CN103497733A - 悬浮液、研磨液套剂、研磨液、基板的研磨方法及基板 - Google Patents
悬浮液、研磨液套剂、研磨液、基板的研磨方法及基板 Download PDFInfo
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- CN103497733A CN103497733A CN201310335723.2A CN201310335723A CN103497733A CN 103497733 A CN103497733 A CN 103497733A CN 201310335723 A CN201310335723 A CN 201310335723A CN 103497733 A CN103497733 A CN 103497733A
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- 230000007935 neutral effect Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000003002 pH adjusting agent Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920000083 poly(allylamine) Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- VQMWBBYLQSCNPO-UHFFFAOYSA-N promethium atom Chemical compound [Pm] VQMWBBYLQSCNPO-UHFFFAOYSA-N 0.000 description 1
- 150000003233 pyrroles Chemical class 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 231100000241 scar Toxicity 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 238000002798 spectrophotometry method Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- VXKWYPOMXBVZSJ-UHFFFAOYSA-N tetramethyltin Chemical compound C[Sn](C)(C)C VXKWYPOMXBVZSJ-UHFFFAOYSA-N 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
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- 238000005303 weighing Methods 0.000 description 1
- 239000001052 yellow pigment Substances 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/12—Etching, surface-brightening or pickling compositions containing heavy metal salts in an amount of at least 50% of the non-solvent components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
Abstract
Description
悬浮液用储藏液的外观 | 研磨速度(nm/min) | |
实施例1 | 少有浑浊且呈淡黄色 | 280 |
实施例2 | 透明且呈淡黄色 | 320 |
实施例3 | 透明且呈淡黄色 | 340 |
实施例4 | 透明且呈淡黄色 | 380 |
实施例5 | 透明且呈淡黄色 | 327 |
实施例6 | 透明且呈淡黄色 | 376 |
实施例7 | 透明且呈淡黄色 | 350 |
实施例8 | 透明且呈淡黄色 | 355 |
实施例9 | 透明且呈淡黄色 | 377 |
实施例10 | 透明且呈淡黄色 | 368 |
实施例11 | 透明且呈淡黄色 | 405 |
实施例12 | 透明且呈淡黄色 | 389 |
实施例13 | 透明且呈淡黄色 | 320 |
实施例14 | 极少的浑浊且呈淡黄色 | 255 |
实施例15 | 极少的浑浊且呈淡黄色 | 285 |
实施例16 | 透明且呈淡黄色 | 305 |
实施例17 | 透明且呈淡黄色 | 335 |
比较例1 | 白色浑浊 | 170 |
比较例2 | 白色浑浊 | 190 |
比较例3 | 白色浑浊 | 175 |
比较例4 | 浑浊且呈淡黄色 | 220 |
Claims (4)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2010-260036 | 2010-11-22 | ||
JP2010260036 | 2010-11-22 | ||
CN201180055796.5A CN103222035B (zh) | 2010-11-22 | 2011-11-21 | 悬浮液、研磨液套剂、研磨液、基板的研磨方法及基板 |
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CN201180055796.5A Division CN103222035B (zh) | 2010-11-22 | 2011-11-21 | 悬浮液、研磨液套剂、研磨液、基板的研磨方法及基板 |
Publications (2)
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CN103497733A true CN103497733A (zh) | 2014-01-08 |
CN103497733B CN103497733B (zh) | 2016-11-23 |
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CN201310335499.7A Active CN103497732B (zh) | 2010-11-22 | 2011-11-21 | 悬浮液、研磨液套剂、研磨液、基板的研磨方法及基板 |
CN201310335599.XA Pending CN103500706A (zh) | 2010-11-22 | 2011-11-21 | 悬浮液、研磨液套剂、研磨液、基板的研磨方法及基板 |
CN201310335723.2A Active CN103497733B (zh) | 2010-11-22 | 2011-11-21 | 悬浮液、研磨液套剂、研磨液、基板的研磨方法及基板 |
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CN201310335499.7A Active CN103497732B (zh) | 2010-11-22 | 2011-11-21 | 悬浮液、研磨液套剂、研磨液、基板的研磨方法及基板 |
CN201310335599.XA Pending CN103500706A (zh) | 2010-11-22 | 2011-11-21 | 悬浮液、研磨液套剂、研磨液、基板的研磨方法及基板 |
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US (5) | US9988573B2 (zh) |
JP (4) | JP5590144B2 (zh) |
KR (4) | KR101476943B1 (zh) |
CN (4) | CN103222035B (zh) |
SG (1) | SG190054A1 (zh) |
TW (4) | TW201323591A (zh) |
WO (1) | WO2012070541A1 (zh) |
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KR101476943B1 (ko) * | 2010-11-22 | 2014-12-24 | 히타치가세이가부시끼가이샤 | 슬러리, 연마액 세트, 연마액, 기판의 연마 방법 및 기판 |
KR101886892B1 (ko) | 2010-11-22 | 2018-08-08 | 히타치가세이가부시끼가이샤 | 슬러리, 연마액 세트, 연마액, 기판의 연마 방법 및 기판 |
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US20130244431A1 (en) | 2013-09-19 |
JP5590144B2 (ja) | 2014-09-17 |
KR20130129397A (ko) | 2013-11-28 |
CN103222035A (zh) | 2013-07-24 |
TW201226546A (en) | 2012-07-01 |
US9988573B2 (en) | 2018-06-05 |
JP2013211567A (ja) | 2013-10-10 |
CN103497733B (zh) | 2016-11-23 |
TWI434919B (zh) | 2014-04-21 |
TW201323591A (zh) | 2013-06-16 |
TWI510606B (zh) | 2015-12-01 |
KR101886895B1 (ko) | 2018-08-08 |
KR20130129396A (ko) | 2013-11-28 |
JP2013211568A (ja) | 2013-10-10 |
KR20130133188A (ko) | 2013-12-06 |
US20130130501A1 (en) | 2013-05-23 |
CN103497732A (zh) | 2014-01-08 |
CN103500706A (zh) | 2014-01-08 |
KR101476943B1 (ko) | 2014-12-24 |
JPWO2012070541A1 (ja) | 2014-05-19 |
KR20130129395A (ko) | 2013-11-28 |
US20180251680A1 (en) | 2018-09-06 |
SG190054A1 (en) | 2013-06-28 |
US20130143404A1 (en) | 2013-06-06 |
JP5831495B2 (ja) | 2015-12-09 |
TW201323592A (zh) | 2013-06-16 |
CN103497732B (zh) | 2016-08-10 |
WO2012070541A1 (ja) | 2012-05-31 |
JP2013211566A (ja) | 2013-10-10 |
US20120329370A1 (en) | 2012-12-27 |
TW201323593A (zh) | 2013-06-16 |
CN103222035B (zh) | 2016-09-21 |
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