CN103650126B - 方向调整装置以及方向调整方法 - Google Patents

方向调整装置以及方向调整方法 Download PDF

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Publication number
CN103650126B
CN103650126B CN201280016013.7A CN201280016013A CN103650126B CN 103650126 B CN103650126 B CN 103650126B CN 201280016013 A CN201280016013 A CN 201280016013A CN 103650126 B CN103650126 B CN 103650126B
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CN
China
Prior art keywords
goods
mounting table
mask
rotary apparatus
holding means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201280016013.7A
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English (en)
Chinese (zh)
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CN103650126A (zh
Inventor
雁部政彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
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Murata Machinery Ltd
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Publication date
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Publication of CN103650126A publication Critical patent/CN103650126A/zh
Application granted granted Critical
Publication of CN103650126B publication Critical patent/CN103650126B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN201280016013.7A 2011-05-02 2012-03-13 方向调整装置以及方向调整方法 Active CN103650126B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011-102723 2011-05-02
JP2011102723 2011-05-02
PCT/JP2012/001735 WO2012150645A1 (ja) 2011-05-02 2012-03-13 向き調整装置及び向き調整方法

Publications (2)

Publication Number Publication Date
CN103650126A CN103650126A (zh) 2014-03-19
CN103650126B true CN103650126B (zh) 2016-08-17

Family

ID=47107838

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280016013.7A Active CN103650126B (zh) 2011-05-02 2012-03-13 方向调整装置以及方向调整方法

Country Status (7)

Country Link
US (1) US9376267B2 (ko)
EP (1) EP2706564B1 (ko)
JP (1) JP5585726B2 (ko)
KR (1) KR101463135B1 (ko)
CN (1) CN103650126B (ko)
TW (1) TWI527084B (ko)
WO (1) WO2012150645A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5631464B1 (ja) * 2013-08-30 2014-11-26 株式会社 ベアック 露光装置
CN109014586A (zh) * 2017-06-12 2018-12-18 信码互通（北京）科技有限公司 用于实现易拉罐顶盖精确赋码的装置、系统及其方法
TW202134774A (zh) 2019-12-05 2021-09-16 美商應用材料股份有限公司 光標處理系統

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1512273A (zh) * 2002-12-27 2004-07-14 Asml 掩模盒和传送盒内的光刻掩模以及扫描盒内的掩模的方法
CN101118375A (zh) * 2006-07-31 2008-02-06 村田机械株式会社 洁净储料机和物品的保管方法

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JPH05136233A (ja) * 1991-11-12 1993-06-01 Seiko Epson Corp フオトマスクの自動搬送装置及びフオトマスク検査装置
US5944475A (en) * 1996-10-11 1999-08-31 Asyst Technologies, Inc. Rotated, orthogonal load compatible front-opening interface
US6082949A (en) * 1996-10-11 2000-07-04 Asyst Technologies, Inc. Load port opener
US6427096B1 (en) * 1999-02-12 2002-07-30 Honeywell International Inc. Processing tool interface apparatus for use in manufacturing environment
US6338409B1 (en) * 2000-04-13 2002-01-15 International Business Machines Corporation Reticle SMIF pod in situ orientation
US6619903B2 (en) * 2001-08-10 2003-09-16 Glenn M. Friedman System and method for reticle protection and transport
EP1434094A1 (en) * 2002-12-27 2004-06-30 ASML Netherlands B.V. Container for a mask
US7397539B2 (en) 2003-03-31 2008-07-08 Asml Netherlands, B.V. Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof
US7695239B2 (en) * 2003-07-14 2010-04-13 Fortrend Engineering Corporation End effector gripper arms having corner grippers which reorient reticle during transfer
JP4356443B2 (ja) * 2003-12-17 2009-11-04 凸版印刷株式会社 基板移載装置
JP2005221618A (ja) * 2004-02-04 2005-08-18 Toppan Printing Co Ltd 基板収納方向制御装置
US7462011B2 (en) * 2004-08-12 2008-12-09 Tokyo Electron Limited Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program
JP4665468B2 (ja) * 2004-09-15 2011-04-06 凸版印刷株式会社 フォトマスク及びフォトマスクブランクスの載置方向変更装置
JP4710308B2 (ja) * 2004-10-29 2011-06-29 株式会社ニコン レチクル搬送装置、露光装置、及びレチクルの搬送方法
JP4667018B2 (ja) * 2004-11-24 2011-04-06 ミライアル株式会社 レチクル搬送容器
US7245350B2 (en) * 2005-11-11 2007-07-17 Canon Kabushiki Kaisha Exposure apparatus
JP2007165367A (ja) * 2005-12-09 2007-06-28 Izumi Akiyama ワーク枚葉搬送システム
KR100774828B1 (ko) * 2006-12-18 2007-11-07 동부일렉트로닉스 주식회사 레티클 방향전환장치
US8814488B2 (en) * 2007-04-02 2014-08-26 Hitachi Kokusai Electric Inc. Substrate processing apparatus and semiconductor device manufacturing method
KR101433214B1 (ko) * 2010-09-13 2014-08-22 무라다기카이가부시끼가이샤 자동창고 및 물품 반출 방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1512273A (zh) * 2002-12-27 2004-07-14 Asml 掩模盒和传送盒内的光刻掩模以及扫描盒内的掩模的方法
CN101118375A (zh) * 2006-07-31 2008-02-06 村田机械株式会社 洁净储料机和物品的保管方法

Also Published As

Publication number Publication date
KR101463135B1 (ko) 2014-11-21
WO2012150645A1 (ja) 2012-11-08
EP2706564A1 (en) 2014-03-12
JPWO2012150645A1 (ja) 2014-07-28
US20140321958A1 (en) 2014-10-30
JP5585726B2 (ja) 2014-09-10
TW201245019A (en) 2012-11-16
US9376267B2 (en) 2016-06-28
EP2706564A4 (en) 2014-12-03
CN103650126A (zh) 2014-03-19
EP2706564B1 (en) 2020-09-02
KR20130124986A (ko) 2013-11-15
TWI527084B (zh) 2016-03-21

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