CN104919577B - 半导体装置 - Google Patents
半导体装置 Download PDFInfo
- Publication number
- CN104919577B CN104919577B CN201380070544.9A CN201380070544A CN104919577B CN 104919577 B CN104919577 B CN 104919577B CN 201380070544 A CN201380070544 A CN 201380070544A CN 104919577 B CN104919577 B CN 104919577B
- Authority
- CN
- China
- Prior art keywords
- metal film
- source
- ground voltage
- backgate
- same shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 21
- 239000004744 fabric Substances 0.000 claims description 7
- 238000000926 separation method Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 4
- 206010037660 Pyrexia Diseases 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000027950 fever generation Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0266—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0266—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements
- H01L27/027—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements specially adapted to provide an electrical current path other than the field effect induced current path
- H01L27/0277—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements specially adapted to provide an electrical current path other than the field effect induced current path involving a parasitic bipolar transistor triggered by the local electrical biasing of the layer acting as base of said parasitic bipolar transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0292—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using a specific configuration of the conducting means connecting the protective devices, e.g. ESD buses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41758—Source or drain electrodes for field effect devices for lateral devices with structured layout for source or drain region, i.e. the source or drain region having cellular, interdigitated or ring structure or being curved or angular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013007153A JP6099986B2 (ja) | 2013-01-18 | 2013-01-18 | 半導体装置 |
JP2013-007153 | 2013-01-18 | ||
PCT/JP2013/084288 WO2014112293A1 (ja) | 2013-01-18 | 2013-12-20 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104919577A CN104919577A (zh) | 2015-09-16 |
CN104919577B true CN104919577B (zh) | 2017-11-21 |
Family
ID=51209395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380070544.9A Expired - Fee Related CN104919577B (zh) | 2013-01-18 | 2013-12-20 | 半导体装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9397088B2 (zh) |
EP (1) | EP2947681A4 (zh) |
JP (1) | JP6099986B2 (zh) |
KR (1) | KR102082643B1 (zh) |
CN (1) | CN104919577B (zh) |
TW (1) | TWI575698B (zh) |
WO (1) | WO2014112293A1 (zh) |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61216477A (ja) * | 1985-03-22 | 1986-09-26 | Nec Corp | 半導体装置 |
JP3237110B2 (ja) * | 1998-03-24 | 2001-12-10 | 日本電気株式会社 | 半導体装置 |
US6310379B1 (en) * | 1999-06-03 | 2001-10-30 | Texas Instruments Incorporated | NMOS triggered NMOS ESD protection circuit using low voltage NMOS transistors |
JP4620282B2 (ja) * | 2001-04-24 | 2011-01-26 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP2007096211A (ja) * | 2005-09-30 | 2007-04-12 | Ricoh Co Ltd | 半導体装置 |
JP5586819B2 (ja) * | 2006-04-06 | 2014-09-10 | ピーエスフォー ルクスコ エスエイアールエル | 半導体装置 |
US7847904B2 (en) * | 2006-06-02 | 2010-12-07 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic appliance |
JP2008193019A (ja) | 2007-02-08 | 2008-08-21 | Matsushita Electric Ind Co Ltd | 半導体集積回路装置 |
US8178908B2 (en) * | 2008-05-07 | 2012-05-15 | International Business Machines Corporation | Electrical contact structure having multiple metal interconnect levels staggering one another |
JP5694020B2 (ja) * | 2011-03-18 | 2015-04-01 | トランスフォーム・ジャパン株式会社 | トランジスタ回路 |
JP2013008715A (ja) * | 2011-06-22 | 2013-01-10 | Semiconductor Components Industries Llc | 半導体装置 |
TWI456900B (zh) * | 2011-11-17 | 2014-10-11 | Global Unichip Corp | 訊號延遲電路和訊號延遲方法 |
-
2013
- 2013-01-18 JP JP2013007153A patent/JP6099986B2/ja not_active Expired - Fee Related
- 2013-12-20 EP EP13871991.9A patent/EP2947681A4/en not_active Ceased
- 2013-12-20 KR KR1020157018944A patent/KR102082643B1/ko active IP Right Grant
- 2013-12-20 WO PCT/JP2013/084288 patent/WO2014112293A1/ja active Application Filing
- 2013-12-20 CN CN201380070544.9A patent/CN104919577B/zh not_active Expired - Fee Related
- 2013-12-20 US US14/761,670 patent/US9397088B2/en active Active
- 2013-12-30 TW TW102148939A patent/TWI575698B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP2947681A1 (en) | 2015-11-25 |
KR102082643B1 (ko) | 2020-02-28 |
TWI575698B (zh) | 2017-03-21 |
EP2947681A4 (en) | 2016-08-17 |
KR20150109360A (ko) | 2015-10-01 |
WO2014112293A1 (ja) | 2014-07-24 |
JP2014138146A (ja) | 2014-07-28 |
US20150364464A1 (en) | 2015-12-17 |
US9397088B2 (en) | 2016-07-19 |
TW201444050A (zh) | 2014-11-16 |
JP6099986B2 (ja) | 2017-03-22 |
CN104919577A (zh) | 2015-09-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20160331 Address after: Chiba County, Japan Applicant after: SEIKO INSTR INC Address before: Chiba County, Japan Applicant before: Seiko Instruments Inc. |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Chiba County, Japan Patentee after: EPPs Lingke Co. Ltd. Address before: Chiba County, Japan Patentee before: SEIKO INSTR INC |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171121 Termination date: 20201220 |