not fixing the front bearing 8 to the frame case 4. Make it possible. Thereby, the galvano scanner 1 can absorb the dimensional change of the rotating body in the axial direction.

  Here, as a comparative example of the present embodiment, surface tilt resonance when the galvano scanner 1 is not provided with the ball plunger 10 will be described. The galvano scanner 1 is provided with a slight gap between the front bearing 8 and the frame case 4 so that the front bearing 8 can be freely displaced in the axial direction with respect to the dimensional change of the rotating body in the axial direction. The galvano scanner 1 is designed with such a gap of, for example, about 6 μm or less, but it is difficult to manage tolerances for such fine dimensions.

  Conventionally, it has been known that the galvano scanner 1 generates surface tilt resonance with the position of the front bearing 8 as a fulcrum (node). In the following description, the surface tilt resonance using the position of the front bearing 8 as a fulcrum is appropriately referred to as a first surface tilt resonance.

  Further, the galvano scanner 1 is designed to observe surface-inclined resonance with the position of the boundary between the scan mirror 2 and the mirror mount 12 as a fulcrum as driving speed increases. In the following description, the surface tilt resonance using the position of the boundary between the scan mirror 2 and the mirror mount 12 as a fulcrum is appropriately referred to as a second surface tilt resonance. It has been found by the inventor's experiment that the second surface collapse resonance is induced when the gap between the front bearing 8 and the frame case 4 is relatively large.

  FIG. 3 is a diagram for explaining the occurrence of the first surface tilt resonance. FIG. 4 is a diagram illustrating an example of the relationship between the frequency and amplitude of the first surface tilt resonance. In FIG. 3, a part of the configuration of the galvano scanner 1 is simplified as appropriate, and the configuration unnecessary for the description is omitted.

  When the gap between the outer peripheral surface 19 of the front bearing 8 and the inner surface of the frame case 4 is, for example, 6 μm or less, the galvano scanner 1 may generate the first surface-inclined resonance. In the first surface tilt resonance, for example, the frequency is f1. When the amplitude of resonance is h, the deflection angle of the scan mirror 2 is, for example, θ with the position of the front bearing 8 as a fulcrum.

  In the galvano scanner 1, in the repeated reciprocating rotation of the rotating body in the same cycle, when the frequency of the rotation coincides with the natural frequency of the rotating body, surface tilt resonance occurs. Due to surface tilt resonance, the reflection surface of the scan mirror 2 is periodically displaced in a direction perpendicular to the reflection surface. When the reflecting surface of the scan mirror 2 is displaced in the direction perpendicular to the reflecting surface, the galvano scanner 1 causes an error in the position of the laser beam in the direction perpendicular to the scanning direction of the laser beam. It becomes.

  For the galvano scanner 1 that generates the first surface tilt resonance, an error in the position of the laser beam due to the first surface tilt resonance is adjusted by adjusting the weight balance of the rotating body so that the amplitude h is as small as possible. Reduce. The weight balance of the rotating body is adjusted, for example, by sticking a seal on the back surface of the scan mirror 2. The back surface is the surface of the scan mirror 2 opposite to the reflecting surface.

  FIG. 5 is a diagram for explaining the occurrence of the second surface tilt resonance. FIG. 6 is a diagram illustrating an example of the relationship between the frequency and amplitude of the second surface tilt resonance. In FIG. 5, a part of the configuration of the galvano scanner 1 is simplified as appropriate and illustrations of components unnecessary for the description are omitted.

  When the gap between the outer peripheral side surface 19 of the front bearing 8 and the inner surface of the frame case 4 is larger than the case shown in FIG. 3, the galvano scanner 1 may generate a second surface-inclined resonance. In the second surface tilt resonance, for example, the frequency is f2 (f2> f1). When the amplitude of resonance is h, the deflection angle of the scan mirror 2 is, for example, θ ′ with the position of the boundary between the scan mirror 2 and the mirror mount 12 as a fulcrum.

  When the clearance between the front bearing 8 and the frame case 4 is relatively large, for example, 6 μm or more, the front bearing 8 suppresses vibration of the rotating body by causing the moving of the rotating body in a direction perpendicular to the axial direction. Is considered to be weakened.

  The distance between the end of the scan mirror 2 opposite to the side fixed to the mirror mount 12 and the resonance fulcrum is longer in the case of the second surface-inclined resonance than in the first surface-inclined resonance. Become. When the amplitude of any resonance is the same h, θ ′ is larger than θ (θ ′> θ).

  When the focal length of the lens provided in the laser processing apparatus is F, the processing position shift caused by the first surface tilt resonance is expressed as Δx = 2Fθ. Further, the processing position shift caused by the second surface tilt resonance is expressed as Δx ′ = 2Fθ ′. Since θ ′> θ, the relationship Δx ′> Δx is established. As described above, even if the first surface-inclined resonance and the second surface-inclined resonance can be set to the same amplitude h, the case of the second surface-inclined resonance is greater than that in the case of the first surface-inclined resonance. As a result, the displacement of the machining position increases.

  The galvano scanner 1 may cause the second surface-inclined resonance and the first surface-inclined resonance to occur irregularly in a situation where the second surface-inclined resonance occurs. In the galvano scanner 1, the first surface fall resonance and the second surface fall resonance may occur together. FIG. 7 is a diagram for explaining the relationship between the resonance frequency and amplitude when the first surface-inclined resonance and the second surface-inclined resonance occur.

  When resonances having different frequencies are mixed, the galvano scanner 1 cannot reach the weight balance of the rotating body so as to reduce the amplitude of both surface-inclined resonances. For example, when an adjustment is performed to suppress the amplitude of the first surface-inclined resonance at the frequency f1 and the second surface-inclined resonance at the frequency f2, the amplitude of the first surface-inclined resonance is adjusted. May increase. In addition, when the adjustment for suppressing the amplitude with respect to the first surface-inclined resonance is performed, the amplitude of the second surface-inclined resonance may increase.

  The galvano scanner 1 is desired to be able to suppress as much as possible the second surface tilt resonance that is disadvantageous in improving the accuracy of the processing position. Since there is a limit in reducing the resonance amplitude h by adjusting the weight balance of the rotating body, it is desirable that the galvano scanner 1 be able to improve the second surface tilt resonance from the generation factor. Furthermore, the galvano scanner 1 also has the second surface tilt resonance in order to suppress the occurrence of the first surface tilt resonance in the situation where the second surface tilt resonance occurs and to suppress the mixture of both surface tilt resonances. It is desirable to be able to improve from the generation factor.

  In the galvano scanner 1 assembled with normal manufacturing accuracy, it is extremely difficult to strictly carry out tolerance management for a dimension of, for example, 10 μm. Even if the gap between the front bearing 8 and the frame case 4 is designed to be, for example, about 6 μm or less, the gap may actually be 6 μm or more. It is difficult to stably manufacture the galvano scanner 1 in which the gap satisfies a desired dimensional condition. When a manufactured product of the galvano scanner 1 that does not satisfy such dimensional conditions is handled as a defective product, the yield of the galvano scanner 1 is greatly reduced.

  In the galvano scanner 1 according to the present embodiment, the spherical member 21 of the ball plunger 10 is brought into contact with the outer peripheral side surface 19 of the front bearing 8 so that the front bearing 8 is moved with a predetermined force acting perpendicular to the axial direction. Press down. The galvano scanner 1 can effectively suppress the vibration of the rotating body caused by the gap around the front bearing 8. The galvano scanner 1 may adjust the position of the ball plunger 10 while observing the state of occurrence of resonance.

  By providing the ball plunger 10, the galvano scanner 1 can improve the second surface tilt resonance that may be caused by a relatively large gap around the front bearing 8 from the cause. The galvano scanner 1 can suppress both the state in which the second surface-inclined resonance and the first surface-inclined resonance are irregularly generated, and the state in which the first surface-inclined resonance and the second surface-inclined resonance are mixed. .

  The galvano scanner 1 can reduce the second surface fall resonance by installing the ball plunger 10, thereby enabling adjustment of the weight balance of the rotating body exclusively for reducing the amplitude with respect to the first surface fall resonance. To do. Through the adjustment of the position of the ball plunger 10 and the adjustment of the weight balance of the rotating body, the galvano scanner 1 can effectively reduce surface tilt resonance in high-speed driving.

  The spherical member 21 rotates in conjunction with the displacement of the front bearing 8 in the axial direction. The spherical member 21 is movable in accordance with the displacement of the front bearing 8 in the axial direction while maintaining a state in contact with the outer peripheral side surface 19 of the front bearing 8.

  The galvano scanner 1 includes a spherical member 21 that freely rotates while in contact with the front bearing 8 in the ball plunger 10 that is a vibration suppressing structure, thereby making it possible to absorb the dimensional change of the rotating body due to thermal expansion. The vibration of the rotating body can be suppressed.

  As described above, the galvano scanner 1 has an effect that the surface tilt resonance can be reduced and high positional accuracy can be realized. The galvano scanner 1 can improve the yield by reducing the surface tilt resonance without using strict tolerance management of the gap between the front bearing 8 and the frame case 4.

  The vibration suppression structure is not limited to the ball plunger 10 having the configuration described in the present embodiment. The vibration suppressing structure may be any structure as long as the spherical member in contact with the front bearing 8 rotates in conjunction with the displacement of the front bearing 8 in the axial direction, and the configuration described in the present embodiment may be changed as appropriate. .

Embodiment 2. FIG.
FIG. 8 is a diagram showing a cross-sectional configuration of the galvano scanner according to the second embodiment of the present invention. The galvano scanner 30 scans the processing target with the laser light from the laser light source. The same parts as those in the first embodiment are denoted by the same reference numerals, and repeated description will be omitted as appropriate.

  The roller plunger 31 that is a vibration suppressing structure is disposed in the through hole 11. The roller plunger 31 suppresses the vibration of the front bearing 8 due to the driving of the rotating shaft 3. The roller plunger 31 is inserted into the through hole 11 by being screwed into the through hole 11 from the outer surface of the frame case 4.

  FIG. 9 is a diagram showing a cross-sectional configuration of the roller plunger. The roller plunger 31 includes a disk member 32, a main body portion 33, and a coil spring 34. The main body 33 has a cylindrical shape with the lower end closed and the upper end opened. A thread groove is formed on the side surface of the main body 33.

  The disk member 32 as a contact member is disposed on the main body portion 33. The disk member 32 is supported such that the center of the circle is rotatable. The outer peripheral surface of the disk member 32 is in contact with the outer peripheral side surface of the front bearing 8. The roller plunger 31 is disposed so that the circular surface of the disk member 32 is parallel to the axial direction of the rotating body.

  The coil spring 34 that is an elastic member is disposed inside the main body 33. The coil spring 34 applies a force that pushes up the disk member 32 toward the front bearing 8 to the disk member 32. The upper end of the coil spring 34 abuts on the disk member 32. The lower end of the coil spring 34 is in contact with the bottom surface inside the main body 33.

  For example, when the galvano scanner 30 is manufactured, the roller plunger 31 is tightened in the through hole 11 to a position where the disk member 32 contacts the front bearing 8. A tool such as a screwdriver is used to tighten the roller plunger 31.

  After the disk member 32 reaches the front bearing 8, the roller plunger 31 is further screwed in so that the disk member 32 slightly presses the front bearing 8 with a predetermined force. Whether or not the roller plunger 31 has been screwed in until such a state is determined, for example, from the result of measuring the torque when the roller plunger 31 is screwed in. In addition, the position of the roller plunger 31 may be determined by turning the driver a predetermined amount after the disk member 32 reaches the front bearing 8. After the roller plunger 31 is positioned in this way, it is fixed using an adhesive or the like.

  The galvano scanner 30 according to this embodiment presses the front bearing 8 with a predetermined force acting perpendicular to the axial direction by bringing the disk member 32 of the roller plunger 31 into contact with the outer peripheral side surface of the front bearing 8. wear. The galvano scanner 30 can effectively suppress the vibration of the rotating body caused by the gap around the front bearing 8. The galvano scanner 30 may adjust the position of the roller plunger 31 while observing the state of occurrence of resonance.

  By providing the roller plunger 31, the galvano scanner 30 can improve the second surface-inclined resonance that may be caused by a relatively large gap around the front bearing 8 from the cause. The galvano scanner 30 can suppress both the state in which the second surface-inclined resonance and the first surface-inclined resonance are irregularly generated, and the state in which the first surface-inclined resonance and the second surface-inclined resonance are mixed. .

  The galvano scanner 30 can reduce the second surface tilt resonance by installing the roller plunger 31, and thereby can adjust the weight balance of the rotating body exclusively for reducing the amplitude with respect to the first surface tilt resonance. To do. Through the adjustment of the position of the roller plunger 31 and the adjustment of the weight balance of the rotating body, the galvano scanner 30 can effectively reduce surface tilt resonance in high-speed driving.

  The disk member 32 rotates in conjunction with the displacement of the front bearing 8 in the axial direction. The disc member 32 is movable in accordance with the displacement of the front bearing 8 in the axial direction while maintaining a state in contact with the outer peripheral side surface of the front bearing 8.

  The galvano scanner 30 includes a disk member 32 that freely rotates while being in contact with the front bearing 8 in a roller plunger 31 that is a vibration suppressing structure, thereby making it possible to absorb the dimensional change of the rotating body due to thermal expansion. The vibration of the rotating body can be suppressed. As described above, the galvano scanner 30 has an effect that the surface tilt resonance can be reduced and high positional accuracy can be realized.

  The vibration suppressing structure is not limited to the case of the roller plunger 31 having the configuration described in the present embodiment. The vibration suppressing structure may be any structure as long as the disk member in contact with the front bearing 8 rotates in conjunction with the displacement of the front bearing 8 in the axial direction, and the configuration described in the present embodiment may be changed as appropriate. .

Embodiment 3 FIG.
FIG. 10 is a diagram showing a cross-sectional configuration of the galvano scanner according to the third embodiment of the present invention. The galvano scanner 40 scans the processing target with the laser light from the laser light source. The same parts as those in the first embodiment are denoted by the same reference numerals, and repeated description will be omitted as appropriate.

  A spring structure 41 that is a vibration suppressing structure is inserted into the through hole 11. The spring structure 41 suppresses the vibration of the front bearing 8 due to the driving of the rotating shaft 3.

  FIG. 11 is an exploded side view of the spring structure. The spring structure 41 includes a spring member 42, a positioning member 43 and a main body 44. The spring member 42, which is an elastic member, is also an abutting member that abuts on the outer peripheral side surface of the front bearing 8. The spring member 42 is, for example, a coil spring. The spring member 42 applies a force for pushing up the front bearing 8 to the front bearing 8. The outer diameter of the spring member 42 is smaller than the inner diameter of the through hole 11. A gap is provided between the inner wall of the through hole 11 and the spring member 42.

  The positioning member 43 is provided at the upper end of the main body 44. The positioning member 43 has a cylindrical shape with a diameter smaller than the inner diameter of the spring member 42. The positioning member 43 is inserted into the lower part of the spring member 42. The positioning member 43 fixes the position of the spring member 42 on the side of the spring member 42 opposite to the side in contact with the front bearing 8.

  The main body 44 has a columnar shape that is thicker than the positioning member 43. A thread groove is formed on the side surface of the main body 44. The spring structure 41 is inserted into the through hole 11 by screwing the main body 44 with the spring member 42 set on the positioning member 43 into the through hole 11 from the outer surface of the frame case 4. The upper end of the spring member 42 contacts the outer peripheral side surface of the front bearing 8. The lower end of the spring member 42 contacts the upper end of the main body 44.

  For example, when the galvano scanner 40 is manufactured, the main body 44 is tightened in the through hole 11 to a position where the upper end of the spring member 42 contacts the front bearing 8. A tool such as a screwdriver is used to tighten the main body 44.

  After the upper end of the spring member 42 reaches the front bearing 8, the main body 44 is further screwed in so that the spring member 42 slightly presses the front bearing 8 with a predetermined force. Whether or not the main body 44 has been screwed in until such a state is determined, for example, from the result of measuring the torque when the main body 44 is screwed. In addition, the position of the main body 44 may be determined by turning the driver a predetermined amount after the upper end of the spring member 42 reaches the front bearing 8. After being positioned in this way, the main body 44 is fixed using an adhesive or the like.

  The galvano scanner 40 according to the present embodiment presses the front bearing 8 with a predetermined force acting perpendicular to the axial direction by bringing the spring member 42 of the spring structure 41 into contact with the outer peripheral side surface of the front bearing 8. wear. The galvano scanner 40 can effectively suppress the vibration of the rotating body caused by the gap around the front bearing 8. Note that the galvano scanner 40 may adjust the position of the main body 44 while observing the state of occurrence of resonance.

  By providing the spring structure 41, the galvano scanner 40 can improve the second surface-inclined resonance that may be caused by a relatively large gap around the front bearing 8 from the cause. The galvano scanner 40 can suppress a state in which the second surface-inclined resonance and the first surface-inclined resonance are irregularly generated, and a state in which the first surface-inclined resonance and the second surface-inclined resonance are mixed.

  The galvano-scanner 40 can reduce the second surface fall resonance by installing the spring structure 41, so that the adjustment of the weight balance of the rotating body can be performed exclusively for the purpose of reducing the amplitude with respect to the first surface fall resonance. To do. Through the adjustment of the position of the spring structure 41 and the adjustment of the weight balance of the rotating body, the galvano scanner 40 can effectively reduce surface tilt resonance in high-speed driving.

  The position of the lower portion of the spring member 42 is fixed by inserting the positioning member 43. On the other hand, the portion of the spring member 42 above the portion where the positioning member 43 is inserted (on the front bearing 8 side) is movable within the range of the gap between the inner wall of the through hole 11. The spring structure 41 secures a gap between the spring member 42 and the inner wall of the through hole 11 by providing the positioning member 43.

  When the front bearing 8 is displaced due to thermal expansion of the rotating body, the spring member 42 is deformed so as to bend in the direction in which the front bearing 8 is displaced. The spring member 42 is movable according to the displacement of the front bearing 8 in the axial direction while maintaining a state in which the spring member 42 is in contact with the outer peripheral side surface of the front bearing 8.

  The galvano scanner 40 includes a spring member 42 that freely deforms in a state of being in contact with the front bearing 8 in the spring structure 41 that is a vibration suppressing structure, so that the dimensional change of the rotating body due to thermal expansion can be absorbed. The vibration of the rotating body can be suppressed. As described above, the galvano scanner 40 has an effect that the surface tilt resonance can be reduced and high positional accuracy can be realized.

  Note that the vibration suppressing structure is not limited to the spring structure 41 having the configuration described in the present embodiment. The vibration suppressing structure may be any structure as long as the elastic member in contact with the front bearing 8 is deformed in conjunction with the displacement of the front bearing in the axial direction, and the configuration described in the present embodiment may be changed as appropriate.

Embodiment 4 FIG.
FIG. 12 is a diagram showing a configuration of a laser processing apparatus according to Embodiment 4 of the present invention. The laser processing apparatus 50 is an apparatus that forms a minute hole in a processing target by irradiation with laser light (pulse laser light). The laser processing apparatus 50 performs, for example, a processing process (cycle pulse mode) in which a plurality of processing positions set on a processing object are sequentially scanned and laser irradiation is performed on each processing position in a plurality of cycles.

  The laser processing device 50 includes a laser oscillator 51, a bend mirror 52, a Y-axis galvano scanner 53, an X-axis galvano scanner 54, scan mirrors 55 and 56, an fθ lens 57, a galvano driver 60, and a control device 61.

  The work 58 that is the object to be processed is, for example, a printed circuit board. The work 58 is placed on an XY table (not shown). The XY table moves the work 58 in a two-dimensional direction including the X-axis direction and the Y-axis direction.

  A laser oscillator 51 which is a laser light source emits laser light 62. The laser beam 62 is a laser beam output in a pulse shape. For processing a printed circuit board, for example, any of infrared light having a wavelength of 9 to 10 μm, ultraviolet light having a wavelength of 0.5 μm, and the like is used as a laser beam. The bend mirror 52 reflects the laser light 62 from the laser oscillator 51 and advances it to the scan mirror 55.

  The scan mirror 55 reflects the laser light 62 from the laser oscillator 51. The scan mirror 55 is a mirror that deflects the incident laser light 62. The Y-axis galvano scanner 53 drives the scan mirror 55. The scan mirror 56 reflects the laser light 62 from the scan mirror 55. The scan mirror 56 is a mirror that deflects the incident laser light 62. The X-axis galvano scanner 54 drives a scan mirror 56.

  The scan mirror 55 is connected to the rotation axis of the Y-axis galvano scanner 53. The Y-axis galvano scanner 53 reciprocates the rotating body around the rotation axis. The Y-axis galvano scanner 53 scans the irradiation position of the laser beam 62 on the workpiece 58 in the Y-axis direction.

  The scan mirror 56 is connected to the rotation axis of the X-axis galvano scanner 54. The X-axis galvano scanner 54 reciprocates the rotating body around the rotation axis. The X-axis galvano scanner 54 scans the irradiation position of the laser beam 62 on the workpiece 58 in the X-axis direction.

  The fθ lens 57 changes the laser beam 62 from the scan mirror 56 into a laser beam 63 perpendicular to the processed surface of the workpiece 58. The fθ lens 57 condenses the laser beam 63 at the machining position 59 in the work 58. The galvano driver 60 drives the Y-axis galvano scanner 53 and the X-axis galvano scanner 54.

  The control device 61 as a control unit controls the overall operation of the laser processing device 50. The control device 61 controls the oscillation of the laser beam 62 of the laser oscillator 51 and the driving of the Y-axis galvano scanner 53 and the X-axis galvano scanner 54 by the galvano driver 60. The control device 61 controls a motor (not shown) that drives the XY table.

  The Y-axis galvano scanner 53 and the X-axis galvano scanner 54 have the same configuration as the galvano scanner 1 according to the first embodiment, for example. The Y-axis galvano scanner 53 and the X-axis galvano scanner 54 can reduce surface tilt resonance and realize high positional accuracy. The laser processing apparatus 50 has the effect that the laser beam 63 can be advanced to the correct processing position 59 and high-precision processing can be performed.

  The Y-axis galvano scanner 53 and the X-axis galvano scanner 54 may have the same configuration as any of the galvano scanner 30 according to the second embodiment and the galvano scanner 40 according to the third embodiment. The laser processing apparatus 50 only needs to have at least one of the Y-axis galvano scanner 53 and the X-axis galvano scanner 54 having the same configuration as any of the galvano scanners 1, 30, and 40 of the first to third embodiments. Shall. In any case, the laser processing apparatus 50 can advance the laser beam 63 to the accurate processing position 59, and can realize highly accurate processing.

  1 Galvano Scanner, 2 Scan Mirror, 3 Rotating Shaft, 4 Frame Case, 5 Magnet, 6 Coil, 7 Iron Core, 8 Front Bearing, 9 Rear Bearing, 10 Ball Plunger, 11 Through Hole, 12 Mirror Mount, 13 Mount Presser, 14 Fastener, 15 Presser plate, 16 Preload spring, 17 Washer, 18 Lead wire, 19 Outer peripheral surface, 21 Spherical member, 22 Body part, 23 Coil spring, 30 Galvano scanner, 31 Roller plunger, 32 Disk member , 33 Main body part, 34 Coil spring, 40 Galvano scanner, 41 Spring structure, 42 Spring member, 43 Positioning member, 44 Main body part, 50 Laser processing device, 51 Laser oscillator, 52 Bend mirror, 53 Y-axis galvano scanner, 54 X-axis galvano scanner, 55 scan mirror, 56 Scan mirror, 57 fθ lens, 58 workpiece, 59 processing position, 60 galvano driver, 61 controller, 62, 63 laser beam.

The rear bearing 9 is fixed to the frame case 4. The front bearing 8 is not fixed to the frame case 4. The preload spring 16 applies preload to the front bearing 8 via a washer 17. The pressing plate 15 is provided in contact with the front outer end surface of the frame case 4 and the preload spring 16.

From the spherical member 21 has reached the front bearing 8, further by screwing slightly the ball plunger 10, a state in which the spherical member 21 is slightly pressed before side bearing 8. Whether or not the ball plunger 10 has been screwed in until such a state is determined, for example, from the result of measuring the torque when the ball plunger 10 is screwed in. In addition, the spherical member 21 at times Succoth the driver from reaching the front bearing 8, it is also possible to determine the position of the ball plunger 10. After the ball plunger 10 is positioned in this way, it is fixed using an adhesive or the like.

For the galvano scanner 1 that generates the first surface tilt resonance, an error in the position of the laser beam due to the first surface tilt resonance is adjusted by adjusting the weight balance of the rotating body so that the amplitude h is as small as possible. Reduce. The weight balance of the rotating body is adjusted, for example, by sticking a seal on the back surface of the scan mirror 2. The back surface is a surface on the back side of the reflection surface of the scan mirror 2.

Galvanometer scanner 1 according to this embodiment, the spherical member 21 of the ball plunger 10 that is brought into contact with the outer peripheral side surface 19 of the front bearing 8, pressing the front bearing 8 with a force rather work perpendicular to the axial direction wear. The galvano scanner 1 can effectively suppress the vibration of the rotating body caused by the gap around the front bearing 8. The galvano scanner 1 may adjust the position of the ball plunger 10 while observing the state of occurrence of resonance.

A disk member 32 has reached the front bearing 8, by further screwing the roller plunger 31 slightly, a state in which the disc member 32 is slightly pressed before side bearing 8. Whether or not the roller plunger 31 has been screwed in until such a state is determined, for example, from the result of measuring the torque when the roller plunger 31 is screwed in. In addition, disk member 32 is at times Succoth the driver from reaching the front bearing 8, it is also possible to determine the position of the roller plunger 31. After the roller plunger 31 is positioned in this way, it is fixed using an adhesive or the like.

Galvano scanner 30 according to this embodiment, the disk member 32 of the roller plunger 31 that is abutted on the outer peripheral side surface of the front bearing 8, press the front bearing 8 with a force rather work perpendicular to the axial direction . The galvano scanner 30 can effectively suppress the vibration of the rotating body caused by the gap around the front bearing 8. The galvano scanner 30 may adjust the position of the roller plunger 31 while observing the state of occurrence of resonance.

The positioning member 43 is provided at the upper end of the main body 44. The positioning member 43 has a cylindrical shape with a diameter smaller than the inner diameter of the spring member 42. The positioning member 43 is inserted into the lower part of the spring member 42. The positioning member 43 fixes the position of the spring member 42 on the side of the spring member 42 other than the side in contact with the front bearing 8.

From the upper end of the spring member 42 reaches the front bearing 8, further by screwing the body portion 44 slightly, a state where the spring member 42 is slightly pressed before side bearing 8. Whether or not the main body 44 has been screwed in until such a state is determined, for example, from the result of measuring the torque when the main body 44 is screwed. In addition, the upper end of the spring member 42 in the driver from reaching the front bearing 8 times Succoth, it is also possible to determine the position of the main body portion 44. After being positioned in this way, the main body 44 is fixed using an adhesive or the like.

Galvanometer scanner 40 according to this embodiment, the spring member 42 of the spring structure 41 that is abutted on the outer peripheral side surface of the front bearing 8, press the front bearing 8 with a force rather work perpendicular to the axial direction . The galvano scanner 40 can effectively suppress the vibration of the rotating body caused by the gap around the front bearing 8. Note that the galvano scanner 40 may adjust the position of the main body 44 while observing the state of occurrence of resonance.

Claims (9)

A rotating body that includes a rotating shaft and is rotatable about the rotating shaft;
A mirror connected to one end on the front side of the rotating shaft and deflecting incident light;
A frame case having an internal space for rotating the rotating body;
A front bearing that is provided at the front end of the internal space and that rotatably supports the rotating shaft;
A vibration suppressing structure that suppresses vibration of the front bearing by driving the rotating shaft,
The vibration suppressing structure includes an abutting member that abuts on an outer peripheral side surface of the front bearing,
The galvano scanner, wherein the contact member is movable in accordance with a displacement of the front bearing in an axial direction parallel to the rotation shaft. The frame case is formed with a through-hole penetrating between the outer peripheral surface of the frame case and the internal space.
The galvano scanner according to claim 1, wherein the vibration suppression structure is disposed in the through hole.   The galvano scanner according to claim 1, wherein the contact member is a spherical member that rotates in conjunction with a displacement of the front bearing in the axial direction.   The galvano scanner according to claim 1, wherein the contact member is a disk member that rotates in conjunction with a displacement of the front bearing in the axial direction.   5. The galvano scanner according to claim 3, wherein the vibration suppression structure includes an elastic member that applies a force to push the contact bearing member toward the front bearing. The contact member is an elastic member that imparts a force to push up the front bearing to the front bearing,
The galvano scanner according to claim 1, wherein the elastic member is deformed in conjunction with a displacement of the front bearing in the axial direction.   The galvano scanner according to claim 6, wherein the vibration suppressing structure includes a positioning member that fixes a position of the elastic member on a side opposite to a side of the elastic member that contacts the front bearing.   The galvano scanner according to claim 2, wherein the vibration suppression structure is screwed into the through hole. A laser light source;
A galvano scanner that scans a laser beam from the laser light source with a workpiece,
The galvo scanner is
A rotating body that includes a rotating shaft and is rotatable about the rotating shaft;
A mirror connected to one end on the front side of the rotating shaft and deflecting incident light;
A frame case having an internal space for rotating the rotating body;
A front bearing that is provided at the front end of the internal space and that rotatably supports the rotating shaft;
A vibration suppressing structure that suppresses vibration of the front bearing by driving the rotating shaft,
The vibration suppressing structure includes an abutting member that abuts on an outer peripheral side surface of the front bearing,
The laser processing apparatus, wherein the contact member is movable in accordance with a displacement of the front bearing in an axial direction parallel to the rotation shaft.