CN103771332A - 电子装置及其制造方法 - Google Patents

电子装置及其制造方法 Download PDF

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Publication number
CN103771332A
CN103771332A CN201310493344.6A CN201310493344A CN103771332A CN 103771332 A CN103771332 A CN 103771332A CN 201310493344 A CN201310493344 A CN 201310493344A CN 103771332 A CN103771332 A CN 103771332A
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CN
China
Prior art keywords
layer
cavity
region
ground floor
electronic device
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Pending
Application number
CN201310493344.6A
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English (en)
Chinese (zh)
Inventor
吉泽隆彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN103771332A publication Critical patent/CN103771332A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0058—Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00333—Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00325—Processes for packaging MEMS devices for reducing stress inside of the package structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
CN201310493344.6A 2012-10-19 2013-10-18 电子装置及其制造方法 Pending CN103771332A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-231846 2012-10-19
JP2012231846A JP2014086447A (ja) 2012-10-19 2012-10-19 電子装置及びその製造方法

Publications (1)

Publication Number Publication Date
CN103771332A true CN103771332A (zh) 2014-05-07

Family

ID=50484595

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310493344.6A Pending CN103771332A (zh) 2012-10-19 2013-10-18 电子装置及其制造方法

Country Status (3)

Country Link
US (1) US8952467B2 (enExample)
JP (1) JP2014086447A (enExample)
CN (1) CN103771332A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105217560A (zh) * 2014-06-26 2016-01-06 英飞凌技术德累斯顿有限责任公司 微机械系统和用于制造微机械系统的方法
CN105600735A (zh) * 2014-11-18 2016-05-25 精工爱普生株式会社 电子装置、物理量传感器、压力传感器以及高度计
CN105621341A (zh) * 2015-12-29 2016-06-01 苏州工业园区纳米产业技术研究院有限公司 一种mems锚区结构及其制备方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10081535B2 (en) * 2013-06-25 2018-09-25 Analog Devices, Inc. Apparatus and method for shielding and biasing in MEMS devices encapsulated by active circuitry
US9382111B2 (en) * 2014-06-26 2016-07-05 Infineon Technologies Dresden Gmbh Micromechanical system and method for manufacturing a micromechanical system
US10155660B2 (en) * 2015-01-28 2018-12-18 Taiwan Semiconductor Manufacturing Co., Ltd. Device and method for protecting FEOL element and BEOL element
JP2017033985A (ja) 2015-07-29 2017-02-09 セイコーエプソン株式会社 電子装置及びその製造方法、発振器、電子機器、並びに、移動体
US11346875B2 (en) * 2018-02-27 2022-05-31 Applied Materials, Inc. Micro resonator array sensor for detecting wafer processing parameters
US11262262B2 (en) * 2019-01-28 2022-03-01 Taiwan Semiconductor Manufacturing Company Ltd. Pressure sensor and manufacturing method thereof
JP7452492B2 (ja) * 2021-05-21 2024-03-19 株式会社デンソー 慣性センサおよびその製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101177234A (zh) * 2006-11-08 2008-05-14 精工爱普生株式会社 电子装置及其制造方法
US20100207216A1 (en) * 2007-06-29 2010-08-19 IHP GmbH - Innovations for High Performance Micro -electronics/Leibriz-Institut fur innovative Mikro Corrosion-resistant mems component and method for the production thereof
CN1898150B (zh) * 2003-12-24 2011-04-27 凯文迪什动力学有限公司 容纳装置以及相应装置的方法
CN102223591A (zh) * 2010-04-19 2011-10-19 联华电子股份有限公司 微机电系统麦克风的晶片级封装结构及其制造方法
CN102303844A (zh) * 2011-08-15 2012-01-04 上海先进半导体制造股份有限公司 Mems器件及其形成方法

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* Cited by examiner, † Cited by third party
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JP3778128B2 (ja) 2002-05-14 2006-05-24 株式会社デンソー メンブレンを有する半導体装置の製造方法
JP4544880B2 (ja) 2003-09-25 2010-09-15 京セラ株式会社 微小電気機械式装置の封止方法
KR100575363B1 (ko) 2004-04-13 2006-05-03 재단법인서울대학교산학협력재단 미소기계소자의 진공 실장방법 및 이 방법에 의해 진공실장된 미소기계소자
JP2007222956A (ja) * 2006-02-21 2007-09-06 Seiko Epson Corp Ｍｅｍｓデバイスおよびｍｅｍｓデバイスの製造方法
JP2007222957A (ja) * 2006-02-21 2007-09-06 Seiko Epson Corp Ｍｅｍｓデバイスの製造方法
JP4480728B2 (ja) 2006-06-09 2010-06-16 パナソニック株式会社 Ｍｅｍｓマイクの製造方法
CN101086956B (zh) 2006-06-09 2011-04-13 松下电器产业株式会社 半导体装置的制造方法
US7994594B2 (en) 2007-03-15 2011-08-09 Seiko Epson Corporation Electronic device, resonator, oscillator and method for manufacturing electronic device
JP4386086B2 (ja) * 2007-03-15 2009-12-16 セイコーエプソン株式会社 電子装置及びその製造方法
JP5412031B2 (ja) 2007-07-24 2014-02-12 ローム株式会社 Ｍｅｍｓセンサ
JP4726927B2 (ja) 2008-06-19 2011-07-20 株式会社日立製作所 集積化マイクロエレクトロメカニカルシステムおよびその製造方法
JP5121765B2 (ja) 2009-03-25 2013-01-16 株式会社東芝 Ｍｅｍｓデバイスおよびその製造方法
JP2011143486A (ja) 2010-01-13 2011-07-28 Seiko Epson Corp 電子装置
JP2011182210A (ja) * 2010-03-02 2011-09-15 Seiko Epson Corp 電子装置
JP2012096316A (ja) * 2010-11-02 2012-05-24 Seiko Epson Corp 電子装置および電子装置の製造方法
JP2012119821A (ja) * 2010-11-30 2012-06-21 Seiko Epson Corp 電子装置、電子機器及び電子装置の製造方法
JP2013031907A (ja) * 2011-08-03 2013-02-14 Seiko Epson Corp 電子装置およびその製造方法、並びに発振器
JP2013123779A (ja) * 2011-12-15 2013-06-24 Seiko Epson Corp 電子装置および発振器

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1898150B (zh) * 2003-12-24 2011-04-27 凯文迪什动力学有限公司 容纳装置以及相应装置的方法
CN101177234A (zh) * 2006-11-08 2008-05-14 精工爱普生株式会社 电子装置及其制造方法
CN102173375A (zh) * 2006-11-08 2011-09-07 精工爱普生株式会社 电子装置
US20100207216A1 (en) * 2007-06-29 2010-08-19 IHP GmbH - Innovations for High Performance Micro -electronics/Leibriz-Institut fur innovative Mikro Corrosion-resistant mems component and method for the production thereof
CN102223591A (zh) * 2010-04-19 2011-10-19 联华电子股份有限公司 微机电系统麦克风的晶片级封装结构及其制造方法
CN102303844A (zh) * 2011-08-15 2012-01-04 上海先进半导体制造股份有限公司 Mems器件及其形成方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105217560A (zh) * 2014-06-26 2016-01-06 英飞凌技术德累斯顿有限责任公司 微机械系统和用于制造微机械系统的方法
CN105600735A (zh) * 2014-11-18 2016-05-25 精工爱普生株式会社 电子装置、物理量传感器、压力传感器以及高度计
CN105621341A (zh) * 2015-12-29 2016-06-01 苏州工业园区纳米产业技术研究院有限公司 一种mems锚区结构及其制备方法

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Publication number Publication date
US8952467B2 (en) 2015-02-10
US20140110799A1 (en) 2014-04-24
JP2014086447A (ja) 2014-05-12

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Application publication date: 20140507