GB2521645B - Vacuum metallizers and methods of operating vacuum metallizers - Google Patents

Vacuum metallizers and methods of operating vacuum metallizers

Info

Publication number
GB2521645B
GB2521645B GB1323014.9A GB201323014A GB2521645B GB 2521645 B GB2521645 B GB 2521645B GB 201323014 A GB201323014 A GB 201323014A GB 2521645 B GB2521645 B GB 2521645B
Authority
GB
United Kingdom
Prior art keywords
metallizers
vacuum
methods
operating
operating vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1323014.9A
Other versions
GB201323014D0 (en
GB2521645A (en
Inventor
David Kilcoyne
Mark Russell Walker
Mark Farrell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bobst Manchester Ltd
Original Assignee
Bobst Manchester Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bobst Manchester Ltd filed Critical Bobst Manchester Ltd
Priority to GB1323014.9A priority Critical patent/GB2521645B/en
Publication of GB201323014D0 publication Critical patent/GB201323014D0/en
Publication of GB2521645A publication Critical patent/GB2521645A/en
Application granted granted Critical
Publication of GB2521645B publication Critical patent/GB2521645B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/46—Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Fluid Mechanics (AREA)
  • Physical Vapour Deposition (AREA)
GB1323014.9A 2013-12-24 2013-12-24 Vacuum metallizers and methods of operating vacuum metallizers Active GB2521645B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1323014.9A GB2521645B (en) 2013-12-24 2013-12-24 Vacuum metallizers and methods of operating vacuum metallizers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1323014.9A GB2521645B (en) 2013-12-24 2013-12-24 Vacuum metallizers and methods of operating vacuum metallizers

Publications (3)

Publication Number Publication Date
GB201323014D0 GB201323014D0 (en) 2014-02-12
GB2521645A GB2521645A (en) 2015-07-01
GB2521645B true GB2521645B (en) 2016-01-06

Family

ID=50114759

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1323014.9A Active GB2521645B (en) 2013-12-24 2013-12-24 Vacuum metallizers and methods of operating vacuum metallizers

Country Status (1)

Country Link
GB (1) GB2521645B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5254169A (en) * 1992-03-10 1993-10-19 Leybold Aktiengesellschaft High-vacuum coating apparatus
US5415729A (en) * 1992-02-12 1995-05-16 Balzers Aktiengesellschaft Vacuum treatment apparatus
DE10205805C1 (en) * 2002-02-13 2003-08-14 Ardenne Anlagentech Gmbh Apparatus for coating strips of material in vacuum has magnetrons mounted in housing fitted with screen over its top and inflatable seal between two
EP1964943A1 (en) * 2007-02-28 2008-09-03 Applied Materials, Inc. Entry lock system, web processing installation, and method for using the same
EP2374914A1 (en) * 2010-04-07 2011-10-12 Applied Materials, Inc. A device for sealing a chamber inlet or a chamber outlet for a flexible substrate; substrate processing apparatus, and method for assembling such a device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5415729A (en) * 1992-02-12 1995-05-16 Balzers Aktiengesellschaft Vacuum treatment apparatus
US5254169A (en) * 1992-03-10 1993-10-19 Leybold Aktiengesellschaft High-vacuum coating apparatus
DE10205805C1 (en) * 2002-02-13 2003-08-14 Ardenne Anlagentech Gmbh Apparatus for coating strips of material in vacuum has magnetrons mounted in housing fitted with screen over its top and inflatable seal between two
EP1964943A1 (en) * 2007-02-28 2008-09-03 Applied Materials, Inc. Entry lock system, web processing installation, and method for using the same
EP2374914A1 (en) * 2010-04-07 2011-10-12 Applied Materials, Inc. A device for sealing a chamber inlet or a chamber outlet for a flexible substrate; substrate processing apparatus, and method for assembling such a device

Also Published As

Publication number Publication date
GB201323014D0 (en) 2014-02-12
GB2521645A (en) 2015-07-01

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