JP5585726B2 - 向き調整装置及び向き調整方法 - Google Patents
向き調整装置及び向き調整方法 Download PDFInfo
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- JP5585726B2 JP5585726B2 JP2013513064A JP2013513064A JP5585726B2 JP 5585726 B2 JP5585726 B2 JP 5585726B2 JP 2013513064 A JP2013513064 A JP 2013513064A JP 2013513064 A JP2013513064 A JP 2013513064A JP 5585726 B2 JP5585726 B2 JP 5585726B2
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- mounting table
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
110 回転棚
111 レチクル用回転棚
112 空ポッド用回転棚
120 レチクル搬送装置
121,122,131,132 アーム
123,133 ハンド
124,125,126,134,135,136 関節
127,137 昇降ガイド
130 ポッド搬送装置
140 ポッドオープナー
141 係止部
142 載置部
150 OHTオートロードポート
160 マニュアルロードポート
170 ファンフィルタユニット
180 コントローラ
200 ポッド
210 カバー
220 ドア
221 突起
230 レチクル
231 マーカー
Claims (5)
- 荷物の外部装置への挿入方向が予め定められ、且つ前記荷物が載置された状態の載置台の外部装置への挿入方向が予め定められている場合において、前記荷物と前記載置台との相対的な向きを調整する向き調整装置であって、
前記載置台を旋回させる旋回装置と、
前記荷物をその向きを変更させることなく前記載置台の上方で保持する保持装置と、
前記荷物と前記載置台との相対的な向きを予め定められた向きに調整するために、前記旋回装置及び前記保持装置を制御するコントローラとを備え、
前記コントローラは、
前記保持装置に、前記旋回装置に保持されている前記載置台から上方に離隔させた状態で前記荷物を保持させ、
前記旋回装置に、前記荷物が離隔した状態の前記載置台を初期位置から目的位置まで旋回させ、
前記保持装置に、前記目的位置まで旋回した前記載置台に、前記載置台の上方で保持されていた前記荷物を載置させ、
前記旋回装置に、前記荷物が載置された状態の前記載置台を前記目的位置から前記初期位置まで旋回させる
向き調整装置。 - 前記保持装置は、前記荷物を保持した状態で上下方向に移動し、前記載置台から所定の距離だけ上方に離隔した保持位置で前記荷物を保持する
請求項1に記載の向き調整装置。 - 前記コントローラは、前記保持装置によって前記荷物が前記載置台から離隔した後で、且つ前記保持位置に到達する前に、前記載置台の前記初期位置から前記目的位置への旋回を前記旋回装置に開始させる
請求項2に記載の向き調整装置。 - 該向き調整装置は、さらに、前記荷物と前記載置台との相対的な向きを確認する向き確認装置を備え、
前記コントローラは、前記旋回装置に前記載置台を前記初期位置まで旋回させた後に、前記向き確認装置に前記荷物と前記載置台との相対的な向きを確認させる
請求項1〜3のいずれか1項に記載の向き調整装置。 - 荷物の外部装置への挿入方向が予め定められ、且つ前記荷物が載置された状態の載置台の外部装置への挿入方向が予め定められている場合において、前記載置台を旋回させる旋回装置と、前記荷物をその向きを変更させることなく前記載置台の上方で保持する保持装置とを備える向き調整装置が、前記荷物と前記載置台との相対的な向きを調整する向き調整方法であって、
前記保持装置が、前記旋回装置に保持されている前記載置台から上方に離隔させた状態で前記荷物を保持するステップと、
前記旋回装置が、前記荷物が離隔した状態の前記載置台を初期位置から目的位置まで旋回させるステップと、
前記保持装置が、前記目的位置まで旋回した前記載置台に、前記載置台の上方で保持されていた前記荷物を載置するステップと、
前記旋回装置が、前記荷物が載置された状態の前記載置台を前記目的位置から前記初期位置まで旋回させるステップとを含む
向き調整方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013513064A JP5585726B2 (ja) | 2011-05-02 | 2012-03-13 | 向き調整装置及び向き調整方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011102723 | 2011-05-02 | ||
JP2011102723 | 2011-05-02 | ||
PCT/JP2012/001735 WO2012150645A1 (ja) | 2011-05-02 | 2012-03-13 | 向き調整装置及び向き調整方法 |
JP2013513064A JP5585726B2 (ja) | 2011-05-02 | 2012-03-13 | 向き調整装置及び向き調整方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012150645A1 JPWO2012150645A1 (ja) | 2014-07-28 |
JP5585726B2 true JP5585726B2 (ja) | 2014-09-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013513064A Active JP5585726B2 (ja) | 2011-05-02 | 2012-03-13 | 向き調整装置及び向き調整方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9376267B2 (ja) |
EP (1) | EP2706564B1 (ja) |
JP (1) | JP5585726B2 (ja) |
KR (1) | KR101463135B1 (ja) |
CN (1) | CN103650126B (ja) |
TW (1) | TWI527084B (ja) |
WO (1) | WO2012150645A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5631464B1 (ja) * | 2013-08-30 | 2014-11-26 | 株式会社 ベアック | 露光装置 |
CN109014586A (zh) * | 2017-06-12 | 2018-12-18 | 信码互通(北京)科技有限公司 | 用于实现易拉罐顶盖精确赋码的装置、系统及其方法 |
TW202134774A (zh) | 2019-12-05 | 2021-09-16 | 美商應用材料股份有限公司 | 光標處理系統 |
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JPH05136233A (ja) * | 1991-11-12 | 1993-06-01 | Seiko Epson Corp | フオトマスクの自動搬送装置及びフオトマスク検査装置 |
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JP2005183549A (ja) * | 2003-12-17 | 2005-07-07 | Toppan Printing Co Ltd | 基板移載装置 |
JP2005221618A (ja) * | 2004-02-04 | 2005-08-18 | Toppan Printing Co Ltd | 基板収納方向制御装置 |
JP2006086253A (ja) * | 2004-09-15 | 2006-03-30 | Toppan Printing Co Ltd | 基板配置方向制御装置 |
JP2006153899A (ja) * | 2004-10-29 | 2006-06-15 | Nikon Corp | レチクル保護部材、レチクル搬送装置、露光装置、及びレチクルの搬送方法。 |
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JP2008030914A (ja) * | 2006-07-31 | 2008-02-14 | Murata Mach Ltd | クリーンストッカと物品の保管方法 |
WO2012035693A1 (ja) * | 2010-09-13 | 2012-03-22 | ムラテックオートメーション株式会社 | 自動倉庫及び物品搬出方法 |
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-
2012
- 2012-03-13 EP EP12779355.2A patent/EP2706564B1/en active Active
- 2012-03-13 CN CN201280016013.7A patent/CN103650126B/zh active Active
- 2012-03-13 WO PCT/JP2012/001735 patent/WO2012150645A1/ja active Application Filing
- 2012-03-13 KR KR1020137025783A patent/KR101463135B1/ko active IP Right Grant
- 2012-03-13 US US14/114,785 patent/US9376267B2/en active Active
- 2012-03-13 JP JP2013513064A patent/JP5585726B2/ja active Active
- 2012-04-27 TW TW101115146A patent/TWI527084B/zh active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH05136233A (ja) * | 1991-11-12 | 1993-06-01 | Seiko Epson Corp | フオトマスクの自動搬送装置及びフオトマスク検査装置 |
JP2004537867A (ja) * | 2001-08-10 | 2004-12-16 | エーエスエムエル ユーエス インコーポレイテッド | レチクルを保護及び搬送する装置及び方法 |
JP2005183549A (ja) * | 2003-12-17 | 2005-07-07 | Toppan Printing Co Ltd | 基板移載装置 |
JP2005221618A (ja) * | 2004-02-04 | 2005-08-18 | Toppan Printing Co Ltd | 基板収納方向制御装置 |
JP2006086253A (ja) * | 2004-09-15 | 2006-03-30 | Toppan Printing Co Ltd | 基板配置方向制御装置 |
JP2006153899A (ja) * | 2004-10-29 | 2006-06-15 | Nikon Corp | レチクル保護部材、レチクル搬送装置、露光装置、及びレチクルの搬送方法。 |
JP2007165367A (ja) * | 2005-12-09 | 2007-06-28 | Izumi Akiyama | ワーク枚葉搬送システム |
JP2008030914A (ja) * | 2006-07-31 | 2008-02-14 | Murata Mach Ltd | クリーンストッカと物品の保管方法 |
WO2012035693A1 (ja) * | 2010-09-13 | 2012-03-22 | ムラテックオートメーション株式会社 | 自動倉庫及び物品搬出方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2012150645A1 (ja) | 2012-11-08 |
KR101463135B1 (ko) | 2014-11-21 |
KR20130124986A (ko) | 2013-11-15 |
US9376267B2 (en) | 2016-06-28 |
EP2706564A4 (en) | 2014-12-03 |
EP2706564A1 (en) | 2014-03-12 |
JPWO2012150645A1 (ja) | 2014-07-28 |
CN103650126A (zh) | 2014-03-19 |
US20140321958A1 (en) | 2014-10-30 |
EP2706564B1 (en) | 2020-09-02 |
TWI527084B (zh) | 2016-03-21 |
TW201245019A (en) | 2012-11-16 |
CN103650126B (zh) | 2016-08-17 |
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