CN102386086A - 滚轮及刻蚀清洗机 - Google Patents
滚轮及刻蚀清洗机 Download PDFInfo
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- CN102386086A CN102386086A CN2011103560001A CN201110356000A CN102386086A CN 102386086 A CN102386086 A CN 102386086A CN 2011103560001 A CN2011103560001 A CN 2011103560001A CN 201110356000 A CN201110356000 A CN 201110356000A CN 102386086 A CN102386086 A CN 102386086A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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CN201110356000.1A CN102386086B (zh) | 2011-11-10 | 2011-11-10 | 刻蚀清洗机 |
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CN201110356000.1A CN102386086B (zh) | 2011-11-10 | 2011-11-10 | 刻蚀清洗机 |
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CN102386086A true CN102386086A (zh) | 2012-03-21 |
CN102386086B CN102386086B (zh) | 2014-03-05 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103441089A (zh) * | 2013-08-02 | 2013-12-11 | 上海华力微电子有限公司 | 一种湿法刻蚀工艺的控制方法 |
CN103545191A (zh) * | 2012-07-16 | 2014-01-29 | 中国科学院微电子研究所 | 栅极结构的形成方法、半导体器件的形成方法以及半导体器件 |
CN105118802A (zh) * | 2015-09-06 | 2015-12-02 | 昊诚光电(太仓)有限公司 | 电池片背面抛光用水膜厚度控制装置 |
CN107331639A (zh) * | 2017-08-16 | 2017-11-07 | 国家电投集团西安太阳能电力有限公司 | 带液滚轮及太阳能电池清洗设备 |
CN108682620A (zh) * | 2018-06-07 | 2018-10-19 | 通威太阳能(安徽)有限公司 | 一种改善滚轮带液刻蚀过刻的方法及其装置 |
CN110676153A (zh) * | 2019-09-20 | 2020-01-10 | 常州捷佳创精密机械有限公司 | 太阳能电池、臭氧溶液施加装置及太阳能电池的制备方法 |
Citations (10)
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JPH07893A (ja) * | 1993-06-18 | 1995-01-06 | Mitsui Toatsu Chem Inc | ロールコーターのドクターブレード及びインク循環方法 |
JP2010114345A (ja) * | 2008-11-10 | 2010-05-20 | Sharp Corp | 太陽電池の製造方法 |
KR20100110422A (ko) * | 2009-04-03 | 2010-10-13 | (유)에스엔티 | 태양전지 제조용 기판 식각장치 |
CN201796936U (zh) * | 2010-09-29 | 2011-04-13 | 常州天合光能有限公司 | 提高电池制备良率的链式制绒设备 |
JP2011082359A (ja) * | 2009-10-07 | 2011-04-21 | Mitsubishi Electric Corp | 基板処理装置および基板処理方法 |
KR20110060082A (ko) * | 2009-11-30 | 2011-06-08 | 현대중공업 주식회사 | 습식 식각장치 |
TW201126739A (en) * | 2010-01-22 | 2011-08-01 | Tainergy Tech Co Ltd | Wet-etching machine for solar cell manufacturing process |
CN201962364U (zh) * | 2011-01-25 | 2011-09-07 | 东方电气集团(宜兴)迈吉太阳能科技有限公司 | 单晶硅太阳能电池片湿法刻蚀装置 |
JP2011212810A (ja) * | 2010-03-31 | 2011-10-27 | Bando Chemical Industries Ltd | ワイヤーソー用メインローラ |
CN202167531U (zh) * | 2011-07-30 | 2012-03-14 | 常州天合光能有限公司 | 太阳能电池片刻蚀机传输装置 |
-
2011
- 2011-11-10 CN CN201110356000.1A patent/CN102386086B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07893A (ja) * | 1993-06-18 | 1995-01-06 | Mitsui Toatsu Chem Inc | ロールコーターのドクターブレード及びインク循環方法 |
JP2010114345A (ja) * | 2008-11-10 | 2010-05-20 | Sharp Corp | 太陽電池の製造方法 |
KR20100110422A (ko) * | 2009-04-03 | 2010-10-13 | (유)에스엔티 | 태양전지 제조용 기판 식각장치 |
JP2011082359A (ja) * | 2009-10-07 | 2011-04-21 | Mitsubishi Electric Corp | 基板処理装置および基板処理方法 |
KR20110060082A (ko) * | 2009-11-30 | 2011-06-08 | 현대중공업 주식회사 | 습식 식각장치 |
TW201126739A (en) * | 2010-01-22 | 2011-08-01 | Tainergy Tech Co Ltd | Wet-etching machine for solar cell manufacturing process |
JP2011212810A (ja) * | 2010-03-31 | 2011-10-27 | Bando Chemical Industries Ltd | ワイヤーソー用メインローラ |
CN201796936U (zh) * | 2010-09-29 | 2011-04-13 | 常州天合光能有限公司 | 提高电池制备良率的链式制绒设备 |
CN201962364U (zh) * | 2011-01-25 | 2011-09-07 | 东方电气集团(宜兴)迈吉太阳能科技有限公司 | 单晶硅太阳能电池片湿法刻蚀装置 |
CN202167531U (zh) * | 2011-07-30 | 2012-03-14 | 常州天合光能有限公司 | 太阳能电池片刻蚀机传输装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103545191A (zh) * | 2012-07-16 | 2014-01-29 | 中国科学院微电子研究所 | 栅极结构的形成方法、半导体器件的形成方法以及半导体器件 |
CN103441089A (zh) * | 2013-08-02 | 2013-12-11 | 上海华力微电子有限公司 | 一种湿法刻蚀工艺的控制方法 |
CN105118802A (zh) * | 2015-09-06 | 2015-12-02 | 昊诚光电(太仓)有限公司 | 电池片背面抛光用水膜厚度控制装置 |
CN107331639A (zh) * | 2017-08-16 | 2017-11-07 | 国家电投集团西安太阳能电力有限公司 | 带液滚轮及太阳能电池清洗设备 |
CN108682620A (zh) * | 2018-06-07 | 2018-10-19 | 通威太阳能(安徽)有限公司 | 一种改善滚轮带液刻蚀过刻的方法及其装置 |
CN110676153A (zh) * | 2019-09-20 | 2020-01-10 | 常州捷佳创精密机械有限公司 | 太阳能电池、臭氧溶液施加装置及太阳能电池的制备方法 |
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CN102386086B (zh) | 2014-03-05 |
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Address after: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2 Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180314 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2 Patentee before: North China Science and technology group Limited by Share Ltd. |