KR101273436B1 - 프린트헤드 노즐 형성 - Google Patents

프린트헤드 노즐 형성 Download PDF

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Publication number
KR101273436B1
KR101273436B1 KR1020077003756A KR20077003756A KR101273436B1 KR 101273436 B1 KR101273436 B1 KR 101273436B1 KR 1020077003756 A KR1020077003756 A KR 1020077003756A KR 20077003756 A KR20077003756 A KR 20077003756A KR 101273436 B1 KR101273436 B1 KR 101273436B1
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KR
South Korea
Prior art keywords
layer
nozzle
etching
recess
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020077003756A
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English (en)
Korean (ko)
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KR20070040395A (ko
Inventor
지엔팡 첸
안드레아스 비블
폴 에이. 호이징톤
Original Assignee
후지필름 디마틱스, 인크.
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Application filed by 후지필름 디마틱스, 인크. filed Critical 후지필름 디마틱스, 인크.
Publication of KR20070040395A publication Critical patent/KR20070040395A/ko
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Publication of KR101273436B1 publication Critical patent/KR101273436B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR1020077003756A 2004-08-05 2005-08-04 프린트헤드 노즐 형성 Expired - Fee Related KR101273436B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/913,571 US7347532B2 (en) 2004-08-05 2004-08-05 Print head nozzle formation
US10/913,571 2004-08-05
PCT/US2005/028064 WO2006017808A2 (en) 2004-08-05 2005-08-04 Print head nozzle formation

Publications (2)

Publication Number Publication Date
KR20070040395A KR20070040395A (ko) 2007-04-16
KR101273436B1 true KR101273436B1 (ko) 2013-06-11

Family

ID=35159850

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077003756A Expired - Fee Related KR101273436B1 (ko) 2004-08-05 2005-08-04 프린트헤드 노즐 형성

Country Status (7)

Country Link
US (2) US7347532B2 (enExample)
EP (1) EP1786628B1 (enExample)
JP (2) JP4874246B2 (enExample)
KR (1) KR101273436B1 (enExample)
CN (3) CN105109207A (enExample)
HK (1) HK1218278A1 (enExample)
WO (1) WO2006017808A2 (enExample)

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US7011390B2 (en) * 1997-07-15 2006-03-14 Silverbrook Research Pty Ltd Printing mechanism having wide format printing zone
US7799273B2 (en) 2004-05-06 2010-09-21 Smp Logic Systems Llc Manufacturing execution system for validation, quality and risk assessment and monitoring of pharmaceutical manufacturing processes
US7444197B2 (en) 2004-05-06 2008-10-28 Smp Logic Systems Llc Methods, systems, and software program for validation and monitoring of pharmaceutical manufacturing processes
US7347532B2 (en) * 2004-08-05 2008-03-25 Fujifilm Dimatix, Inc. Print head nozzle formation
TWI379771B (en) * 2005-07-01 2012-12-21 Fujifilm Dimatix Inc Non-wetting coating on a fluid ejector
JP2008094018A (ja) * 2006-10-13 2008-04-24 Seiko Epson Corp ノズルプレートの製造方法及び液滴吐出ヘッドの製造方法
JP4881126B2 (ja) * 2006-10-25 2012-02-22 株式会社東芝 ノズルプレートの製造方法、および液滴吐出ヘッドの製造方法
US8128201B2 (en) * 2006-12-01 2012-03-06 Fujifilm Dimatix, Inc. Non-wetting coating on a fluid ejector
US8236187B2 (en) * 2006-12-22 2012-08-07 Telecom Italia S.P.A. Ink-jet printhead manufacturing process
AU2008236694B2 (en) * 2007-04-04 2014-01-23 The Regents Of The University Of California Compositions, devices, systems, and methods for using a nanopore
KR101126169B1 (ko) 2007-05-17 2012-03-23 삼성전자주식회사 멤스소자 및 그 제조방법
JP2009083140A (ja) * 2007-09-27 2009-04-23 Fujifilm Corp 液体吐出ヘッド及びその製造方法
EP2732973B1 (en) 2008-10-30 2015-04-15 Fujifilm Corporation Non-wetting coating on a fluid ejector
US20100110144A1 (en) * 2008-10-31 2010-05-06 Andreas Bibl Applying a Layer to a Nozzle Outlet
KR20110081888A (ko) * 2008-10-31 2011-07-14 후지필름 디마틱스, 인크. 노즐 유출구 형상화
US8197029B2 (en) 2008-12-30 2012-06-12 Fujifilm Corporation Forming nozzles
JP5207544B2 (ja) * 2009-02-24 2013-06-12 富士フイルム株式会社 インクジェットヘッドの製造方法及びインクジェット記録装置
US8303082B2 (en) * 2009-02-27 2012-11-06 Fujifilm Corporation Nozzle shape for fluid droplet ejection
KR20110000960A (ko) * 2009-06-29 2011-01-06 삼성전자주식회사 반도체 칩, 스택 모듈, 메모리 카드 및 그 제조 방법
US8262200B2 (en) * 2009-09-15 2012-09-11 Fujifilm Corporation Non-wetting coating on a fluid ejector
US20110181664A1 (en) * 2010-01-27 2011-07-28 Fujifilm Corporation Forming Self-Aligned Nozzles
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JP5723109B2 (ja) * 2010-06-14 2015-05-27 富士フイルム株式会社 液体吐出ヘッドの製造方法
JP5410486B2 (ja) 2011-09-21 2014-02-05 富士フイルム株式会社 液体吐出ヘッド、液体吐出装置及び液体吐出ヘッドの異常検知方法
KR101890755B1 (ko) 2011-11-25 2018-08-23 삼성전자 주식회사 잉크젯 프린팅 장치 및 노즐 형성 방법
JP5725664B2 (ja) * 2012-03-14 2015-05-27 富士フイルム株式会社 ノズルプレートの製造方法
JP5645863B2 (ja) * 2012-03-14 2014-12-24 富士フイルム株式会社 ノズルプレートの製造方法
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JP5943755B2 (ja) * 2012-07-20 2016-07-05 キヤノン株式会社 液体吐出ヘッドの基板の製造方法
KR101941168B1 (ko) 2012-10-09 2019-01-22 삼성전자주식회사 잉크젯 프린팅 장치
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CN107405922B (zh) * 2015-03-24 2020-06-30 锡克拜控股有限公司 喷墨打印头的制造方法
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JP6883042B2 (ja) * 2015-12-31 2021-06-02 フジフィルム ディマティックス， インコーポレイテッド 液体吐出装置
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CN106553453A (zh) * 2016-12-06 2017-04-05 苏州工业园区纳米产业技术研究院有限公司 热气泡式喷墨打印头及其制作方法
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CN107187205B (zh) * 2017-06-08 2019-09-24 翁焕榕 喷嘴板及其制备方法及喷墨打印机
WO2020066333A1 (ja) * 2018-09-27 2020-04-02 富士フイルム株式会社 インクタンク、インクジェット記録装置、及びインクジェット記録方法
JP7384561B2 (ja) * 2019-02-18 2023-11-21 ローム株式会社 ノズル基板、インクジェットプリントヘッドおよびノズル基板の製造方法
CN114368222A (zh) * 2022-01-21 2022-04-19 武汉敏捷微电子有限公司 一种微流体器件及其制作方法
JP2024130564A (ja) * 2023-03-15 2024-09-30 株式会社リコー 液体吐出モジュール、液体吐出ヘッド及び液体吐出装置
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Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
EP0057600A2 (en) * 1981-01-30 1982-08-11 The Board Of Trustees Of The University Of Illinois Affinity resins and their use in isolating bacterial luciferase
EP0098553A1 (de) * 1982-07-05 1984-01-18 Siemens Aktiengesellschaft Verfahren und Einrichtung zur automatischen Abfrage des Meldermesswerts und/oder der Melderkennung in einer Gefahrenmeldeanlage
EP0133287A1 (de) * 1983-07-30 1985-02-20 Johannes Bendig Vorrichtung zur Steuerung des Bewegungsablaufes in einer Folien-verarbeitungsmaschine
US6375313B1 (en) * 2001-01-08 2002-04-23 Hewlett-Packard Company Orifice plate for inkjet printhead

Also Published As

Publication number Publication date
EP1786628A2 (en) 2007-05-23
HK1218278A1 (zh) 2017-02-10
EP1786628B1 (en) 2012-10-03
US8377319B2 (en) 2013-02-19
KR20070040395A (ko) 2007-04-16
CN101035682A (zh) 2007-09-12
JP2011156873A (ja) 2011-08-18
CN102582262B (zh) 2015-09-30
HK1104263A1 (en) 2008-01-11
US20080128387A1 (en) 2008-06-05
WO2006017808A2 (en) 2006-02-16
JP5118227B2 (ja) 2013-01-16
US20060028508A1 (en) 2006-02-09
WO2006017808A3 (en) 2006-04-20
JP4874246B2 (ja) 2012-02-15
CN105109207A (zh) 2015-12-02
US7347532B2 (en) 2008-03-25
CN102582262A (zh) 2012-07-18
JP2008509024A (ja) 2008-03-27

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