CN102834544B - 对用于柔性衬底的腔室入口或腔室出口进行密封的装置、衬底处理设备及组装该装置的方法 - Google Patents

对用于柔性衬底的腔室入口或腔室出口进行密封的装置、衬底处理设备及组装该装置的方法 Download PDF

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Publication number
CN102834544B
CN102834544B CN201180018024.4A CN201180018024A CN102834544B CN 102834544 B CN102834544 B CN 102834544B CN 201180018024 A CN201180018024 A CN 201180018024A CN 102834544 B CN102834544 B CN 102834544B
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CN
China
Prior art keywords
pipe
substrate
flexible pipe
chamber
opening
Prior art date
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CN201180018024.4A
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English (en)
Chinese (zh)
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CN102834544A (zh
Inventor
卡尔-海因里希·温克
沃克尔·海克
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Applied Materials Inc
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Applied Materials Inc
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Publication date
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Publication of CN102834544A publication Critical patent/CN102834544A/zh
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Publication of CN102834544B publication Critical patent/CN102834544B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/10—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with inflatable member
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H01J2237/166—Sealing means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
CN201180018024.4A 2010-04-07 2011-03-22 对用于柔性衬底的腔室入口或腔室出口进行密封的装置、衬底处理设备及组装该装置的方法 Active CN102834544B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10159259.0 2010-04-07
EP10159259.0A EP2374914B1 (en) 2010-04-07 2010-04-07 A device for sealing a chamber inlet or a chamber outlet for a flexible substrate; substrate processing apparatus, and method for assembling such a device
PCT/EP2011/054363 WO2011124467A1 (en) 2010-04-07 2011-03-22 A device for sealing a chamber inlet or a chamber outlet for a flexible substrate, substrate processing apparatus, and method for assembling such a device

Publications (2)

Publication Number Publication Date
CN102834544A CN102834544A (zh) 2012-12-19
CN102834544B true CN102834544B (zh) 2016-01-20

Family

ID=42199270

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180018024.4A Active CN102834544B (zh) 2010-04-07 2011-03-22 对用于柔性衬底的腔室入口或腔室出口进行密封的装置、衬底处理设备及组装该装置的方法

Country Status (7)

Country Link
US (1) US20110247557A1 (enExample)
EP (1) EP2374914B1 (enExample)
JP (1) JP5878162B2 (enExample)
KR (1) KR101869525B1 (enExample)
CN (1) CN102834544B (enExample)
TW (1) TWI558842B (enExample)
WO (1) WO2011124467A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385215B (zh) * 2007-12-20 2013-02-11 Chung Shan Inst Of Science Ruthenium Metal Complexes Dyes and Their Solar Cells
CN102941433B (zh) * 2012-10-19 2016-02-24 浙江吉尚汽车部件有限公司 主缸密封圈装配方法
DE102014100070B4 (de) 2013-09-06 2019-04-18 VON ARDENNE Asset GmbH & Co. KG Schlitzventil und Vakuumbeschichtungsanlage
GB2521645B (en) * 2013-12-24 2016-01-06 Bobst Manchester Ltd Vacuum metallizers and methods of operating vacuum metallizers
USD924825S1 (en) 2018-01-24 2021-07-13 Applied Materials, Inc. Chamber inlet
CN108899249B (zh) * 2018-07-11 2023-11-21 浙江正泰电器股份有限公司 继电器、继电器抽真空充气系统及继电器抽真空充气方法
US20220112594A1 (en) * 2020-10-14 2022-04-14 Applied Materials, Inc. Device for sealing a vacuum chamber, vacuum processing system, and method of monitoring a load lock seal

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3302432A (en) * 1963-05-31 1967-02-07 Mather & Platt Ltd Seals for pressure vessels or the like
US4291727A (en) * 1979-02-28 1981-09-29 Institute Of Gas Technology Pipeline flow restrictor and process

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
US3170576A (en) 1962-08-24 1965-02-23 Pennsalt Chemicals Corp Rotary seal
DE2331367A1 (de) * 1973-06-20 1975-01-23 Kleinewefers Ind Co Gmbh Dichtung fuer behandlungsbehaelter, insbesondere fuer textile warenbahnen
US4017258A (en) * 1974-06-10 1977-04-12 Sando Iron Works Co., Ltd. Method of forming a pressure seal employing an air-balance in a high pressure steamer
US4249846A (en) * 1978-12-20 1981-02-10 Pacific Western Systems, Inc. Rotary vacuum seal for a wafer transport system
JP2581676B2 (ja) * 1986-07-17 1997-02-12 日本鋼管株式会社 炉内ロ−ル
US4812101A (en) 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for continuous throughput in a vacuum environment
DD285120A5 (de) * 1989-06-20 1990-12-05 Fi Manfred Von Ardenne,Dd Bandventil
NL9101900A (nl) * 1991-11-14 1993-06-01 Beugen J Van Beheer Bv Werkwijze voor het vervaardigen van een opblaasbare afsluitplug voor leidingen.
DE59306704D1 (de) * 1992-02-12 1997-07-17 Balzers Hochvakuum Vakuumbearbeitungsanlage
DE4207525C2 (de) * 1992-03-10 1999-12-16 Leybold Ag Hochvakuum-Beschichtungsanlage
JP3199162B2 (ja) * 1996-03-18 2001-08-13 松下電器産業株式会社 連続真空処理装置
US6748726B2 (en) * 1997-10-06 2004-06-15 Jean-Pierre Rossi Device for packaging products under controlled atmosphere in packages sealed with a film
DE19960751A1 (de) * 1999-12-16 2001-07-05 Fzm Ges Fuer Produktentwicklun Schleuse und Verfahren zur Anwendung derselben
CN100386552C (zh) 2004-05-25 2008-05-07 应用材料有限责任与两合公司 一种用于条带处理设备的气锁安全阀
DE102007009678A1 (de) * 2006-10-27 2008-04-30 Sms Demag Ag Bandschleuse

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3302432A (en) * 1963-05-31 1967-02-07 Mather & Platt Ltd Seals for pressure vessels or the like
US4291727A (en) * 1979-02-28 1981-09-29 Institute Of Gas Technology Pipeline flow restrictor and process

Also Published As

Publication number Publication date
EP2374914A1 (en) 2011-10-12
KR20130098859A (ko) 2013-09-05
CN102834544A (zh) 2012-12-19
KR101869525B1 (ko) 2018-06-22
WO2011124467A1 (en) 2011-10-13
TW201202471A (en) 2012-01-16
US20110247557A1 (en) 2011-10-13
TWI558842B (zh) 2016-11-21
JP5878162B2 (ja) 2016-03-08
JP2013524017A (ja) 2013-06-17
EP2374914B1 (en) 2015-07-22

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