KR101869525B1 - 가요성 기판용 챔버 입구 또는 챔버 출구를 밀봉하기 위한 장치, 기판 처리 기구 및 이러한 장치를 조립하기 위한 방법 - Google Patents

가요성 기판용 챔버 입구 또는 챔버 출구를 밀봉하기 위한 장치, 기판 처리 기구 및 이러한 장치를 조립하기 위한 방법 Download PDF

Info

Publication number
KR101869525B1
KR101869525B1 KR1020127029226A KR20127029226A KR101869525B1 KR 101869525 B1 KR101869525 B1 KR 101869525B1 KR 1020127029226 A KR1020127029226 A KR 1020127029226A KR 20127029226 A KR20127029226 A KR 20127029226A KR 101869525 B1 KR101869525 B1 KR 101869525B1
Authority
KR
South Korea
Prior art keywords
tube
chamber
flexible substrate
sealing
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020127029226A
Other languages
English (en)
Korean (ko)
Other versions
KR20130098859A (ko
Inventor
칼-하인리히 벤크
폴커 하커
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20130098859A publication Critical patent/KR20130098859A/ko
Application granted granted Critical
Publication of KR101869525B1 publication Critical patent/KR101869525B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/10—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with inflatable member
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H01J2237/166—Sealing means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
KR1020127029226A 2010-04-07 2011-03-22 가요성 기판용 챔버 입구 또는 챔버 출구를 밀봉하기 위한 장치, 기판 처리 기구 및 이러한 장치를 조립하기 위한 방법 Active KR101869525B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10159259.0A EP2374914B1 (en) 2010-04-07 2010-04-07 A device for sealing a chamber inlet or a chamber outlet for a flexible substrate; substrate processing apparatus, and method for assembling such a device
EP10159259.0 2010-04-07
PCT/EP2011/054363 WO2011124467A1 (en) 2010-04-07 2011-03-22 A device for sealing a chamber inlet or a chamber outlet for a flexible substrate, substrate processing apparatus, and method for assembling such a device

Publications (2)

Publication Number Publication Date
KR20130098859A KR20130098859A (ko) 2013-09-05
KR101869525B1 true KR101869525B1 (ko) 2018-06-22

Family

ID=42199270

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127029226A Active KR101869525B1 (ko) 2010-04-07 2011-03-22 가요성 기판용 챔버 입구 또는 챔버 출구를 밀봉하기 위한 장치, 기판 처리 기구 및 이러한 장치를 조립하기 위한 방법

Country Status (7)

Country Link
US (1) US20110247557A1 (enExample)
EP (1) EP2374914B1 (enExample)
JP (1) JP5878162B2 (enExample)
KR (1) KR101869525B1 (enExample)
CN (1) CN102834544B (enExample)
TW (1) TWI558842B (enExample)
WO (1) WO2011124467A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385215B (zh) * 2007-12-20 2013-02-11 Chung Shan Inst Of Science Ruthenium Metal Complexes Dyes and Their Solar Cells
CN102941433B (zh) * 2012-10-19 2016-02-24 浙江吉尚汽车部件有限公司 主缸密封圈装配方法
DE102014100070B4 (de) 2013-09-06 2019-04-18 VON ARDENNE Asset GmbH & Co. KG Schlitzventil und Vakuumbeschichtungsanlage
GB2521645B (en) * 2013-12-24 2016-01-06 Bobst Manchester Ltd Vacuum metallizers and methods of operating vacuum metallizers
USD924825S1 (en) * 2018-01-24 2021-07-13 Applied Materials, Inc. Chamber inlet
CN108899249B (zh) * 2018-07-11 2023-11-21 浙江正泰电器股份有限公司 继电器、继电器抽真空充气系统及继电器抽真空充气方法
US20220112594A1 (en) * 2020-10-14 2022-04-14 Applied Materials, Inc. Device for sealing a vacuum chamber, vacuum processing system, and method of monitoring a load lock seal

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3170576A (en) 1962-08-24 1965-02-23 Pennsalt Chemicals Corp Rotary seal
GB1001508A (en) * 1963-05-31 1965-08-18 Mather & Pratt Ltd Improvements in or relating to seals for pressure vessels or the like
DE2331367A1 (de) * 1973-06-20 1975-01-23 Kleinewefers Ind Co Gmbh Dichtung fuer behandlungsbehaelter, insbesondere fuer textile warenbahnen
US4017258A (en) * 1974-06-10 1977-04-12 Sando Iron Works Co., Ltd. Method of forming a pressure seal employing an air-balance in a high pressure steamer
US4249846A (en) * 1978-12-20 1981-02-10 Pacific Western Systems, Inc. Rotary vacuum seal for a wafer transport system
US4291727A (en) * 1979-02-28 1981-09-29 Institute Of Gas Technology Pipeline flow restrictor and process
JP2581676B2 (ja) * 1986-07-17 1997-02-12 日本鋼管株式会社 炉内ロ−ル
US4812101A (en) 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for continuous throughput in a vacuum environment
DD285120A5 (de) * 1989-06-20 1990-12-05 Fi Manfred Von Ardenne,Dd Bandventil
NL9101900A (nl) * 1991-11-14 1993-06-01 Beugen J Van Beheer Bv Werkwijze voor het vervaardigen van een opblaasbare afsluitplug voor leidingen.
EP0555764B1 (de) * 1992-02-12 1997-06-11 Balzers Aktiengesellschaft Vakuumbearbeitungsanlage
DE4207525C2 (de) * 1992-03-10 1999-12-16 Leybold Ag Hochvakuum-Beschichtungsanlage
JP3199162B2 (ja) * 1996-03-18 2001-08-13 松下電器産業株式会社 連続真空処理装置
DK1021338T3 (da) * 1997-10-06 2002-07-22 Jean-Pierre Rossi Apparat til konditionering af produkter under en kontrolleret atmosfære i emballager, som er forsynet med låg af en film
DE19960751A1 (de) * 1999-12-16 2001-07-05 Fzm Ges Fuer Produktentwicklun Schleuse und Verfahren zur Anwendung derselben
CN100386552C (zh) 2004-05-25 2008-05-07 应用材料有限责任与两合公司 一种用于条带处理设备的气锁安全阀
DE102007009678A1 (de) * 2006-10-27 2008-04-30 Sms Demag Ag Bandschleuse

Also Published As

Publication number Publication date
EP2374914A1 (en) 2011-10-12
TW201202471A (en) 2012-01-16
TWI558842B (zh) 2016-11-21
CN102834544A (zh) 2012-12-19
KR20130098859A (ko) 2013-09-05
JP2013524017A (ja) 2013-06-17
WO2011124467A1 (en) 2011-10-13
JP5878162B2 (ja) 2016-03-08
US20110247557A1 (en) 2011-10-13
EP2374914B1 (en) 2015-07-22
CN102834544B (zh) 2016-01-20

Similar Documents

Publication Publication Date Title
KR101869525B1 (ko) 가요성 기판용 챔버 입구 또는 챔버 출구를 밀봉하기 위한 장치, 기판 처리 기구 및 이러한 장치를 조립하기 위한 방법
JP6599393B2 (ja) 高圧タンク
JP4976411B2 (ja) ダイヤフラム装置を有する真空計
KR101964566B1 (ko) 실링 링
JP2005265177A (ja) スライド弁
US20020149157A1 (en) Sealing gasket for cables
US8376208B1 (en) Purge plug for welding applications
US8499784B2 (en) Lock valve in particular for a strip processing unit
US12025246B2 (en) Vacuum chamber connector
US10473247B2 (en) Method of forming a pipe joint, pipe joint component, and pipe joint, fluid control device, fluid control unit and semiconductor fabrication apparatus including the pipe joint component
CN113776741A (zh) 一种管道检测装置
KR101353792B1 (ko) 노출 공정을 위한 광학 요소 유닛
KR20200121443A (ko) 배관 연결 조립체
US20190247795A1 (en) Ro element with integral pressure vessel
CN110745612B (zh) 卷绕系统
JP4255372B2 (ja) 防水気密装置
CN106716099A (zh) 具有限位结构的薄膜腔
JP2020094276A (ja) シール装置、真空装置、成膜装置、及びフィルム製造方法
CN223938724U (zh) 一种气囊阀装置
KR102426085B1 (ko) 회전축 씰 및 이를 사용하는 부품 이송장치
KR20200045388A (ko) 실링 링
KR101008430B1 (ko) 가스켓이 결합되어진 덕트
JP2021081019A (ja) シール装置、真空装置、成膜装置及び多層フィルム製造方法
CN103298597B (zh) 用于吹塑薄膜软管的校正装置
CN120212273A (zh) 一种气囊阀装置

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20121107

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20160311

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20170918

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20180328

PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20180614

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20180615

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20210603

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20220602

Start annual number: 5

End annual number: 5