CN102582262B - 打印头喷嘴形成 - Google Patents

打印头喷嘴形成 Download PDF

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Publication number
CN102582262B
CN102582262B CN201110436821.6A CN201110436821A CN102582262B CN 102582262 B CN102582262 B CN 102582262B CN 201110436821 A CN201110436821 A CN 201110436821A CN 102582262 B CN102582262 B CN 102582262B
Authority
CN
China
Prior art keywords
silicon
layer
nozzle layer
substrate
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN201110436821.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN102582262A (zh
Inventor
陈振方
安德烈亚斯.拜布尔
保罗.A.霍伊辛顿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Dimatix Inc
Original Assignee
Fujifilm Dimatix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Dimatix Inc filed Critical Fujifilm Dimatix Inc
Publication of CN102582262A publication Critical patent/CN102582262A/zh
Application granted granted Critical
Publication of CN102582262B publication Critical patent/CN102582262B/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201110436821.6A 2004-08-05 2005-08-04 打印头喷嘴形成 Expired - Lifetime CN102582262B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/913,571 US7347532B2 (en) 2004-08-05 2004-08-05 Print head nozzle formation
US10/913,571 2004-08-05
CNA2005800337654A CN101035682A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800337654A Division CN101035682A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成

Publications (2)

Publication Number Publication Date
CN102582262A CN102582262A (zh) 2012-07-18
CN102582262B true CN102582262B (zh) 2015-09-30

Family

ID=35159850

Family Applications (3)

Application Number Title Priority Date Filing Date
CN201110436821.6A Expired - Lifetime CN102582262B (zh) 2004-08-05 2005-08-04 打印头喷嘴形成
CNA2005800337654A Pending CN101035682A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成
CN201510556516.9A Pending CN105109207A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成

Family Applications After (2)

Application Number Title Priority Date Filing Date
CNA2005800337654A Pending CN101035682A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成
CN201510556516.9A Pending CN105109207A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成

Country Status (7)

Country Link
US (2) US7347532B2 (enExample)
EP (1) EP1786628B1 (enExample)
JP (2) JP4874246B2 (enExample)
KR (1) KR101273436B1 (enExample)
CN (3) CN102582262B (enExample)
HK (1) HK1218278A1 (enExample)
WO (1) WO2006017808A2 (enExample)

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Also Published As

Publication number Publication date
CN102582262A (zh) 2012-07-18
WO2006017808A2 (en) 2006-02-16
JP2011156873A (ja) 2011-08-18
KR101273436B1 (ko) 2013-06-11
US20080128387A1 (en) 2008-06-05
US20060028508A1 (en) 2006-02-09
KR20070040395A (ko) 2007-04-16
CN105109207A (zh) 2015-12-02
CN101035682A (zh) 2007-09-12
JP4874246B2 (ja) 2012-02-15
EP1786628A2 (en) 2007-05-23
US8377319B2 (en) 2013-02-19
EP1786628B1 (en) 2012-10-03
HK1218278A1 (zh) 2017-02-10
US7347532B2 (en) 2008-03-25
HK1104263A1 (en) 2008-01-11
JP5118227B2 (ja) 2013-01-16
JP2008509024A (ja) 2008-03-27
WO2006017808A3 (en) 2006-04-20

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